JPH031533U - - Google Patents
Info
- Publication number
- JPH031533U JPH031533U JP5998889U JP5998889U JPH031533U JP H031533 U JPH031533 U JP H031533U JP 5998889 U JP5998889 U JP 5998889U JP 5998889 U JP5998889 U JP 5998889U JP H031533 U JPH031533 U JP H031533U
- Authority
- JP
- Japan
- Prior art keywords
- active layer
- semiconductor device
- substrate
- layer
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
Landscapes
- Junction Field-Effect Transistors (AREA)
Description
第１図ａないしｇは本考案の半導体装置を製作
するための製造工程図、第２図は、上記半導体装
置に用いられる半導体基板の平面図、第３図は従
来のこの種の半導体装置の構造断面図である。
１０……半導体基板、１１……半絶縁性ＧａＡ
ｓ基板、１２……ｐ型バツフア層、１３……ｎ型
能動層、１４……ｐ型層。
1A to 1G are manufacturing process diagrams for manufacturing the semiconductor device of the present invention, FIG. 2 is a plan view of a semiconductor substrate used in the above semiconductor device, and FIG. 3 is a diagram of a conventional semiconductor device of this type. It is a structural sectional view. 10... Semiconductor substrate, 11... Semi-insulating GaA
s substrate, 12... p-type buffer layer, 13... n-type active layer, 14... p-type layer.
Claims (1)
おいて、前記基板と能動層との間に、当該能動層
とは反対導電型で、かつ、相対的に低濃度の厚さ
の薄いバツフア層を形成したことを特徴とする半
導体装置。 In a semiconductor device having an active layer on a semi-insulating substrate, a thin buffer layer having a conductivity type opposite to that of the active layer and having a relatively low concentration is formed between the substrate and the active layer. A semiconductor device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5998889U JPH031533U (en) | 1989-05-24 | 1989-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5998889U JPH031533U (en) | 1989-05-24 | 1989-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031533U true JPH031533U (en) | 1991-01-09 |
Family
ID=31586976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5998889U Pending JPH031533U (en) | 1989-05-24 | 1989-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031533U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008001222A (en) * | 2006-06-22 | 2008-01-10 | Superstar:Kk | Wheel, air valve and transfer method of pneumatic sensor |
| JP2008522894A (en) * | 2004-12-08 | 2008-07-03 | サンドビク マイニング アンド コンストラクション オサケ ユキチュア | Method and apparatus for improving safety in wheel handling |
-
1989
- 1989-05-24 JP JP5998889U patent/JPH031533U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008522894A (en) * | 2004-12-08 | 2008-07-03 | サンドビク マイニング アンド コンストラクション オサケ ユキチュア | Method and apparatus for improving safety in wheel handling |
| JP2008001222A (en) * | 2006-06-22 | 2008-01-10 | Superstar:Kk | Wheel, air valve and transfer method of pneumatic sensor |