JPH03145191A - Electrode of circuit board - Google Patents

Electrode of circuit board

Info

Publication number
JPH03145191A
JPH03145191A JP1283863A JP28386389A JPH03145191A JP H03145191 A JPH03145191 A JP H03145191A JP 1283863 A JP1283863 A JP 1283863A JP 28386389 A JP28386389 A JP 28386389A JP H03145191 A JPH03145191 A JP H03145191A
Authority
JP
Japan
Prior art keywords
electrode
resistance
low resistance
circuit board
adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1283863A
Other languages
Japanese (ja)
Inventor
Yuji Matsuda
勇次 松田
Katsuyuki Naito
克幸 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1283863A priority Critical patent/JPH03145191A/en
Publication of JPH03145191A publication Critical patent/JPH03145191A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing of the conductive pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To obtain an electrode of a circuit board which is connected tightly to a protrudent electrode and low in resistance at its connected part with the protrudent electrode by a method wherein the electrode is composed of a first material and a second material, the first material is conductive and lower than the second material in resistance, and the second material is higher than the first material in adhesion to the protrudent electrode. CONSTITUTION:An electrode is composed of a first part of highly conductive first material and a second part formed of second material excellent in adhesion. The first part is a low resistance part 20, the second part is composed of tight contact parts 30 formed on the low resistance part 20, and the low resistance part 20 electrically connects an electrode 10 with the protrudent electrode of an electronic part low in resistance and is formed of material lower than that of the tight contact part 30 in resistance. Mo is preferably employed as the first material of low resistance. On the other hand, the tight contact part 30 serves as a part which tightly connects the protrudent electrode of an electronic part with the electrode 10 and is formed of material higher than that of the low resistance part 10 in adhesion. It is preferable that ITO is used as the second material excellent in adhesion.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は回路基板の電極に関し、特に、電子部品の突起
電極と密着性良く接続され、接続部の接続不良が発生せ
ず、かつ、その接続部の抵抗が低い回路基板の電極に関
する。
Detailed Description of the Invention (Field of Industrial Application) The present invention relates to electrodes for circuit boards, and in particular, to electrodes for circuit boards that are connected with good adhesion to protruding electrodes of electronic components, and that do not cause connection failures at the connection portions. The present invention relates to an electrode for a circuit board having a low resistance at a connecting part.

(従来の技術) 絶縁性基板上に配線が形成された回路基板であって、I
C等の電子部品が搭載されるものは、電子部品の突起電
極と該配線とを接続するための電極を回路基板上に有し
ている。従来の回路基板の電極は、金属又はITO(I
ndium  Tin0xide)等の導電性材料のう
ちの一種類の材料からなる。電極と電子部品の突起電極
とは、導電性接着剤によって接続されている。
(Prior art) A circuit board in which wiring is formed on an insulating substrate,
Those on which electronic components such as C are mounted have electrodes on the circuit board for connecting the protruding electrodes of the electronic components and the wiring. Conventional circuit board electrodes are made of metal or ITO (ITO).
It is made of one type of conductive material such as ndium (TinOxide). The electrode and the protruding electrode of the electronic component are connected with a conductive adhesive.

(発明が解決しようとする課H) しかしながら、上述の従来技術においては、以下上述べ
る問題点があった。
(Problem H to be Solved by the Invention) However, the above-mentioned prior art has the following problems.

電極が金属からなる場合、回路基板の電極と電子部品の
突起電極との接続部に於いて、抵抗は低いが、密着性が
悪いという問題がある。このため、接続部で断線又は接
続不良が発生したりすることがある。また、電極がIT
Oからなる場合、接続部の密着性は良いが、抵抗が高い
という問題がある。このときの抵抗値は、電極が金属で
あるときの抵抗値の10倍以上の大きさである。このた
め、接続部での電圧降下が大きくなり、それによってI
Cの誤動作等が発生しやすくなる。
When the electrode is made of metal, the resistance is low at the connection between the electrode of the circuit board and the protruding electrode of the electronic component, but there is a problem of poor adhesion. Therefore, disconnection or poor connection may occur at the connection portion. Also, the electrode is
When made of O, the adhesion of the connection portion is good, but there is a problem of high resistance. The resistance value at this time is ten times or more greater than the resistance value when the electrode is made of metal. This increases the voltage drop at the connection, which causes I
C malfunctions are more likely to occur.

本発明は上記課題を解決するためになされたものであり
、その目的とするところは、電子部品の突起電極と密着
性良く接続され、接続部の接続不良が発生せず、かつ、
その接続部の抵抗が低い回路基板の電極を提供すること
にある。
The present invention has been made to solve the above-mentioned problems, and its purpose is to connect with the protruding electrode of an electronic component with good adhesion, and to prevent a connection failure from occurring at the connection part.
An object of the present invention is to provide an electrode for a circuit board whose connection portion has low resistance.

(課題を解決するための手段) 本発明は、電子部品の突起電極が導電性接着剤を介して
#MII!される回路基板の電極であって、該電極は第
一の材料からなる第一の部分と第二の材料からなる第二
の部分とを有しており、該第一の材料は導電性を有して
おり、該第一の材料の抵抗は該第二の材料の抵抗よりも
小さく、該第二の材料の該突起電極に対する密着性は該
第一の材料の該突起電極に対する密着性よりも高く、そ
のことにより上記目的が達成される。
(Means for Solving the Problems) The present invention provides #MII! protruding electrodes of electronic components via a conductive adhesive. an electrode for a circuit board, the electrode having a first portion made of a first material and a second portion made of a second material, the first material being electrically conductive; The resistance of the first material is lower than the resistance of the second material, and the adhesion of the second material to the protruding electrode is greater than the adhesion of the first material to the protruding electrode. is also high, thereby achieving the above objective.

また、前記第一の材料はMoであることが好ましい。Moreover, it is preferable that the first material is Mo.

また、前記第二の材料はITOであることが好ましい。Further, it is preferable that the second material is ITO.

(実施例) 以下に本発明を実施例について説明する第1図は実施例
の要部を示す斜視図である。回路基板(不図示)上の配
線40の端部に於て、配線40とIC等の電子部品の突
起電極とを接続するための電極lOが設けられている。
(Example) The present invention will be described below with reference to an example. FIG. 1 is a perspective view showing the main parts of the example. At the end of the wiring 40 on the circuit board (not shown), an electrode 1O is provided for connecting the wiring 40 and a protruding electrode of an electronic component such as an IC.

なお、第1図に示す電極10と同様の構造を有する複数
の電極が、回路基板上に形成された所定パターンを有す
る配線40の所定位置に設けられている。
Note that a plurality of electrodes having a structure similar to the electrode 10 shown in FIG. 1 are provided at predetermined positions of the wiring 40 having a predetermined pattern formed on the circuit board.

電極10は、導電性の高い第一の材料からなる第一の部
分と密着性の高い第二の材料からなる第二の部分とを有
している。第一の部分は低抵抗部20であり、第二の部
分は低抵抗部20上に形成された密着部30である。低
抵抗部20は電子部品の突起ii極と電極10との間を
低抵抗で電気的に接続するための部分であり、密着部3
0の材料よりも抵抗の低い材料によって形成されている
The electrode 10 has a first portion made of a first material with high conductivity and a second portion made of a second material with high adhesiveness. The first part is the low resistance part 20, and the second part is the contact part 30 formed on the low resistance part 20. The low resistance part 20 is a part for electrically connecting the protrusion II pole of the electronic component and the electrode 10 with low resistance, and the contact part 3
It is made of a material with lower resistance than the material of 0.

抵抗の低い第一の材料として、例えば、Mo1T五等の
金属は好適である。一方、密着部30は電子部品の突起
電極と電極10との間を密着性良く接続するための部分
であり、低抵抗部20よりも密着性の良い材料によって
形成されている。密着性の良い第二の材料として、例え
ば、fToが好適である。本実施例の密着部30の平面
視形状は、第1図に示すように、ストライブ状である。
For example, a metal such as Mo1T5 is suitable as the first material with low resistance. On the other hand, the contact portion 30 is a portion for connecting the protruding electrode of the electronic component and the electrode 10 with good adhesion, and is formed of a material with better adhesion than the low resistance portion 20. For example, fTo is suitable as the second material with good adhesion. The shape of the contact portion 30 in this embodiment in plan view is striped, as shown in FIG.

次に、本実施例の作製方法について第2図を用いて説明
する。まず、回路基板となるガラス製絶縁基板1上に、
第一の材料としてMoをスパッタリング法により堆積し
、Mo膜(膜厚的300OA)2を形成した(第2図(
a))。
Next, the manufacturing method of this example will be explained using FIG. 2. First, on a glass insulating substrate 1 that will become a circuit board,
Mo was deposited as the first material by sputtering to form a Mo film (300 OA in film thickness) 2 (see Fig. 2).
a)).

次に、Mo膜膜上上7オトレジスト3をスピンコードに
より塗布し、所定温度に加熱してフォトレジスト3を硬
化させた後、フォトレジスト3の所定領域を露光し、現
像することによりフォトレジスト3を所定形状にバター
ニングした(第2図(b))。このフォトレジスト3の
パターンは、Mo膜2からなる配線40及び低抵抗部2
oのパターンを決めるものであり、回路基板の用途に応
じて設計される。
Next, an upper photoresist 3 is applied on the Mo film using a spin code, heated to a predetermined temperature to harden the photoresist 3, and then a predetermined area of the photoresist 3 is exposed and developed. was patterned into a predetermined shape (Fig. 2(b)). The pattern of this photoresist 3 includes wiring 40 made of Mo film 2 and low resistance part 2.
This determines the pattern of the circuit board, and is designed according to the purpose of the circuit board.

フォト1/シスト3を再び加熱硬化させた後、バターニ
ングされたフォトレジスト3をマスクとしてMo膜2を
エツチングすることにより、Mo膜2をバターニングし
、配線4oと電極IQの低抵抗部20とを形成したく第
2図(C))。この後、フォトレジスト3を除去した。
After heating and hardening the photo 1/cyst 3 again, the Mo film 2 is etched using the buttered photoresist 3 as a mask, thereby buttering the Mo film 2 and forming the low resistance part 20 of the wiring 4o and the electrode IQ. Figure 2 (C)). After this, the photoresist 3 was removed.

次に、絶縁基板1上全面に、第二の材料としてITOを
スパッタリング法により堆積し、ITO膜(膜厚約20
00大)4を形成した(第2図(d))。
Next, ITO is deposited as a second material on the entire surface of the insulating substrate 1 by a sputtering method, and an ITO film (film thickness of about 20
00 large) 4 was formed (Fig. 2(d)).

170M44上にフォトレジスト5をスピンコードによ
り塗布し、所定温度に加熱してフォトレジスト5を硬化
させた後、フォト1/シスト5の所定領域部分を露光し
、現像することによりフォトレジスト5を所定形状にバ
ターニングした(第2図(e))。このフォトレジスト
5のパターンは、ITO膜4からなる密着部30のパタ
ーンを決めるものであり、本実施例では、低抵抗部20
上にストライブ状に形成された。
A photoresist 5 is applied onto the 170M44 using a spin code, heated to a predetermined temperature to harden the photoresist 5, and then a predetermined area of the photo 1/cyst 5 is exposed and developed to form the photoresist 5 into a predetermined shape. It was patterned into a shape (Fig. 2(e)). The pattern of this photoresist 5 determines the pattern of the close contact part 30 made of the ITO film 4, and in this embodiment, the pattern of the low resistance part 20 is
Formed in stripes on top.

フォトレジスト5を再び加熱硬化させた後、パターニン
グされたフォトレジストSをマスクとして、ITO膜4
をエツチングすることにより、ITo膜4をパターニン
グし、電極10の密着部30を形成した(第2図(f)
)。この後、フォトレジスト5を除去し、本実施例の回
路基板を作製した。
After heating and hardening the photoresist 5 again, using the patterned photoresist S as a mask, the ITO film 4 is
The ITo film 4 was patterned by etching to form the contact portion 30 of the electrode 10 (FIG. 2(f)).
). Thereafter, the photoresist 5 was removed, and the circuit board of this example was manufactured.

回路基板上には、突起電極を有するIC等の各f!電子
部品が搭載される。電子部品の突起電極と電極10とは
導電性接着剤によって接続される。
On the circuit board, each f! Equipped with electronic components. The protruding electrode of the electronic component and the electrode 10 are connected using a conductive adhesive.

電子部品の突起電極と電極10との間の密着性はストラ
イブ状の密着部30によって向上する。また、電子部品
の動作時に於て、電流は密着部30が形成されていない
領域の低抵抗部20を主に流れるため、突起電極と電極
10との間の接続抵抗は低い。
The adhesion between the protruding electrode of the electronic component and the electrode 10 is improved by the striped adhesion portion 30. Further, during operation of the electronic component, current mainly flows through the low resistance portion 20 in the area where the contact portion 30 is not formed, so the connection resistance between the protruding electrode and the electrode 10 is low.

このように本実施例によれば、回路基板の電極10と電
子部品の突起電極とが密着性良く接続され、かつ、その
接続部の抵抗は低抵抗である。従って、接続部の断線又
は接続不良が発生することがないことに加えて、接続部
の抵抗が低いため、接続部での電圧降下によるICの誤
動作等が防止される。
As described above, according to this embodiment, the electrode 10 of the circuit board and the protruding electrode of the electronic component are connected with good adhesion, and the resistance of the connection portion is low. Therefore, in addition to preventing disconnection or poor connection at the connection portion, the resistance of the connection portion is low, thereby preventing malfunction of the IC due to a voltage drop at the connection portion.

密着部30の形状は、上記実施例のストライブ状に限ら
れない。電極10の表面に於て電子部品の突起電極が接
着される面に、低抵抗部20と密着部30とが実質的に
交互に配された形状であれば、優れた密着性と低い接続
抵抗を実現できる。
The shape of the close contact portion 30 is not limited to the striped shape of the above embodiment. If the surface of the electrode 10 to which the protruding electrode of the electronic component is bonded has a shape in which the low resistance portions 20 and the contact portions 30 are substantially alternately arranged, excellent adhesion and low connection resistance can be achieved. can be realized.

第3図に示す同心円状、或は第4図に示す市松模様状の
形状は、密着部30の形状として好適である。
The concentric circle shape shown in FIG. 3 or the checkered pattern shape shown in FIG. 4 is suitable as the shape of the contact portion 30.

また、上記の何れの実施例も、Moからなる低抵抗部2
0上にITOからなる密着部3oが形成されたものであ
るが、第5図に示すように、絶縁基板1上のITOから
なる密着部30上にMoからなる低抵抗部20が形成さ
れたものであっても良い。この低抵抗部20の形状は、
電極10の表面に於て電子部品の突起電極が接着される
面に、低抵抗部20と密着部30とが実質的に交互に配
された形状であれば良い。低抵抗部20の形状としては
、第1図、第3図又は第4図に示す実施例の密着部30
と同様の形状が好適である。第5図に示す実施例では、
配線40は低抵抗部20と同じ材料(Mo)を用いて低
抵抗部20と一体的に形成されている。
In addition, in any of the above embodiments, the low resistance part 2 made of Mo
As shown in FIG. It may be something. The shape of this low resistance part 20 is
Any shape may be used as long as the low resistance portions 20 and the contact portions 30 are substantially alternately arranged on the surface of the electrode 10 to which the protruding electrodes of the electronic component are bonded. The shape of the low resistance part 20 is the contact part 30 of the embodiment shown in FIG. 1, FIG. 3, or FIG.
A similar shape is suitable. In the embodiment shown in FIG.
The wiring 40 is formed integrally with the low resistance section 20 using the same material (Mo) as the low resistance section 20.

第6図に示す実施例は、ITOからなる密着部30上に
Moからなる低抵抗部20が形成されたものである。配
線40はITOを用いて密着部30と一体的に形成され
ている。配線40はITOからなるため、Moからなる
他の実施例の配線よりも高抵抗である。
In the embodiment shown in FIG. 6, a low resistance part 20 made of Mo is formed on a close contact part 30 made of ITO. The wiring 40 is formed integrally with the contact portion 30 using ITO. Since the wiring 40 is made of ITO, it has a higher resistance than the wiring of other embodiments made of Mo.

第7図に示す実施例は、低抵抗部20と同じ材料(Mo
)からなる配線40が、ITOからなる密着部30上に
低抵抗部20と同時に形成されたものである。配[40
は低抵抗部20と異なる材料を用いて低抵抗部20と別
々に形成されたものであっても良い。配線40は密着部
30を介して絶縁基板1に接着されているため、配線4
0と絶縁基板1との密着性は高い。
The embodiment shown in FIG. 7 is made of the same material as the low resistance part 20 (Mo
) is formed simultaneously with the low resistance part 20 on the adhesive part 30 made of ITO. Distribution [40
may be formed separately from the low resistance part 20 using a different material from the low resistance part 20. Since the wiring 40 is bonded to the insulating substrate 1 via the adhesive part 30, the wiring 40
The adhesion between 0 and the insulating substrate 1 is high.

なお、上記何れの実施例に於ても、MoO20びI T
O4膜はスパッタリング法によって形成されたものであ
るが、他の方法、例えば、電子ビーム蒸着法を用いて形
成されたものであっても良い。
In addition, in any of the above examples, MoO20 and IT
Although the O4 film is formed by sputtering, it may be formed by other methods, such as electron beam evaporation.

また、電極10は、第一の材料からなる第一の部分と第
二の材料からなる第二の部分以外に、他の材料からなる
一つ以上の部分を有していても良い。この他の材料が導
電性の高いものであれば、この部分は低抵抗部20と同
様に機能する。また、この他の材料が密着性の高いもの
であれば、この部分は密着部30と同様に機能する。
Moreover, the electrode 10 may have one or more parts made of another material in addition to the first part made of the first material and the second part made of the second material. If the other material is highly conductive, this portion functions similarly to the low resistance portion 20. Further, if the other material has high adhesion, this portion functions similarly to the adhesion portion 30.

(発明の効果) このように本発明によれば、IC等の電子部品の突起電
極と回路基板の電極とが密着性良く接続されるので、接
続部での接続不良が発生することがない。また、該接続
部の抵抗は低抵抗であるので、該接続部での電圧降下に
よる【Cの誤動作等が防止される。
(Effects of the Invention) As described above, according to the present invention, the protruding electrodes of an electronic component such as an IC and the electrodes of a circuit board are connected with good adhesion, so that no connection failure occurs at the connection portion. Further, since the resistance of the connection portion is low, malfunction of [C due to voltage drop at the connection portion, etc.] is prevented.

4     の   な  1 第1図は本発明の実施例を示す斜視図、第2図(a)〜
(f)はその実施例の作製方法を説明するための断面図
、第3図は他の実施例を示す平面図、第4図は更に他の
実施例を示す平面図、第5図は更に他の実施例を示す断
面図、第6図は更に他の実施例を示す断面図、第7図は
更に他の実施例を示す断面図である。
4 No. 1 Fig. 1 is a perspective view showing an embodiment of the present invention, Fig. 2(a) -
(f) is a cross-sectional view for explaining the manufacturing method of the example, FIG. 3 is a plan view showing another example, FIG. 4 is a plan view showing still another example, and FIG. FIG. 6 is a sectional view showing still another embodiment, and FIG. 7 is a sectional view showing still another embodiment.

l・・・絶縁基板、2・・・Mo膜、3・・・フォトレ
ジスト、4・・・ITO膜、5””フォトレジスト、1
0・・・電極、20・・・低抵抗部、30・・・密着部
、40・・・配線。
1... Insulating substrate, 2... Mo film, 3... Photoresist, 4... ITO film, 5"" photoresist, 1
0... Electrode, 20... Low resistance part, 30... Close contact part, 40... Wiring.

以上that's all

Claims (3)

【特許請求の範囲】[Claims] 1.電子部品の突起電極が導電性接着剤を介して接続さ
れる回路基板の電極であって、 該電極は第一の材料からなる第一の部分と第二の材料か
らなる第二の部分とを有しており、該第一の材料は導電
性を有しており、該第一の材料の抵抗は該第二の材料の
抵抗よりも小さく、該第二の材料の該突起電極に対する
密着性は該第一の材料の該突起電極に対する密着性より
も高い、 回路基板の電極。
1. An electrode of a circuit board to which a protruding electrode of an electronic component is connected via a conductive adhesive, the electrode comprising a first part made of a first material and a second part made of a second material. The first material has conductivity, the resistance of the first material is smaller than the resistance of the second material, and the second material has good adhesion to the protruding electrode. is an electrode of a circuit board, the adhesion of which is higher than that of the first material to the protruding electrode.
2.前記第一の材料はMoである請求項1に記載の回路
基板の電極。
2. The circuit board electrode according to claim 1, wherein the first material is Mo.
3.前記第二の材料はITOである請求項1又は2に記
載の回路基板の電極。
3. The electrode for a circuit board according to claim 1 or 2, wherein the second material is ITO.
JP1283863A 1989-10-30 1989-10-30 Electrode of circuit board Pending JPH03145191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1283863A JPH03145191A (en) 1989-10-30 1989-10-30 Electrode of circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1283863A JPH03145191A (en) 1989-10-30 1989-10-30 Electrode of circuit board

Publications (1)

Publication Number Publication Date
JPH03145191A true JPH03145191A (en) 1991-06-20

Family

ID=17671151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1283863A Pending JPH03145191A (en) 1989-10-30 1989-10-30 Electrode of circuit board

Country Status (1)

Country Link
JP (1) JPH03145191A (en)

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