JPH0316205Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention is applicable to specimens used in electronic analysis equipment such as scanning electron microscopes and It relates to mobile devices.

[Conventional technology]

BACKGROUND ART Scan rotation, which rotates an image, is used in electronic analysis devices such as scanning electron microscopes and X-ray analyzers that irradiate a sample on a sample stage with an electron beam and observe the image. Figure 3 shows the scan
FIG. 3 is a diagram for explaining rotation.
On a CRT, an image of a sample is usually observed along the coordinate axes as shown in Figure 3a. here,
When the image is rotated using scan rotation, it becomes as shown in Figure 3b at 45° rotation,
When rotated by 90 degrees, it becomes as shown in Figure 3c.

[Problem that the invention attempts to solve]

However, with conventional sample moving devices, when you want to move the sample on the sample stage in the X direction, for example,
When you use scan rotation to rotate and observe an image, it becomes difficult to determine its direction.
In particular, if you apply scan rotation many times, you will not be able to tell which direction the X and Y movements are until you actually move it.

The present invention is based on the above consideration, and
It is an object of the present invention to provide a sample moving device in which the X and Y moving directions of the sample can always be easily determined even during scan rotation and are easy to operate.

[Means for solving problems]

To this end, the sample moving device of the present invention is a sample moving device for an electronic analyzer that has the functions of moving the sample by operating the sample moving operation means, irradiating the sample with an electron beam, observing the image, and rotating the image. , characterized in that the sample moving operation means is provided with a rotation mechanism, and when an image to be observed is rotated, the rotation mechanism is driven so that the sample movement operation means is rotated by the same angle in accordance with the rotation angle of the image. It is something.

[Operation] In the sample moving device of the present invention, when scan rotation is applied, the rotation mechanism is also driven thereby, and the sample moving operation means is also rotated by the same angle as the rotation angle of the rotating image. Therefore, the correspondence between the image subjected to scan rotation and the movement direction of the operation by the movement operation means is clear, and the
The Y movement direction can be determined accurately.

〔Example〕

Examples will be described below with reference to the drawings.

FIG. 1 is a diagram showing the configuration of one embodiment of the sample moving device of the present invention, and FIG. 2 is a diagram showing an example of correspondence between a push button switch and an image when scan rotation is applied. In the figure, 1 is the sample, 2 is the X movement moving part, 3 is the X movement drive screw, 4 is the X movement guide, 5 and 10 are joints, 6 is the X movement motor, 7 is the Y movement movement part, and 8 is the Y movement Drive screw, 9 is Y movement guide, 1
1 is a Y motor, 12 is a sample stage, 13 is a push button switch, 14 is a worm wheel,
15 is a worm, 16 is a push button/switch drive motor, 17 is a case, 18 is an SRT knob,
19 indicates an SRT circuit, and 20 indicates a CRT.

In FIG. 1, sample 1 is placed on sample stage 12.
It moves in the X direction by the movement of the X motion moving section 2, and moves in the Y direction by the movement of the Y motion moving section 7. In the X-movement moving unit 2, the X-movement drive screw 3 rotates via the joint 5 as the X-movement motor 6 rotates, and the X-movement moving unit 2 moves in the left and right directions in the drawing depending on the direction of rotation. The Y-movement moving unit 7 moves the Y-movement drive screw 8 via the joint 10 as the Y-movement motor 11 rotates.
rotates and moves up and down in the drawing depending on the direction of rotation. The push button switch 13 is a switch that is operated when performing X and Y motion movement, and has a total of four push buttons, one for the positive and negative directions of X and the positive and negative directions of Y, which are marked △ in the figure. When this push button is operated, the X motion motor 6 or the Y motion motor 11 is driven to rotate forward or backward depending on the content of the operation. FIG. 1b shows a cross-sectional view of the sample stage 12 and case 17 shown in FIG. 1a. The SRT knob 18 is operated when applying scan rotation, and when this SRT knob 18 is operated,
The SRT circuit 19 controls the CRT 2 depending on the operation content.
At the same time as the image of 0 is rotated, the push button/switch driving motor 16 is driven by the same amount of rotation as the rotation angle. As a result, the rotation of the push button switch driving motor 16 causes the push button switch 13 to rotate by the same angle in the same direction as the image via the worm 15 and the worm wheel 14. The state of the push button switch 13 when it is rotated 45 degrees counterclockwise using the scan rotation by operating the SRT knob 18 from the state shown in FIG.
FIG. 2 shows the display state of the CRT 20.
As is clear from FIG. 2, the X and Y movement directions on the CRT 20 coincide with the direction of operation instruction of the push button switch 13.

It should be noted that the present invention is not limited to the above-described embodiment, and for example, instead of the combination of the worm 15 and the worm wheel 14 that rotate the push button switch 13 shown in FIG.
It goes without saying that various modifications can be made, such as using spur gears, screw gears, or bevel gears, or using push button switches 13 other than those shown.

[Effect of idea]

As is clear from the above explanation, according to the present invention, in order to rotate the switch that performs X, Y dynamic drive to the same angle as the rotation angle of the image,
The direction of movement can be easily determined, making it easier to operate. In addition, in order to automatically match the rotation angle of the scan rotation and the rotation angle of the switch that performs X and Y dynamic drive,
The direction of Y movement always matches the switch for driving the X and Y motions, and the correspondence between the image and the operation can be achieved, eliminating unnecessary operations.

[Brief explanation of drawings]

Fig. 1 shows the configuration of one embodiment of the sample moving device of the present invention, Fig. 2 shows an example of the correspondence between the push button switch and the image when scan rotation is applied, and Fig. 3 FIG. 3 is a diagram for explaining scan rotation. 1...Sample, 2...X moving part, 3...X moving drive screw, 4...X moving guide, 5 and 10...Joint, 6
...X movement motor, 7...Y movement moving part, 8...Y movement drive screw, 9...Y movement guide, 11...Y movement motor, 1
2... Sample stage, 13... Push button switch, 14... Worm foil, 15... Worm, 1
6...Push button/switch drive motor, 17...
Case, 18...SRT knob, 19...SRT circuit,
20...CRT.

Claims (1)

[Scope of utility model registration request] A sample moving device for an electronic analyzer that has a function of moving a sample by operating a sample moving operation means, irradiating an electron beam, observing an image, and rotating the image, the sample moving operation means having a rotation mechanism. 2. A sample moving device, characterized in that, when rotating an image to be observed, the rotating mechanism is driven so that the sample moving operation means also rotates by the same angle in accordance with the rotation angle of the image.