JPH0317634U - - Google Patents
Info
- Publication number
- JPH0317634U JPH0317634U JP7851989U JP7851989U JPH0317634U JP H0317634 U JPH0317634 U JP H0317634U JP 7851989 U JP7851989 U JP 7851989U JP 7851989 U JP7851989 U JP 7851989U JP H0317634 U JPH0317634 U JP H0317634U
- Authority
- JP
- Japan
- Prior art keywords
- side plates
- wafer carrier
- wafer
- plates
- support plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000000969 carrier Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Description
第１図は本実施例のウエーフアキヤリアの斜視
図を、第２図は第１図に用いられる貫通文字の形
状例を示す説明図である。第３図及び第４図は従
来のウエーフアキヤリアの斜視図である。
１…ウエーフアキヤリア、２…半導体ウエーフ
ア収納用溝、３，４…側板、５…支持板、６…貫
通文字。
FIG. 1 is a perspective view of the wafer carrier of this embodiment, and FIG. 2 is an explanatory diagram showing an example of the shape of the penetrating characters used in FIG. 1. 3 and 4 are perspective views of conventional wafer carriers. DESCRIPTION OF SYMBOLS 1... Wafer carrier, 2... Semiconductor wafer storage groove, 3, 4... Side plate, 5... Support plate, 6... Penetration character.
Claims (1)
板と前記側板を結合する前後の支持板とからなる
ウエーフアキヤリアにおいて、少なくとも前記側
板又は支持板の一方にウエーフアキヤリア固有の
識別番号あるいは識別記号を貫通文字を用いて設
けてなることを特徴とするウエーフアキヤリア。 In a wafer carrier consisting of a pair of side plates having grooves for storing semiconductor wafers and front and rear support plates that connect the side plates, at least one of the side plates or the support plates is provided with an identification number or identification symbol unique to the wafer carrier. A wafer aquillia characterized by being set up using letters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7851989U JPH0317634U (en) | 1989-07-03 | 1989-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7851989U JPH0317634U (en) | 1989-07-03 | 1989-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317634U true JPH0317634U (en) | 1991-02-21 |
Family
ID=31621865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7851989U Pending JPH0317634U (en) | 1989-07-03 | 1989-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317634U (en) |
-
1989
- 1989-07-03 JP JP7851989U patent/JPH0317634U/ja active Pending
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