JPH03138350A - 鋼物体の表面特性を改善する方法 - Google Patents
鋼物体の表面特性を改善する方法Info
- Publication number
- JPH03138350A JPH03138350A JP18958590A JP18958590A JPH03138350A JP H03138350 A JPH03138350 A JP H03138350A JP 18958590 A JP18958590 A JP 18958590A JP 18958590 A JP18958590 A JP 18958590A JP H03138350 A JPH03138350 A JP H03138350A
- Authority
- JP
- Japan
- Prior art keywords
- steel
- temperature
- steel object
- silane
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 41
- 239000010959 steel Substances 0.000 title claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 31
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910000077 silane Inorganic materials 0.000 claims abstract description 22
- 239000011261 inert gas Substances 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 6
- 229910000975 Carbon steel Inorganic materials 0.000 claims abstract description 5
- 239000010962 carbon steel Substances 0.000 claims abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 28
- 239000010703 silicon Substances 0.000 claims description 28
- 238000009792 diffusion process Methods 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000008246 gaseous mixture Substances 0.000 abstract 3
- 238000005234 chemical deposition Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 43
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 229910021332 silicide Inorganic materials 0.000 description 13
- 238000005229 chemical vapour deposition Methods 0.000 description 12
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 12
- 239000012808 vapor phase Substances 0.000 description 10
- 238000005260 corrosion Methods 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000007750 plasma spraying Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- MBMLMWLHJBBADN-UHFFFAOYSA-N Ferrous sulfide Chemical compound [Fe]=S MBMLMWLHJBBADN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XMIJDTGORVPYLW-UHFFFAOYSA-N [SiH2] Chemical compound [SiH2] XMIJDTGORVPYLW-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000009388 chemical precipitation Methods 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910001067 superalloy steel Inorganic materials 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- -1 wear resistance Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
- C23C10/08—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases only one element being diffused
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8909697 | 1989-07-19 | ||
| FR8909697A FR2649995B1 (fr) | 1989-07-19 | 1989-07-19 | Procede de siliciuration d'aciers par depot chimique en phase gazeuse |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03138350A true JPH03138350A (ja) | 1991-06-12 |
Family
ID=9383914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18958590A Pending JPH03138350A (ja) | 1989-07-19 | 1990-07-19 | 鋼物体の表面特性を改善する方法 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0409687B1 (fr) |
| JP (1) | JPH03138350A (fr) |
| CA (1) | CA2021305A1 (fr) |
| DE (1) | DE69029064T2 (fr) |
| FR (1) | FR2649995B1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009123774A (ja) * | 2007-11-12 | 2009-06-04 | Toyota Motor Corp | 磁心用粉末および磁心用粉末の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69205320T2 (de) * | 1991-04-17 | 1996-03-14 | Air Liquide | CVD-Verfahren zum Herstellen einer Siliziumdiffusionsschicht und/oder Überzug auf der Oberfläche eines Metallsubstrates. |
| DE102017110221A1 (de) * | 2017-05-11 | 2018-11-15 | Gottfried Wilhelm Leibniz Universität Hannover | Verfahren zur Wärmebehandlung eines Bauteils sowie Anlage dafür |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1042076A (fr) * | 1950-09-15 | 1953-10-28 | Union Chimique Belge Sa | Procédé pour rendre la surface de l'acier dure et résistant à la corrosion |
| FR1108158A (fr) * | 1953-07-03 | 1956-01-10 | Procédé pour <l'ennoblissement> de la surface de métaux, en particulier du fer etde l'acier | |
| GB1072932A (en) * | 1963-11-01 | 1967-06-21 | Berghaus Elektrophysik Anst | Method of and apparatus for surface hardening bodies by gaseous treatment |
| GB1128609A (en) * | 1964-12-31 | 1968-09-25 | Allegheny Ludlum Steel | Improvements in or relating to silicon steel |
| FR2018029A1 (en) * | 1968-09-13 | 1970-05-29 | Allegheny Ludlum Steel | Augmenting the silicon contact of steel by treat - ment with silicon tetrachloride in the gas phase |
| JPS58141376A (ja) * | 1982-02-16 | 1983-08-22 | Seiko Epson Corp | プラズマセメンテ−シヨン |
| FR2587730A1 (fr) * | 1985-09-23 | 1987-03-27 | Rhone Poulenc Rech | Procede de siliciuration d'un substrat metallique ferreux et substrat metallique ferreux silicie |
| US4714632A (en) * | 1985-12-11 | 1987-12-22 | Air Products And Chemicals, Inc. | Method of producing silicon diffusion coatings on metal articles |
-
1989
- 1989-07-19 FR FR8909697A patent/FR2649995B1/fr not_active Expired - Fee Related
-
1990
- 1990-07-04 DE DE1990629064 patent/DE69029064T2/de not_active Expired - Fee Related
- 1990-07-04 EP EP19900401931 patent/EP0409687B1/fr not_active Expired - Lifetime
- 1990-07-17 CA CA 2021305 patent/CA2021305A1/fr not_active Abandoned
- 1990-07-19 JP JP18958590A patent/JPH03138350A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009123774A (ja) * | 2007-11-12 | 2009-06-04 | Toyota Motor Corp | 磁心用粉末および磁心用粉末の製造方法 |
| US8414984B2 (en) | 2007-11-12 | 2013-04-09 | Toyota Jidosha Kabushiki Kaisha | Powder for magnetic core, method for manufacturing powder for magnetic core, and dust core |
Also Published As
| Publication number | Publication date |
|---|---|
| DE69029064D1 (de) | 1996-12-12 |
| FR2649995B1 (fr) | 1993-08-13 |
| EP0409687B1 (fr) | 1996-11-06 |
| DE69029064T2 (de) | 1997-06-05 |
| EP0409687A1 (fr) | 1991-01-23 |
| FR2649995A1 (fr) | 1991-01-25 |
| CA2021305A1 (fr) | 1991-01-20 |
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