JPH0316323U - - Google Patents
Info
- Publication number
- JPH0316323U JPH0316323U JP7490489U JP7490489U JPH0316323U JP H0316323 U JPH0316323 U JP H0316323U JP 7490489 U JP7490489 U JP 7490489U JP 7490489 U JP7490489 U JP 7490489U JP H0316323 U JPH0316323 U JP H0316323U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- retake
- conveying device
- case
- storage stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Description
第１図は本案の一実施例の斜視図、第２図はレ
テイクル受渡し点での平面図、第３図はレテイク
ル異常セツト時でのレテイクル受渡し点の正面図
である。
１……レテイクル搬送装置Ａ、２……レテイク
ル、３……レテイクルケース、３ａ……下ケース
、３ｂ……上ケース、４……収納段、５……ケー
スオープナ、６……レテイクル搬送装置Ｂ、７…
…レテイクルチヤツク、８……センサ、９……レ
テイクルガイド。
FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a plan view of the reticle transfer point, and FIG. 3 is a front view of the reticle transfer point when the reticle is abnormally set. DESCRIPTION OF SYMBOLS 1... Reticle conveyance device A, 2... Reticle transfer device, 3... Reticle case, 3a... Lower case, 3b... Upper case, 4... Storage stage, 5... Case opener, 6... Reticle transfer device B.7...
...Reticle chuck, 8...Sensor, 9...Reticle guide.
Claims (1)
個所有する収納段を持ち、任意のレテイクルクケ
ースを収納段より取出し、レテイクルケースを開
けレテイクルを受渡すレテイクル搬送装置Ａと、
レテイクルを受取り、任意の位置に搬送するレテ
イクル搬送装置Ｂから成るレテイクル自動搬送装
置において、前記レテイクル搬送装置Ａのレテイ
クル受渡し点でのレテイクルの状態を監視するセ
ンサを設けたことを特徴とするレテイクル自動搬
送装置。 a retake transfer device A having a storage stage having a plurality of retake cases for storing retakes, taking out an arbitrary retake case from the storage stage, opening the retake case and delivering the retake;
An automatic reticle conveying device comprising a reticle conveying device B that receives a reticle and conveys it to an arbitrary position, characterized in that a sensor is provided to monitor the state of the reticle at a reticle delivery point of the reticle conveying device A. Conveyance device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7490489U JPH0316323U (en) | 1989-06-28 | 1989-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7490489U JPH0316323U (en) | 1989-06-28 | 1989-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316323U true JPH0316323U (en) | 1991-02-19 |
Family
ID=31615011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7490489U Pending JPH0316323U (en) | 1989-06-28 | 1989-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316323U (en) |
-
1989
- 1989-06-28 JP JP7490489U patent/JPH0316323U/ja active Pending