JPH03141027A - Apparatus for producing perpendicular magnetic recording medium - Google Patents

Apparatus for producing perpendicular magnetic recording medium

Info

Publication number
JPH03141027A
JPH03141027A JP27942089A JP27942089A JPH03141027A JP H03141027 A JPH03141027 A JP H03141027A JP 27942089 A JP27942089 A JP 27942089A JP 27942089 A JP27942089 A JP 27942089A JP H03141027 A JPH03141027 A JP H03141027A
Authority
JP
Japan
Prior art keywords
roll
magnetic
rolls
film
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27942089A
Other languages
Japanese (ja)
Inventor
Masayuki Kimura
昌行 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP27942089A priority Critical patent/JPH03141027A/en
Publication of JPH03141027A publication Critical patent/JPH03141027A/en
Pending legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To prevent the generation of wrinkling and folding by using rolls each having an outer frame, the outer peripheral sides of which from a square column shape, matching the pitch of magnetic films and the distances between the rolls and between the outer frames and feeding the magnetic films without contact with the outer frames. CONSTITUTION:A high-polymer film 4 is intermittently delivered from the roll 1 and the magnetic films 5 are formed at the specified pitch by targets 6 be tween the rolls 2. The magnetic films are then taken up on the roll 3. Each of the rolls has the outer frame 9 which forms the same square column. The spacing between the rolls 2 and 3 is one pitch of the magnetic films 5 and the magnetic film part always enters the virtual plane 10 between the outer frames 9. The film is thus sent and taken up without contact with the outer frames 9. The parts where the magnetic films 5 are formed are, therefore, shrunk by natural cooling and the magnetic disk products are obtd. at a high yield without generating the wrinkling and folding.

Description

【発明の詳細な説明】 イ0発明の目的 〔産業上の利用分野〕 本発明は、垂直磁気記録用のフレキシブル磁気ディスク
等に用いる垂直磁気記録媒体の製造装置に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION Object of the Invention [Field of Industrial Application] The present invention relates to an apparatus for manufacturing a perpendicular magnetic recording medium used for a flexible magnetic disk for perpendicular magnetic recording.

〔従来の技術〕[Conventional technology]

近年、磁気記録の高密度化の要求に伴い、減磁界の影響
が少なく、飛躍的に記録密度の向上が期待できる垂直磁
気記録の研究が盛んに行われている。
In recent years, with the demand for higher density magnetic recording, research has been actively conducted on perpendicular magnetic recording, which is less affected by demagnetizing fields and is expected to dramatically improve recording density.

長尺の高分子フィルム上にCo基磁性膜を真空蒸着法、
スパッタ法、あるいは鍍金法などによって作製される垂
直磁気記録媒体(以下垂直媒体と称す)は磁性層が連続
薄膜であるために垂直磁気記録方式において特に優れた
高密度記録特性を示すことがわかり、各種磁気テープ成
るいはディスク状磁気記録媒体など様々な製品形態への
応用開発が進められている0本発明者らは、従来がら垂
直媒体の製造装置として、第3図に示すように、送リ出
しロール11から送り出された長尺の高分子フィルム4
を、2個のガイドロール12を介して断続的に走行させ
、磁気ディスクの円形状に磁性膜5を一定ピッチで形成
して、再現良く垂直媒体を作製する装置を提案している
。その場合磁性膜5の形成時のみ高分子フィルム4の移
動を停止し、ターゲット6によりスパッタを行い磁性膜
5を形成する。スパッタ後は巻取りロール13に巻き取
る。
Vacuum deposition of a Co-based magnetic film on a long polymer film,
It has been found that perpendicular magnetic recording media (hereinafter referred to as perpendicular media) manufactured by sputtering or plating methods exhibit particularly excellent high-density recording characteristics in perpendicular magnetic recording systems because the magnetic layer is a continuous thin film. Development of application to various product forms such as various magnetic tapes and disk-shaped magnetic recording media is progressing. A long polymer film 4 fed out from the feed roll 11
The authors propose an apparatus for producing a perpendicular medium with good reproducibility by causing the magnetic film 5 to run intermittently through two guide rolls 12 and forming the magnetic film 5 on the circular shape of the magnetic disk at a constant pitch. In that case, the movement of the polymer film 4 is stopped only when forming the magnetic film 5, and sputtering is performed using the target 6 to form the magnetic film 5. After sputtering, the film is wound onto a winding roll 13.

このように一定ピツチで断続的にスパッタを行うことに
より、長尺の高分子フィルム4に断続的な磁性膜5の形
成が可能となる。
By performing sputtering intermittently at a constant pitch in this manner, it becomes possible to form the magnetic film 5 intermittently on the long polymer film 4.

しかしながら、第3図の装置によって作製された垂直媒
体は、磁性膜5を形成後のガイドロール12を通過する
時に、磁性膜5にしわや折れが生ずるという欠点があっ
た。即ち、第4図の従来の装置による作製時の垂直媒体
の平面図に示すように、スパッタの熱によって高分子フ
ィルム4の磁性膜5の形成部分が膨らみ、この部分がガ
イドロール12に接触し冷却され、収縮して通過するこ
とにより磁性膜5にしわ14や折れ15が発生していた
。このため、高分子フィルム4から磁気ディスクに打ち
抜いた時、しわ14や折れ15が磁気ディスク上にも残
るため、製品は不良となり、歩留りが低いという問題が
あった。
However, the perpendicular medium manufactured by the apparatus shown in FIG. 3 has a drawback in that the magnetic film 5 is wrinkled or folded when passing through the guide roll 12 after the magnetic film 5 has been formed. That is, as shown in FIG. 4, a plan view of a vertical medium produced using a conventional apparatus, the part of the polymer film 4 where the magnetic film 5 is formed swells due to the heat of the sputtering, and this part comes into contact with the guide roll 12. Wrinkles 14 and folds 15 were generated in the magnetic film 5 as it was cooled, contracted and passed through. Therefore, when a magnetic disk is punched from the polymer film 4, wrinkles 14 and folds 15 remain on the magnetic disk, resulting in a defective product and a problem of low yield.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

本発明は、上記の問題を解決し、磁性膜を形成した高分
子フィルムを搬送し巻き取る時の磁性膜へのしわや折れ
の発生を防止し、以て磁気ディスク製品の歩留りを向上
した量産性に優れた垂直媒体の製造装置を提供すること
にある。
The present invention solves the above problems and prevents wrinkles and folds from occurring in the magnetic film when the polymer film on which the magnetic film is formed is transported and rolled up, thereby improving the yield of magnetic disk products in mass production. The purpose of the present invention is to provide a vertical media manufacturing device with excellent performance.

口8発明の構成 〔課題を解決するための手段〕 本発明は、長尺の高分子フィルム上にスパッタリング法
により、断続的に垂直磁気記録用の磁性膜を形成して垂
直磁気記録媒体を製造する装置において、少なくともガ
イドロール、巻取りロールの外周辺が角柱状をつくる外
枠を持つロールとし、断続的に作製した前記磁性膜のピ
ッチと前記各ロール間及び外枠間の距離を合わせ、常に
磁性膜の部分は前記各ロールの外枠に触れずに搬送され
、巻き取られることを特徴とする垂直磁気記録媒体の製
造装置である。
8. Structure of the invention [Means for solving the problem] The present invention manufactures a perpendicular magnetic recording medium by intermittently forming a magnetic film for perpendicular magnetic recording on a long polymer film by a sputtering method. In the apparatus, at least the guide roll and the take-up roll have an outer frame having a prismatic outer periphery, and the pitch of the intermittently produced magnetic film is adjusted to the distance between each of the rolls and between the outer frames, This perpendicular magnetic recording medium manufacturing apparatus is characterized in that the magnetic film portion is always transported and wound up without touching the outer frame of each roll.

〔作用〕[Effect]

少なくともガイドロール、及び巻取りロールの形状を、
従来の円柱状から角柱状をつくる外枠を持つロールとし
、断続的に作製した磁性膜のピッチと各ロール間、及び
外枠間の距離を合わせれば、常に磁性膜の部分はロール
の外枠の間にあって、ロールの外枠に触れずに搬送され
巻き取られる。
At least the shape of the guide roll and take-up roll,
By using a roll with an outer frame that creates a prismatic shape instead of the conventional cylindrical shape, and matching the pitch of the intermittently produced magnetic films, the distance between each roll, and the distance between the outer frames, the magnetic film part will always be aligned with the outer frame of the roll. It is transported and wound up without touching the outer frame of the roll.

従って、高分子フィルムの磁性膜の形成部分はロールに
触れないので、急に収縮を起こさず自然冷却による自然
収縮をするので、磁性膜にしわや折れが発生しない。
Therefore, since the portion of the polymer film where the magnetic film is formed does not come into contact with the roll, it does not suddenly shrink but naturally shrinks due to natural cooling, so that no wrinkles or folds occur in the magnetic film.

〔実施例〕〔Example〕

以下に本発明の実施例を図を参照して詳しく説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は、本発明の垂直媒体の製造装置に用いるロール
の一実施例を示す外観斜視図である。ロール軸7に4枚
の支持板8を各々直角に羽根状に配置して取り付け、各
々の支持板8の外周辺の合成が四角柱状をつくる外枠9
を形成し、外枠9が4つの虚血10(点線で示す)を形
成したロールである。このロールでは高分子フィルムを
4つの虚血10に沿って搬送、及び巻き取る構造である
FIG. 1 is an external perspective view showing one embodiment of a roll used in the vertical media manufacturing apparatus of the present invention. Four support plates 8 are attached to the roll shaft 7 by arranging them in a wing shape at right angles, and the outer periphery of each support plate 8 is combined to form a square prism shape.
The outer frame 9 is a roll in which four ischaemias 10 (indicated by dotted lines) are formed. This roll has a structure in which the polymer film is conveyed along four ischaemias 10 and wound up.

第2図は、第1図のロールを配置した本発明の一実施例
を示す垂直媒体の製造装置の主要部の概略斜視図である
。即ち、送り出しロール1から断続的に送り出された高
分子フィルム4に、2個のガイドロール2の間でターゲ
ット6によりスパッタ法で円形の磁性膜5が一定ピッチ
で形成され、巻取りロール3に巻き取られて垂直磁気記
録媒体が製造される装置である。送り出しロール1、ガ
イドロール2、及び巻取りロール3は、第1図で示すロ
ールと同じ形状で四角柱状を作る外枠9を形成したもの
である。この製造装置は、少なくとも磁性膜5を形成し
た後のガイドロール2と巻取りロール3の間の距離は、
高分子フィルム4上の磁性膜5のピッチの整数倍に合わ
せられている。
FIG. 2 is a schematic perspective view of the main parts of a vertical media manufacturing apparatus showing an embodiment of the present invention in which the rolls shown in FIG. 1 are arranged. That is, a circular magnetic film 5 is formed at a constant pitch on a polymer film 4 that is intermittently sent out from a delivery roll 1 by a sputtering method using a target 6 between two guide rolls 2. This is a device for manufacturing perpendicular magnetic recording media by winding the media. The delivery roll 1, the guide roll 2, and the take-up roll 3 are each formed with an outer frame 9 having the same shape as the roll shown in FIG. 1 and forming a rectangular column shape. In this manufacturing apparatus, at least the distance between the guide roll 2 and the winding roll 3 after forming the magnetic film 5 is
The pitch is adjusted to be an integral multiple of the pitch of the magnetic film 5 on the polymer film 4.

さらに上記の各ガイドロール2、巻取りロール3の外枠
9の間隔は、磁性膜5の1ピツチに合わせられており、
磁性膜5の部分は必ずロールの外枠9の間の虚血10に
入り、外枠9には触らずに搬送され巻き取られるよう構
成されている。従ってこの製造装置によれば、磁性M5
の形成部分は、ガイドロール2と巻取りロール3に直接
触れずに自然冷却により自然収縮するのでしわや折れが
発生せず、磁気ディスク製品が高歩留りで得られる。
Further, the intervals between the outer frames 9 of each of the guide rolls 2 and the winding rolls 3 are matched to one pitch of the magnetic film 5,
A portion of the magnetic film 5 always enters the ischemia 10 between the outer frames 9 of the rolls, and is configured to be transported and wound up without touching the outer frames 9. Therefore, according to this manufacturing apparatus, the magnetic M5
The formed portion naturally shrinks due to natural cooling without directly touching the guide roll 2 and take-up roll 3, so wrinkles and folds do not occur, and magnetic disk products can be obtained at a high yield.

これを実証するため、本発明の実施例に示した下記のロ
ールを配置した垂直媒体の製造装置により、下記の高分
子フィルムに下記仕様の磁性膜を作製した。
In order to demonstrate this, a magnetic film having the following specifications was produced on the following polymer film using the perpendicular media manufacturing apparatus shown in the examples of the present invention and equipped with the following rolls.

ロール(送り出しロールl、ガイドロール2、巻取りロ
ール3) 形状     支持板8が四枚で四角柱状をつくる外枠
9を形成 虚血10の寸法 (長)110mmx (幅)300■
■×四面高分子フィルム4 種類     ポリイミドフィルム 寸法     (幅)250ml×(厚)50μ■以下
余白 磁性膜5 材質     CoCr合金膜 寸法     膜厚  0.5μm 外形  約φ90脂鵬 ビ・ソチ  110騰鵬 形成方法  RFマグネトロンスパッタリングこれによ
って得られた垂直媒体にはしわや折れによる不良は発生
しなかった。
Rolls (feeding roll 1, guide roll 2, take-up roll 3) Shape: Four support plates 8 form an outer frame 9 that forms a square prism Dimensions of ischemia 10 (Length) 110mm x (Width) 300mm
■ × Four-sided polymer film 4 types Polyimide film dimensions (width) 250 ml × (thickness) 50 μm or less Margin magnetic film 5 Material CoCr alloy film dimensions Film thickness 0.5 μm External shape Approximately φ90 Bi-Sochi 110 Tenpeng Forming method RF No defects due to wrinkles or folds occurred in the vertical media obtained by magnetron sputtering.

尚1本例のロールでは外形を四角柱としたが三角、六角
でもよく、又外枠の形成を支持板としたが棒枠、網枠で
も良く、本例に拘束されない。
In the roll of this example, the outer shape is a quadrangular prism, but it may be triangular or hexagonal, and although the outer frame is formed with a support plate, it may be a rod frame or a net frame, and is not limited to this example.

又、本例では送り出しロール1、ガイドロール2、巻取
りロール3のすべてのロールを第1図に示すロールと同
形としたが、磁性膜5を形成した後のガイドロール2と
巻取りロール3の2個のみでも充分であり、本例に拘束
されるものではない。
Furthermore, in this example, all of the rolls, including the delivery roll 1, the guide roll 2, and the take-up roll 3, have the same shape as the rolls shown in FIG. It is sufficient to use only two of them, and the invention is not limited to this example.

ハ1発明の効果 〔発明の効果〕 以上述べたように本発明によれば、高分子フィルムに形
成した磁性膜にしわや折れの発生がなく、磁気ディスク
を高歩留りで得られる量産性に優れた垂直磁気記録媒体
の製造装置を提供出来る。
C1 Effects of the Invention [Effects of the Invention] As described above, according to the present invention, the magnetic film formed on the polymer film is free from wrinkles and folds, and it is excellent in mass production, allowing magnetic disks to be obtained at a high yield. It is possible to provide an apparatus for manufacturing a perpendicular magnetic recording medium.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の垂直磁気記録媒体の製造装置に用い
るロールの一実施例を示す外観斜視図。 第2図は、第1図のロールを配置した本発明の一実施例
を示す垂直磁気記録媒体の製造装置の主要部の概略斜視
図。 第3図は、従来の垂直磁気記録媒体の製造装置の主要部
を示す概略斜視図。 第4図は、従来の垂直磁気記録媒体の製造装置により作
製された時の状態を示す垂直磁気記録媒体の平面図であ
る。 1−・・(本発明の)送り出しロール、2・・・(本発
明の)ガイドロール、3・・・(本発明の)巻取りロー
ル、4・・・高分子フィルム、5・・・磁性膜、6・・
・ターゲット、7・・・ロール軸、8・・・支持板、9
・・・外枠、10・・・虚血、11・・・(従来の)送
り出しロール、12・・・(従来の)ガイドロール、1
3・・・(従来の)巻取りロール、14・・・しわ、1
5・・・折れ。
FIG. 1 is an external perspective view showing one embodiment of a roll used in the perpendicular magnetic recording medium manufacturing apparatus of the present invention. FIG. 2 is a schematic perspective view of the main parts of a perpendicular magnetic recording medium manufacturing apparatus showing an embodiment of the present invention in which the rolls shown in FIG. 1 are arranged. FIG. 3 is a schematic perspective view showing the main parts of a conventional perpendicular magnetic recording medium manufacturing apparatus. FIG. 4 is a plan view of a perpendicular magnetic recording medium manufactured by a conventional perpendicular magnetic recording medium manufacturing apparatus. 1-... Delivery roll (of the present invention), 2... Guide roll (of the present invention), 3... Winding roll (of the present invention), 4... Polymer film, 5... Magnetic Membrane, 6...
・Target, 7... Roll axis, 8... Support plate, 9
... Outer frame, 10 ... Ischemia, 11 ... (Conventional) delivery roll, 12 ... (Conventional) Guide roll, 1
3...(Conventional) winding roll, 14...Wrinkle, 1
5...Break.

Claims (1)

【特許請求の範囲】[Claims] 1、長尺の高分子フィルム上にスパッタリング法により
、断続的に垂直磁気記録用の磁性膜を形成して垂直磁気
記録媒体を製造する装置において、少なくともガイドロ
ール、巻取りロールの外周辺が角柱状をつくる外枠を持
つロールとし、断続的に作製した前記磁性膜のピッチと
前記各ロール間及び外枠間の距離を合わせ、常に磁性膜
の部分は前記各ロールの外枠に触れずに搬送され、巻き
取られることを特徴とする垂直磁気記録媒体の製造装置
1. In an apparatus that manufactures a perpendicular magnetic recording medium by intermittently forming a magnetic film for perpendicular magnetic recording on a long polymer film by sputtering, at least the outer periphery of the guide roll and take-up roll is square. A roll having an outer frame forming a columnar shape is used, and the pitch of the magnetic film produced intermittently and the distance between each roll and the outer frame are adjusted so that the magnetic film part does not always touch the outer frame of each roll. An apparatus for manufacturing a perpendicular magnetic recording medium, which is transported and wound.
JP27942089A 1989-10-25 1989-10-25 Apparatus for producing perpendicular magnetic recording medium Pending JPH03141027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27942089A JPH03141027A (en) 1989-10-25 1989-10-25 Apparatus for producing perpendicular magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27942089A JPH03141027A (en) 1989-10-25 1989-10-25 Apparatus for producing perpendicular magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH03141027A true JPH03141027A (en) 1991-06-17

Family

ID=17610835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27942089A Pending JPH03141027A (en) 1989-10-25 1989-10-25 Apparatus for producing perpendicular magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH03141027A (en)

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