JPH03181011A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To improve productivity by forming the thin film of amorphous glass along the wall surface of grooves and grooving the thin film of the amorphous glass to the shape nearly complying with the groove shape, then forming a soft magnetic thin film on the worked surface. CONSTITUTION:The thin film 4 of the amorphous glass, such as, for example, SiO2, is formed by a vacuum deposition method or sputtering method, etc., on the groove wall surfaces 3 of the grooves 2.... The thin film 4 of the amor phous glass is thereafter subjected again to the grooving by a blade having the shape of the working part nearly identical with the shape at the time of dicing. The soft magnetic thin film 6 consisting of an Fe-Al-Si alloy is formed at a prescribed film thickness, i.e. the film thickness approximately correspond ing to the track width of the magnetic head by the vacuum vapor deposition or sputtering method, etc., on the one smooth surface 5 of the slopes of the amorphous glass covering the respective V-grooves 2.... The clogging to the higher number blade at the time of finishing is substantially prevented in this way and the productivity is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic head configured as a thin film laminated head by providing a soft magnetic thin film on a substrate made of a nonmagnetic material.

[Conventional technology]

In recent years, with the increase in the density of magnetic recording, high coercive force media such as metal tapes have become mainstream. For this reason,
Core materials used in magnetic heads are also required to have high saturation magnetic flux density. Therefore, as shown in FIG. 2, for example, a thin film laminated head is known in which a thin film 30 made of a soft magnetic metal having a high saturation magnetic flux density is provided on a substrate 31 made of a nonmagnetic material.

In the manufacturing process of the above magnetic head, as shown in FIG. 3, blades with a grain size of about 1000 (hereinafter abbreviated as #1000) are formed on a substrate 31 made of a non-magnetic material such as crystallized glass. After the process of forming continuous grooves 32 with a cross-sectional shape of a cross section by the dicing process using the dicing process, as shown by the broken line in the figure, 5μ
Finishing of the groove 32 is performed with a depth of cut of m or less. The thus obtained wall surface is coated with soft magnetic g, which is produced from the Fe-Al-3i alloy, by vacuum evaporation or sputtering.
A J film is formed.

After the above process, the grooves 32... are filled with low melting point glass, the surface is ground, and a window for coil winding is processed to form one side of the core block. After they are bonded to each other with a gap material in between, they are cut into a predetermined width to form a magnetic helad tip as shown in FIG. 2.

[Problem to be solved by the invention]

As mentioned above, when forming a soft magnetic thin film along the grooves 32..., in order to form this soft magnetic thin film with good magnetic properties, the surfaces of the grooves 32... should have, for example, a surface roughness of approximately 20
It is necessary to have a smooth finish of 0 angstrom or less. Then, as mentioned above, the continuous groove 32.
Since it is difficult to finish the wall surface of . The grooves 32 are finished by dicing using a high-count blade to form groove wall surfaces having the smoothness described above. On the other hand, the substrate 3 made of a non-magnetic material
First, crystallized glass, which has excellent wear resistance, is usually used, but this crystallized glass has poor dicing processability, so it is difficult to make a cut when finishing with dicing using the above-mentioned high-count blade. If the amount is increased, the blade may become clogged and cracks may easily occur in the substrate 3I. In addition, since clogging is likely to occur, it is necessary to set the machining feed rate to, for example, 0.3 m 1 sec or less, and it is not easy to process a large number of pieces.As a result, productivity is reduced. The problem is that it is inferior to

[Means for Solving the Problems] In order to solve the above problems, a method for manufacturing a magnetic head according to the present invention involves forming grooves in a substrate made of a non-magnetic material such as crystallized glass, and forming grooves on the walls of the grooves. In a method of manufacturing a magnetic head that requires a soft magnetic thin film to be provided along the substrate, a groove of a predetermined shape is formed in the substrate, and then a thin film of amorphous glass is formed along the wall of the groove. The method is characterized in that after a groove is formed on an amorphous glass thin film substantially following the groove shape, the soft magnetic thin film is formed on the processed surface.

[For production]

According to the above method, finishing of the groove by dicing using a high-count blade is performed on the amorphous glass thin film formed along the wall surface of the groove of the substrate, thereby forming a predetermined shape. Grooves having surface smoothness are formed.

The amorphous glass described above has better processability for dicing, etc. than non-magnetic materials, and is therefore less likely to clog high-count blades, making it suitable for finishing processing as described above. Since the speed is higher than that of the conventional method and it is possible to process a large number of items, productivity can be improved.

[Example] An example of the present invention will be described below based on FIGS. 1(a) to (i).

The manufacturing process of the magnetic head according to this example is shown in FIG. 1(a).
To explain the order while referring to ~(i), first, the first
As shown in Figure (a), the surface 1 of a substantially rectangular parallelepiped-shaped substrate l
A is formed with a plurality of grooves 2 having a cross section of a square shape having a predetermined pitch dimension A and depth B and extending parallel to each other and adjacent to each other.

As the substrate 1, since the surface of the substrate 1 becomes the sliding contact surface of the magnetic tape, a non-magnetic material with excellent wear resistance, such as crystallized glass, is selected. The above-mentioned groove processing on the substrate 1, which has a high hardness and therefore has high hardness, is performed by dicing. In this case, the particle size is 2000 (hereinafter referred to as #2000)
The grooves 2 having the above-mentioned shape are formed using a blade smaller than the size of the blade, usually about #1000.

Next, as shown in FIG. 1(b), an amorphous glass thin film 4 such as Sing is applied to the groove wall surfaces 3 of the grooves 2 by vacuum evaporation or sputtering to a film thickness of several micrometers to several micrometers.
101I. After this, Figure 1 (C)
As shown in FIG. 1, groove processing is performed on the amorphous glass thin M4 again using a blade having almost the same shape of the processed portion as in the dicing processing shown in FIG. 1(a).

In this case, the machined groove 2 of FIG. 1(a)...
#2000 is used as a finishing process to improve the surface smoothness of
The above processing is usually performed using a blade of approximately #3000. This finishing process, as mentioned above,
Since the process is performed on amorphous glass, which has better workability than the crystallized glass constituting the substrate 1, the smooth surface 5 with a surface roughness of about 200 angstroms or less can be diced without clogging the blade. Processing speed from 0.5
This can be done at a higher speed than conventional methods, on the order of t, om/SeC.

After the above, as shown in FIG. 1(d), each V-shaped groove 2
Fe-41 is deposited on one smooth surface 5 of the inclined surface of the amorphous glass covering ... by vacuum evaporation or sputtering.
The soft magnetic thin film 6 made of -5i alloy has a predetermined thickness, that is, approximately 20t, which is approximately equivalent to the track width of the magnetic head.
It is formed with a film thickness of Im.

Thereafter, as shown in FIG. 1(e), the low melting point glass 7 is filled onto the multi-grooves 2..., and then, as shown in FIG. 1(f), the surface of the low melting point glass 7 is filled. However, multi-groove 2...
・It is polished flat until it reaches the apex on the surface side,
It is formed as a one-sided core block 9. At this time, the areas of the soft magnetic thin film 6 that protrude beyond the surface-side apexes of the multi-grooves 2... are also removed at the same time, and the polished surface 1b has the surface-side apexes of the multi-grooves 2... Adjacent to the apex portion, a layer of the soft magnetic thin film 6 extending in a direction perpendicular to the plane of the paper is exposed.

Next, as shown in FIG. 1(g), a coil winding window 10 having a four-groove shape with a trapezoidal cross section is provided on the side of the polished surface 1b of the one-sided core block 9, and a coil winding window 10 having a four-groove shape with a trapezoidal cross section is formed on the side of the polished surface 1b of the one-sided core block 9. Coil winding windows 11 each having a U-shaped cross section are formed on the opposite surface.

Thereafter, a non-magnetic gap material such as SiO□ is deposited on the polished surface 1b by vacuum evaporation or sputtering. In this way, the coil winding windows 10 and 11
As shown in FIG. 1(h), the one-sided core block 9 on which the non-magnetic gap material is formed is polished to the other one-sided core block 9 formed in the same way, on which the non-magnetic gap material is coated. The surfaces 1b face each other, and the soft magnetic thin films 6 extending along the walls of the grooves 2 to the polishing surface tb are positioned on the same straight line and are fixed under pressure and bonded to each other. Then, the core block 12 is formed. After that, by cutting out the core block 12 with each groove width of 2,
A magnetic head chip 13 shown in FIG. 1(i) is produced. Then, the magnetic herad chip 13 is adhesively fixed to a base plate (not shown), and further subjected to coil winding and tape polishing to complete a magnetic head.

In this way, in the above embodiment, when forming the soft magnetic thin film 6 along the surface of the grooves 2 of the substrate l made of crystallized glass, the crystallization is performed along the grooves 2. An amorphous glass thin film 4 of amorphous glass, which has better workability than glass, is formed, and the grooves 2 and 4 are formed by dicing the amorphous glass thin film 4 using a high-count blade.
Finishing is performed to obtain the required surface smoothness. For this reason, during the finishing process described above, the blade does not become clogged as in the conventional case, and therefore, the occurrence of cracks in the substrate 1 is suppressed, and the processing speed is further increased. Since processing can be performed, productivity can be improved.

In addition, in the above embodiment, an example in which crystallized glass was used as the substrate 1 was explained, but it is also possible to use photosensitive crystallized glass as this crystallized glass,
Further, the present invention can also be applied when the substrate 1 is made of other non-magnetic materials such as ceramics.

〔Effect of the invention〕

As described above, the method for manufacturing a magnetic head according to the present invention includes:
After forming a groove of a predetermined shape on a substrate made of a non-magnetic material such as crystallized glass, a thin film of amorphous glass is formed along the wall surface of the groove, and then the above-mentioned method is applied to this thin film of amorphous glass. After processing grooves that substantially follow the groove shape, the above-mentioned soft magnetic thin film is formed on the processed surface.

This makes it possible to achieve a predetermined shape and smooth surface by finishing grooves by dicing using a high-count blade, for example, on an amorphous glass thin film that has better workability than crystallized glass as a substrate material. A groove having a certain degree is formed. For this reason, clogging of the high-count blade during the above-mentioned finishing process is less likely to occur, making it possible to increase the processing speed and process a large number of pieces, thereby increasing productivity. This has the effect of making it possible to improve the performance.

[Brief explanation of drawings]

FIGS. 1(a) to 1(i) each show a manufacturing process according to a method for manufacturing a magnetic head in an embodiment of the present invention. FIG. 1(a) is a perspective view of the substrate after groove-shaped grooves. FIG. 1(b) is a sectional view of a main part of the substrate after forming an amorphous glass thin film on the surface. FIG. 1(c) is a cross-sectional view of a main part of the substrate showing the finishing step of grooves formed on the amorphous glass thin film. FIG. 1(d) is a sectional view of a main part of the substrate after a soft magnetic thin film is formed on the groove surface. FIG. 1(e) is a sectional view of a main part of the substrate after the grooves are filled with low melting point glass. FIG. 1(f) is a sectional view of the main part of the substrate after the surface side of the low melting point glass has been ground. FIG. 1(g) is a perspective view of a one-sided core block formed by providing a coil winding window on the substrate after the above process. FIG. 1(h) is a perspective view of a core block formed by joining the two one-sided core blocks to each other. FIG. 1(i) is a perspective view of a magnetic herad chip cut out from the core block. FIGS. 2 and 3 show conventional examples. FIG. 2 is a perspective view of the magnetic head chip. FIG. 3 is an enlarged sectional view of the surface of the substrate for explaining groove processing on the substrate in the manufacturing process of the magnetic helad chip. 1 is a substrate, 2 is a groove, 4 is an amorphous glass thin film, 6 is a soft magnetic thin film, 7 is a low melting point glass, 9 is a core block on one side, 13
is a magnetic herad tip.

Claims (1)

[Claims] 1. A method for manufacturing a magnetic head, in which a groove is formed in a substrate made of a non-magnetic material such as crystallized glass, and a soft magnetic thin film is provided along the wall of the groove, in which a groove of a predetermined shape is formed in the substrate. After that, a thin film of amorphous glass is formed along the wall surface of this groove, and then, after groove processing is performed on this amorphous glass thin film almost following the shape of the groove, the processed surface is coated with the above-mentioned A method for manufacturing a magnetic head, characterized by creating a soft magnetic thin film.