JPH03132011A - Manufacture of solid electrolytic capacitor - Google Patents

Manufacture of solid electrolytic capacitor

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Publication number
JPH03132011A
JPH03132011A JP27078489A JP27078489A JPH03132011A JP H03132011 A JPH03132011 A JP H03132011A JP 27078489 A JP27078489 A JP 27078489A JP 27078489 A JP27078489 A JP 27078489A JP H03132011 A JPH03132011 A JP H03132011A
Authority
JP
Japan
Prior art keywords
polythiophene
precursor
solid electrolytic
electrolytic capacitor
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27078489A
Other languages
Japanese (ja)
Other versions
JP2901285B2 (en
Inventor
Kazumi Naito
一美 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP27078489A priority Critical patent/JP2901285B2/en
Publication of JPH03132011A publication Critical patent/JPH03132011A/en
Application granted granted Critical
Publication of JP2901285B2 publication Critical patent/JP2901285B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)

Abstract

PURPOSE:To improve high-frequency characteristics of a solid electrolytic capacitor by a method wherein polythiophene precursor is melted and applied to a dielectric oxide film layer and polymerized by oxidizing agent to form a conductive polymer layer whose main component is polythiophene. CONSTITUTION:Thiophene is treated with Lewis acid such as AlCl3 to obtain polythiophene precursor which is thiophene oligomer having a nonconjugate part on a part of its skeleton. A valve action metal is immersed into the molten precursor to form a coating on a dielectric oxide film. The valve action metal is made of Al, Ta, Ti, etc., or alloy having such metal as substrate. The adhering film is polymerized by oxidizing agent. If I or the like is added at that time, the conductivity of the coating is improved, and high-frequency characteristics of a solid capacitor are improved. A carbon paste cathode layer is provided on the obtained semiconductor layer and sealed to complete a product. With this constitution, oxidative polymerization can be completed within a short time and, further, a sufficient capacitance can be provided.

Description

【発明の詳細な説明】 [産業上の利用分野1 本発明は、高周波性能の良好な固体電解コンデンサの製
造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application 1] The present invention relates to a method for manufacturing a solid electrolytic capacitor with good high frequency performance.

[従来の技術] 固体電解コンデンサは表面に誘電体酸イヒ皮膜層をイア
するアルミニウム、タンタル、ニオブ等の弁作用金属に
半導体層が付着した構造を有している。又、弁作用金属
の形状は表面積を太き(するために複雑に入り(んだ形
状をとっている。
[Prior Art] A solid electrolytic capacitor has a structure in which a semiconductor layer is attached to a valve metal such as aluminum, tantalum, or niobium, which has a dielectric acid film layer on its surface. In addition, the shape of the valve metal has a complicated shape in order to increase the surface area.

従来、この種の固体電解コンデンサの半導体層には、主
に硝酸マンガンの熱分解により形成される二酸化マンガ
ンが用いられている。しかし、この熱分解の際に必要な
高熱と発生するNO□ガスの酸化作用等によって誘電体
であるアルミニウム。
Conventionally, manganese dioxide, which is mainly formed by thermal decomposition of manganese nitrate, has been used for the semiconductor layer of this type of solid electrolytic capacitor. However, due to the high heat required during this thermal decomposition and the oxidizing effect of the NO□ gas generated, aluminum is a dielectric material.

タンタルなどの誘電体酸化皮膀の損傷が起こり、そのた
め耐電圧は低下し、漏れ電流が大きくなり、誘電特性を
劣化させる等大きな欠点がある。
There are major drawbacks such as damage to the dielectric oxide skin such as tantalum, resulting in lower withstand voltage, increased leakage current, and deterioration of dielectric properties.

また再化成という工程も数回必要になる。In addition, the process of reconstitution is required several times.

これらの欠点を補うために高熱を付与せずに半導体層を
形成する方法、つまり高電導性の高分子半導体材料を半
導体層とする方法が試みられている。その例としては下
記の一般式で表わされる千ツマ−を重合して得られる高
分子化合物にドーパントをドープして得られる電導性高
分子化合物を゛1モ導体層とする固体電解コンデンサが
知られている。
In order to compensate for these drawbacks, attempts have been made to form a semiconductor layer without applying high heat, that is, to form a semiconductor layer using a highly conductive polymeric semiconductor material. An example of such a solid electrolytic capacitor is a solid electrolytic capacitor in which the conductive layer is made of a conductive polymer compound obtained by doping a dopant into a polymer compound obtained by polymerizing a polymer expressed by the following general formula. ing.

又、この種の″:ri導性高分子化合物を半導体層とす
る固体電解コンデンサの″!A遣方法として、一般式(
1)で表わされるモノマーを溶解した溶液中で電解重合
することによって半導体層を形成する方法、一般式(1
)で表わされる七ツマ−と別に用意した酸化剤を使用し
て誘電体酸化皮膜層上で反応させ半導体層を形成する方
法、等が知られている。
In addition, this type of solid electrolytic capacitor whose semiconductor layer is an ri conductive polymer compound is also available! The general formula (
1) A method of forming a semiconductor layer by electrolytically polymerizing in a solution containing a monomer represented by the general formula (1).
) A method is known in which a semiconductor layer is formed by reacting on a dielectric oxide film layer using an oxidizing agent prepared separately.

[発明が解決しようとする課題1 しかしながら、上述した電解重合による方法では、半導
体層を形成する時間が長くかかるばかりでなく、極端に
入りくんだ形状を有する弁作用金属の場合(即ち、単位
面積あたりの容量が大きい弁作用金属)には、充分容量
を引き出せないという欠点がある。又、誘電体酸化皮膜
層上でモノマーを反応させる方法では、モノマーがポリ
マーになるために酸化剤で脱水素を行う必要があるが、
前述した極端に入りくんだ形状を有する弁作用金属の場
合、充分、脱水素が進まず、その結果、作製した固体電
解コンデンサの高周波性能が今一つ不充分であるという
問題点があった。
[Problem to be Solved by the Invention 1] However, with the method using electrolytic polymerization described above, not only does it take a long time to form a semiconductor layer, but also when the valve metal has an extremely deep shape (i.e., the unit area Valve metals (with a large capacity per unit) have the disadvantage of not being able to draw out sufficient capacity. In addition, in the method of reacting monomers on a dielectric oxide film layer, it is necessary to dehydrogenate the monomers with an oxidizing agent in order to turn them into polymers.
In the case of a valve metal having an extremely convoluted shape as described above, dehydrogenation does not proceed sufficiently, and as a result, there is a problem in that the high frequency performance of the produced solid electrolytic capacitor is still insufficient.

【課題を解決するための手段1 本発明は、−F述した問題点を解決するためになされた
もので、弁作用を有する金属の表面に、順次、誘電体酸
化皮膜層、ポリチオフェンを1成分とする電導性品分子
からなる半導体層及び導電体層を形成した固体電解コン
デンサの″!A遣方法において、この二F導体層を、ポ
リチオフェン前駆体を融解して前記誘電体酸化皮膜層−
Lに付着させる工程とこのポリチオフェン前駆体を酸化
剤で酸化重合してポリチオフェンを主成分とする電導性
高分子にする工程によって形成する固体電解コンデンサ
の製造方法にある。
[Means for Solving the Problems 1] The present invention has been made in order to solve the problems mentioned above, in which a dielectric oxide film layer and a polythiophene layer are sequentially applied to the surface of a metal having a valve action. In the manufacturing method of a solid electrolytic capacitor having a semiconductor layer and a conductor layer formed of conductive molecules, the 2F conductor layer is formed by melting the polythiophene precursor to form the dielectric oxide film layer.
The present invention provides a method for manufacturing a solid electrolytic capacitor, which is formed by attaching the polythiophene precursor to L and oxidatively polymerizing the polythiophene precursor with an oxidizing agent to form a conductive polymer containing polythiophene as a main component.

以下1本発明について詳細に説明する。The present invention will be explained in detail below.

本発明において固体電解コンデンサの陽極として用いら
れる弁作用金属としては、例えばアルミニウム、タンタ
ル、ニオブ、チタン及びこれらを基質とする合金等、弁
作用を有する金属がいずれも使用できる。
As the valve metal used as the anode of the solid electrolytic capacitor in the present invention, any metal having a valve effect can be used, such as aluminum, tantalum, niobium, titanium, and alloys using these as substrates.

弁作用金属の表面に設ける誘電体酸化皮膜は、弁作用金
属の表面部分に設けられた弁作用金属自体の酸化物層で
あってもよ(、あるいは、弁作用金属の表面。Lに設け
られた他の誘電体酸化物の層であってもよいが、特に弁
作用金属自体の酸化物からなる層であることが好ましい
。いずれの場合にも酸化物層を設ける方法としては、電
解液を用いた陽極化成法など従来公知の方法を用いるこ
とができる。
The dielectric oxide film provided on the surface of the valve metal may be an oxide layer of the valve metal itself provided on the surface portion of the valve metal (or an oxide layer provided on the surface of the valve metal. Although the layer may be made of another dielectric oxide, it is particularly preferable to use a layer made of the oxide of the valve metal itself.In either case, the method of providing the oxide layer is to use an electrolytic solution. Conventionally known methods such as the anodization method used can be used.

本発明による半導体層は、上述した誘電体酸化皮膜層−
Eに、(l)ポリチオフェン前駆体を融解して前記誘電
体酸化皮膜層上に付着する工程と(2)このポリチオフ
ェン前駆体を酸化剤で酸化重合してポリチオフェンを主
成分とする電導性高分子にする工程、によって形成する
ことが肝要である。
The semiconductor layer according to the present invention includes the dielectric oxide film layer described above.
(l) melting the polythiophene precursor and depositing it on the dielectric oxide film layer; and (2) oxidatively polymerizing the polythiophene precursor with an oxidizing agent to form a conductive polymer mainly composed of polythiophene. It is important to form it by the process of making it.

本発明におけるポリチオフェン前駆体とは、チオフェン
のオリゴマーで骨格の一部に非共役部分が存在するもの
であり、融点が240〜280℃の範囲に入る。このよ
うなポリチオフェン前駆体の作製方法は1例えばチオフ
ェンをAlCl1、CuC1□等のルイス酸で処理して
得ることができる。
The polythiophene precursor in the present invention is a thiophene oligomer having a non-conjugated portion in a part of its skeleton, and has a melting point in the range of 240 to 280°C. Such a polythiophene precursor can be prepared by, for example, treating thiophene with a Lewis acid such as AlCl1 or CuC1□.

前述したポリチオフェン前駆体を誘電体酸化皮19層上
に付着させるには、このポリチオフェン前駆体を融解さ
せこの融解液に弁作用金属を浸漬し引きFげることによ
って形成される。
The aforementioned polythiophene precursor is deposited on the dielectric oxide layer 19 by melting the polythiophene precursor, immersing the valve metal in the melt, and then pulling the valve metal.

さらに本発明において、後述する酸化剤を前記ポリチオ
フェン前駆体に導入し酸化重合することによってポリチ
オフェンを主成分とする電導性高分子を形成して半導体
に変化させる。
Further, in the present invention, an oxidizing agent, which will be described later, is introduced into the polythiophene precursor and oxidatively polymerized, thereby forming a conductive polymer containing polythiophene as a main component and converting it into a semiconductor.

酸化剤としては、)ecla、AsF s、Pl:5、
S03、FNIl、l 2S20.、  N21zS2
0e、 に2S20−1  KklnO,、lI □0
2、塩素酸1ム、次亜塩素酸1ム、過塩素酸塩、SbF
5.11F3、[1C13BBr、F2520S、1I
NO3等従来公知の酸化剤を挙げることができ、各酸化
剤を一種以上使用してもよい。前記したポリチオフェン
前駆体に該酸化剤を導入するには、適当な溶媒に溶解し
た酸化剤溶液を付着させるか、又はガス状の酸化剤の場
合には、気相で接触することによって導入することがで
きる。又、本発明においては先に酸化剤を誘電体酸化皮
膜層上に付着させておき、次いでポリチオフェン前駆体
を融解させて誘電体酸化皮膜層上に付着と同時に酸化重
合させポリチオフェンを主成分とする電導性高分子から
なる半導体層を形成してもよい。
As the oxidizing agent, ecla, AsF s, Pl:5,
S03, FNIl, l 2S20. , N21zS2
0e, 2S20-1 KklnO,, lI □0
2. 1 m chloric acid, 1 m hypochlorous acid, perchlorate, SbF
5.11F3, [1C13BBr, F2520S, 1I
Conventionally known oxidizing agents such as NO3 can be used, and one or more of each oxidizing agent may be used. The oxidizing agent can be introduced into the polythiophene precursor by applying a solution of the oxidizing agent dissolved in a suitable solvent or, in the case of a gaseous oxidizing agent, by contacting it in the gas phase. Can be done. In addition, in the present invention, an oxidizing agent is first deposited on the dielectric oxide film layer, and then the polythiophene precursor is melted and oxidized and polymerized at the same time as it is deposited on the dielectric oxide film layer, so that polythiophene is the main component. A semiconductor layer made of a conductive polymer may be formed.

本発明において使用する酸化剤は、それ自身、酸化重合
で形成されたポリチオフェンのドルパントとなり電導性
を付与する物質であるが、さらに形成されたポリチオフ
ェンの電導性を高めるためには、酸化剤を接触させる前
後又は酸化剤と共に、従来公知の酸化剤以外のドーパン
トをドープしてもよい。
The oxidizing agent used in the present invention itself is a substance that becomes a dolphant for the polythiophene formed by oxidative polymerization and imparts electrical conductivity. A dopant other than the conventionally known oxidizing agent may be doped before or after or together with the oxidizing agent.

このようなドーパントとして、例えば、ヨウ素、Hフッ
化ヒ素、硫酸、AsFa−など特開昭58−54553
号公報、特開昭58−54554号公報に記載のドーパ
ントを挙げることができる。
Examples of such dopants include iodine, arsenic fluoride, sulfuric acid, AsFa, etc.
Examples thereof include dopants described in Japanese Patent Application Laid-Open No. 58-54554.

又、このようなドーパントは化学的手法や電気化学手法
を用いてドープすることができる。
Further, such a dopant can be doped using a chemical method or an electrochemical method.

本発明に用いる半導体は電導度がlO°〜to2s・c
m−’オーダーのものが得られ、電導度が高い程、作製
した固体電解コンデンサの高周波特性が良好なものとな
る。
The semiconductor used in the present invention has an electrical conductivity of lO°~to2s・c
m-' order is obtained, and the higher the conductivity, the better the high frequency characteristics of the produced solid electrolytic capacitor.

本発明の方法による固体電解コンデンサは、上述した半
導体層の上にカーボンペースト又は/及び銀ペースト等
で陰極層を取り出し、重に樹脂やケース等、従来公知の
方法で封目して製品とされる。
The solid electrolytic capacitor produced by the method of the present invention is made into a product by removing the cathode layer from the above-mentioned semiconductor layer using carbon paste or/and silver paste, etc., and then sealing it with a resin, a case, etc. using a conventionally known method. Ru.

[作用1 ポリチオフェン前駆体を融解して誘電体酸化皮膜層上に
付着させ、酸化剤で酸化重合することによってポリチオ
フェンを主成分とする電導性高分子からなる半導体層を
形成すると、ポリチオフェン前駆体が既に一部酸化重合
した物質であるため、チオフェンモノマーから酸化重合
してポリチオフェンにするよりも酸化重合せねばならな
い鼠が少なくて良い。その結果、目的とする電導性をイ
1する高分子になるまでの脱水素が少な(て良い。又、
電解型合法に比較して、酸化重合は短時間で終了するば
かりでなく、ポリチオフェン前駆体を融解して誘電体酸
化皮膜層上に付着させるため、充分な容量を引き出すこ
とができる。
[Effect 1] When a polythiophene precursor is melted and deposited on a dielectric oxide film layer and oxidatively polymerized with an oxidizing agent to form a semiconductor layer consisting of a conductive polymer mainly composed of polythiophene, the polythiophene precursor Since it is a material that has already been partially oxidatively polymerized, fewer mice need to be oxidatively polymerized than when oxidatively polymerizing a thiophene monomer to form polythiophene. As a result, there is less dehydrogenation required to obtain a polymer that achieves the desired electrical conductivity.
Compared to the electrolytic method, oxidative polymerization not only completes in a short time, but also allows sufficient capacity to be extracted because the polythiophene precursor is melted and deposited on the dielectric oxide film layer.

〔実施例j 以下、実施例及び比較例を示して説明する。[Example j Examples and comparative examples will be shown and explained below.

実施例1 ポリチオフェン111駆体は、チオフェンモノマに塩化
アルミを投入し、0℃で2時間反応し充分洗浄して塩酸
残が無いことを6i1酸銀テストで確認してi′)だ。
Example 1 The polythiophene 111 precursor was obtained by adding aluminum chloride to a thiophene monomer, reacting at 0° C. for 2 hours, washing thoroughly, and confirming that there was no hydrochloric acid residue using a 6i1 acid silver test.

濃黄色で融点240〜280℃であった。It was dark yellow and had a melting point of 240-280°C.

一方、別に用意したTaペレット(3mmx2mrrI
、厚さ0.5mm、 CV 2万/g)をりん酸水溶液
中で化成して表面にTa 2 (] 5の誘電体酸化皮
膜層を7℃g成した。このような素子を30点用へし、
前述したポリチオフェン前駆体の融解物に浸漬し引き上
げたさらに20%過硫酸アンモニウム水溶液に浸漬した
。その後、Taペレットを水で洗浄した後、乾燥した。
On the other hand, a separately prepared Ta pellet (3 mm x 2 mrrI
, 0.5 mm thick, CV 20,000/g) in a phosphoric acid aqueous solution to form a dielectric oxide film layer of Ta 2 (] 5 on the surface at 7°C. Such elements were used for 30 points. Heshi,
The sample was immersed in the melt of the polythiophene precursor described above, pulled up, and further immersed in a 20% ammonium persulfate aqueous solution. Thereafter, the Ta pellets were washed with water and then dried.

このようにして形成されたポリチオフェンを主成分とす
る電導性高分子からなる゛ト導体層上に、カーボンペー
スト及び銀ペストを順に付着させ導電体層を形成した。
Carbon paste and silver paste were sequentially deposited on the thus formed conductor layer made of a conductive polymer containing polythiophene as a main component to form a conductor layer.

次いで樹脂封口して固体電解コンデンサを作製した。The solid electrolytic capacitor was then sealed with resin.

実施例2 実施例1の20%過硫酸アンモニウム水溶液の代わりに
5%過マンガン酸カリ水溶液を用いた以外は実施例1と
同様にして固体電解コンデンサを作製した。
Example 2 A solid electrolytic capacitor was produced in the same manner as in Example 1 except that 5% potassium permanganate aqueous solution was used instead of the 20% ammonium persulfate aqueous solution in Example 1.

実施例3 実施例1の20%過硫酸アンモニウム水溶液の代わりに
lO%塩化鉄アルコール溶液を用い、アルコールで洗浄
した以外は実施例1と同様にして固体電解コンデンサを
作製した。
Example 3 A solid electrolytic capacitor was produced in the same manner as in Example 1, except that a 10% iron chloride alcohol solution was used in place of the 20% ammonium persulfate aqueous solution in Example 1, and the capacitor was washed with alcohol.

比較例1 実施例1で使用したものと同様なTaペレットを陽極に
、別に用意したTa箔を陰極とし、電解液としてチオフ
ェン0.1モル、BunN旺、0.1モル溶解させたC
Il、CN溶液を使用して2時間電解重合し、ボチリオ
フエンにBF、アニオンがドープした電導性高分子を半
導体層とする素子を得た。さらに実施例1と同様にして
導電体層を形成し、封口して固体電解コンデンサを作製
した。
Comparative Example 1 A Ta pellet similar to that used in Example 1 was used as an anode, a separately prepared Ta foil was used as a cathode, and as an electrolyte, 0.1 mol of thiophene, 0.1 mol of BunN, and 0.1 mol of C were dissolved.
Electrolytic polymerization was carried out for 2 hours using an Il, CN solution to obtain an element whose semiconductor layer was a conductive polymer in which bothyliophene was doped with BF and an anion. Furthermore, a conductive layer was formed and sealed in the same manner as in Example 1 to produce a solid electrolytic capacitor.

比較例2 実施例1でポリチオフェン前駆体の代わりにチオフェン
モノマーをTaベレットの誘電体酸化皮膜層上に付着し
た以外は、実施例1と同様にして固体電解コンデンサを
作製した。
Comparative Example 2 A solid electrolytic capacitor was produced in the same manner as in Example 1, except that a thiophene monomer was deposited on the dielectric oxide film layer of the Ta pellet instead of the polythiophene precursor in Example 1.

以−ト、各側で作製した固体電解コンデンサの性能をま
とめて第1表に示す。
Table 1 summarizes the performance of the solid electrolytic capacitors fabricated on each side.

(以下余白) 第1表 傘  12011zでの値 参申  10KIIzでのイ直 〔発明の効果J 本発明によれば、ポリチオフェン前駆体を融解して誘電
体酸化皮膜層上に付着させ、さらに酸化剤で酸化重合し
てポリチオフェンを主成分とする電導性高分子からなる
半導体層を形成しているので、(11られた固体電解コ
ンデンサは、充分な古川を引き出し、さらに高周波の性
能が良好である。
(Leaving space below) Table 1 Umbrella Price reference at 12011z Direction at 10KIIz [Effects of the invention J According to the present invention, the polythiophene precursor is melted and deposited on the dielectric oxide film layer, and the oxidizing agent is Since the solid electrolytic capacitor (11) is oxidatively polymerized to form a semiconductor layer made of a conductive polymer containing polythiophene as its main component, the solid electrolytic capacitor (11) has sufficient Furukawa performance and also has good high frequency performance.

Claims (1)

【特許請求の範囲】[Claims] 1.弁作用を有する金属の表面に、順次、誘電体酸化皮
膜層、ポリチオフェンを主成分とする電導性高分子から
なる半導体層及び導電体層を形成した固体電解コンデン
サの製造方法において、前記半導体層を、ポリチオフェ
ン前駆体を融解して前記誘電体酸化皮膜層上に付着させ
る工程とこのポリチオフェン前駆体を酸化剤で酸化重合
してポリチオフェンを主成分とする電導性高分子にする
工程によって形成することを特徴とする固体電解コンデ
ンサの製造方法。
1. A method for manufacturing a solid electrolytic capacitor in which a dielectric oxide film layer, a semiconductor layer made of a conductive polymer containing polythiophene as a main component, and a conductor layer are sequentially formed on the surface of a metal having a valve action. , a step of melting a polythiophene precursor and depositing it on the dielectric oxide film layer, and a step of oxidatively polymerizing the polythiophene precursor with an oxidizing agent to form a conductive polymer mainly composed of polythiophene. Features: Manufacturing method of solid electrolytic capacitors.
JP27078489A 1989-10-18 1989-10-18 Method for manufacturing solid electrolytic capacitor Expired - Lifetime JP2901285B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27078489A JP2901285B2 (en) 1989-10-18 1989-10-18 Method for manufacturing solid electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27078489A JP2901285B2 (en) 1989-10-18 1989-10-18 Method for manufacturing solid electrolytic capacitor

Publications (2)

Publication Number Publication Date
JPH03132011A true JPH03132011A (en) 1991-06-05
JP2901285B2 JP2901285B2 (en) 1999-06-07

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ID=17490951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27078489A Expired - Lifetime JP2901285B2 (en) 1989-10-18 1989-10-18 Method for manufacturing solid electrolytic capacitor

Country Status (1)

Country Link
JP (1) JP2901285B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7038903B2 (en) 2003-03-28 2006-05-02 Sanyo Electric Co., Ltd. Solid electrolytic capacitor and manufacturing method thereof
JP2008088231A (en) * 2006-09-29 2008-04-17 Tsurumi Soda Co Ltd Etching solution for conductive polymer and method for patterning conductive polymer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7038903B2 (en) 2003-03-28 2006-05-02 Sanyo Electric Co., Ltd. Solid electrolytic capacitor and manufacturing method thereof
JP2008088231A (en) * 2006-09-29 2008-04-17 Tsurumi Soda Co Ltd Etching solution for conductive polymer and method for patterning conductive polymer

Also Published As

Publication number Publication date
JP2901285B2 (en) 1999-06-07

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