JPH03159109A - Porcelain capacitor and its manufacture - Google Patents
Porcelain capacitor and its manufactureInfo
- Publication number
- JPH03159109A JPH03159109A JP1298137A JP29813789A JPH03159109A JP H03159109 A JPH03159109 A JP H03159109A JP 1298137 A JP1298137 A JP 1298137A JP 29813789 A JP29813789 A JP 29813789A JP H03159109 A JPH03159109 A JP H03159109A
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- mol
- sio
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- Ceramic Capacitors (AREA)
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Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、誘電体磁器と少なくとも2つの電極とから成
る単層又は積層JiR造の磁器コンデンサ及びその製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a single-layer or laminated JiR ceramic capacitor comprising a dielectric ceramic and at least two electrodes, and a method for manufacturing the same.
[従来の技術]
従来、積層磁器コンデンサを製造する際には、誘電体磁
器原料粉末から成るグリーンシート(未焼結磁器シート
)に白金又はパラジウム等の貴金属の導電性ペーストを
所望パターンに印刷し、これを複数枚積み重ねて圧着し
、1300℃〜1600℃の酸化性雰囲気中で焼結させ
た。これにより、誘電体磁器と内部電極とが同時に得ら
れる。[Prior Art] Conventionally, when manufacturing multilayer ceramic capacitors, a conductive paste of noble metal such as platinum or palladium is printed in a desired pattern on a green sheet (unsintered ceramic sheet) made of dielectric ceramic raw material powder. A plurality of these sheets were stacked and pressed together, and sintered in an oxidizing atmosphere at 1300°C to 1600°C. Thereby, the dielectric ceramic and the internal electrode can be obtained at the same time.
上述の如く、貴金属を使用すれば、酸化性雰囲気中で高
温で焼結させても目的とする内部電極を得ることができ
る。しかし、白金、パラジウム等の貴金属は高価である
ため、必然的に積層磁器コンデンサがコスト高になった
。As mentioned above, if a noble metal is used, the intended internal electrode can be obtained even if it is sintered at high temperature in an oxidizing atmosphere. However, since precious metals such as platinum and palladium are expensive, the cost of multilayer ceramic capacitors has inevitably increased.
上述の問題を解決することができるものとして、本件出
願人に係わる特公昭61−14607号公報には、
(Bak−xM8)OkTiO2(但し、MはMg及び
Znの内の少なくとも1種)から成る基本成分と、L
l 20とSiO2とから成る添加成分とを含む誘電体
磁器組成物が開示されている。As a solution to the above-mentioned problem, Japanese Patent Publication No. 14607/1987, filed by the applicant, discloses (Bak-xM8) consisting of OkTiO2 (where M is at least one of Mg and Zn). Basic ingredients and L
A dielectric porcelain composition is disclosed that includes an additive component consisting of 120 and SiO2.
また、特公昭61−14608号公報には、上記の特公
昭61−14607号公報のL i20とS 102の
代りに、L l 20と3102とMO(但し、MOは
BaO1CaO及びSrOの内の少なくとも1種)とか
ら成る添加成分とを含む誘電体磁器組成物が開示されて
いる。In addition, in Japanese Patent Publication No. 61-14608, instead of Li20 and S 102 in the above-mentioned Japanese Patent Publication No. 61-14607, L l 20, 3102, and MO (however, MO is at least one of BaO, CaO, and SrO) are used. A dielectric ceramic composition containing an additive component consisting of (1) is disclosed.
また、特公昭61−14609号公報には、(B a
h−x−y MX L y ) o w T t 02
(但し、MはMg及びZnの少なくとも1種、Lは
Sr及びCaの内の少なくとも1種)から成る基本成分
とL l 20とS iO2とから成る添加成分とを含
む誘電体磁器組成物が開示されている。In addition, in Japanese Patent Publication No. 14609/1983, (B a
h-x-y MX L y ) o w T t 02
(However, M is at least one of Mg and Zn, L is at least one of Sr and Ca) and an additive component consisting of L l 20 and SiO2. Disclosed.
また、特公昭61−14610号公報には、上記の特公
昭61−14609号公報におけるLi2Oと5102
の代りに、L l 20とS t O2とMO(但し、
MOはBad、CaO及びSrOの内の少なくとも1種
)とから成る添加成分を含む誘電体磁器組成物が開示さ
れている。Moreover, in Japanese Patent Publication No. 14610/1982, Li2O and 5102
Instead of L l 20, S t O2 and MO (however,
A dielectric ceramic composition containing an additive component consisting of MO (at least one of Bad, CaO, and SrO) is disclosed.
また、特公昭61−14611号公報には、(B a
M ) OT i 02 (但し、MはMg、
ト×χk
Zn、Sr及びCaの少なくとも1種)から成る基本成
分と、B2O3とSiO□とから成る添加成分とを含む
誘電体磁器組成物が開示されている。In addition, in Japanese Patent Publication No. 14611/1983, (B a
M) OT i 02 (However, M is Mg,
A dielectric ceramic composition is disclosed that includes a basic component consisting of (at least one of Zn, Sr, and Ca) and additive components consisting of B2O3 and SiO□.
また、特公昭62−1595号公報には、(Ba
M ) OTiO2(但し、MはMg、Z−XXk
n、Sr及びCaの内の少なくとも1種)から成る基本
成分と、B2O3とMO(fjfiしMOはBaO1M
g05ZnO,SrO及びCaOの少なくとも1種)と
から成る添加成分とを含む誘電体磁器組成物が開示され
ている。In addition, in Japanese Patent Publication No. 1595/1983, (Ba
M) A basic component consisting of OTiO2 (where M is at least one of Mg, Z-XXkn, Sr, and Ca), and B2O3 and MO (fjfi and MO is BaO1M).
A dielectric ceramic composition containing an additive component consisting of at least one of g05ZnO, SrO, and CaO is disclosed.
また、特公昭62−1596号公報には、上記の特公昭
62−1595号公報の8203とMOの代りに、BO
とS t O2とMO(但しMO3
はBad、MgO,ZnO,SrO及びCaOの内の少
なくとも1種)とから成る添加成分とを含む誘電体磁器
組成物が開示されている。In addition, in Japanese Patent Publication No. 1596-1986, BO
A dielectric ceramic composition is disclosed that includes an additive component consisting of S t O2 and MO (where MO3 is at least one of Bad, MgO, ZnO, SrO, and CaO).
これらに開示されている誘電体磁器組成物は、還元性雰
囲気1200℃以下の条件の焼成で得ることができ、比
誘電率が2000以上、静電容量の温度変化率が一25
℃〜+85℃で±10%の範囲にすることができるもの
である。The dielectric ceramic composition disclosed in these documents can be obtained by firing in a reducing atmosphere at 1200°C or lower, has a relative dielectric constant of 2000 or more, and has a temperature change rate of capacitance of 125.
It can be adjusted within a range of ±10% from °C to +85 °C.
[発明が解決しようとする課題]
ところで、近年の電子回路の高密度化に伴い、積層コン
デンサの小型化の要求が非常に強く、これに対応する為
に、温度変化率を悪化させることなく誘電体の比誘電率
を、上記各公報に開示されている誘電体磁器組成物の比
誘電率よりも更に増大させることが望まれている。[Problem to be solved by the invention] Incidentally, with the recent increase in the density of electronic circuits, there is a strong demand for miniaturization of multilayer capacitors. It is desired to further increase the relative permittivity of the body over the relative permittivity of the dielectric ceramic compositions disclosed in the above-mentioned publications.
そこで、本発明の目的は、非酸化性雰囲気、1200℃
以下の温度での焼成で得るものであるにも拘らず、高い
誘電率を有し、且つ広い温度範囲にわたって誘電率の温
度変化率が小さい誘電体磁器を備えている磁器コンデン
サ及びその製造方法を提供することにある。Therefore, the purpose of the present invention is to use a non-oxidizing atmosphere at 1200°C.
A ceramic capacitor equipped with a dielectric ceramic having a high dielectric constant and a small rate of change in dielectric constant over a wide temperature range, even though it is obtained by firing at the following temperatures, and a method for manufacturing the same. It is about providing.
[課題を解決するための手段]
上記目的を達成するための本発明は、誘電体磁器と、前
記磁器に接触している少なくとも2つの電極とから成る
磁器コンデンサにおいて、前記磁器が100.0重量部
の基本成分と、0.01〜3.00重量部の第1の添加
成分と、0.2〜5゜0重量部の第2の添加成分とから
成り、前記基本成分が、(Ba M L )
OTiO2に−x−yxyk
(但し、MはMg、Znの内の少なくとも1種の金属、
1、はCa、Sr、の内の少なくとも1種の金属、k、
x、yは、
1.00≦k≦1.05
0<x<0.10
0<y≦0.05
0.01≦x+y≦0.10を満足する数値)であり、
前記第1の添加成分がCr2O3とAl2O3の内の少
なくとも1種の金属酸化物であり、前記第2の添加成分
がLi OとS t 02とMO(但し、MOはBa
O1SrO,Cab、MgO及びZnOの内の少なくと
も1種の金属酸化物)から成り、且つ前記L 120と
前記SiO□と前MgO及びZnOの組成範囲がこれ等
の組成をモル%で示す三角図における前記L l 20
が1モル%、前記S 102が80モル%、前記MOが
19モル%の点(A)と、前記し120が1モル%、前
記SiO2が39モル%、前記MOが60モル%の点(
B)と、前記し120が30モル%、前記5t02が3
0モル%、前記MOが40モル%の点(C)と、前記L
120が50モル%、前記SiO2が50モル%、前
記MOが0モル%の点(D)と、前記Li2oが20モ
ル%、前記S t 02が80モル%、前記MOが0モ
ル%の点(E)とを順に結ぶ5本の直線で囲まれた領域
内のものであるコンデンサに係わるものである。なお、
基本成分を示す組成式において、k−x、x、には勿論
それぞれの元素の原子数を示し、Baはバリウム、0は
酸素、Tiはチタン、Mgはマグネシウム、Znは亜鉛
である。第1の添加成分のCr 203は酸化クロム、
Al2O3は酸化アルミニウムである。第2の添加成分
におけるLi2Oは酸化リチウム、S I O2は酸化
けい素、BaOは酸化バリウム、SrOは酸化ストロン
チウム、CaOは酸化カルシウム、MgOは酸化マグネ
シウム、ZnOは酸化亜鉛である。[Means for Solving the Problems] To achieve the above object, the present invention provides a ceramic capacitor comprising a dielectric ceramic and at least two electrodes in contact with the ceramic, in which the ceramic has a weight of 100.0 parts of the basic component, 0.01 to 3.00 parts by weight of the first additive component, and 0.2 to 5.0 parts by weight of the second additive component, and the basic component is (Ba M L)
-x-yxyk to OTiO2 (However, M is at least one metal of Mg and Zn,
1, at least one metal selected from Ca, Sr, k,
x, y are numerical values that satisfy the following: 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10),
The first additive component is at least one metal oxide of Cr2O3 and Al2O3, and the second additive component is LiO, S t 02 and MO (however, MO is Ba
The composition range of L120, SiO□, MgO and ZnO is as shown in the triangular diagram showing these compositions in mol%. Said L l 20
A point (A) where S102 is 1 mol%, S102 is 80 mol%, and MO is 19 mol%, and point (A) where 120 is 1 mol%, SiO2 is 39 mol%, and MO is 60 mol%.
B), the above 120 is 30 mol%, and the above 5t02 is 3
0 mol%, the point (C) where the MO is 40 mol%, and the point (C) where the MO is 40 mol%, and the point (C) where the MO is 40 mol%
A point (D) where 120 is 50 mol%, the SiO2 is 50 mol%, and the MO is 0 mol%, and the Li2o is 20 mol%, the S t 02 is 80 mol%, and the MO is 0 mol%. This relates to a capacitor within the area surrounded by five straight lines connecting (E) in sequence. In addition,
In the composition formula showing the basic components, k-x and x of course indicate the number of atoms of each element, Ba is barium, 0 is oxygen, Ti is titanium, Mg is magnesium, and Zn is zinc. The first additive component Cr 203 is chromium oxide,
Al2O3 is aluminum oxide. In the second additive component, Li2O is lithium oxide, S I O2 is silicon oxide, BaO is barium oxide, SrO is strontium oxide, CaO is calcium oxide, MgO is magnesium oxide, and ZnO is zinc oxide.
製造方法に係わる発明は、上記の基本成分と第1及び第
2の添加成分との混合物を用意する工程と、少なくと#
、、2つの電極部分を有する前記混合物の成形物を作る
工程と、前記電極部分を有する前記成形物を非酸化性雰
囲気で焼成する工程と、前記焼成で得られた成形物を酸
化性雰囲気で熱処理する工程とを含む磁器コンデンサの
製造方法に係わるものである。The invention related to the manufacturing method includes a step of preparing a mixture of the above-mentioned basic component and first and second additive components, and at least #
, a step of making a molded product of the mixture having two electrode parts, a step of firing the molded product having the electrode part in a non-oxidizing atmosphere, and a step of baking the molded product obtained by the firing in an oxidizing atmosphere. The present invention relates to a method of manufacturing a ceramic capacitor including a step of heat treatment.
[作用効果]
上記発明の磁器コンデンサにおける誘電体磁器を非酸化
性雰囲気、1200°C以下の焼成で得ることができる
。従って、ニッケル等の卑金属の導電性ペーストをグリ
ーンシートに塗布し、グリーンシートと導電性ペースト
とを同時に焼成する方法によって磁器コンデンサを製造
することが可能になる。誘電体磁器の組成を本発明で特
定された範囲にすることによって、比誘電率が3000
以上、誘電体損失tanとが2.5%以下、抵抗率ρか
lX106MO・C+a以上であり、且つ比誘電率の温
度変化率が一55℃〜125℃で一15%〜+15%(
25℃を基準)、−25℃〜85℃で一10%〜+10
%(20°Cを基準)の範囲に収まる誘電体磁器を備え
たコンデンサを提供することができる。[Operation and Effect] The dielectric ceramic in the ceramic capacitor of the above invention can be obtained by firing in a non-oxidizing atmosphere at 1200°C or less. Therefore, it becomes possible to manufacture a ceramic capacitor by applying a conductive paste of a base metal such as nickel to a green sheet and firing the green sheet and the conductive paste simultaneously. By setting the composition of the dielectric ceramic within the range specified in the present invention, the dielectric constant can be increased to 3000.
As mentioned above, the dielectric loss tan is 2.5% or less, the resistivity ρ is more than lX106MO・C+a, and the temperature change rate of the dielectric constant is -15% to +15% at -155°C to 125°C (
(based on 25℃), -10% to +10 at -25℃ to 85℃
% (based on 20° C.) can be provided.
[実施例]
次に、本発明に従う実施例及び比牧例について説明する
。[Examples] Next, examples and examples according to the present invention will be described.
まず、本発明に従う基本成分の組成式
4式%
試料No、 1のx、y、にの欄に示す割合で得るため
、換言すれば、(BaML)OT
O,960,040,021,02
102、更に詳細には、MO,04= Mg O,03
ZnO。First, in order to obtain the composition formula 4 of the basic component according to the present invention in the proportions shown in the x, y, columns of Sample No. 1, in other words, (BaML) OT O,960,040,021,02 102 , more specifically, MO,04=MgO,03
ZnO.
ol及びL =Ca Sr であるので、
0.02 0.01 0.01(Ba
Mg Zn Ca Sr
)0.96 0.03 0.01 0.
01 0.0101、02T l 02を得るため
に、純度99,0%以上のB a CO3(炭酸バリウ
ム)、Mg0(酸化マグネシウム)、Zn0(酸化亜鉛
)、CaC03(炭酸カルシウム)SrCO3(炭酸ス
トロンチウム及びTlO2(酸化チタン)を用意し、不
純物を目方に入れないで
BaC0:1037.72g(0,96モル部相当)
MgO: 6.62g (0,03モル部相当)ZnO
:4.46g (0,01モル部相当)CaCO:5.
48g(0,01モル部相当)S r Co 3 :
8.09 g < 0 、01モル部相当)TiOz
: 437.63g (1,00モル部相当ンを秤量し
な。Since ol and L = Ca Sr,
0.02 0.01 0.01 (Ba
Mg Zn Ca Sr
)0.96 0.03 0.01 0.
01 0.0101, 02T l 02, B a CO3 (barium carbonate), Mg0 (magnesium oxide), Zn0 (zinc oxide), CaC03 (calcium carbonate), SrCO3 (strontium carbonate and Prepare TlO2 (titanium oxide) and prepare without adding impurities: BaC0: 1037.72g (equivalent to 0.96 mol part) MgO: 6.62g (equivalent to 0.03 mol part) ZnO
:4.46g (equivalent to 0.01 mole part)CaCO:5.
48g (equivalent to 0.01 mole part) S r Co 3 :
8.09 g < 0, equivalent to 01 mole part) TiOz
: 437.63 g (Weigh out the equivalent of 1,00 mole parts.)
次に、秤量されたこれ等の原料をボヅトミル(pot
m1ll)に入れ、更にアルミナボールと水2゜5Jと
を入れ、15時時間式攪拌した後、撹拌物をステンレス
ポットに入れて熱風式乾燥器で150℃、4時間乾燥し
た0次にこの乾燥物を粗粉砕し、この粗粉砕物をトンネ
ル炉にて大気中で1200℃、2時間仮焼し、上記組成
式の基本成分を得た。Next, these weighed raw materials are placed in a pot mill.
After adding the alumina balls and 2.5 J of water and stirring for 15 hours, the stirred material was placed in a stainless steel pot and dried at 150°C for 4 hours in a hot air dryer. The material was coarsely pulverized, and the coarsely pulverized material was calcined in the atmosphere at 1200° C. for 2 hours in a tunnel furnace to obtain the basic components of the above compositional formula.
一方、第2表の試料Nα1の第2の添加成分を得るため
に、L i 20を0.43g (1モル部)と、S
iO2を68.76g (80モル部)と、BaCO3
を10.73g (3,8モル部)と、SrCO3を8
.03g (3,8モル部)と、CaCO3を5.44
g (3,8モル部)と、Mgoを2.19g (3,
8モル部)と、ZnOを4.42g (3,8モル部)
をそれぞれ秤量し、この混合物にアルコールを300C
C加え、ポリエチレンポットにてアルミナボールを用い
て10時間撹拌した後、大気中1000℃で2時間仮焼
成し、これを300ccの水と共にアルミナポットに入
れ、アルミナボールで15時間粉砕し、しかる後、15
0°Cで4時間乾燥させてL i20が1モル%、S
io 2が80モル%、MOが19モル%(Ba03.
8モル%±SrO3,8モル%十Ca03.8モル%+
Mgo 3.8モル%十ZnO3,8モル%)の組成
の第2の添加成分の粉末を得た。なお、MOの内容であ
るBaOとSrOとCaOとMgOとZnOとの割合は
第2表に示すようにいずれも20モル%となる。On the other hand, in order to obtain the second additive component of sample Nα1 in Table 2, 0.43 g (1 mole part) of L i 20 and S
68.76g (80 mol parts) of iO2 and BaCO3
10.73g (3.8 mol parts) of
.. 03g (3.8 mol parts) and 5.44g of CaCO3
g (3,8 mol parts) and 2.19 g (3,8 mol parts) of Mgo.
8 mol parts) and 4.42 g (3.8 mol parts) of ZnO
Weigh each and add alcohol to this mixture at 300C.
C was added and stirred for 10 hours using an alumina ball in a polyethylene pot, then pre-calcined in the air at 1000°C for 2 hours, put into an alumina pot with 300cc of water, pulverized with an alumina ball for 15 hours, and then , 15
After drying at 0°C for 4 hours, L i20 was 1 mol%, S
io2 is 80 mol%, MO is 19 mol% (Ba03.
8 mol%±SrO3, 8 mol% + Ca03.8 mol%+
A powder of a second additive component having a composition of 3.8 mol% Mgo and 8 mol% ZnO was obtained. Note that the proportions of BaO, SrO, CaO, MgO, and ZnO, which are the contents of MO, are all 20 mol% as shown in Table 2.
次に、100重量部(1000g>の基本成分に2重量
部(20g)の第2の添加成分を添加し、更に、第1の
添加成分として平均粒径が0.5ttmでよく粒の揃っ
た純度99.0%以上のCr 203を0.1重量部(
1g)添加し、更に、アクリル酸エステルポリマー、グ
リセリン、縮合リン酸塩の水溶液から成る有機バインダ
を基本成分と第1及び第2の添加成分との合計重量に対
して15重量%添加し、更に、50重量%の水を加え、
これ等をボールミルに入れて粉砕及び混合して磁器原料
のスラリーを作製した。Next, 2 parts by weight (20g) of the second additive component was added to 100 parts by weight (1000g>) of the basic component, and further, the particles were well-aligned with an average particle size of 0.5ttm as the first additive component. 0.1 part by weight of Cr 203 with a purity of 99.0% or more (
1 g), and further, 15% by weight of an organic binder consisting of an aqueous solution of acrylic ester polymer, glycerin, and condensed phosphate based on the total weight of the basic component and the first and second additive components, and , add 50% water by weight,
These were placed in a ball mill, pulverized and mixed to prepare a slurry of porcelain raw materials.
次に、上記スラリーを真空脱泡機に入れて脱泡し、この
スラリーをリバースロールコータに入れ、ここから得ら
れる薄膜成形物を長尺なポリエステルフィルム上に連続
して受は取ると共に、同フィルム上でこれを100℃に
加熱して乾燥させ、厚さ約25μmの未焼結磁器シート
を得た。このシートは長尺なものであるが、これを10
cn角の正方形に裁断して使用する。Next, the above slurry is degassed by putting it into a vacuum defoaming machine, and this slurry is put into a reverse roll coater, and the thin film molding obtained from this is continuously coated on a long polyester film, and the same This was dried on a film by heating to 100° C. to obtain an unsintered porcelain sheet with a thickness of about 25 μm. This sheet is long, but it can be divided into 10
Use by cutting into squares with cn angles.
一方、内部電極用の導電ペーストは、粒径平均1.5μ
mのニッケル粉末10gと、エチルセルロース0,9g
をブチルカルピトール9.1gに溶解させたものとを攪
拌機に入れ、10時間撹拌することにより得た。この導
電ペーストを長さ14011+、幅7關のパターンを5
0個有するスクリーンを介して上記未焼結磁器シートの
片側に印刷した後、これを乾燥させた。On the other hand, the conductive paste for internal electrodes has an average particle size of 1.5 μm.
10g of nickel powder and 0.9g of ethyl cellulose
was dissolved in 9.1 g of butylcarpitol and placed in a stirrer and stirred for 10 hours. Make 5 patterns of this conductive paste with a length of 14011+ and a width of 7
After printing on one side of the green porcelain sheet through a screen of 0.00, it was dried.
次に、上記印刷面を上にして未焼結磁器シートを2枚積
層した。この際、隣接する上下のシートにおいて、その
印刷面がパターンの長平方向に約半分程ずれるように配
置した。更に、この積層物の上下両面にそれぞれ4枚ず
つ厚さ60μmの未焼結磁器シートを積層した0次いで
、この積層物を約50℃の温度で厚さ方向に約40トン
の荷重を加えて圧着させた。しかる後、この積層物を格
子状に裁断し、50個の積層チップを得た。Next, two unsintered porcelain sheets were laminated with the printed surfaces facing up. At this time, the adjacent upper and lower sheets were arranged so that their printed surfaces were shifted by about half in the longitudinal direction of the pattern. Furthermore, four unsintered porcelain sheets with a thickness of 60 μm were laminated on each of the upper and lower surfaces of this laminate.Next, this laminate was subjected to a load of approximately 40 tons in the thickness direction at a temperature of approximately 50°C. It was crimped. Thereafter, this laminate was cut into a grid shape to obtain 50 laminate chips.
次に、この積層体を雰囲気焼成が可能な炉に入れ、大気
雰囲気中で100℃/hの速度で600℃まで昇温して
、有機バインダを燃焼させた。しかる後、炉の雰囲気を
大気からH2(2体積%)十N2 (98体積%)の雰
囲気に変えた。そして、炉を上述の如き還元性雰囲気と
した状態を保って、積層体加熱温度を600℃から焼結
温度の1150℃まで、100℃/hの速度で昇温して
1150℃(最高温度)を3時間保持した後、100℃
/hの速度で600℃まで降温し、雰囲気を大気雰囲気
(酸化性雰囲気)におきかえて、600℃を30分間保
持して酸化処理を行い、その後、室温まで冷却して積層
焼結体チップを作製した。Next, this laminate was placed in a furnace capable of firing in an atmosphere, and the temperature was raised to 600° C. at a rate of 100° C./h in an air atmosphere to burn the organic binder. Thereafter, the atmosphere in the furnace was changed from air to an atmosphere containing H2 (2% by volume) and N2 (98% by volume). Then, while maintaining the reducing atmosphere in the furnace as described above, the heating temperature of the laminate was increased from 600°C to the sintering temperature of 1150°C at a rate of 100°C/h to 1150°C (maximum temperature). After holding for 3 hours, 100℃
The temperature was lowered to 600°C at a rate of /h, the atmosphere was changed to air atmosphere (oxidizing atmosphere), 600°C was maintained for 30 minutes to carry out oxidation treatment, and then the laminated sintered chips were cooled to room temperature. Created.
次に、第1図に示す積層磁器コンデンサ10を得るため
に、3つの誘電体磁器層12と2つの内部電極14とか
ら成る積層焼結体チップ15に一対の外部電極16を形
成した。なお、外部電極16は、電極が露出する焼結体
チップ15の側面に亜鉛とガラスフリット(glass
frit)とビヒクル(vehicle)とから成
る導電性ペーストを塗布して乾燥し、これを大気中で5
50”Cの温度で15分間焼付け、亜鉛電極層18を形
成し、更にこの上に無電解メツキで法で銅層20を形成
し、更にこの上に電気メツキ法でpbSn半田層22を
設けたものから成る。Next, in order to obtain the multilayer ceramic capacitor 10 shown in FIG. 1, a pair of external electrodes 16 were formed on the multilayer sintered chip 15 consisting of three dielectric ceramic layers 12 and two internal electrodes 14. Note that the external electrode 16 is made of zinc and glass frit on the side surface of the sintered chip 15 where the electrode is exposed.
A conductive paste consisting of frit and vehicle is applied and dried, and then heated in the atmosphere for 50 minutes.
Baking was performed at a temperature of 50''C for 15 minutes to form a zinc electrode layer 18, on which a copper layer 20 was formed by electroless plating, and further on this a pbSn solder layer 22 was provided by electroplating. consists of things.
このコンデンサ10の誘電体磁器層12の厚さは0.0
2m、一対の内部電極14の対向面積は5 tan X
S■=25m2である。なお、焼結後の磁器層12の
組成は、焼結前の基本成分と添加成分との混合組成と実
質的に同じである。The thickness of the dielectric ceramic layer 12 of this capacitor 10 is 0.0
2 m, and the opposing area of the pair of internal electrodes 14 is 5 tan
S■=25m2. Note that the composition of the ceramic layer 12 after sintering is substantially the same as the mixed composition of the basic components and additive components before sintering.
次に、コンデンサ10の電気特性を測定し、その平均値
を求めたところ、第3表に示す如く、比誘電率ε、が3
800、tanδが1.1%、抵抗率ρが3.8X10
6MΩ・C1l、25℃の静電容量を基準にした一55
℃及び+125℃の静電容量の変化率ΔC、ΔC125
が−10゜5%、55
+3.6%、20℃の静電容量を基準にした一25°C
1+85℃の静電容量の変化率ΔC、Δ25
C85は−5,0%、−5,9%であった。Next, when the electrical characteristics of the capacitor 10 were measured and the average value was calculated, as shown in Table 3, the relative dielectric constant ε was 3.
800, tan δ is 1.1%, resistivity ρ is 3.8X10
-55 based on 6MΩ・C1l, 25℃ capacitance
Rate of change of capacitance at °C and +125 °C ΔC, ΔC125
-10°5%, 55 +3.6%, -25°C based on 20°C capacitance
The capacitance change rates ΔC and Δ25C85 at 1+85°C were -5.0% and -5.9%.
なお、電気的特性は次の要領で測定した。Note that the electrical characteristics were measured in the following manner.
(A) 比誘電率ε、は、温度20℃、周波数1 k
Hz、電圧(実効値)1.OVの条件で静電容量を測定
し、この測定値一対の内部電極14の対向面積25藺2
と一対の内部電極14間の磁器層12の厚さ0.02f
lから計算で求めた。(A) The relative permittivity ε is at a temperature of 20°C and a frequency of 1k.
Hz, voltage (effective value) 1. The capacitance is measured under OV conditions, and the measured value is 25cm2, which is the opposing area of the pair of internal electrodes 14.
The thickness of the ceramic layer 12 between the pair of internal electrodes 14 is 0.02f.
Calculated from l.
(B) 誘電体損失tanδ(%)は比誘電率と同一
条件で測定した。(B) Dielectric loss tan δ (%) was measured under the same conditions as the relative dielectric constant.
(C) 抵抗率ρ(MΩ・cn)は、温度20℃にお
いてDClooVを1分間印加した後に一対の外部電極
16間の抵抗値を測定し、この測定値と寸法とに基づい
て計算で求めた。(C) Resistivity ρ (MΩ・cn) was calculated by measuring the resistance value between the pair of external electrodes 16 after applying DClooV for 1 minute at a temperature of 20° C. based on this measured value and the dimensions. .
(D) 静電容量の温度特性は、恒温槽の中に試料を
入れ、−55℃、−25℃、0℃、+20℃、25℃、
−1−40℃、+ 60 ’C1七85℃、+105℃
、+125°Cの各温度において、周波数1 kHz、
電圧(実効値)1.OVの条件で静電容量を測定し、2
0℃及び25℃の時の静電容量に対する各温度における
変化率を求めることによって得た。(D) Temperature characteristics of capacitance were measured by placing the sample in a constant temperature bath, -55°C, -25°C, 0°C, +20°C, 25°C,
-1-40℃, +60'C1785℃, +105℃
, +125°C, frequency 1 kHz,
Voltage (effective value) 1. Measure the capacitance under OV conditions,
It was obtained by determining the rate of change at each temperature with respect to the capacitance at 0°C and 25°C.
以上、試料NQIの作製方法及びその特性について述べ
たが、試料NG2〜106についても、基本成分、第1
及び第2添加成分の組成、これ等の割合、及び還元性雰
囲気での焼成温度を第1表〜第3表に示すように変えた
他は、試料NQIと全く同一の方法で積層磁器コンデン
サを作製し、同一方法で′電気的特性を測定した。The preparation method of sample NQI and its characteristics have been described above, but samples NG2 to NG106 also have basic components,
A multilayer ceramic capacitor was manufactured in exactly the same manner as Sample NQI, except that the composition of the second additive component, their proportions, and the firing temperature in a reducing atmosphere were changed as shown in Tables 1 to 3. The electrical characteristics were measured using the same method.
第1表は、それぞれの試料の基本成分と第1の添加成分
の組成及び添加量と第2の添加成分の添加量を示し、第
2表はそれぞれの試料の第2の添加成分の組成を示し、
第3表はそれぞれの試料の焼成温度、及び電気的特性を
示す、なお、第1表の基本成分の間のx、y、には組成
式の各元素の原子数、即ちTiの原子数を1とした場合
の各元素の原子数の割合を示す、Mxの欄のMg、Zn
は、一般式のMの内容を示し、Mg、Znの欄にはこれ
等の原子数が示されている。従ってXの値はMgの原子
数とZnの原子数の和によって求められる。Lyの欄の
Ca、Srは一般式りの内容を示し、Ca、Srの欄に
はこれ等の原子数が示されている。従ってyの値はCa
のに原子数とSrの原子数との和で求められる。x+y
の欄には、結局、Mg、Zn、Ca、Srの原子数の和
が示されている。第1及び第2の添加成分の添加量は基
本成分100重量部に対する重量部で示されている。第
2表の第2の添加成分のMOの内容の欄には、BaO1
Mg01ZnO1SrO,CaOの割合がモル%で示さ
れている。第3表において、静電容量の温度特性は、2
5℃の静電容量を基準にしな一55℃及び+125℃の
静電容量変化率をΔC(%)ΔC(%)、20℃の静電
−55125
容量を基準にした一25°C及び+85℃の静電容量変
化率をΔC,(%)、ΔC(%)で示585
されている。Table 1 shows the composition and amount of the basic component and the first additive component of each sample, and the amount of the second additive component, and Table 2 shows the composition of the second additive component of each sample. show,
Table 3 shows the firing temperature and electrical properties of each sample. Note that x and y between the basic components in Table 1 indicate the number of atoms of each element in the composition formula, that is, the number of Ti atoms. Mg, Zn in the Mx column, which indicates the ratio of the number of atoms of each element when set to 1.
indicates the content of M in the general formula, and the numbers of these atoms are shown in the Mg and Zn columns. Therefore, the value of X is determined by the sum of the number of Mg atoms and the number of Zn atoms. Ca and Sr in the Ly column show the contents of the general formula, and the numbers of these atoms are shown in the Ca and Sr columns. Therefore, the value of y is Ca
It is determined by the sum of the number of atoms of Sr and the number of atoms of Sr. x+y
The column ultimately shows the sum of the numbers of atoms of Mg, Zn, Ca, and Sr. The amounts of the first and second additive components are expressed in parts by weight relative to 100 parts by weight of the basic component. In the column of MO content of the second additive component in Table 2, BaO1
The proportions of Mg01ZnO1SrO and CaO are shown in mol%. In Table 3, the temperature characteristics of capacitance are 2
Based on the capacitance at 5℃, the capacitance change rate at 55℃ and +125℃ is ΔC (%) ΔC (%), the capacitance at 20℃ is -55125. The capacitance change rate in degrees Celsius is expressed as ΔC (%) and ΔC (%).
第1表〜第3表から明らかな如く、本発明に従う試料で
は、非酸化性雰囲気、1200°C以下の焼成で、比誘
電率ε が3000以上、誘電体損失tanδが2.5
%以下、抵抗率ρが1×106MΩ・C11以上、静電
容量の温度変化率ΔC−55及びΔCが−15%〜+1
5%、ΔC−25及び25
ΔC85は一10%〜+10%の範囲となり、所望特性
のコンデンサを得ることが出来る。一方、試:nNo、
11〜16.27.32.33.38.39.44.4
5.57〜63.71〜77.82.83.87.88
.97.98.99.105.106では本発明の目的
を達成することができない、従って、これ等は本発明の
範囲外のものである。As is clear from Tables 1 to 3, the samples according to the present invention have a relative dielectric constant ε of 3000 or more and a dielectric loss tan δ of 2.5 when fired in a non-oxidizing atmosphere at 1200°C or less.
% or less, resistivity ρ is 1 x 106 MΩ・C11 or more, temperature change rate of capacitance ΔC-55 and ΔC is -15% to +1
5%, ΔC-25 and 25 ΔC85 are in the range of -10% to +10%, making it possible to obtain a capacitor with desired characteristics. On the other hand, trial: nNo,
11-16.27.32.33.38.39.44.4
5.57-63.71-77.82.83.87.88
.. 97.98.99.105.106 cannot achieve the purpose of the present invention, and therefore they are outside the scope of the present invention.
第3表にはΔC、ΔC、ΔC、Δ
−55125−25
C85のみが示されているが、本発明の範囲に属する試
料の一り5℃〜十85℃の範囲の種々の静電容量の変化
率ΔCは、−10%〜+10%の範囲に収まり、また、
−55℃〜+125℃の範囲の種々の静電容量の変化率
ΔCは、−15%〜+15%の範囲に収まっている。Although only ΔC, ΔC, ΔC, Δ-55125-25 C85 is shown in Table 3, it is one of the samples belonging to the scope of the present invention. The rate of change ΔC falls within the range of -10% to +10%, and
The various capacitance change rates ΔC in the range of −55° C. to +125° C. fall within the range of −15% to +15%.
次に、組成の限定理由について述べる。Next, the reasons for limiting the composition will be described.
x十yの値が、試料に45.63に示す如く、零の場合
には、ΔC−55が一15%〜+15%の範囲外となる
が、試料No46〜49.64.65に示す如く、x+
yの値が0.01の場合には、所望の電気的特性を得る
ことができる。従って、x+yの値の下限は0.01で
ある。一方、試料No、59〜62 、72〜76に示
す如く、x+yの値が0.12の場合には、八〇85が
一10%〜+10%の範囲外となるが、試料No、53
〜56.69.70に示す如く、x+yの値が0.10
の場合には、所望の電気的特性を得ることができる。If the values of x and y are zero as shown in sample No. 45.63, ΔC-55 will be outside the range of -15% to +15%, but as shown in sample No. 46 to 49.64.65. ,x+
When the value of y is 0.01, desired electrical characteristics can be obtained. Therefore, the lower limit of the value of x+y is 0.01. On the other hand, as shown in sample Nos. 59-62 and 72-76, when the value of x+y is 0.12, 8085 is outside the range of -10% to +10%, but sample No. 53
~ As shown in 56.69.70, the value of x+y is 0.10
In this case, desired electrical characteristics can be obtained.
但し、x+yの値が試料N057.58.71に不す如
く、0.1であってもyの値が0.05を越えてしまう
場合には緻密な焼結体が得られない。However, even if the value of x+y is 0.1, as in sample No. 057.58.71, if the value of y exceeds 0.05, a dense sintered body cannot be obtained.
従って、x+yの上限値は0.10であるが、同時にy
の上限値を0.05にしなければならない。Therefore, the upper limit of x+y is 0.10, but at the same time y
The upper limit of the value must be set to 0.05.
なお、M成分のMgとZn及びし成分のCaとSrはほ
ぼ同様に働き、O<x<0.10を満足する範囲でMg
とZnの内の一方又は両方を使用すること、またO<y
≦0.05を満足する範囲でCaとSrの内の一方又は
両方を使用することができる。そして、M成分及びし成
分の1種又は複数種の何れの場合においてもx十yの値
を0.01〜0.10の範囲にすることが望ましい。In addition, Mg and Zn of the M component and Ca and Sr of the M component work almost similarly, and Mg and Zn act in almost the same way.
and Zn or both, and O<y
One or both of Ca and Sr can be used within a range satisfying ≦0.05. It is desirable that the values of x and y be in the range of 0.01 to 0.10 in any case of one or more of the M component and the Y component.
kの値が、試料N077.83に示す如く、1゜0より
も小さい場合には、ρが1xlO6MΩ・CI末、満と
なり、大幅に低くなるが、試料N078.84に示す如
く、kの値が1.00の場合には、所望の電気的特性が
得られる。従って、kの値の下限は1.00である。一
方、kの値が、試料愁82.87に示す如く、1.05
より大きい場合には緻密な焼結体が得られないが、試料
No81.86に示す如く、kの値が1.05の場合に
は所望の電気的特性が得られる。従って、kの値の上限
は1.05である。When the value of k is smaller than 1°0, as shown in sample No. 077.83, ρ becomes full at the end of 1xlO6MΩ・CI, which is significantly lower, but as shown in sample No. 078.84, the value of k When is 1.00, desired electrical characteristics can be obtained. Therefore, the lower limit of the value of k is 1.00. On the other hand, the value of k is 1.05 as shown in sample number 82.87.
If it is larger, a dense sintered body cannot be obtained, but as shown in sample No. 81.86, when the value of k is 1.05, desired electrical characteristics can be obtained. Therefore, the upper limit of the value of k is 1.05.
第1の添加成分であるCr2O3及び/又はAl2O3
の添加量が試料N088.99に示す如く香の場合は、
ΔC−5,が一15%以下となるが、試料No、 89
.90.100.101に示す如く添加量が100重量
部の基本成分に対して0.01重量部の場合には所望の
特性を得ることができる。Cr2O3 and/or Al2O3 as the first additive component
When the amount of addition is incense as shown in sample No. 088.99,
ΔC-5 is less than 15%, but sample No. 89
.. As shown in 90.100.101, desired characteristics can be obtained when the amount added is 0.01 part by weight per 100 parts by weight of the basic component.
従って第1の添加成分の下限は0.01である。Therefore, the lower limit of the first additive component is 0.01.
一方、試料N097.98.105.106に示す如く
添加量が3.0重量部よりも多い場合には1250℃で
焼成しても緻密な焼結体が得られないが、試料Nα94
.95.96.104に示す如く添加量が3.0重量部
の場合には所望の特性を得ることができる。従って第1
の添加成分の上限は3.0重量部である。なお、第1の
添加成分のCr2O3とA I 203とはほぼ同様に
働き、これ等から選択された1つを使用しても、又は複
数を使用しても同様な結果が得られる。そして、第1の
添加成分が1種又は複数種の何れの場合に於いても、添
加量は0.01〜3.0の範囲にすることが望ましい、
なお、この第1の添加成分は、静電容量の温度特性の改
善に寄与する。即ち、第1の添加成分の添加によって一
55゛C〜125℃の範囲での静電容量の温度変化率Δ
C−5、〜ΔC125を一15%〜+15%の範囲に容
易に収めることが可能になると共に、−25℃〜85°
Cの範囲での静電容量の温度変化率ΔC−25〜ΔC8
5を一10%〜+10%の範囲に容易に収めることが可
能になり、且つ各温度範囲における静電容量の温度変化
率の変動幅を小さくすることができる。また、第1の添
加成分は抵抗率ρを大きくする作用を若子育する。On the other hand, as shown in sample N097.98.105.106, when the amount added is more than 3.0 parts by weight, a dense sintered body cannot be obtained even if fired at 1250°C, but sample Nα94
.. As shown in 95.96.104, when the amount added is 3.0 parts by weight, desired characteristics can be obtained. Therefore, the first
The upper limit of the added components is 3.0 parts by weight. Note that Cr2O3 and A I 203, which are the first additive components, work almost in the same way, and the same result can be obtained even if one selected from them is used or a plurality of them are used. And, regardless of whether the first additive component is one type or multiple types, the amount added is preferably in the range of 0.01 to 3.0.
Note that this first additive component contributes to improving the temperature characteristics of capacitance. That is, by adding the first additive component, the temperature change rate Δ of capacitance in the range of -55°C to 125°C
It becomes possible to easily keep C-5, ~ΔC125 in the range of -15% to +15%, and it also allows for -25°C to 85°
Temperature change rate of capacitance in the range of C ΔC-25 to ΔC8
5 can be easily kept within the range of -10% to +10%, and the fluctuation width of the temperature change rate of capacitance in each temperature range can be reduced. Further, the first additive component has the effect of increasing the resistivity ρ.
第2の添加成分の添加量が零の場合には、試料No27
.33.39から明らかな如く、焼成温度が1250℃
であっても緻密な焼結体が得られないが、試料No28
.34.40に示す如く、添加量が100重量部の基本
成分に対して0.2重量部の場合には、1190℃の焼
成で所望の電気的特性を有する焼結体が得られる。従っ
て、第2の添加成分の下限は0.2重量部である。〒方
、試料NQ32.38.44に示す如く、第2の添加酸
範囲外となるが、試料No、 31.37.43に示す
如く、添加量が5.0重量部の場合には所望特性を得る
ことができる。従って、添加量の上限は5゜0重量部で
ある。When the amount of the second additive component added is zero, sample No. 27
.. As is clear from 33.39, the firing temperature is 1250℃
Although a dense sintered body cannot be obtained even with sample No. 28,
.. As shown in 34.40, when the amount added is 0.2 parts by weight per 100 parts by weight of the basic components, a sintered body having desired electrical properties can be obtained by firing at 1190°C. Therefore, the lower limit of the second additive component is 0.2 parts by weight. On the other hand, as shown in sample No. 32.38.44, it is outside the range of the second added acid, but as shown in sample No. 31.37.43, when the amount added is 5.0 parts by weight, the desired properties are achieved. can be obtained. Therefore, the upper limit of the amount added is 5.0 parts by weight.
第2の添加成分の好ましい組成は、第2図のLi O
5ty2 MOの組成比を示す三角図に基づいて決定す
ることができる。三角図の第1の点(A)は、試料Nα
1のL 120が1モル%、5102が80モル%、M
Oが19モル%の組成を示し、第2の点(B)は、試料
No、 2のL 120が1モル%、SiO2が39モ
ル%、MOが60モル%の組成を示し、第3の点(C)
は、試料No、 3のLi Oが30モル%、S t
O2が30モル%、MOが40モル%の組成を示し、
第4の点(D)は、試料NQ4のLi Oが50モル
%、S t O2が50モル%、MOが0モル%の組成
を示し、第5の点(E)は、試料No、 5のし120
が20モル%、SiO2が80モル%、MOが0モル%
の組成を示す。A preferred composition of the second additive component is Li O
It can be determined based on a triangular diagram showing the composition ratio of 5ty2 MO. The first point (A) in the triangular diagram is the sample Nα
1 L 120 is 1 mol%, 5102 is 80 mol%, M
The second point (B) shows a composition of 19 mol% O, sample No. 2 has a composition of 1 mol% L 120, 39 mol% SiO2, 60 mol% MO, and the third point (B) Point (C)
is sample No. 3, LiO is 30 mol%, S t
Shows a composition of 30 mol% O2 and 40 mol% MO,
The fourth point (D) shows the composition of sample NQ4 with 50 mol% of LiO, 50 mol% of S t O2, and 0 mol% of MO, and the fifth point (E) shows the composition of sample No. 5 Noshi 120
is 20 mol%, SiO2 is 80 mol%, MO is 0 mol%
The composition of
本発明の範囲に属する試料の第2の添加成分の組成は三
角図の第1〜5の点(A)〜(E)を順に結ぶ5本の直
線で囲まれた領域内の組成になっている。この領域内の
組成とすれば、所望の電気的特性を得ることができる。The composition of the second additive component of the sample that falls within the scope of the present invention is within the area surrounded by five straight lines connecting points 1 to 5 (A) to (E) in the triangular diagram in order. There is. If the composition is within this range, desired electrical characteristics can be obtained.
一方、試料l1iQ11〜16のように、第2の添加成
分の組成が本発明で特定した範囲外となれば、緻密な焼
結体を得ることができない、なお、MO酸成分例えば試
料NQ22〜26に示す如(BaO2MgO,ZnO1
Sro、CaOのいずれか1つであってもよいし、又は
他の試料で示すように適当な比率としてもよい
[変形例]
以上、本発明の実施例について述べたが、本発明はこれ
に限定されるものではなく、例えば次の変形例が可能な
ものである。On the other hand, if the composition of the second additive component is outside the range specified in the present invention, as in samples l1iQ11-16, a dense sintered body cannot be obtained. As shown in (BaO2MgO, ZnO1
It may be either one of Sro or CaO, or it may be in an appropriate ratio as shown in other samples [Modifications] The embodiments of the present invention have been described above, but the present invention The present invention is not limited to this, and the following modifications are possible, for example.
(a) 基本成分の中に、本発明の目的を阻害しない
範囲で微量のM n O2(好ましくは0.05〜0.
1重量%)等の鉱化剤を添加し、焼結性を向上させても
よい、また、その他の物質を必要に応じて添加してもよ
い。(a) A trace amount of M n O2 (preferably 0.05-0.
1% by weight) may be added to improve sinterability, and other substances may be added as necessary.
(b) 出発原料を、実施例で示したちの以外の酸化物
又は水酸化物又はその他の化合物とじてもよい。(b) The starting materials may be combined with oxides or hydroxides or other compounds other than those shown in the examples.
(c) 焼成時の非酸化性雰囲気での処理の後の酸化
性雰囲気での処理の温度を600°C以外の焼結温度よ
りも低い温度(好ましくは500℃〜1000℃の範囲
)としてもよい。即ち、ニッケル等の電極材料と磁器の
酸化とを考慮して種々変更することが可能である。(c) Even if the temperature of the treatment in the oxidizing atmosphere after the treatment in the non-oxidizing atmosphere during firing is lower than the sintering temperature other than 600°C (preferably in the range of 500°C to 1000°C). good. That is, various changes can be made in consideration of the electrode material such as nickel and the oxidation of the ceramic.
(d) 非酸化性雰囲気中の焼成温度を、電極材料を
考慮して種々変えることができる。ニッケルを内部電極
とする場合には、1050℃〜1200℃の範囲でニッ
ケル粒子の凝集がほとんど生じない。(d) The firing temperature in a non-oxidizing atmosphere can be varied depending on the electrode material. When nickel is used as the internal electrode, hardly any agglomeration of nickel particles occurs in the range of 1050°C to 1200°C.
(e) 焼結を中性雰囲気で行ってもよい。(e) Sintering may be performed in a neutral atmosphere.
(f> 積層磁器コンデンサ以外の一般的な単層の磁
器コンデンサにも勿論適用可能である。(f> It is of course applicable to general single-layer ceramic capacitors other than multilayer ceramic capacitors.
第1図は本発明の実施例に係わる積層型磁器コンデンサ
を示す断面図、
第2図は添加成分の組成範囲を示す三角図である。
l
2・・・磁器層、
14・・・内部電極、
6・・・外部型
極。
代
理
人
同
野
則
次
第1図
第2図FIG. 1 is a sectional view showing a multilayer ceramic capacitor according to an embodiment of the present invention, and FIG. 2 is a triangular diagram showing the composition range of additive components. l2...Porcelain layer, 14...Internal electrode, 6...External type pole. Figure 1 Figure 2
Claims (1)
も2つの電極とから成る磁器コンデンサにおいて、 前記磁器が100.0重量部の基本成分と、0.01〜
3.00重量部の第1の添加成分と、0.2〜5.0重
量部の第2の添加成分とから成り、 前記基本成分が、 (Ba_k_−_x_−_yM_xL_y)O_kTi
O_2(但し、MはMg、Znの内の少なくとも1種の
金属、LはCa、Srの内の少なくとも1種の金属、k
、y、xは、 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10を満足する数値)であり、 前記第1の添加成分がCr_2O_3とAl_2O_3
の内の少なくとも1種の金属酸化物であり、前記第2の
添加成分がLi_2OとSiO_2とMO(但し、MO
はBaO、SrO、CaO,MgO及びZnOの内の少
なくとも1種の金属酸化物)から成り、且つ前記Li_
2Oと前記SiO_2と前記MOとの組成範囲がこれ等
の組成をモル%で示す三角図における 前記Li_2Oが1モル%、前記SiO_2が80モル
%、前記MOが19モル%の点(A)と、前記Li_2
Oが1モル%、前記SiO_2が39モル%、前記MO
が60モル%の点(B)と、前記Li_2Oが30モル
%、前記SiO_2が30モル%、前記MOが40モル
%の点(C)と、前記Li_2Oが50モル%、前記S
iO_2が50モル%、前記MOが0モル%の点(D)
と、前記Li_2Oが20モル%、前記SiO_2が8
0モル%、前記MOが0モル%の点(E)と、を順に結
ぶ5本の直線で囲まれた領域内のものであることを特徴
とするコンデンサ。 [2]100.0重量部の基本成分と、0.01〜3.
00重量部の第1の添加成分と、0.2〜5.0重量部
の第2の添加成分とから成り、前記基本成分が、 (Ba_k_−_x_−_yM_xL_y)O_kTi
O_2(但し、MはMg、Znの内の少なくとも1種の
金属、LはCa、Srの内の少なくとも1種の金属、k
、x、yは、 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10を満足する 数値)であり、前記第1の添加成分がCr_2O_3と
Al_2O_3の内の少なくとも1種の金属酸化物であ
り、前記第2の添加成分がLi_2OとSiO_2とM
O(但し、MOはBaO、SrO、CaO、MgO及び
ZnOの内の少なくとも1種の金属酸化物)から成り、
且つ前記Li_2Oと前記SiO_2と前記MOとの組
成範囲がこれ等の組成をモル%で示す三角図における前
記Li_2Oが1モル%、前記SiO_2が80モル%
、前記MOが19モル%の点(A)と、前記Li_2O
が1モル%、前記SiO_2が39モル%、前記MOが
60モル%の点(B)と、前記Li_2Oが30モル%
、前記SiO_2が30モル%、前記MOが40モル%
の点(C)と、前記Li_2Oが50モル%、前記Si
O_2が50モル%、前記MOが0モル%の点(D)と
、前記Li_2Oが20モル%、前記SiO_2が80
モル%、前記MOが0モル%の点(E)とを順に結ぶ5
本の直線で囲まれた領域内のものであることを特徴とす
る混合物を用意する工程と、少なくとも2つの電極部分
を有する前記混合物の成形物を作る工程と、 前記電極部分を有する前記成形物を非酸化性雰囲気で焼
成する工程と、 前記焼成で得られた成形物を酸化性雰囲気で熱処理する
工程と を含む磁器コンデンサの製造方法。[Scope of Claims] [1] A ceramic capacitor comprising dielectric ceramic and at least two electrodes in contact with the ceramic, wherein the ceramic contains 100.0 parts by weight of a basic component and 0.01 to 0.01 parts by weight of a basic component.
It consists of a first additive component of 3.00 parts by weight and a second additive component of 0.2 to 5.0 parts by weight, and the basic component is (Ba_k_−_x_−_yM_xL_y)O_kTi
O_2 (However, M is at least one metal among Mg and Zn, L is at least one metal among Ca and Sr, k
, y, and x are numerical values that satisfy 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10), and Added components are Cr_2O_3 and Al_2O_3
The second additive component is at least one metal oxide of Li_2O, SiO_2, and MO (however, MO
is made of at least one metal oxide of BaO, SrO, CaO, MgO, and ZnO, and the Li_
The composition range of 2O, the SiO_2, and the MO is a point (A) where the Li_2O is 1 mol%, the SiO_2 is 80 mol%, and the MO is 19 mol% in a triangular diagram showing these compositions in mol%. , said Li_2
O is 1 mol%, the SiO_2 is 39 mol%, the MO
Point (B) where Li_2O is 60 mol%, point (C) where Li_2O is 30 mol%, SiO_2 is 30 mol%, and MO is 40 mol%, and Li_2O is 50 mol% and the S
Point (D) where iO_2 is 50 mol% and the MO is 0 mol%
, the Li_2O is 20 mol%, and the SiO_2 is 8 mol%.
0 mol %, and the capacitor is within an area surrounded by five straight lines sequentially connecting the point (E) where the MO is 0 mol %. [2] 100.0 parts by weight of basic components, and 0.01 to 3.
00 parts by weight of the first additive component and 0.2 to 5.0 parts by weight of the second additive component, the basic component being (Ba_k_-_x_-_yM_xL_y)O_kTi
O_2 (However, M is at least one metal among Mg and Zn, L is at least one metal among Ca and Sr, k
, x, and y are numerical values that satisfy 1.00≦k≦1.05 0<x<0.10 0<y≦0.05 0.01≦x+y≦0.10), The additive component is at least one metal oxide of Cr_2O_3 and Al_2O_3, and the second additive component is Li_2O, SiO_2, and M
O (however, MO is at least one metal oxide of BaO, SrO, CaO, MgO and ZnO),
In addition, the composition range of the Li_2O, the SiO_2, and the MO is 1 mol% for the Li_2O and 80 mol% for the SiO_2 in a triangular diagram showing these compositions in mol%.
, the point (A) where the MO is 19 mol%, and the Li_2O
is 1 mol%, the SiO_2 is 39 mol%, the MO is 60 mol%, and the Li_2O is 30 mol%.
, the SiO_2 is 30 mol%, the MO is 40 mol%
point (C), the Li_2O is 50 mol%, the Si
Point (D) where O_2 is 50 mol% and the MO is 0 mol%, and the Li_2O is 20 mol% and the SiO_2 is 80 mol%.
mol%, connect the point (E) where the MO is 0 mol% in order 5
a step of preparing a mixture characterized in that it is within an area surrounded by a straight line of a book; a step of making a molded article of the mixture having at least two electrode portions; and a step of forming the molded article having the electrode portions. A method for manufacturing a ceramic capacitor, comprising: firing the molded product in a non-oxidizing atmosphere; and heat-treating the molded product obtained by the firing in an oxidizing atmosphere.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1298137A JPH03159109A (en) | 1989-11-16 | 1989-11-16 | Porcelain capacitor and its manufacture |
| EP90120258A EP0432418B1 (en) | 1989-11-16 | 1990-10-22 | Solid dielectric capacitor and method of manufacture |
| DE69016619T DE69016619T2 (en) | 1989-11-16 | 1990-10-22 | Solid dielectric capacitor and manufacturing method. |
| US07/601,315 US5111357A (en) | 1989-11-16 | 1990-10-22 | Solid dielectric capacitor and method of manufacture |
| KR1019900018687A KR930011190B1 (en) | 1989-11-16 | 1990-11-16 | Solid dielectric capacitor and of manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1298137A JPH03159109A (en) | 1989-11-16 | 1989-11-16 | Porcelain capacitor and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03159109A true JPH03159109A (en) | 1991-07-09 |
| JPH0529300B2 JPH0529300B2 (en) | 1993-04-30 |
Family
ID=17855665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1298137A Granted JPH03159109A (en) | 1989-11-16 | 1989-11-16 | Porcelain capacitor and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03159109A (en) |
-
1989
- 1989-11-16 JP JP1298137A patent/JPH03159109A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0529300B2 (en) | 1993-04-30 |
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