JPH03177226A - Load shifter device in clean room - Google Patents

Abstract

PURPOSE:To prevent dust generated from the drive section of a shifter device from scattering, by sucking dust from a rotating and driving device through a carrier casing and dust from the drive part of a support arm through a rotary cylinder into a dust cover, and then by sucking and discharging all dust through an exhaust duct. CONSTITUTION:During delivery operation, dust which is generated from the rotating and driving section of a rotary cylinder 17 and the elevating and driving part of a support arm 18 and a load receiving and driving device within a carrier casing 15 is sucked and discharged into an exhaust duct 36 by a suction fan 37. Further, dust which is generated from the driving part of the support arm 18 within the rotary cylinder 17 is led by air flowing from an opening 19, and is then sucked into the carrier casing 15 by way of dust suction holes 34, a dust cover 33 and a communication port 35, and is then discharged into the exhaust duct 36 by the suction fan 37. Further, since a delivery port 8 is closed by a door 32, always, excepting the time of rotation of the rotary cylinder 17, it is possible to prevent dust from flowing between a clean room 2 and a storage section 6.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is applicable to cargo transfer in a clean room where cargo is received and delivered to a transport device that transports cargo (articles) that are extremely sensitive to dust, such as semiconductors. Regarding equipment.

2. Description of the Related Art A transfer device for receiving and transferring loads to and from a conventional conveyance device is disclosed, for example, in Japanese Patent Application Laid-open No. 180622/1983.

Problem to be Solved by the Invention When installing the above-mentioned transfer device in a clean room, in order to prevent dust generated from the sliding parts of the transfer device from adhering to the load, a cover is attached to each movable part to prevent dust from attaching to the transfer device. It is possible to prevent the emission of

However, in the case of parts such as support arms that hold loads, which repeatedly move up and down or approach and separate, openings connected to the movable body are required in the cover of the drive device, and dust can enter the clean room through these openings. may be emitted.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above problems and provide a transfer device that can prevent dust from dispersing and is suitable for clean rooms.

Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a load transfer device disposed in a clean room opposite to a station formed on a transfer path of the load transfer device. A rotary drive device for rotating a rotary cylinder on a mount case about a vertical axis is provided within the frame case, and a pair of left and right support arms, which can move toward and away from each other and can be raised and lowered, are attached to the side of the rotary cylinder through an opening. A centering cover is provided on the pedestal case to protrude and cover the lower side of the rotary cylinder, and a dust suction hole is formed on the lower side of the rotary cylinder to communicate the inside of the rotary cylinder and the centering cover. A communication port is formed to communicate the inside of the centering cover and the inside of the pedestal case, and an exhaust duct is provided in the pedestal case.

Effect In the above configuration, the dust generated from the rotation drive device of the rotary tube is sucked and discharged from the inside of the mount case to the exhaust duct, and the dust generated from the drive section of the support arm is entrained by the air flowing in from the opening and rotated. The dust is sucked into the dust cover from inside the cylinder through the dust suction hole, and further suctioned and discharged into the exhaust duct through the communication hole and the frame case. Therefore, dust generated from the drive section of the 8n device can be prevented from being dissipated into the clean room.

Example An embodiment of the present invention will be described below based on the drawings.

Reference numeral 1 denotes a load transfer device disposed in a clean room 2 and composed of a rail device 3 and a C1 carriage 4 guided by the rail device 3, and a transfer path 5 of this load transfer device tl.
is a storage device! i! A station 9 is formed and arranged on the conveyance path 5 facing the insertion/extraction opening 8 formed in the 0 body 7, which is disposed so as to pass through the side of the box-like body 7 of the 0 body.

The clean room 2 is configured so that clean air is blown downward from the ceiling side through a filter 10, and the descending clean air is sucked into the floor below through a mesh-type floor 11. Although not shown, the cargo storage device 6 includes a main body 7
It is equipped with a shelf for storing the goods 12 inside and a loading/unloading device for loading and unloading the goods 12, and carries the goods 12 in and out for predetermined processing steps.

A transfer device 14 for receiving and transferring the cargo 12 is disposed between the station 9 and the movable cargo receiving platform 13 disposed at the loading/unloading port 8 . The transfer device 14 and the cargo receiver 13 are
It is provided in a pedestal case 15 fixed to the main body 7,
The rail device 3 at the 9th position on the stage 3rd floor also uses this frame case 1.
5 is penetrated and supported.

In this transfer device 14, a rotating cylinder 17 having an octagonal cylinder shape and having a top plate 17a and a bottom plate 17b is fixed to a vertical rotating shaft 16 that penetrates the upper surface of a gantry case 15 and is rotatably supported. A pair of left and right support arms 18, which can move toward and away from each other via drive means (not shown) such as cylinders, are disposed at the upper part of this rotation #J17 in 180-degree symmetrical directions, and the side plates of the rotation cylinder 18 Opening 19 formed in 18c
The tip is projected upwardly through the tip. Further, this support arm 18 is connected to an elevating shaft 20 that is fitted within the axis of the rotary shaft 16 so as to be able to rise and fall freely, and is able to move up and down between a lowered position and a raised position shown in phantom lines in FIG. A driven sprocket 21 is attached to the lower end of the rotary shaft 16 in the frame case 15, and the drive sprocket 23 of the output shaft of the rotary drive motor 22 disposed in the frame case 15 and the driven sprocket 21 are connected to each other via a belt 24. A horizontal lifting rod 25 is fixed to the lower end of the lifting shaft 20 that protrudes from the 0-rotation shaft 16, which is interlocked with the rotation shaft 16 and rotates the rotation frJ16.
An upright shaft 26 is erected parallel to. A lifting drive motor 28 is disposed within the gantry case 15, and the output shaft thereof has a pinion 27 that meshes with the rack of the rack shaft 26.
The lifting position of the support arm 18 shown in solid lines in FIG. 2 and the receiving position shown in phantom lines are transferred If! It is driven up and down between the positions. In addition,
A balance weight 30 is connected to the lower end of the lifting shaft 20 via a connecting member, a sprocket, and a cable body 29.

The loading/unloading port 8 is surrounded by an opening frame 8a and a top frame 8b that are erected on both sides of the gantry case 15, and is surrounded by a rotating cylinder 17.
A hollow wall 31 is disposed at both lower portions of the container.

And said rotation 1'! ! A pair of left and right door bodies 32 are attached to the i17 in a direction perpendicular to the support arm 18, and the support arm 1
8 is the transfer position of the load 12 located above the station 9 and the load receiving platform 13, and the side frame 8a, the ceiling frame 8b and the hollow q
The space of the entrance/exit 8 surrounded by 31 is closed by a door body 32. Rotary cylinder 1 including the hollow wall 31
A ring-shaped dust cover 33 with a U-shaped cross section and open on the rotating eJ17 side is disposed on the pedestal case 15 around the lower part of the rotary tube 17 facing the dust cover 33.
A dust suction hole 34 is formed at a predetermined position in the side plate 17 of. In addition, the dust collection cover 33 at the 31st position is connected to the rack rod 26.
is formed so as to extend slightly outward so that it can be inserted, and a communication port 35 that communicates the inside of the dust collection cover 33 and the inside of the pedestal case 15 is formed on its lower surface.

An exhaust duct 36 is connected to one side of the gantry case 15, and an intake fan 37 is attached to the inlet of the exhaust duct 36. In addition, a loading platform driving device 38 is also disposed within the gantry case 15 and is capable of moving the loading platform 13 inward of the main body 7 to change the receiving angle of the load 12.

Next, the operation of this embodiment will be explained.

When the self-propelled cart 4 loaded with the load 12 on the load receiving portion 4a stops at the station 9, each support arm 18 in the raised and separated state is moved by the pinion 27, rack shaft 26,
The lifting lot 25 is lowered via the lifting shaft 20 and moved closer to the cargo 12 for storage on the cargo receiving section 4a and the cargo receiving platform 1.
The cargoes 12 above 3 for delivery are held respectively. and,
After raising the support arm 18 again, drive the rotary drive motor 22 to rotate the rotation @17 by 180 degrees, lower the support arm 18,
The cargo 12 for warehousing is transferred onto the receiving platform 13, and the cargo 12 for unloading is transferred to the receiving section 4 of the self-propelled cart 4.
Transfer to a.

During the handing operation, this receiver is placed in the rotating cylinder 1 in the frame case 15.
Dust generated in the rotary drive unit 7, the lift drive unit of the support arm 18, and the loading platform drive unit 38 is sucked and discharged into the exhaust duct 36 by the intake fan 37. In addition, dust generated from the driving part of the support arm 18 in the rotary cylinder 17 is entrained by the air flowing in from the opening 19, and is carried through the dust collection hole 34, dust collection cover 33,
The air is sucked into the frame case 15 through the communication port 34 and discharged into the exhaust duct 36 by the intake fan 37 . Further, since the loading/unloading port 8 is closed by the door body 32 except when the rotary tube 17 is rotating, dust does not flow in or out between the clean room 2 and the cargo storage device 6.

Effects of the Invention As described above, according to the present invention, the rotary cylinder and the pedestal case are communicated with each other through the dust suction hole, the dust suction cover, and the communication port,
The dust generated from the drive part of the support arm inside the rotary tube is entrained by the air flowing in from the opening and guided into the mount case, and is sucked and discharged into the exhaust duct together with the dust generated from the rotation drive device of the rotary tube. It is possible to reliably prevent dust generated from the drive unit of the mounting device from dispersing into the clean room.

[Brief explanation of drawings]

The drawings show one embodiment of the present invention, and FIG. 1 is a side sectional view of the transfer device, FIG. 2 is a front sectional view thereof, and FIG. 3 is a plan sectional view thereof. DESCRIPTION OF SYMBOLS 1... Load conveyance device, 5... Conveyance path, 7... Main body, 8... Loading/unloading port, 9... Station, 13...
... Loading platform, 14... Transfer device, 15... Frame case, 16... Rotating shaft, 17... Rotating tube, 18...
Support arm, 19...opening', 20...lifting shaft, 22
...Rotation drive motor, 28...Elevating drive motor, 3
DESCRIPTION OF SYMBOLS 1... Hollow wall, 32... Door body, 33... Container cover, 34... Dust suction hole, 35... Communication port, 36... Exhaust duct, 37... Intake fan.

Claims (1)

[Claims] 1. In a load transfer device installed in a clean room facing a station formed on the transport path of the load transfer device, a rotation drive is installed inside the mount case to rotate a rotary cylinder on the mount case around a vertical axis. A dust collecting cover is provided on the rotating tube, and a pair of left and right support arms that can move toward and away from each other and can be raised and lowered protrude laterally through the opening, and a dust collection cover is provided on the mount case to cover the lower side surface of the rotating tube. A dust suction hole is formed in the lower side surface of the rotary cylinder to communicate the inside of the rotary cylinder and the inside of the dust collection cover, and a communication port is formed in the upper surface of the pedestal case to communicate the inside of the dust collection cover and the inside of the pedestal case. A load transfer device in a clean room characterized by an exhaust duct connected to a mount case.