JPH0317807A - Manufacture of perpendicular recording thin film magnetic head - Google Patents

Abstract

PURPOSE:To enhance a shield effect for outside leakage magnetic flux concentrated on the tip part of a main magnetic pole by arranging the substrate confronting plane and both side planes of the main magnetic pole so as to enclose with a magnetic substrate functioning as magnetic shield. CONSTITUTION:A groove 21 having a V-shaped bottom plane and a notched part 22 having a bottom plane shallower than the groove 21 and flat in a direction intersecting orthogonally to the longitudinal direction of the V-shaped groove 21 are provided on the magnetic substrate 11. After a nonmagnetic insulating material 13 is filled in the groove 21 and the notched part 22, an inter-layer insulating layer 14a, a thin film coil 15, and an inter-layer insulating layer 14b are formed sequentially so as to enclose the notched part 22. The main magnetic pole 16 for recording and reproduction is formed so that a rear end part can be extended to the plane of the substrate 11 including the layer 14a and the tip part to the plane of the insulating layer 13 in the groove 21, respectively. Next, the tip part 16a of the main magnetic pole 16 is cut with the substrate 11 along the longitudinal direction of the groove 21 on an oblique plane at a side in the vicinity of the notched part 22 of the groove 21.

Description

[Detailed Description of the Invention] [Summary] Regarding a method of manufacturing a perpendicular magnetization recording type thin film magnetic head used in magnetic disk devices, magnetic tape devices, etc., the structure of the main pole arrangement area of the magnetic substrate is improved, In order to improve the shielding effect against the external leakage Luha field concentrated at the tip of the main pole, a groove with a V-shaped bottom surface is formed on the magnetic substrate, and a groove is formed in a direction perpendicular to the longitudinal force direction of the ■-shaped groove. A notch is provided that is shallower than the letter-shaped groove and has a flat bottom surface, and after filling the letter-shaped groove and the notch with a non-magnetic insulating material, an interlayer insulating layer is formed to cover the notch. , a thin film coil, and an insulating layer between the eyebrows are sequentially formed, and a main magnetic pole for recording and reproduction is provided, the rear end including the interlayer insulating layer is on the magnetic substrate surface, and the tip is on the V
The tips of the main poles are formed so as to extend on the non-magnetic insulating material surfaces in the V-shaped grooves, and the tips of the main poles are aligned in the longitudinal direction of the grooves on the inclined surface of the V-shaped grooves on the side closer to the notch. The method includes a step of cutting along the magnetic substrate together with the magnetic substrate.

[Industrial application field]

The present invention relates to a method for manufacturing a thin film magnetic head of vertical position recording type used in magnetic disk devices, magnetic tape devices, etc.

Perpendicular magnetization recording is attracting attention as a method that can overcome the high-density limitations of commonly used horizontal magnetization recording.
In this perpendicular magnetization recording method, information is magnetized in a direction perpendicular to the surface of a perpendicular magnetic recording medium that has a two-layer structure in which a magnetic recording layer with perpendicular anisotropy is laminated on a soft magnetic layer with high magnetic permeability. A single-pole thin-film magnetic head for perpendicular recording has already been proposed, which can realize high-density magnetic recording.

Such a single-pole type thin-film R-type hesode is exposed to external a
/9J. The main magnetic pole is abnormally excited by the external leakage {f field}, and the already recorded n
There is a tendency for magnetized information to be partially demagnetized or erased. Therefore, there is a need for a method for easily manufacturing a thin n* magnetic head for perpendicular recording that prevents the influence of such external leakage magnetic fields and improves reliability.

[Conventional technology]

The conventional single 45i pole perpendicular recording thin film n-air head is
As shown in the plan view of FIG. 4 and the cross-sectional view of FIG. 5 taken along the line A-A' in FIG.
Magnetic substrate 1 made of ferrite such as n, Mn-Zn, etc.
A wide groove 12 having a V-shaped bottom surface 12a at the center of the bottom is formed in a predetermined area of 1, and glass, Si
n. A non-magnetic insulating material 13 such as the like is buried.

Then, on the buried region of the non-magnetic insulating material 13, a thin film coil 15 and an interlayer insulating layer 14 formed in a spiral shape etc.
b is sequentially formed, and further on the interlayer insulating layer 14b, an amorphous Co-Z film having a thickness of, for example, 0.3 to 0.5 μm is formed.
A recording/reproducing main magnetic pole 16 made of an r-based magnetic thin film is placed such that its tip 16a is placed on the surface of the non-magnetic insulating material 13 on the V-shaped bottom 12a of the groove l2, and its rear end 16b is placed on the magnetic substrate 11.
They are formed so as to extend on each surface.

In addition, in the area other than the tip 16a on the main magnetic pole 16,
A raised magnetic layer 17 made of Ni-Fe with a film thickness of about 3 μm is laminated to lower the 6n air resistance of the main magnetic pole 16,
The combination with the above-mentioned 65t substrate 11, which has low air resistance, achieves high recording and reproducing efficiency.

Furthermore, a raised magnetic layer l including the main pole tip 16a
Aj on 7! zOt etc. protection jff I19! 1 8
At the same time, the main pole tip 16a is buried in the protective film l8 and the groove l2 along the longitudinal direction of the groove l2 on one inclined surface of the V-shaped bottom 12a of the groove 12. The non-magnetic insulating material 13 and the magnetic substrate 11 are cut and removed and polished. A medium facing surface l9 is formed by cutting, and the medium facing surface l9 is shaped into a slider by cutting.

A thin film magnetic head for perpendicular recording with such a configuration is capable of recording and
During reproduction, a high magnetic permeability soft magnetic layer interposed between the disk substrate and the magnetic recording layer of the facing magnetic recording medium is connected to the main magnetic pole 16 of the magnetic head and the magnetic substrate 11 functioning as a magnetic flux return yoke. By using it in a magnetic path, it is possible to perform high-density magnetic recording and reproduction in the direction perpendicular to the magnetic recording layer of the medium.

Further, the end face of the magnetic substrate l1 in contact with the non-magnetic insulating material 13 embedded in the groove l2 on the medium facing surface 19 is inclined, and the edge of the frosted surface of the magnetic substrate 11 and the surface in contact with the non-magnetic insulating material 13 is tilted. Since the edges of the end portions are obtuse angles, concentration of magnetic flux from the opposing medium is reduced, and generation of edge noise (distortion of reproduced waveform) due to concentration of magnetic flux is prevented.

[Problem to be solved by the invention]

By the way, the thin film magnetic head for perpendicular recording as described above is
Due to the single magnetic pole type and the presence of a soft magnetic layer in the above-mentioned two-layer one-structure perpendicular magnetic recording medium used in combination with the magnetic head, the medium drive in a device such as a magnetic disk device is difficult. It is easily affected by leakage magnetic fields from magnetic mechanisms such as the main magnetic pole tip 16a shown in FIG. Since the distance between the main magnetic pole 16 and the magnetic substrate 1l functioning as a magnetic shield is large, the effect of the magnetic substrate 11 in shielding the main magnetic pole 16 from the shallow magnetic field mentioned above cannot be sufficiently exhibited. The above-mentioned leakage magnetic field is absorbed, for example, by a soft magnetic layer in a perpendicular magnetic recording medium, and the leakage magnetic field absorbed by the soft magnetic layer is concentrated at the tip 16a of the main pole I6 of the magnetic head facing the medium surface. Therefore, the main group pole 1
6 is excited to the extent that it magnetizes the medium, which causes the information on the medium to be demagnetized and deteriorated, or in the worst case, to be erased.

In view of the above-mentioned conventional problems, the present invention provides a novel perpendicular recording thin film magnetic field that improves the structure of the main pole arrangement area of the magnetic substrate to enhance the shielding effect against external leakage magnetic fields concentrated at the tip of the main pole. The object of the present invention is to provide a method for manufacturing a head.

[Means to solve the problem]

In order to achieve the above-mentioned object, the present invention provides VV on a magnetic substrate.
A groove having a letter-shaped bottom surface and a notch portion having a flat bottom surface and shallower than the letter-shaped groove in a direction perpendicular to the longitudinal direction of the ilv-shaped groove are provided, and the V-shaped groove and the cutout portion are provided. After filling the part with a non-magnetic insulating material, an interlayer insulating layer, a thin film coil, and a glabellar insulating layer are sequentially formed so as to cover the notch, and a main magnetic pole for recording and reproduction is further formed, including on the interlayer insulating layer. The rear end portion is formed to extend on the surface of the magnetic substrate, and the tip portion is formed on the non-magnetic insulating material surface of the V-shaped structure, and the tip portion of the main pole is formed on the surface of the V-shaped structure. 9 [Function] Thin magnetic recording material for perpendicular recording obtained by the manufacturing method of the present invention The head has a structure in which the substrate-facing surface of the main n-pole and its both sides are surrounded by a magnetic substrate that functions as a magnetic shield through a buried non-6a insulating material. The effect of shielding external leakage magnetic fields is enhanced.

As a result, demagnetization or erasure of magnetized information on a medium that has already been recorded is prevented, stable reproduction output characteristics are obtained, and reliability is improved.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 and FIG. 2 are diagrams for explaining an embodiment of the method for manufacturing a thin film magnetic head for perpendicular recording according to the present invention.
Figure 1 is a plan view of the main part showing the relationship between the magnetic substrate in which non-magnetic insulating material is buried and the main magnetic pole, and Figure 2 is a plan view of the main part showing the relationship between the magnetic substrate embedded with non-magnetic insulating material and the main magnetic pole.
FIG. 3 is a sectional view taken along a cutting line.

In each of these figures, parts that are equivalent to those in FIGS. 4 and 5 are designated by the same reference numerals.

As shown in these figures, in the embodiment, the slider N
On the magnetic substrate 11 made of ferrite such as i-Zn or Mn-Zn, a ■-shaped bottom surface is formed in the area where the main magnetic pole 16 is arranged. 1
/#21 having a and a flat bottom surface shallower than the ■-shaped groove 21 in a direction perpendicular to the longitudinal direction of the V-shaped groove 21;
In addition, the notch portion 22 having a width narrower than the main magnetic pole 16 is shaped by mechanical grinding, for example, to form the shape of the letter ■. r! #
A non-magnetic insulating material 13 made of glass, SiO2, or ^l203 is provided in the notch 21 and the notch 22 by a heating melting method, a sputtering method, or the like.

Next, a thin film coil in a spiral shape or the like is placed on the notch 22 in which the non-magnetic insulating material 13 is embedded in the magnetic substrate ti through an interlayer insulating layer 14a made of a thermosetting insulating resin material or the like as shown in the figure. 15. The interlayer insulating layer 14b is sequentially deposited, and on this interlayer insulating layer 14b, for example, j is 0.3~
A main magnetic pole 16 made of an amorphous Co-Zr magnetic thin film with a film thickness of 0.5 μm has its tip 16a on the surface of the non-magnetic insulating material 13 buried in the V-shaped groove 21, and its rear end 16b. are formed so as to extend on the surface of the magnetic substrate 11, respectively.

Thereafter, a raised magnetic layer l7 made of Ni--Fe is formed on the main pole 16 except for the tip 16a, as in the conventional case.
A protective film l8 made of A N 203 or the like is formed on the raised magnetic layer l7 including the main pole tip 16a.
Adhere to the precepts.

Then, the hesode control board is attached to the main magnetic pole tip 16a.
The notch 22 of the V-shaped groove 21 is opened so that
The groove 21 is cut out along the longitudinal direction at a corresponding position on the inclined surface on the side closer to the groove 21, and the medium facing surface l9 is completely cut out.

In a thin film magnetic head constructed using this method,
As shown in the medium facing surface of the main pole tip 16a viewed from the medium side in FIGS. Since the structure is such that the main magnetic pole 16 is surrounded by the magnetic substrate l1 which functions as a magnetic shield through the non-magnetic insulating material 13, the external leakage magnetic field from the medium side surrounds the main magnetic pole 16. Since the concentration of the external leakage magnetic field on the main pole tip 16a is reduced, unexpected situations such as demagnetization or erasure of magnetization information on the already recorded medium as in the conventional case occur. can be prevented.

〔Effect of the invention〕

As is clear from the above description, according to the method of manufacturing a thin film magnetic hesode for perpendicular recording according to the present invention, a magnetic member with low magnetic resistance, that is, a magnetic substrate is arranged so as to surround the main magnetic pole on the medium facing surface. This structure significantly improves the effectiveness of shielding the main pole against external leakage magnetic fields, and improves reliability by preventing demagnetization or erasure of magnetization information recorded on the medium. It has excellent practical effects.

[Brief explanation of the drawing]

FIG. 1 is a plan view of essential parts for explaining an embodiment of the method for manufacturing a thin film magnetic head for perpendicular recording according to the present invention, and FIG. 2 is a cross section taken along the line BB' shown in FIG. 1. 3 is a plan view of the main part showing the vicinity of the tip of the main pole on the medium facing surface of the thin film magnetic head for perpendicular recording according to the present invention. FIG. 4 shows a method of manufacturing a conventional thin film magnetic head for perpendicular recording. FIG. 5 is a cross-sectional view taken along the line A-A" shown in FIG. 4. FIG. 6 is a main magnetic pole on the medium facing surface of a conventional thin-film 4FI perpendicular recording head. FIG. 3 is a plan view of the main parts showing the vicinity of the tip. In FIGS.
is an interlayer insulating layer, 15 is a thin film coil, 16 is a main 6R pole, 1
6a is the main pole tip, 16b is the main pole rear end, l7 is a raised magnetic layer, l8 is a protective film, 21 is a V-shaped groove, 21a
2 indicates a v-shaped bottom surface, and 22 indicates a notch. IllFigure 2Figure 3

Claims (1)

[Claims] A groove (21) having a V-shaped bottom surface on a magnetic substrate (11), and a V-shaped groove (21) in a direction perpendicular to the longitudinal direction of the V-shaped groove (21).
A cutout (22) is provided which is shallower than the groove (21) and has a flat bottom surface, and the V-shaped groove (21) and the cutout (22) are filled with a non-magnetic insulating material (13). After that,
An interlayer insulating layer (14a) is formed to cover the notch (22).
), a thin film coil (15), and an interlayer insulating layer (14b) are sequentially formed, and a main magnetic pole (16) for recording and reproduction is formed on the magnetic substrate ( 1
1) on the surface, the tip portions are formed so as to extend on the surface of the non-magnetic insulating material (13) in the V-shaped groove (21),
The tip end (16a) of the main pole (16) is inserted into the V-shaped groove (
21) A perpendicular recording thin film characterized by comprising the step of cutting along the longitudinal direction of the groove (21) on the inclined surface on the side closer to the notch (22) together with the magnetic substrate (11). A method of manufacturing a magnetic head.