JPH0317634U - - Google Patents

Info

Publication number
JPH0317634U
JPH0317634U JP7851989U JP7851989U JPH0317634U JP H0317634 U JPH0317634 U JP H0317634U JP 7851989 U JP7851989 U JP 7851989U JP 7851989 U JP7851989 U JP 7851989U JP H0317634 U JPH0317634 U JP H0317634U
Authority
JP
Japan
Prior art keywords
side plates
wafer carrier
wafer
plates
support plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7851989U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7851989U priority Critical patent/JPH0317634U/ja
Publication of JPH0317634U publication Critical patent/JPH0317634U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本実施例のウエーフアキヤリアの斜視
図を、第２図は第１図に用いられる貫通文字の形
状例を示す説明図である。第３図及び第４図は従
来のウエーフアキヤリアの斜視図である。 １…ウエーフアキヤリア、２…半導体ウエーフ
ア収納用溝、３，４…側板、５…支持板、６…貫
通文字。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエーフア収納用の溝を有する一対の側
    板と前記側板を結合する前後の支持板とからなる
    ウエーフアキヤリアにおいて、少なくとも前記側
    板又は支持板の一方にウエーフアキヤリア固有の
    識別番号あるいは識別記号を貫通文字を用いて設
    けてなることを特徴とするウエーフアキヤリア。
JP7851989U 1989-07-03 1989-07-03 Pending JPH0317634U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7851989U JPH0317634U (ja) 1989-07-03 1989-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7851989U JPH0317634U (ja) 1989-07-03 1989-07-03

Publications (1)

Publication Number Publication Date
JPH0317634U true JPH0317634U (ja) 1991-02-21

Family

ID=31621865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7851989U Pending JPH0317634U (ja) 1989-07-03 1989-07-03

Country Status (1)

Country Link
JP (1) JPH0317634U (ja)

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