JPH0863706A - Production of magnetic head - Google Patents

Production of magnetic head

Info

Publication number
JPH0863706A
JPH0863706A JP19913794A JP19913794A JPH0863706A JP H0863706 A JPH0863706 A JP H0863706A JP 19913794 A JP19913794 A JP 19913794A JP 19913794 A JP19913794 A JP 19913794A JP H0863706 A JPH0863706 A JP H0863706A
Authority
JP
Japan
Prior art keywords
magnetic core
groove
substrate
magnetic
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19913794A
Other languages
Japanese (ja)
Inventor
Fumiaki Nakamura
文昭 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP19913794A priority Critical patent/JPH0863706A/en
Publication of JPH0863706A publication Critical patent/JPH0863706A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE: To improve the utilization rate of materials by cutting and separating a magnetic core substrate at reference lines for cutting, thereby forming magnetic core blocks. CONSTITUTION: Thin films of gap spacers (not shown in Fig.) consisting of a nonmagnetic material, such as silica, are deposited on the groove 4 forming surfaces of at least one of the substrates 15 and thereafter, two sheets of the substrates 15, 15 are butted against each other and are heated. The heated substrates are joined and integrated by glass 7, by which the magnetic core substrate 16 is produced. Next, both side face parts 9, 9 parallel with the joint surface of the substrate 16 are then ground down to the thickness size of the finished magnetic core as shown by alternate long and short dash lines, by which the substrate 16 is separated in the parts of the reference grooves 14 for cutting by which the magnetic core blocks are obtd. These core blocks are sliced at the plane orthogonal with the joint surfaces in the central part of the track groove, by which the magnetic core chips are obtd. The bottom end faces of the resulted core chips are exactly worked to the prescribed size from a gap depth reference line and, therefore, the magnetic heads having the exact gap depth are mass produced when the magnetic heads are assembled with these bottom end faces as reference planes.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気記録装置に使用する
磁気ヘッドに関し、特にギャップデプスの加工精度を向
上した大量生産に好適する磁気ヘッドの製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording apparatus, and more particularly to a method of manufacturing a magnetic head suitable for mass production with improved gap depth processing accuracy.

【0002】[0002]

【従来の技術】従来、強磁性酸化物材料を磁気コアとす
るいわゆるバルク型磁気ヘッドの製造方法において、ギ
ャップデプスを正確に加工するため、磁気コアブロック
の下端をギャップデプス基準ラインから一定寸法で切断
し、磁気コアブロックの下端面をギャップデプスの基準
面とする特開平2−179907号公報に開示されてい
るような、磁気ヘッドの製造方法が一般的に採用されて
いる。この磁気ヘッドの製造方法について、図面を参照
して説明する。図4に示すように、強磁性酸化物板1の
片面に、巻線溝2及びV字状のギャップデプス規制溝3
を一体とした溝4を、所定の間隔で複数形成する。つい
で、図5に示すように、前記溝4を形成した面に、前記
溝4と直交する方向に磁気ギャップのトラック幅を規制
するトラック溝5を所定の間隔で形成して基板6を製作
する。そして、図6に示すように、二枚の前記基板6の
うち、少なくとも一方の基板6の前記溝4形成面にシリ
カ等の非磁性体からなるギャツプスペーサ(図示せず)
の薄膜を被着してから、ギャップデプス規制溝3が観察
し易いように、該溝4形成面どおしを端面を少しずらし
て突き合わせ、加熱して、ガラス7により接合一体化し
て、磁気コア基板8を製作する。
2. Description of the Related Art Conventionally, in a method of manufacturing a so-called bulk type magnetic head using a ferromagnetic oxide material as a magnetic core, in order to accurately process the gap depth, the lower end of the magnetic core block is kept at a constant dimension from the gap depth reference line. A method of manufacturing a magnetic head, which is cut and the lower end surface of the magnetic core block is used as a reference surface of the gap depth, as disclosed in JP-A-2-179907 is generally adopted. A method of manufacturing this magnetic head will be described with reference to the drawings. As shown in FIG. 4, the winding groove 2 and the V-shaped gap depth regulating groove 3 are formed on one surface of the ferromagnetic oxide plate 1.
A plurality of grooves 4 which are integrated with each other are formed at a predetermined interval. Then, as shown in FIG. 5, on the surface on which the groove 4 is formed, track grooves 5 for restricting the track width of the magnetic gap are formed at predetermined intervals in the direction orthogonal to the groove 4 to manufacture the substrate 6. . Then, as shown in FIG. 6, a gap spacer (not shown) made of a non-magnetic material such as silica on the groove 4 forming surface of at least one of the two substrates 6.
After depositing the thin film of, the gap depth regulating groove 3 is abutted with the groove 4 forming surfaces with their end faces slightly displaced so that they can be easily observed, heated, and joined together by the glass 7 to form a magnetic field. The core substrate 8 is manufactured.

【0003】ついで、通常、接合時の熱処理等での変形
を防止するため、完成した磁気コアの厚さ寸法の半分よ
り厚い材料を使用するために、図7に示すように、磁気
コア基板8の接合面と平行な両側面部9,9を、図中に
一点鎖線で示すように、完成した磁気コアの厚さ寸法に
なるように研磨した後、ギャップデプス規制溝3により
形成されるギャップデプス基準ライン10を、少しずら
せて接合した端面側から観測し、ギャップデプス基準ラ
イン10から一定の寸法Lで、図中に点線で示すよう
に、ギャップデプス規制溝3と平行で、接合面と直交す
る面で切断分離し、磁気コアチップの下端面を形成す
る。そして、図8に示すように、分離して得られた磁気
コアブロック11をトラック溝5の中央部で、図中に点
線で示すように、接合面と直交する面でスライスして、
図9に示すような、磁気コアチップ12を作成する。
Then, in order to prevent deformation due to heat treatment or the like at the time of bonding, a material thicker than half the thickness of the completed magnetic core is usually used. Therefore, as shown in FIG. After the side surface portions 9 and 9 parallel to the joint surface are polished to the thickness dimension of the completed magnetic core as shown by the dashed line in the figure, the gap depth regulating groove 3 forms the gap depth. Observe the reference line 10 from the end face side that is slightly displaced and joined, and with a constant dimension L from the gap depth reference line 10, as shown by the dotted line in the drawing, parallel to the gap depth regulating groove 3 and orthogonal to the joining face. The surface is cut and separated to form the lower end surface of the magnetic core chip. Then, as shown in FIG. 8, the magnetic core block 11 obtained by separation is sliced at the central portion of the track groove 5 and at a surface orthogonal to the bonding surface as shown by a dotted line in the drawing,
A magnetic core chip 12 as shown in FIG. 9 is created.

【0004】上述した工程で磁気コアチップ12を作成
することにより、下端面13をギャップデプスの基準面
とする磁気コアチップ12が得られ、その後の磁気へッ
ド組立工程でこの磁気コアチップ12の下端面13を基
準面として用いて加工することにより、正確なギャップ
デプスを有する磁気へッドが組立られる。
By manufacturing the magnetic core chip 12 in the above-described process, the magnetic core chip 12 having the lower end surface 13 as a reference surface for the gap depth is obtained, and the lower end surface of this magnetic core chip 12 is obtained in the subsequent magnetic head assembly process. By processing using 13 as a reference surface, a magnetic head having an accurate gap depth is assembled.

【0005】[0005]

【発明が解決しようとする課題】ところが、上述した磁
気ヘッドの製造方法によれば、磁気コア基板をギャップ
デプス基準ラインから一定の寸法で切断分離して磁気コ
アブロックを作成する際、基板の接合に用いたガラスが
接合部側面にながれ、デプス基準ラインが観察し難いた
め、基板の端面をずらして突き合わせることが必要であ
り、材料の利用率が低下するという問題があった。しか
も、磁気コア基板から複数の磁気コアブロックを作成す
るため、切断加工をする度毎に、ギャップデプス基準ラ
インを観察して切断寸法を調整する必要があり、切断加
工工数が増大するという問題があった。さらに、この切
断面積が大きく加工量が多いため、切断に使用する薄い
回転切断刃の磨耗や、変形により、加工精度が低下し、
基準面とギャップデプス基準ラインとの距離が不正確に
なるという問題もあった。
However, according to the above-described method of manufacturing a magnetic head, when the magnetic core substrate is cut and separated from the gap depth reference line with a certain size to form a magnetic core block, the substrates are joined together. Since the glass used for the above is rubbed on the side surface of the joint and it is difficult to observe the depth reference line, it is necessary to shift the end faces of the substrates to abut against each other, which causes a problem that the utilization factor of the material is reduced. Moreover, since a plurality of magnetic core blocks are created from the magnetic core substrate, it is necessary to observe the gap depth reference line and adjust the cutting dimension every time the cutting process is performed, which causes a problem of increasing the number of cutting processes. there were. Furthermore, since this cutting area is large and the amount of processing is large, the processing accuracy decreases due to wear and deformation of the thin rotary cutting blade used for cutting,
There is also a problem that the distance between the reference plane and the gap depth reference line becomes inaccurate.

【0006】特に、磁気ギャップの両側に強磁性体金属
薄膜を配し、強磁性酸化物を磁気コアとする複合磁気へ
ッドの製造に際しては、磁気コア基板の分離切断の際、
強磁性酸化物と、これに積層された強磁性金属との異種
材料を切断加工する必要があるため、切断速度を変更し
たり、それぞれの材料に適した切断刃に取り替え、一つ
の溝を形成するのに、複数回の加工が必要となるという
問題があった。本発明は、上述した従来の問題を解決す
るために提案するもので、ギャップデプス規制溝形成時
に、同時に一定寸法間隔で切断基準溝を形成することに
より、磁気コア基板の切断分離加工を容易化するととも
に、ギャップデプスの基準面となる磁気コアチップの下
端面寸法の加工精度を向上した磁気へッドの製造方法を
提供することを目的とする。
Particularly, in manufacturing a composite magnetic head in which ferromagnetic metal thin films are arranged on both sides of a magnetic gap and a ferromagnetic oxide is used as a magnetic core, when the magnetic core substrate is separated and cut,
Since it is necessary to cut different materials of the ferromagnetic oxide and the ferromagnetic metal laminated on it, the cutting speed can be changed or a cutting blade suitable for each material can be used to form one groove. However, there is a problem in that it requires multiple processing. The present invention is proposed in order to solve the above-mentioned conventional problem, and facilitates the cutting and separating process of the magnetic core substrate by simultaneously forming the cut reference grooves at a constant size interval when forming the gap depth regulating groove. In addition, it is an object of the present invention to provide a method for manufacturing a magnetic head in which the processing accuracy of the dimension of the lower end surface of the magnetic core chip, which serves as the reference surface for the gap depth, is improved.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
本願では、強磁性酸化物からなる板の片面にギャップデ
プス規制溝及び切断基準溝を所定間隔隔離して形成する
工程と、前記強磁性酸化物からなる板の前記ギャップデ
プス規制溝形成面に前記ギャップデプス規制溝と直交す
る方向にトラック溝を形成して基板を作成する工程と、
二つの前記基板を前記トラック溝形成面を対向させて接
合一体化し磁気コア基板を形成する工程と、前記磁気コ
ア基板の切断基準溝において、前記切断基準溝と平行
に、前記磁気コア基板の接合面と直交する面で分離して
磁気コアブロックを形成する工程と、前記磁気コアブロ
ックをトラック溝に平行にスライスして磁気コアチップ
を形成する工程とを具備する磁気ヘッドの製造方法を提
供する。また、上記製造方法は、前記強磁性酸化物から
なる板の厚さを完成した磁気へッドの厚さの半分より厚
い寸法の材料とし、前記切断基準溝の深さを、前記完成
した磁気へッドの厚さより深く形成し、前記磁気コア基
板形成後、接合面と平行な両側面を研磨して前記切断基
準溝を露出させ、この部分で分離して磁気コアブロック
を形成することが望ましい。
In order to solve the above problems, in the present application, a step of forming a gap depth regulating groove and a cutting reference groove at a predetermined interval on one surface of a plate made of a ferromagnetic oxide; A step of forming a substrate by forming a track groove in a direction orthogonal to the gap depth regulating groove on the gap depth regulating groove forming surface of a plate made of an oxide;
Forming a magnetic core substrate by integrally joining the two substrates so that the track groove forming surfaces face each other, and in the cutting reference groove of the magnetic core substrate, the magnetic core substrate is joined in parallel with the cutting reference groove. Provided is a method of manufacturing a magnetic head, which comprises a step of forming a magnetic core block by separating the magnetic core block on a surface orthogonal to a surface and a step of slicing the magnetic core block parallel to a track groove to form a magnetic core chip. Further, in the above manufacturing method, the thickness of the plate made of the ferromagnetic oxide is set to a material having a thickness larger than half of the thickness of the completed magnetic head, and the depth of the cutting reference groove is set to the completed magnetic head. The magnetic core block may be formed to be deeper than the thickness of the head, and after the magnetic core substrate is formed, both side surfaces parallel to the bonding surface may be polished to expose the cutting reference groove, and the magnetic core block may be separated at this portion. desirable.

【0008】また、前記基板のトラック溝形成面に強磁
性金属薄膜を形成して後、二つの前記基板を接合一体化
して磁気コア基板を形成し、前記強磁性金属薄膜がスパ
ッタにより形成したFeTaN合金薄膜とすることが望
ましい。
Further, after a ferromagnetic metal thin film is formed on the track groove forming surface of the substrate, the two substrates are joined and integrated to form a magnetic core substrate, and the ferromagnetic metal thin film is formed by sputtering FeTaN. It is desirable to use an alloy thin film.

【0009】[0009]

【作用】上述した磁気ヘッドの製造方法によれば、ギャ
ップデプス規制溝形成時に、同時に一定寸法間隔で切断
基準溝を形成し、磁気コア基板を該切断基準溝で切断分
離して磁気コアブロックを作成する際、デプス基準ライ
ンの観察が不要となり、基板の端面をずらして突き合わ
せることも不要であり、結果として、材料の利用率が向
上できる。しかも、切断加工をする度毎に、ギャップデ
プス基準ラインを観察して切断寸法を調整する必要もな
く、切断加工工数を低減できる。さらに、切断面積が少
なくなり、加工量も減少するため、切断に使用する薄い
回転切断刃の磨耗も少なく長寿命化でき、また、基準面
の加工精度が向上するため、正確なギャップデプスを有
する磁気ヘッドが組み立てられる。
According to the above-described method of manufacturing a magnetic head, when the gap depth regulating groove is formed, the cutting reference grooves are simultaneously formed at a constant size interval, and the magnetic core substrate is cut and separated by the cutting reference groove to form the magnetic core block. At the time of creation, it is not necessary to observe the depth reference line, and it is not necessary to shift the end faces of the substrates to abut each other, and as a result, the material utilization rate can be improved. Moreover, it is not necessary to observe the gap depth reference line and adjust the cutting dimension every time the cutting process is performed, and the number of cutting processes can be reduced. Furthermore, since the cutting area is reduced and the machining amount is also reduced, wear of the thin rotary cutting blade used for cutting is reduced and the service life is extended, and the machining accuracy of the reference surface is improved, so that the accurate gap depth is provided. The magnetic head is assembled.

【0010】特に、磁気ギャップの両側に強磁性体金属
薄膜を配した複合磁気へッドの製造に際しては、磁気コ
ア基板の分離切断の際、強磁性酸化物板のみの切断加工
でよいため、切断速度を変更したり、それぞれの材料に
適した切断刃に取り替えることは不要となるため、切断
分離が大幅に容易化される。また、切断基準溝の深さを
完成した磁気へッドの厚さより深く形成して、側面研磨
により分離することで、切断加工による分離は不要とな
る。
In particular, when manufacturing a composite magnetic head having ferromagnetic metal thin films on both sides of the magnetic gap, only the ferromagnetic oxide plate needs to be cut when the magnetic core substrate is separated and cut. Since there is no need to change the cutting speed or replace with a cutting blade suitable for each material, cutting separation is greatly facilitated. Further, by forming the depth of the cutting reference groove deeper than the thickness of the completed magnetic head and separating it by side surface polishing, the separation by the cutting process becomes unnecessary.

【0011】[0011]

【実施例】本発明の磁気へッドの製造方法の一実施例に
ついて図面を参照して説明する。図において、従来例と
同じ部分には同一符号を付して説明を省略する。図1に
示すように、強磁性酸化物板1の片面に巻線溝2及びV
字状のギャップデプス規制溝3を1体とした溝4と、ギ
ャップデプス基準ライン10から所定寸法間隔Lの位置
に、切断基準溝14を該切断基準溝14の深さが完成し
た磁気へッドの厚さの半分より深くなるように、所定の
間隔で複数組形成する。ついで、従来例と同様に、前記
溝4を形成した面に、前記溝4と直交する方向に磁気ギ
ャップのトラック幅を規制するトラック溝5を所定の間
隔で形成して、基板15を製作する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the magnetic head manufacturing method of the present invention will be described with reference to the drawings. In the figure, the same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted. As shown in FIG. 1, one side of the ferromagnetic oxide plate 1 has winding grooves 2 and V
The groove 4 having the V-shaped gap depth regulating groove 3 as one body, and the cutting reference groove 14 at a position of a predetermined dimension interval L from the gap depth reference line 10 are formed on the magnetic head where the depth of the cutting reference groove 14 is completed. A plurality of sets are formed at predetermined intervals so as to be deeper than half the thickness of the cord. Then, similarly to the conventional example, track grooves 5 for restricting the track width of the magnetic gap are formed at predetermined intervals on the surface on which the grooves 4 are formed, and the substrate 15 is manufactured. .

【0012】そして、図2に示すように、少なくとも一
方の基板15の前記溝4形成面にシリカ等の非磁性体か
らなるギャツプスペーサ(図示せず)の薄膜を被着して
から、二枚の基板15,15を突き合わせ、加熱して、
ガラス7により接合一体化して、磁気コア基板16を製
作する。ついで、磁気コア基板16の接合面と平行な両
側面部9,9を、図中に一点鎖線で示すように、完成し
た磁気コアの厚さ寸法になるように研磨すると、磁気コ
ア基板16は切断基準溝14の部分で分離され、磁気コ
アブロックが得られる。そして、従来例と同様に、該磁
気コアブロックをトラック溝の中央部で、接合面と直交
する面でスライスして、磁気コアチップを作成する。
Then, as shown in FIG. 2, a thin film of a gap spacer (not shown) made of a non-magnetic material such as silica is deposited on at least one of the substrates 15 on which the groove 4 is formed. The substrates 15 and 15 of
The magnetic core substrate 16 is manufactured by joining and integrating with the glass 7. Next, both side surface portions 9 and 9 parallel to the bonding surface of the magnetic core substrate 16 are polished to have a thickness dimension of the completed magnetic core as shown by a dashed line in the figure, and the magnetic core substrate 16 is cut. The magnetic core block is obtained by being separated at the reference groove 14. Then, similarly to the conventional example, the magnetic core block is sliced at the center of the track groove and on the surface orthogonal to the bonding surface to prepare a magnetic core chip.

【0013】このようにして得られた磁気コアチップ
は、その下端面がギャップデプス基準ラインから所定寸
法に正確に加工されているため、この下端面を基準面と
して、磁気へッドを組立れば、正確なギャツプデプスを
有する磁気へッドが大量に製作できる。また、本発明の
磁気へッドの製造方法を、磁気ギャップの両側に強磁性
体金属薄膜を配し、強磁性酸化物からなる板を磁気コア
とする複合磁気へッドの製造に適用した例については、
図3に示すように、強磁性酸化物板1に形成される強磁
性金属薄膜17は、基板15,15の突き合わせ接合す
る面だけに形成されているため、磁気コア基板18の分
離加工の際、強磁性酸化物板1の両側面部9,9だけを
研磨加工するだけで良い。したがつて、切断速度を変更
したり、それぞれの材料に適した切断刃に取り替える必
要はない。
Since the lower end surface of the magnetic core chip thus obtained is accurately processed to a predetermined dimension from the gap depth reference line, if the magnetic head is assembled using this lower end surface as a reference surface. A large number of magnetic heads with accurate gap depth can be manufactured. Further, the method for producing a magnetic head of the present invention is applied to the production of a composite magnetic head in which ferromagnetic metal thin films are arranged on both sides of a magnetic gap and a plate made of a ferromagnetic oxide is used as a magnetic core. For example,
As shown in FIG. 3, the ferromagnetic metal thin film 17 formed on the ferromagnetic oxide plate 1 is formed only on the surfaces where the substrates 15 and 15 are butted and joined together. It suffices to polish only both side surface portions 9 of the ferromagnetic oxide plate 1. Therefore, there is no need to change the cutting speed or replace with a cutting blade suitable for each material.

【0014】以上、基板15として切断基準溝14の深
さを完成した磁気へッドの厚さ寸法の半分より深く形成
し、研磨により分離する例について説明したが、本発明
はこれに限定されず、強磁性酸化物板1の厚さを完成し
た磁気へッドの厚さの半分と同じにした場合でも、磁気
コア基板16の分離に際しては、切断基準溝14部の強
磁性酸化物板1の一部のみを切断さえすれば良く、した
がつて、切断速度を変更したり、それぞれの材料に適し
た切断刃に取り替える必要はない。また、切断基準溝1
4の形成面は、下端面13の一部を形成しているため、
基準面として後工程の磁気へッドの組立に利用できるの
で、正確なギャップデプスを有する磁気へッドが大量に
生産できる。なお、本実施例は一つの磁気コア基板から
三つの磁気コアブロックを切りだす製造方法について説
明したが、本発明はこれに限定されず、一つの磁気コア
基板から一つの磁気コアブロックを切りだしたり、一つ
の磁気コア基板から四つ以上の磁気コアブロックを切り
だす製造方法にも適用される。
The example in which the depth of the cutting reference groove 14 is formed as the substrate 15 deeper than half of the thickness of the completed magnetic head and is separated by polishing has been described, but the present invention is not limited to this. However, even when the thickness of the ferromagnetic oxide plate 1 is set to be equal to half the thickness of the completed magnetic head, the ferromagnetic oxide plate of the cutting reference groove 14 is separated when the magnetic core substrate 16 is separated. It suffices to cut only a part of 1, so that it is not necessary to change the cutting speed or replace it with a cutting blade suitable for each material. Also, the cutting reference groove 1
Since the formation surface of 4 forms a part of the lower end surface 13,
Since it can be used as a reference surface for assembling a magnetic head in a later step, a large number of magnetic heads having an accurate gap depth can be produced. Although the present embodiment has described the manufacturing method of cutting out three magnetic core blocks from one magnetic core substrate, the present invention is not limited to this, and one magnetic core block is cut out from one magnetic core substrate. Alternatively, it is also applied to a manufacturing method in which four or more magnetic core blocks are cut out from one magnetic core substrate.

【0015】[0015]

【発明の効果】本発明によれば、ギャップデプス規制溝
形成時に、同時に一定寸法間隔で切断基準溝を形成し、
磁気コア基板を該切断基準溝で切断分離して磁気コアブ
ロックを作成するため、ギャツプデプス基準ラインの観
察が不要となり、基板の端面をずらして突き合わせるこ
とも不要であり、材料の利用率が向上できる。しかも、
切断加工をする度毎に、ギャップデプス基準ラインを観
察して切断寸法を調整する必要もなく、切断加工工数を
低減できる。さらに、切断面積が少なくなり、加工量も
減少するため、切断に使用する薄い回転切断刃の磨耗も
少なく長寿命化できる。
According to the present invention, when the gap depth regulating groove is formed, the cutting reference grooves are simultaneously formed at a constant size interval,
Since the magnetic core block is created by cutting and separating the magnetic core substrate with the cutting reference groove, it is not necessary to observe the gap depth reference line, and it is not necessary to shift the end faces of the substrate to abut against each other, improving the material utilization rate. it can. Moreover,
It is not necessary to observe the gap depth reference line every time the cutting process is performed and adjust the cutting dimension, and the number of cutting processes can be reduced. Further, since the cutting area is reduced and the processing amount is reduced, the thin rotary cutting blade used for cutting is also less worn and the life can be extended.

【0016】特に、磁気ギャップの両側に強磁性体金属
薄膜を配した複合磁気へッドの製造に際しては、磁気コ
ア基板の分離切断の際、強磁性酸化物板のみの切断加工
でよいため、切断速度を変更したり、それぞれの材料に
適した切断刃に取り替えることは不要となるため、切断
分離が大幅に容易化される。また、切断基準溝の深さを
完成した磁気へッドの厚さより深く形成して、側面研磨
により分離することで、切断加工による分離は不要とす
ることもできる。
In particular, when manufacturing a composite magnetic head in which ferromagnetic metal thin films are arranged on both sides of the magnetic gap, only the ferromagnetic oxide plate needs to be cut when the magnetic core substrate is separated and cut. Since there is no need to change the cutting speed or replace with a cutting blade suitable for each material, cutting separation is greatly facilitated. Further, by forming the depth of the cutting reference groove deeper than the thickness of the completed magnetic head and separating by side surface polishing, it is possible to eliminate the need for separation by cutting.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例の基板の要部斜視図。FIG. 1 is a perspective view of a main part of a substrate according to an embodiment of the present invention.

【図2】 本発明の一実施例の磁気コア基板の要部斜視
図。
FIG. 2 is a perspective view of a main part of a magnetic core substrate according to an embodiment of the present invention.

【図3】 本発明の他の実施例の磁気コア基板の要部斜
視図。
FIG. 3 is a perspective view of a main part of a magnetic core substrate according to another embodiment of the present invention.

【図4】 従来の巻線溝、デプスエンド規制溝の形成を
示す要部斜視図。
FIG. 4 is a perspective view of a main part showing formation of a conventional winding groove and depth end regulating groove.

【図5】 従来の基板の要部斜視図。FIG. 5 is a perspective view of a main part of a conventional substrate.

【図6】 従来の磁気コア基板の要部斜視図。FIG. 6 is a perspective view of a main part of a conventional magnetic core substrate.

【図7】 従来の磁気コア基板の側面研磨加工を示す要
部斜視図。
FIG. 7 is a perspective view of a main part showing a side surface polishing process of a conventional magnetic core substrate.

【図8】 磁気コアブロックの要部斜視図。FIG. 8 is a perspective view of a main part of a magnetic core block.

【図9】 磁気コアチップの斜視図。FIG. 9 is a perspective view of a magnetic core chip.

【符号の説明】[Explanation of symbols]

1 強磁性酸化物板 3 ギャップデプス規制溝 4 溝 5 トラック溝 7 ガラス 9 側面部 10 ギャップデプス基準ライン 14 切断基準溝 15 基板 16,18 磁気コア基板 17 強磁性金属薄膜 L ギャップデプス基準ラインと切断基準溝との間隔 1 Ferromagnetic Oxide Plate 3 Gap Depth Control Groove 4 Groove 5 Track Groove 7 Glass 9 Side Part 10 Gap Depth Reference Line 14 Cutting Reference Groove 15 Substrate 16, 18 Magnetic Core Substrate 17 Ferromagnetic Metal Thin Film L Gap Depth Reference Line and Cutting Distance from the reference groove

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】強磁性酸化物からなる板の片面にギャップ
デプス規制溝を所定間隔隔離して形成する工程と、前記
ギャツプデプス規制溝と所定間隔隔離して切断基準溝を
形成する工程と、前記強磁性酸化物からなる板の前記ギ
ャップデプス規制溝形成面に前記ギャップデプス規制溝
と直交する方向にトラック溝を形成して基板を作成する
工程と、二つの前記基板を前記トラック溝形成面を対向
させて接合一体化し磁気コア基板を形成する工程と、前
記磁気コア基板の切断基準溝によって、前記磁気コア基
板の接合面と直交する面で分離して磁気コアブロックを
形成する工程と、前記磁気コアブロックをトラック溝に
平行にスライスして磁気コアチップを形成する工程とを
具備することを特徴とした磁気ヘッドの製造方法。
1. A step of forming a gap depth regulating groove on one surface of a plate made of a ferromagnetic oxide at a predetermined distance from each other; a step of forming a cutting reference groove at a predetermined distance from the gap depth regulating groove; A step of forming a substrate by forming track grooves in a direction orthogonal to the gap depth regulating groove on the gap depth regulating groove forming surface of a plate made of a ferromagnetic oxide; and forming two substrates on the track groove forming surface. Forming a magnetic core substrate by facing and joining together to form a magnetic core substrate; and forming a magnetic core block separated by a cutting reference groove of the magnetic core substrate at a surface orthogonal to the joining surface of the magnetic core substrate, A step of slicing the magnetic core block parallel to the track groove to form a magnetic core chip.
【請求項2】前記強磁性酸化物磁性体板の厚さを完成し
た磁気へッドの厚さの半分より厚い寸法の材料とし、切
断基準溝の深さを、前記完成した磁気へッドの厚さより
深く形成し、前記磁気コア基板形成後、接合面と平行な
両側面を研磨して前記切断基準溝部で分離して磁気コア
ブロックを形成することを特徴とする請求項1記載の磁
気へッドの製造方法。
2. The ferromagnetic oxide magnetic plate is made of a material having a thickness larger than half the thickness of the completed magnetic head, and the depth of the cutting reference groove is set to the depth of the completed magnetic head. 2. The magnetic core block according to claim 1, wherein the magnetic core block is formed to be deeper than the thickness of the magnetic core substrate, and after the magnetic core substrate is formed, both side surfaces parallel to the bonding surface are polished and separated by the cutting reference groove portion. Head manufacturing method.
【請求項3】前記基板のトラック溝形成面に強磁性金属
薄膜を形成して後、二つの前記基板を接合一体化して磁
気コア基板を形成することを特徴とする請求項1記載の
磁気へッドの製造方法。
3. The magnetic core substrate according to claim 1, wherein a ferromagnetic metal thin film is formed on the track groove forming surface of the substrate, and then the two substrates are joined and integrated to form a magnetic core substrate. Method of manufacturing a pad.
【請求項4】前記強磁性金属薄膜がスパッタにより形成
したFeTaN合金薄膜であることを特徴とする請求項
3記載の磁気へッドの製造方法。
4. The method of manufacturing a magnetic head according to claim 3, wherein the ferromagnetic metal thin film is a FeTaN alloy thin film formed by sputtering.
JP19913794A 1994-08-24 1994-08-24 Production of magnetic head Pending JPH0863706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19913794A JPH0863706A (en) 1994-08-24 1994-08-24 Production of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19913794A JPH0863706A (en) 1994-08-24 1994-08-24 Production of magnetic head

Publications (1)

Publication Number Publication Date
JPH0863706A true JPH0863706A (en) 1996-03-08

Family

ID=16402764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19913794A Pending JPH0863706A (en) 1994-08-24 1994-08-24 Production of magnetic head

Country Status (1)

Country Link
JP (1) JPH0863706A (en)

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