JPH0316005U - - Google Patents
Info
- Publication number
- JPH0316005U JPH0316005U JP1989076947U JP7694789U JPH0316005U JP H0316005 U JPH0316005 U JP H0316005U JP 1989076947 U JP1989076947 U JP 1989076947U JP 7694789 U JP7694789 U JP 7694789U JP H0316005 U JPH0316005 U JP H0316005U
- Authority
- JP
- Japan
- Prior art keywords
- seat
- probe
- micro
- fixed
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 8
- 239000011358 absorbing material Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 230000005641 tunneling Effects 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Control Of Position Or Direction (AREA)
Description
第１図は本考案の実施例断面図、第２図は従来
品の断面図、第３図は従来品の周波数特性、第４
図は本考案実施例の周波数特性をそれぞれ示した
ものである。
１……探針、２……探針座、３……探針固定座
、４……絶縁座、５……微動素子、６……振動緩
衝座、７……基台、８……絶縁台座、９……配線
、１０……電極端子。
Fig. 1 is a sectional view of an embodiment of the present invention, Fig. 2 is a sectional view of a conventional product, Fig. 3 is a frequency characteristic of the conventional product, and Fig. 4 is a sectional view of an embodiment of the present invention.
The figures show the frequency characteristics of the embodiments of the present invention. 1... Probe, 2... Probe seat, 3... Probe fixing seat, 4... Insulation seat, 5... Fine movement element, 6... Vibration buffer seat, 7... Base, 8... Insulation. Pedestal, 9... Wiring, 10... Electrode terminal.
Claims (1)
固定する探針固定座、探針固定座を絶縁座を介し
て固定する圧電又は電歪材からなる微動素子、こ
の微動素子を振動緩衝材からなる振動緩衝座を介
して基台に固定したことを特徴とする微小位置決
め機構。 (2) 走査型トンネル顕微鏡として使用される請
求項１記載の微小位置決め機構。[Scope of claim for utility model registration] (1) A probe seat to which the probe is fixed, a probe fixing seat to which the probe seat is screwed and fixed, and a piezoelectric or electrostrictive material to which the probe fixing seat is fixed via an insulating seat. 1. A micro-positioning mechanism comprising: a micro-movement element made of a vibration-absorbing material; and a micro-positioning mechanism fixed to a base via a vibration-absorbing seat made of a vibration-absorbing material. (2) The micro-positioning mechanism according to claim 1, which is used as a scanning tunneling microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989076947U JPH0316005U (en) | 1989-06-29 | 1989-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989076947U JPH0316005U (en) | 1989-06-29 | 1989-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316005U true JPH0316005U (en) | 1991-02-18 |
Family
ID=31618876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989076947U Pending JPH0316005U (en) | 1989-06-29 | 1989-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316005U (en) |
-
1989
- 1989-06-29 JP JP1989076947U patent/JPH0316005U/ja active Pending
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