JPH03129929U - - Google Patents

Info

Publication number
JPH03129929U
JPH03129929U JP3815590U JP3815590U JPH03129929U JP H03129929 U JPH03129929 U JP H03129929U JP 3815590 U JP3815590 U JP 3815590U JP 3815590 U JP3815590 U JP 3815590U JP H03129929 U JPH03129929 U JP H03129929U
Authority
JP
Japan
Prior art keywords
chemical solution
spacers
sprayed
injection device
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3815590U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3815590U priority Critical patent/JPH03129929U/ja
Publication of JPH03129929U publication Critical patent/JPH03129929U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係るスペーサ散布装置の一実
施例を示す全体構成図、第2図は従来のスペーサ
散布装置を示す全体構成図である。 2……ガラス基板(対象部材)、4……混合薬
液、11……スペーサ散布装置、12……チヤン
バ、13……ノズル(噴射装置)、13a……先
端部、14……噴射通路、15……拡散球(拡散
部材)、15a……開口部、15b……側壁部、
15……内壁部。
FIG. 1 is an overall configuration diagram showing an embodiment of a spacer dispersing device according to the present invention, and FIG. 2 is an overall configuration diagram showing a conventional spacer dispersing device. 2... Glass substrate (target member), 4... Mixed chemical solution, 11... Spacer spraying device, 12... Chamber, 13... Nozzle (injection device), 13a... Tip, 14... Injection passage, 15 ... Diffusing sphere (diffusion member), 15a... Opening, 15b... Side wall,
15...Inner wall part.

Claims (1)

【実用新案登録請求の範囲】 スペーサが散布される対象部材を載置するチヤ
ンバと、 前記スペーサを含む所定の薬液を噴射する噴射
装置と、 前記噴射装置から噴射された薬液が衝突する位
置に設置され、該薬液の衝突によつて薬液中のス
ペーサの拡散状態を変える拡散部材と、 を具備したことを特徴とするスペーサ散布装置。
[Scope of Utility Model Registration Claim] A chamber on which a target member to be sprayed with spacers is placed, an injection device that sprays a predetermined chemical solution including the spacers, and a chamber installed at a position where the chemical solution sprayed from the injection device collides with each other. A spacer dispersing device comprising: a diffusion member that changes the diffusion state of spacers in a chemical solution by collision of the chemical solution.
JP3815590U 1990-04-10 1990-04-10 Pending JPH03129929U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3815590U JPH03129929U (en) 1990-04-10 1990-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3815590U JPH03129929U (en) 1990-04-10 1990-04-10

Publications (1)

Publication Number Publication Date
JPH03129929U true JPH03129929U (en) 1991-12-26

Family

ID=31545907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3815590U Pending JPH03129929U (en) 1990-04-10 1990-04-10

Country Status (1)

Country Link
JP (1) JPH03129929U (en)

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