JPH0313643B2 - - Google Patents
Info
- Publication number
- JPH0313643B2 JPH0313643B2 JP21053081A JP21053081A JPH0313643B2 JP H0313643 B2 JPH0313643 B2 JP H0313643B2 JP 21053081 A JP21053081 A JP 21053081A JP 21053081 A JP21053081 A JP 21053081A JP H0313643 B2 JPH0313643 B2 JP H0313643B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- magnetic pole
- recording
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Description
【発明の詳細な説明】
(1) 発明の技術分野
本発明は読出しに磁気抵抗効果素子を用いた垂
直磁気記録再生用薄膜磁気ヘツドに関する。DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a thin film magnetic head for perpendicular magnetic recording and reproducing using a magnetoresistive element for reading.
(2) 技術の背景
垂直磁気記録用磁気ヘツドとして各種磁気ヘツ
ドが用いられるに至つている。そのうちのヘツド
には磁性薄膜だけを用いた構成のものもあるが、
その膜厚に再生出力が強く依存する特性があるた
め、高い記録密度で信号を記録しうるようにする
と、そのような記録密度で記録された信号は効率
よく、高分解能で読取り得ないと云われており、
そのような不具合の解決が望まれている。(2) Background of the Technology Various magnetic heads have come to be used as magnetic heads for perpendicular magnetic recording. Some of these heads are constructed using only a magnetic thin film,
Since the playback output strongly depends on the thickness of the film, if it is possible to record signals at a high recording density, the signals recorded at such a recording density cannot be read efficiently and with high resolution. It is said that
A solution to such problems is desired.
(3) 従来技術と問題点
垂直磁気記録再生用磁気ヘツドとして、第１図
に示すような補助磁極励磁方式のものがあるが、
このヘツドはインダクタンスが大きくなり高速の
記録、再生に適さないばかりでなく、励磁を磁気
記録媒体の裏側から行うため基板の厚いデイスク
には適用し得ないという欠点を有する。第１図に
おいて１は主磁極、２は補助磁極、３は書込み／
読み出し用コイル、４は記録磁性層である。(3) Prior art and problems As a magnetic head for perpendicular magnetic recording and reproduction, there is an auxiliary magnetic pole excitation system as shown in Figure 1.
This head not only has a large inductance and is not suitable for high-speed recording and reproduction, but also has the disadvantage that it cannot be applied to disks with thick substrates because excitation is performed from the back side of the magnetic recording medium. In Figure 1, 1 is the main magnetic pole, 2 is the auxiliary magnetic pole, and 3 is the write/write/magnetic pole.
The reading coil 4 is a recording magnetic layer.
上述のような不具合を回避すべく、第２図に示
すように主磁極５をセラミツク製基板６に設けら
れた磁性薄膜とし、この薄膜にコイル７を巻付け
て構成される磁極により記録磁性層８を直接励磁
して記録する主磁極励磁方式の磁気ヘツドが開発
されている。 In order to avoid the above-mentioned problems, as shown in FIG. 2, the main magnetic pole 5 is made of a magnetic thin film provided on a ceramic substrate 6, and a coil 7 is wound around this thin film. A main pole excitation type magnetic head has been developed in which the main pole excitation type magnetic head is directly excited to record data.
しかし、これらの方式のいづれの再生出力対記
録密度特性も第３図に示す如く、主磁極の膜厚Ｐ
に強く依存する特性を有している。即ち、記録磁
性層８の磁化反転間隔をλとすると、おおよそ
Ｐ≒2nλ（ｎ＝1.2.…） ……(1)
を満す記録密度において再生出力が得られないと
いう特性（第３図参照）を有している。 However, as shown in Figure 3, the reproduction output vs. recording density characteristics of any of these methods depend on the film thickness P of the main pole.
It has characteristics that strongly depend on. In other words, if the magnetization reversal interval of the recording magnetic layer 8 is λ, then approximately P≒2nλ (n=1.2.…) ... (1) The characteristic is that no reproduction output can be obtained at a recording density that satisfies the following (see Figure 3). )have.
従つて、記録密度特性を向上させんとして主磁
極膜厚Ｐを薄くすると、記録再生効率が著しく低
下しその分解能も低下するという好ましからざる
点が上述形式の磁気ヘツドに解決されないまゝ残
つている。 Therefore, if the main pole film thickness P is made thinner in an attempt to improve the recording density characteristics, the undesirable problem that the recording/reproducing efficiency and its resolution will drop significantly remains unresolved in the above-mentioned magnetic head. .
(4) 発明の目的
本発明の目的は製造プロセスが簡単で、記録再
生効率が高く、しかも高再生分解能を有する垂直
磁気記録用薄膜磁気ヘツドを提供することにあ
る。(4) Object of the Invention An object of the present invention is to provide a thin film magnetic head for perpendicular magnetic recording which has a simple manufacturing process, high recording and reproducing efficiency, and high reproducing resolution.
(5) 発明の構成
この目的は、主薄膜磁極を設けた非磁性支持体
上に書込み用多巻薄膜コイルを設けた垂直磁気記
録再生用薄膜磁気ヘツドにおいて、上記書込み用
多巻薄膜コイルの中心部に設けた磁気的結合用埋
め込み磁極を介して書込み用多巻薄膜コイル上に
補助薄膜磁極を設け、その補助薄膜磁極と磁気的
に相互作用のある位置で、かつ磁気記録媒体の媒
体面と対向する位置に読み出し用薄膜磁気抵抗素
子を設けることによつて達成される。(5) Structure of the Invention The object of the present invention is to provide a thin film magnetic head for perpendicular magnetic recording and reproducing in which a multi-turn thin film coil for writing is provided on a non-magnetic support provided with a main thin film magnetic pole. An auxiliary thin film magnetic pole is provided on the writing multi-turn thin film coil via an embedded magnetic pole for magnetic coupling provided in the section, and the auxiliary thin film magnetic pole is placed at a position where it magnetically interacts with the auxiliary thin film magnetic pole and with the medium surface of the magnetic recording medium. This is achieved by providing readout thin film magnetoresistive elements at opposing positions.
(6) 発明の実施例
以下添付図面を参照しながら本発明の一実施例
を説明する。(6) Embodiment of the invention An embodiment of the invention will be described below with reference to the attached drawings.
第４図は本発明の実施例を示す図である。１０
は非磁性支持体（以下基板と称す）であり、１１
は基板１０の上で、且つ変換面１９を基板１０下
端面と同一平面とするように形成された主薄膜磁
極である。１２は同心環状の書込み用多巻薄膜コ
イルで、このコイルは主薄膜磁極１１の下部領域
と主薄膜磁極１１より上方の基板１０上部との間
に樹脂等の絶縁物１３の膜の中に埋め込まれるよ
うに主薄膜磁極１１及び基板１０にモールド成形
方式で添書されている。そして、このコイル１２
の環状中心部１４に上記主薄膜磁極に接合された
磁気的結合用埋め込み磁極１５が設けられてい
る。磁極１５の突出平面１６を含んで平面１７を
形成するように絶縁保護膜１８が設けられ、この
保護膜（絶縁膜）１８の下部面に主薄膜磁極１０
の変換面１９（第５図参照）と同一平面内に変換
面２０があるようにして薄膜磁気抵抗効果素子２
１が添設されている（第５図参照）。また、絶縁
膜１８及び素子２１との間に絶縁膜２２（第５図
参照）を挾んで補助薄膜磁極２３が形成され、そ
の上に絶縁保護膜（絶縁膜）２４が被着されて成
る積層構造に本発明ヘツドは構成されている。素
子２１自体の層構成、バイアス方式は任意でよ
い。また２５，２６は書込みコイル用埋込み端子
であり、２７は磁気抵抗効果素子用端子である。 FIG. 4 is a diagram showing an embodiment of the present invention. 10
is a non-magnetic support (hereinafter referred to as substrate), and 11
is a main thin film magnetic pole formed on the substrate 10 so that the conversion surface 19 is flush with the lower end surface of the substrate 10 . Reference numeral 12 denotes a concentric ring-shaped multi-turn thin film coil for writing, which is embedded in a film of an insulating material 13 such as resin between the lower region of the main thin film magnetic pole 11 and the upper part of the substrate 10 above the main thin film magnetic pole 11. It is attached to the main thin film magnetic pole 11 and the substrate 10 using a molding method so that it can be seen. And this coil 12
An embedded magnetic pole 15 for magnetic coupling, which is joined to the main thin film magnetic pole, is provided in the annular center portion 14 of the magnetic head. An insulating protective film 18 is provided to form a flat surface 17 including the protruding flat surface 16 of the magnetic pole 15, and the main thin film magnetic pole 10 is formed on the lower surface of this protective film (insulating film) 18.
The thin film magnetoresistive element 2 is arranged so that the conversion surface 20 is in the same plane as the conversion surface 19 (see FIG. 5) of the thin film magnetoresistive element 2.
1 is attached (see Figure 5). Further, an auxiliary thin film magnetic pole 23 is formed with an insulating film 22 (see FIG. 5) interposed between the insulating film 18 and the element 21, and an insulating protective film (insulating film) 24 is deposited thereon. The head of the present invention is constructed according to the structure. The layer structure and bias method of the element 21 itself may be arbitrary. Further, 25 and 26 are writing coil embedded terminals, and 27 is a magnetoresistive element terminal.
この構造によれば、情報の垂直記録は主薄膜磁
極１１の後端縁で生ぜしめられ、またその読出し
は磁気抵抗効果素子２１で行われるから、記録密
度とは全く独立に主薄膜磁極の膜厚を厚くするこ
とが出来、これにより記録効率を向上させること
が出来る。また、磁気抵抗効果素子２１の再生出
力が大きく、その再生効率も向上する。この素子
は元来、500Å〜1000Åという非常に薄い膜厚を
有し、上記式１から判るように500000BPI（Bit
Per Inch）以上まで再生出来る分解能を有する。
従つて垂直記録媒体の高密度記録特性を活かせ
る。 According to this structure, perpendicular recording of information occurs at the trailing edge of the main thin-film magnetic pole 11, and reading is performed by the magnetoresistive element 21, so that the film of the main thin-film magnetic pole is completely independent of the recording density. The thickness can be increased, thereby improving recording efficiency. Furthermore, the reproduction output of the magnetoresistive element 21 is large, and its reproduction efficiency is also improved. This element originally has a very thin film thickness of 500 Å to 1000 Å, and as seen from equation 1 above, it has a film thickness of 500000 BPI (Bit
It has a resolution that can reproduce more than
Therefore, the high-density recording characteristics of perpendicular recording media can be utilized.
上述した構造の本発明ヘツドの製造を第５図参
照の下に説明する。 The manufacture of the head of the present invention having the structure described above will be explained with reference to FIG.
先ず、セラミツク、ガラス等のスライダ材とし
て適する非磁性基板１０上にスパツタ、蒸着、メ
ツキ等により主薄膜磁極１１となる磁性薄膜パタ
ーンを形成する。 First, a magnetic thin film pattern that will become the main thin film magnetic pole 11 is formed on a nonmagnetic substrate 10 made of ceramic, glass, or the like suitable as a slider material by sputtering, vapor deposition, plating, or the like.
次いで、そのパターンを含む基板１０上に絶縁
された書込み用多巻薄膜コイル１２パターンを形
成する。このコイル１２の各巻線間に感光性兼絶
縁性樹脂１３を施与し、コイル部以外の不要部分
を除去した後、これを熱処理により焼き硬める。 Next, an insulated writing multi-turn thin film coil 12 pattern is formed on the substrate 10 including the pattern. A photosensitive and insulating resin 13 is applied between each winding of the coil 12, unnecessary parts other than the coil portion are removed, and then the resin is baked and hardened by heat treatment.
然る後に、メツキ等により、コイル中心部１４
及び書込み用多巻薄膜コイル１２の端子部２５，
２６にパーマロイ等の導電性磁性薄膜を20〜30μ
ｍの厚さに盛り上げる。 After that, Metsuki et al.
and the terminal portion 25 of the multi-turn thin film coil 12 for writing,
26 with a conductive magnetic thin film of 20 to 30μ such as permalloy.
Pound it up to a thickness of m.
これらの工程で形成された各部上にSiO2、
Al2O3等の絶縁保護膜１８をスパツタリング、イ
オンプレーテイング等により20〜30μｍの厚さだ
け被着する。その基板表面部を平坦に研摩し、コ
イル中心部１４の磁気的結合用埋込み磁極１５及
び各端子部２５，２６を露呈させる。 SiO 2 on each part formed in these steps,
An insulating protective film 18 made of Al 2 O 3 or the like is deposited to a thickness of 20 to 30 μm by sputtering, ion plating, or the like. The surface of the substrate is polished flat to expose the embedded magnetic pole 15 for magnetic coupling of the coil center portion 14 and the respective terminal portions 25 and 26.
このようにして平坦化された基板表面に薄膜磁
気抵抗効果素子２１パターン並びに書込み用端子
パターン（図示せず）及び再生用端子２７パター
ン（第５図参照）を形成し、その上にSiO2、
Al2O3等の絶縁保護膜２４を成膜する。 A thin film magnetoresistive element 21 pattern, a write terminal pattern (not shown), and a read terminal 27 pattern (see FIG. 5) are formed on the surface of the substrate planarized in this way, and SiO 2 ,
An insulating protective film 24 of Al 2 O 3 or the like is formed.
そして、基板表面の研摩により端子パターンを
露出させてウエハプロセスを完了させる。 Then, the terminal pattern is exposed by polishing the substrate surface to complete the wafer process.
これに加えて、その基板を切断、ラツプ仕上げ
等によりこれをスライダ形状に加工すると共に、
そのスロートハイトを所要高に仕上げる。 In addition to this, the board is processed into a slider shape by cutting, lapping, etc.
Finish the throat height to the required height.
(7) 発明の効果
以上の説明から明らかなように、本発明によれ
ば、主薄膜磁極の膜厚を記録密度に関係なく厚く
し記録効率を向上させ、その記録を膜厚の薄い薄
膜磁気抵抗効果素子にて読取るから、再生効率が
向上するばかりでなく再生分解能も向上してい
る。従つて、従来のように記録密度を向上させん
として主薄膜磁極の膜厚を薄くした場合に生じて
しまう不具合は可及的に除去し得ることになつ
た。(7) Effects of the Invention As is clear from the above description, according to the present invention, the thickness of the main thin-film magnetic pole is increased regardless of the recording density to improve recording efficiency, and the recording is performed using a thin-film magnetic pole with a thin film thickness. Since it is read using a resistive effect element, not only the reproduction efficiency is improved but also the reproduction resolution is improved. Therefore, it has become possible to eliminate as much as possible the problems that occur when the film thickness of the main thin film magnetic pole is made thinner in order to improve the recording density as in the past.
第１図及び第２図は従来の垂直磁気記録再生用
磁気ヘツドの構成を示す図、第３図は第１図及び
第２図ヘツドの再生出力−記録密度特性曲線図、
第４図及び第５図はそれぞれ本発明ヘツドの一部
切欠斜視図及び縦断面図である。
図中、１０は非磁性支持体、１１は主薄膜磁
極、１２は書込み用多巻薄膜コイル、２１は薄膜
磁気抵抗効果素子、２３は補助薄膜磁極、１８，
２２，２４は絶縁膜である。
1 and 2 are diagrams showing the configuration of a conventional magnetic head for perpendicular magnetic recording and reproduction, and FIG. 3 is a reproduction output-recording density characteristic curve diagram of the head shown in FIGS. 1 and 2.
FIGS. 4 and 5 are a partially cutaway perspective view and a vertical sectional view, respectively, of the head of the present invention. In the figure, 10 is a non-magnetic support, 11 is a main thin film magnetic pole, 12 is a multi-turn thin film coil for writing, 21 is a thin film magnetoresistive element, 23 is an auxiliary thin film magnetic pole, 18,
22 and 24 are insulating films.
Claims (1)
用多巻薄膜コイルを設けた垂直磁気記録再生用薄
膜磁気ヘツドにおいて、上記書込み用多巻薄膜コ
イルの中心部に設けた磁気的結合用埋め込み磁極
を介して書込み用多巻薄膜コイル上に補助薄膜磁
極を設け、その補助薄膜磁極と磁気的に相互作用
のある位置で、かつ磁気記録媒体の媒体面と対向
する位置に読み出し用薄膜磁気抵抗素子を設けた
ことを特徴とする垂直磁気記録再生用薄膜磁気ヘ
ツド。1. In a thin film magnetic head for perpendicular magnetic recording and reproducing in which a multi-turn thin film coil for writing is provided on a non-magnetic support provided with a main thin film magnetic pole, a magnetic coupling embedding provided in the center of the multi-turn thin film coil for writing is provided. An auxiliary thin film magnetic pole is provided on the multi-turn thin film coil for writing via the magnetic pole, and a thin film magnetic resistance for reading is provided at a position that magnetically interacts with the auxiliary thin film magnetic pole and at a position facing the medium surface of the magnetic recording medium. A thin film magnetic head for perpendicular magnetic recording and reproduction, characterized in that it is provided with an element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21053081A JPS58114321A (en) | 1981-12-26 | 1981-12-26 | Thin film magnetic head for vertical magnetic recording and reproduction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21053081A JPS58114321A (en) | 1981-12-26 | 1981-12-26 | Thin film magnetic head for vertical magnetic recording and reproduction |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58114321A JPS58114321A (en) | 1983-07-07 |
| JPH0313643B2 true JPH0313643B2 (en) | 1991-02-25 |
Family
ID=16590882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21053081A Granted JPS58114321A (en) | 1981-12-26 | 1981-12-26 | Thin film magnetic head for vertical magnetic recording and reproduction |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58114321A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6083213A (en) * | 1983-10-14 | 1985-05-11 | Hitachi Ltd | thin film magnetic head |
| JPS60177420A (en) * | 1984-02-23 | 1985-09-11 | Nec Corp | Composite type thin film magnetic head and its production |
| JPS61145718A (en) * | 1984-12-19 | 1986-07-03 | Nec Corp | Composite thin film magnetic head |
| JP2780916B2 (en) * | 1993-12-08 | 1998-07-30 | 富士通株式会社 | Magnetic head for perpendicular magnetic recording |
| US6407891B1 (en) | 1999-05-24 | 2002-06-18 | International Business Machines Corporation | Magnetic read/write head having electromagnetic field cancellation element |
-
1981
- 1981-12-26 JP JP21053081A patent/JPS58114321A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58114321A (en) | 1983-07-07 |
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