JPH0314420U - - Google Patents

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Publication number
JPH0314420U
JPH0314420U JP7354089U JP7354089U JPH0314420U JP H0314420 U JPH0314420 U JP H0314420U JP 7354089 U JP7354089 U JP 7354089U JP 7354089 U JP7354089 U JP 7354089U JP H0314420 U JPH0314420 U JP H0314420U
Authority
JP
Japan
Prior art keywords
light receiving
receiving section
gratings
predetermined pitch
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7354089U
Other languages
English (en)
Other versions
JPH0733134Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989073540U priority Critical patent/JPH0733134Y2/ja
Publication of JPH0314420U publication Critical patent/JPH0314420U/ja
Application granted granted Critical
Publication of JPH0733134Y2 publication Critical patent/JPH0733134Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の第１実施例を示す平面図、第
２図は同実施例の受光部における受光素子のパタ
ーンを示す図、第３図及び第４図は同受光部にお
ける受光素子の他のパターン例を示す図、第５図
は本考案の第２実施例を示す平面図、第６図は２
格子システムの従来の光学式変位検出装置を示す
平面図、第７図は従来の３格子システムの光学式
変位検出装置を示す模式的平面図、第８図は従来
の３格子システムの光学式変位検出装置を示す平
面図である。 ２０……光源としての照明系、２１，４１……
第２格子、２３，４０……第１格子、２５，２５
ａ，２５ｂ，３０，３１……受光素子２６……受
光部、４２……透光性基板としてのメインスケー
ル。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ 光源と、所定ピツチで格子状に配設した２組
    の受光素子を有する受光部と、前記光源と前記受
    光部の間に配設され、それぞれ所定のピツチを有
    し、少なくとも一方が前記受光部に対して相対移
    動可能な２つの格子とを備えて成る光学式変位検
    出装置。 ２ 前記２つの格子は、透光性基板の各面に形成
    されていることを特徴とする請求項１記載の光学
    式変位検出装置。
JP1989073540U 1989-06-26 1989-06-26 光学式変位検出装置 Expired - Lifetime JPH0733134Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989073540U JPH0733134Y2 (ja) 1989-06-26 1989-06-26 光学式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989073540U JPH0733134Y2 (ja) 1989-06-26 1989-06-26 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPH0314420U true JPH0314420U (ja) 1991-02-14
JPH0733134Y2 JPH0733134Y2 (ja) 1995-07-31

Family

ID=31612442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989073540U Expired - Lifetime JPH0733134Y2 (ja) 1989-06-26 1989-06-26 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPH0733134Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001289674A (ja) * 2000-02-03 2001-10-19 Mitsutoyo Corp 変位測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224315U (ja) * 1985-07-26 1987-02-14
JPS63249015A (ja) * 1987-04-03 1988-10-17 Mitsutoyo Corp 光学式変位検出器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224315U (ja) * 1985-07-26 1987-02-14
JPS63249015A (ja) * 1987-04-03 1988-10-17 Mitsutoyo Corp 光学式変位検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001289674A (ja) * 2000-02-03 2001-10-19 Mitsutoyo Corp 変位測定装置

Also Published As

Publication number Publication date
JPH0733134Y2 (ja) 1995-07-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term