JPH03168907A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To prevent the misalignment of the working position of a notched groove by forming a ferromagnetic metal thin film on the surface of a first nonmagnetic substrate, coating the surface of a second nonmagnetic substrate with a molten glass thin film and joining both substrates to obtain a joined body. CONSTITUTION:A thin film 3 of a ferromagnetic metal such as 'Sendust(R)' and an insulating thin film 4 of SiO2, etc., are alternately laminated by sputtering on the inner surface of the first nonmagnetic substrate 1 to form a laminated film 5. A glass film 6 is then formed on the surface of the second nonmagnetic substrate 2 by the vacuum thin film forming technique, and the laminated film 5 and glass film 6 are matched, melted and joined to obtain a joined body 7. The body 7 is cut off at an azimuth angle of theta to obtain a couple of strip magnetic core block halves 8a and 8b. A reinforcing glass groove 10 is then notched on the gap matched surface 9a of the one half 8a on both sides of the film 5 in parallel with the film 5, and an inner coil window 11 and a glass groove 12 are cut. Glass 13 is heated and molded on the gap matched surfaces of the halves 8a and 8b, the surface is specularly finished, the halves 8a and 8b are cut at a chain line position 17 through a gap spacer, and the curved surface 19 is polished.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a magnetic head made of a soft magnetic thin film and a nonmagnetic substrate for recording and reproducing high frequency signals, such as in a video table recorder compatible with HDTV.

Conventionally, the manufacturing method of this type of magnetic head is shown in Figs. 8 to 1.
The method was as shown in Figure 4. A conventional method for manufacturing a magnetic head will be described below with reference to the drawings.

As shown in FIG. 8, a ferromagnetic metal thin film 32 and an insulating thin film 33 are alternately formed on the surfaces of a plurality of non-magnetic substrates 31 using a vacuum thin film forming technique such as sputtering, as shown in FIG. A laminated film 34 is formed, and a glass thin film 36 is further formed on at least one of the surfaces of the plurality of nonmagnetic substrates 33 except for the outermost surfaces 35a and 35b using a vacuum thin film forming technique. Next, these plurality of non-magnetic substrates 3
1. A composite of the ferromagnetic metal thin film 32, the laminated thin film 33, and the glass thin film 36 is stacked and heated while being pressed.
By fusing with glass, a joined body 37 as shown in FIG. 9 can be obtained. This joined body 37 is sliced with a rotary grindstone such as a dicing saw, a wire saw, etc. to form a pair of magnetic core block halves 38a and 38b as shown in FIG.
get. Here, in the magnetic head used in a video tape recorder, the azimuth recording method 5 can be used, and it is well known that the head is sliced at a desired azimuth angle.

Next, as shown in FIG.
A reinforcing glass groove 4 is formed in parallel with a laminated film 34 of a ferromagnetic metal thin film and an insulating thin film in between using a rotating grindstone such as a grinding saw.
Cut out 0. Here, FIG. 11 shows the glass groove 40 for sleeve reinforcement.
A jig 41 for cantering at an azimuth angle θ so that the ferromagnetic metal thin film and the insulating thin film are cut parallel to the laminated body 34.
This shows the case where it is placed on the

Next, as shown in FIG. 12, at least one magnetic core book opening half 38a. At the gap of 38h, cut out the inner winding window 42 and the glass groove 43. Further, glass 44 is molded on the gap abutting surfaces of the magnetic core block halves 38a * 3 8 b, and this surface is mirror polished, and then the pair of magnetic core block halves 38a,
The gap butting surfaces of 38b are connected to the gear tubes d-
The magnetic core block 45 is obtained by abutting the magnetic core blocks 45 and 45 by heating and melting and joining the glass/14.

Next, as shown in FIG. 13, cutout grooves 47 are formed on the magnetic medium contact surface 46 of the magnetic core block 45 to reduce the contact area of the magnetic medium color and to improve contact with the medium. ,
They are provided in parallel on both sides of the laminated pattern 34 of the ferromagnetic metal thin film and the insulating thin film. Furthermore, as shown in FIG. 14, a manufacturing method is adopted in which the surface 46 in contact with the magnetic medium is polished on one side, and the magnetic head chip 48 is obtained by slicing it with a rotary grindstone such as a slicer or a wire saw. was.

By the way, the above-mentioned conventional magnetic head manufacturing method is based on the first method.
When a reinforcing glass groove 40 is cut out in the gap abutting surface 39a of the magnetic core block half body 38a as shown in FIG. 1, or a cutout groove 47 is used to reduce the contact area of the medium as shown in FIG. When cutting or cutting into magnetic head chips, a thickness of about 1 μm must be added to the thickness of the non-magnetic substrate 31, the thickness of the laminated film 34 of a ferromagnetic metal thin film and an insulating thin film, and the thickness of the glass film 36. Variations occur, and a pitch deviation of several micrometers occurs in the joined body 37, which is made by joining a plurality of these together.
There are disadvantages such as it becomes impossible to perform processing at a desired position, resulting in a decrease in yield, and it takes time and effort to perform processing corresponding to the pitch deviation.

In the method for manufacturing a magnetic head of the present invention, at least a ferromagnetic metal thin film is deposited on the surface of a first nonmagnetic substrate, and a second nonmagnetic substrate is coated on the surface of the first nonmagnetic substrate. A glass thin film is melted and bonded to the surface of the substrate to form a bonded body, and the ferromagnetic metal thin film is bonded in the in-plane direction.
A plurality of magnetic core bodies are cut out so as to be lined up in the depth direction of the magnetic gap to form a pair of magnetic core block halves, which are subjected to the subsequent manufacturing process.

Rejection Due to the above configuration, a plurality of thin film magnetic head cores are located only in the in-plane direction of the laminated film of the ferromagnetic metal thin film and the insulating thin film, and no thin film magnetic head cores are located in the normal direction. In principle, the structure is such that there is no pitch deviation during core butting work due to variations in substrate thickness and film thickness, and there are glass grooves for reinforcement and cutouts to reduce the contact area of the magnetic medium due to pitch deviation. It is possible to eliminate deviations in processing positions.

Real 1u special The present invention will be explained below with reference to the drawings.

1 to 7 are perspective views showing an embodiment of the method for manufacturing a magnetic head according to the present invention.

As shown in FIG. 1, a ferromagnetic metal thin film 3 such as Sendust and an insulating thin film 4 such as Sif+ are alternately coated on the inner surface of a first non-magnetic substrate 1 using a vacuum thin film forming technique such as sputtering. The layers are laminated to form a laminated film 5. Next, a glass film 6 is deposited on the surface of the second nonmagnetic substrate 2 using a vacuum thin film formation technique. Next, the laminated film 6 and the glass film 6 are butted together and heated and melted to obtain a joined body 7 as shown in FIG. 2.

Next, as shown in FIG.
A pair of strip-shaped magnetic core block halves 8a and 8b are obtained by separating the magnetic core blocks.

Next, as shown in FIG. 4, reinforcing glass grooves are formed on both sides of the laminated film 5 of the ferromagnetic metal thin film and the insulating thin film in parallel to the laminated film 5 on the gap abutting surface 9a of at least one of the magnetic core block halves 8a. Cut out 10, and further cut out inner window 1 for winding.
1 and the glass groove 12 are cut.

Next, glass 13 is heated and molded on the gap abutting surfaces of the magnetic core block halves 8a*8b, and then mirror polished.

Further, as shown in FIG. 5, the pair of magnetic head core halves 8a and 8b are butted together via a gap spacer, and the above-mentioned The laminates 5 are butted against each other to obtain a desired track width, heated, and the glass 13 is fused and bonded to obtain a magnetic core block 16. Further, the magnetic head tip 18 as shown in FIG. 6 is obtained by slicing at a desired cutting position l7. Furthermore, the magnetic medium contacting surface 19
In order to reduce the area of the surface in contact with the magnetic medium and to improve contact, grooves 20 are cut out parallel to the laminated film 5.

Furthermore, the magnetic medium contacting surface 19 is polished into a curved surface, and both side surfaces 21 are polished to a flat surface so as to obtain a desired chip thickness, thereby obtaining a magnetic head as shown in FIG.

As explained above, the present invention utilizes a pair of thin film magnetic cores in which a plurality of thin film magnetic cores are arranged only in the in-plane direction of a laminated film of a ferromagnetic metal thin film and an insulating thin film formed on a non-magnetic substrate. By making half of the magnetic core block and cutting the reinforcing glass structure and cutting the notch on the surface in contact with the magnetic medium, we can eliminate the cutting process that occurs due to variations in substrate thickness, ferromagnetic metal thin film, and glass film thickness. Misalignment can be prevented and yield can be improved.

In addition, when matching a pair of magnetic core block halves to align the tracks, track misalignment at the front gap and rear gap is observed from both sides of the magnetic medium facing surface and the bottom end of the magnetic core to determine the track width. This has the effect of reducing output fluctuations due to track deviation of the narrow track head.

[Brief explanation of the drawing]

1 to 7 are perspective views showing an embodiment of the method for manufacturing a magnetic head of the present invention. 8 to 14 are perspective views showing a conventional method of manufacturing a magnetic head. 1. 2, 31...Nonmagnetic substrate, 3, 32
...Ferromagnetic metal thin film, 4.33...
Insulating thin film, 5.34... Laminated film of ferromagnetic metal thin film and insulating thin film, 6,36... Glass film, 10.40... Reinforcing glass groove, 20, 47... Notch groove that regulates the width of the surface in contact with the magnetic medium. (0) Fig. 1・t,bl t (b) 5 Fig. 2 Fig. 3 Tube 5 Fig. 6 Fig. 7 Fig. 35 CL 35 CQ) Fig. 8 Fig. 1 Fig. 41 Fig. 11 Fig. 12 Fig. 13 Figure 46 / / ? 14 Figure

Claims (1)

[Claims] A pair of non-magnetic substrates each having an area corresponding to a large number of cores is prepared, and a large number of ferromagnetic metal thin film cores are formed on at least one surface of the non-magnetic substrate. A ferromagnetic metal thin film core is sandwiched between the two to obtain core block halves, a set of the core block halves is prepared, cores are joined to form a gap, and then the cores are cut into individual cores. A method of manufacturing a magnetic head.