JPH03130355U - - Google Patents

Info

Publication number
JPH03130355U
JPH03130355U JP3893090U JP3893090U JPH03130355U JP H03130355 U JPH03130355 U JP H03130355U JP 3893090 U JP3893090 U JP 3893090U JP 3893090 U JP3893090 U JP 3893090U JP H03130355 U JPH03130355 U JP H03130355U
Authority
JP
Japan
Prior art keywords
polishing
movable platen
polishing film
section
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3893090U
Other languages
Japanese (ja)
Other versions
JPH0644591Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3893090U priority Critical patent/JPH0644591Y2/en
Publication of JPH03130355U publication Critical patent/JPH03130355U/ja
Application granted granted Critical
Publication of JPH0644591Y2 publication Critical patent/JPH0644591Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第8図は本考案の第1実施例を示して
おり、第1図は移動プラテン式研磨装置の正面図
、第2図は同じく側面図、第3図は同じく平面図
、第4図は第1図−線断面図、第5図は第3
図−線断面図、第6図は第3図−線断面
図、第7図は研磨開始時の研磨ヘツドの模式図、
第8図は研磨終了時の研磨ヘツドの模式図、第9
図および第10図は従来例を示しており、第9図
は弾性材コンタクトローラによる研磨の模式図、
第10図a,bは固定プラテンによる研磨を示す
模式図である。 W……ワーク、F……研磨フイルム、10……
移動プラテン式研磨装置、20……ベースフレー
ム、21……上向面部、22……継手、23……
クランク軸、24……連結ロツド、M1……振動
駆動用のモータ、30……研磨ヘツド部、31…
…本体ブロツク、32……移動プラテン、34a
,34b……案内ローラ、35……レールブロツ
ク、38……コイルばね、40……供給部、41
……供給側リール、43……ブレーキ、50……
繰込部、51……巻取側リール、53……摩擦カ
ツプリング、60……与張送り部、61……送り
駆動ローラ、65……加圧補助ローラ、M2……
送り用モータ。
1 to 8 show a first embodiment of the present invention, in which FIG. 1 is a front view of a moving platen type polishing device, FIG. 2 is a side view, and FIG. 3 is a top view, and FIG. Figure 4 is a sectional view taken along the line of Figure 1, and Figure 5 is a cross-sectional view of Figure 3.
6 is a sectional view taken along the line shown in FIG. 3, FIG. 7 is a schematic diagram of the polishing head at the start of polishing,
Figure 8 is a schematic diagram of the polishing head at the end of polishing, Figure 9
10 and 10 show a conventional example, and FIG. 9 is a schematic diagram of polishing using an elastic contact roller.
FIGS. 10a and 10b are schematic views showing polishing using a fixed platen. W...work, F...polishing film, 10...
Moving platen polishing device, 20...Base frame, 21...Upper surface portion, 22...Joint, 23...
Crankshaft, 24... Connection rod, M1... Motor for vibration drive, 30... Polishing head section, 31...
...Body block, 32...Moving platen, 34a
, 34b...Guide roller, 35...Rail block, 38...Coil spring, 40...Supply section, 41
... Supply side reel, 43 ... Brake, 50 ...
Feeding section, 51... Winding side reel, 53... Friction coupling, 60... Tensioning feed section, 61... Feed drive roller, 65... Pressure auxiliary roller, M2...
Feeding motor.

Claims (1)

【実用新案登録請求の範囲】 研磨フイルムを研磨ヘツド部の移動プラテンに
巻き掛け、該研磨ヘツド部を振動させながら研磨
フイルムにワークを接触させて研磨するようにし
た移動プラテン式研磨装置であつて、 引張力を与えて研磨フイルムを保持しながら繰
り出す供給部と、前記研磨ヘツド部を経た研磨フ
イルムを低速度で引き込む繰込部とを設け、 前記研磨ヘツド部に、研磨フイルムの背面に当
接してワークに圧接させる移動プラテンを設け、
研磨フイルムの送り方向に沿つて移動可能に該移
動プラテンを支持するとともに、研磨フイルムの
送りの逆方向に位置するよう付勢保持したことを
特徴とする移動プラテン式研磨装置。
[Claims for Utility Model Registration] A movable platen type polishing device in which a polishing film is wrapped around a movable platen of a polishing head, and a workpiece is polished by bringing it into contact with the polishing film while vibrating the polishing head. , a supply section that feeds out the polishing film while holding it by applying a tensile force, and a feed-in section that draws in the polishing film that has passed through the polishing head section at a low speed; A movable platen is installed that presses against the workpiece.
A movable platen type polishing device, characterized in that the movable platen is supported so as to be movable along the polishing film feeding direction, and is biased and held so as to be positioned in the opposite direction to the polishing film feeding direction.
JP3893090U 1990-04-11 1990-04-11 Mobile platen type polishing machine Expired - Lifetime JPH0644591Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3893090U JPH0644591Y2 (en) 1990-04-11 1990-04-11 Mobile platen type polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3893090U JPH0644591Y2 (en) 1990-04-11 1990-04-11 Mobile platen type polishing machine

Publications (2)

Publication Number Publication Date
JPH03130355U true JPH03130355U (en) 1991-12-27
JPH0644591Y2 JPH0644591Y2 (en) 1994-11-16

Family

ID=31547377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3893090U Expired - Lifetime JPH0644591Y2 (en) 1990-04-11 1990-04-11 Mobile platen type polishing machine

Country Status (1)

Country Link
JP (1) JPH0644591Y2 (en)

Also Published As

Publication number Publication date
JPH0644591Y2 (en) 1994-11-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term