JPH03129929U - - Google Patents
Info
- Publication number
- JPH03129929U JPH03129929U JP3815590U JP3815590U JPH03129929U JP H03129929 U JPH03129929 U JP H03129929U JP 3815590 U JP3815590 U JP 3815590U JP 3815590 U JP3815590 U JP 3815590U JP H03129929 U JPH03129929 U JP H03129929U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- spacers
- sprayed
- injection device
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 239000000243 solution Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Description
第1図は本考案に係るスペーサ散布装置の一実
施例を示す全体構成図、第2図は従来のスペーサ
散布装置を示す全体構成図である。
2……ガラス基板(対象部材)、4……混合薬
液、11……スペーサ散布装置、12……チヤン
バ、13……ノズル(噴射装置)、13a……先
端部、14……噴射通路、15……拡散球(拡散
部材)、15a……開口部、15b……側壁部、
15……内壁部。
FIG. 1 is an overall configuration diagram showing an embodiment of a spacer dispersing device according to the present invention, and FIG. 2 is an overall configuration diagram showing a conventional spacer dispersing device. 2... Glass substrate (target member), 4... Mixed chemical solution, 11... Spacer spraying device, 12... Chamber, 13... Nozzle (injection device), 13a... Tip, 14... Injection passage, 15 ... Diffusing sphere (diffusion member), 15a... Opening, 15b... Side wall,
15...Inner wall part.
Claims (1)
ンバと、 前記スペーサを含む所定の薬液を噴射する噴射
装置と、 前記噴射装置から噴射された薬液が衝突する位
置に設置され、該薬液の衝突によつて薬液中のス
ペーサの拡散状態を変える拡散部材と、 を具備したことを特徴とするスペーサ散布装置。[Scope of Utility Model Registration Claim] A chamber on which a target member to be sprayed with spacers is placed, an injection device that sprays a predetermined chemical solution including the spacers, and a chamber installed at a position where the chemical solution sprayed from the injection device collides with each other. A spacer dispersing device comprising: a diffusion member that changes the diffusion state of spacers in a chemical solution by collision of the chemical solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3815590U JPH03129929U (en) | 1990-04-10 | 1990-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3815590U JPH03129929U (en) | 1990-04-10 | 1990-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03129929U true JPH03129929U (en) | 1991-12-26 |
Family
ID=31545907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3815590U Pending JPH03129929U (en) | 1990-04-10 | 1990-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03129929U (en) |
-
1990
- 1990-04-10 JP JP3815590U patent/JPH03129929U/ja active Pending
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