JPH0318123Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial field of application The invention is adopted, for example, to polish both sides of a magnetic disk, or to form slight streaks on both sides after polishing (micro-rough surface treatment). This invention relates to a double-sided processing machine for disc bodies.

Conventional technology For example, conventional polishing of magnetic disks was
As seen in Japanese Patent Laid-Open No. 130834/1983 and Japanese Patent Laid-Open No. 120460/1983, wrapping tape is carried out by contacting the top surface of a magnetic disk while rotating it around its vertical axis. was. According to this conventional method, after polishing one side, the magnetic disk is turned over (turned over) and polished on the other side, which is inefficient as this flipping work is done manually. It was also the cause of high prices. Therefore, as another method, for example, as seen in Japanese Patent Application Laid-open No. 111830 of 1982, a magnetic disk is held between a pair of adapters so as to be rotatable around the horizontal axis, and pads are attached to both sides of the magnetic disk. A format is provided in which both surfaces are polished simultaneously.

Problems to be Solved by the Invention According to the above-mentioned conventional method of simultaneous double-sided polishing, only one magnetic disk can be polished, and the adapter must be operated to attach and detach each time, which is inefficient. In addition, the attachment and detachment, including the operation of the adapter, is performed manually, which is troublesome and inefficient, and moreover, the polished surface of the magnetic disk is easily touched by the human hand.

An object of the present invention is to provide a double-sided processing machine for discs that can simultaneously process a plurality of discs and automatically load and unload the discs without manual labor.

Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a double-sided processing machine for disk bodies, which processes both sides of a plurality of disk bodies by supporting them at equal angles in the circumferential direction. The device is arranged with its support surface inclined, and a transfer device is provided above the double-sided processing device that is movable in a lateral direction orthogonal to the tilt axis, and this transfer device is used as a transfer platform. , consists of an elevating member attached to this moving table and a plurality of holding devices arranged in the horizontal direction on this elevating member, and the base plate of each holding device is moved up and down to perform at least one of an elevating movement and a lateral movement. Attached to the member, a rocking piece that can swing freely around the horizontal axis and a rocking operation device are provided at the bottom of each base plate, and a chuck device is provided on each rocking piece via the egress/egress operation device. ing.

According to the configuration of the present invention, in the transfer device, each holding device is raised to the same level and moved laterally in the direction of separation, and the swinging piece is placed in a vertical position around the horizontal axis. At the same time, after the chuck device is moved in and out and opposed to the unprocessed material support part, a combination operation of the lifting and lowering movement of the elevating member, the movement in and out of the chuck device, and the chuck movement of the chuck device, In addition, by performing the movement by a predetermined pitch, each holding device can hold each unprocessed disc body in a vertical position. Next, the transfer device is moved and stopped at a predetermined position above the double-sided processing device, and then a part of the base plate of each holding device is lowered and the rest is moved closer to each other, so that the paper is held by these holding devices. The finishing discs may be arranged in a circumferentially equiangular pattern supported by the double-sided processing device. Then, the rocking piece is swung by the swiveling operation device to tilt each unprocessed disk body along the inclined support surface on the receiving side, and then the chuck device is moved to protrude by the ejection and withdrawal operation device. Thus, it is possible to abut the untreated disc body on the inclined support surface. Next, by releasing the chuck device and activating it in the opposite manner to that described above, the transfer device can be placed on standby in a non-operating position. Then, after performing polishing or other processing on both sides of the untreated disc using a member forming an inclined support surface, etc., by operating the transfer device in the same manner as described above,
The group of rotating bodies can be taken out from the double-sided processing apparatus.

Embodiment An embodiment of the present invention will be described below based on the drawings.

In FIGS. 6 to 8, reference numeral 1 denotes a case-like main body forming a processing chamber 2 therein, and a see-through opening/closing door 3 is provided at a predetermined location. At one end of the processing chamber 2, unprocessed disk bodies, that is, magnetic disks 4, which are an example of disk bodies, are supported in parallel with their surfaces facing each other in the front and back direction, and are arranged in three rows ( multiple columns)
An unprocessed material support section 5 for array support is provided. The support stand 6 of the unprocessed material support section 5 is movable in the front and back direction by a parallel pitch by a back and forth moving device 7. From this unprocessed material support part 5 to the other end side, a first double-sided processing device 8, a first cleaning device 9,
A second double-sided processing device 10 and a second cleaning device 11 are provided. A processed material support section 12 similar to the unprocessed material support section 5 is provided at the other end. The support stand 13 that supports the processed magnetic disk 4A of the processed material support section 12 is movable in the front and back direction by parallel pitches by the back and forth moving device 14.
The pitch movement is in the opposite direction to the movement direction of the unprocessed material support section 5. At the upper part of the processing chamber 2, there are a first transfer device 15 and a second transfer device 15 that can reciprocate in both end directions.
A transfer device 16 is provided, in which the first transfer device 15 takes charge from the unprocessed material support section 5 to the first cleaning device 9, and the second transfer device 16 takes charge of the processing from the first cleaning device 9 to the processed material. It covers up to the support part 12. And both transfer devices 15 and 16 are 3 pieces each (plural pieces)
It has holding devices 17A, 17B, and 17C.

In the above embodiment, the magnetic disks 4 on the support stand 6 of the unprocessed material support section 5 are taken out one by one from each row by each holding device 17A, 17B, 17C of the first transfer device 15, and held. be done. and the first
The transfer device 15 moves to the other end side, stops facing the first double-sided processing device 8, and then moves to the holding device 17A,
The three magnetic disks 4 held by 17B and 17C are delivered to the first double-sided processing device 8. The three magnetic disks 4 that have been simultaneously subjected to the desired double-sided processing in the first double-sided processing device 8 are taken out again by the holding devices 17A, 17B, and 17C of the first transfer device 15 that have been on standby. , and is stopped facing the first cleaning device 9 by moving toward the other end. Next, the magnetic disk 4 of the first transfer device 15 is transferred to the first cleaning device 9, where it is cleaned after processing. 1st
The first transfer device 15 that has transferred the magnetic disk 4 to the cleaning device 9 moves back toward the unprocessed material support section 5, and the second transfer device 16 stops facing the first cleaning device 9. The magnetic disk 4 cleaned by the first cleaning device 9 is received by the second transfer device 16 and then transferred to the second double-side processing device 10. The magnetic disk 4 that has been processed on both sides is transferred to the second cleaning device 11 by the second transfer device 16 for cleaning, and the magnetic disk 4A that has been processed is placed on the support stand of the processing object support section 12. Passed on 13.

Although the processing and cleaning are repeated twice in the above embodiment, they can be repeated three or more times by further incorporating a double-sided processing device and a cleaning device.

Next, details of the double-sided processing apparatuses 8 and 10 will be explained with reference to FIGS. 1 and 5 to 8.

A base frame 20 is fixed on a floor plate in the processing chamber 2, and a fixed side processing section 21 and a movable side processing section 22 are arranged on the base frame 20 so as to face each other. In the fixed-side processing section 21, a rotating shaft 25 is rotatably supported by a machine frame 23 that stands up from a base frame 20 via a bearing 24, and the rotating shaft center is aligned with both transfer devices 15. , 16 in the front-rear direction, and the tilt axis 26 is set to be tilted by, for example, 10 degrees so that the movable processing section 22 side is on the upper side. A flange member 27 is fixed to the inner end of the rotating shaft 25, and an annular abrasive body (such as a grindstone), which is an example of a processing body, is attached to the inner surface of the flange member 27. A fluid path 30 is formed within the rotary shaft 25 along the inclined axis 26 , and the outer end of the fluid path 30 is connected to a supply hose 32 via a rotary joint 31 . The terminal end (inner end) of the fluid path 30 is opened at a plurality of locations on the front surface of the polishing body 29. That is, a ring material 33 is attached to the rotating shaft 25 inside the flange material 27, and a plurality of distribution channels 34 communicating with the fluid channel 30 are formed in the ring material 33. A plurality of radial passages 35 are formed in the circumferential direction in the polishing body 29, and each radial passage 35 has a plurality of openings 36 opening at the front surface.
is connected to. Relay passages 37 communicating with the radial passages 35 are formed from the polishing body 29 to the flange member 27, and the outer ends of these relay passages 37 communicate with the distribution passage 34 via piping 38. In the other movable side processing section 22, a cylinder 42 that is slidable in the longitudinal direction via a bearing 41 is disposed on a machine frame 40 that stands up from the base frame 20.
A rotating shaft 44 is rotatably provided inside via a bearing 43. Sliding of the cylindrical body 42 and the rotation axis 4
The four rotations are performed on the common tilt axis 26. A sliding operation device 45 that is linked to the cylinder body 42 is linked to a lever 48 that is attached to a bracket 46 from the machine frame 40 via a lateral pin 47, and a lever 48 that is linked to the lower end of this lever 48 and is attached to the base frame 20 side. The installed cylinder device 49 and the lever 48
The receiving ring 50 is interlocked with the upper end of the cylindrical body 42 and is attached to the outer end of the cylindrical body 42. The rotating shaft 4
A boss member 52 is installed near the inner end of 4 via a key 51.
is fixed, and a flange member 54 is freely movably attached to the inner end via a ball bearing 53. The pin 55 from the flange material 54 is inserted through the hole 56 formed in the boss member 52, and
4 and the boss member 52 is a spring 5 for maintaining neutrality.
7 is intervened. A polishing body 58 is attached to the inner surface of the flange material 54. A fluid passage 59 along the inclined axis 26 is formed within the rotary shaft 44 , and the outer end of the fluid passage 59 is connected to a supply hose 67 via a rotary joint 60 . and fluid path 5
The terminal end (inner end) of the polishing body 58 is opened at a plurality of locations on the front surface of the polishing body 58 . That is, the ring material 61 is attached to the rotating shaft 44 inside the flange material 54,
A plurality of distribution passages 62 communicating with the fluid passage 59 are formed in this ring material 61 . A plurality of radial passages 63 are formed in the polishing body 58 in the circumferential direction, and each radial passage 63 communicates with a plurality of openings 64 opening at the front surface. Relay passages 65 communicating with the radial passages 63 are formed from the polishing body 58 to the flange member 54, and the outer ends of these relay passages 65 communicate with the distribution passage 62 via piping 66.

Inside the base frame 20 is a drive shaft 70 in the front and rear direction.
The fixed end of the drive shaft 70 is interlocked with the fixed rotating shaft 25 via an endless transmission 71. Further, the movable end of the drive shaft 70 is operatively connected to an intermediate shaft 73 via a gear transmission 72.
A transmission wheel body 74 is fitted onto the intermediate shaft 73 so as to be slidable only in the axial direction, and a passive wheel body 76 that is interlocked with the transmission wheel body 74 via a belt 75 is fixed to the rotating shaft 44 on the movable side. ing. The cylindrical body 42 and the transmission wheel body 74 are interlocked via a plate member 77, a bearing 78, and the like. Further, the drive shaft 70 is operatively connected to a motor 80 via an endless transmission 79.

The fixed side processing section 21 includes a support device 90 that supports the magnetic disk 4 in a detachable and rotatable manner.
is provided. This support device 90 has an inclined axis 2
a support shaft 98 located on the top of the rotary shaft 25 and freely rotatably supported at the tip of the rotating shaft 25 via a bearing 91;
A common grooved roller 92 fixed to the free end of this support shaft 98, and three sets of pressing grooves facing the common grooved roller 92 and arranged at intervals of 120 degrees, two in the circumferential direction. A bearing device 95 rotatably supports the roller 93 and the front and rear shafts 94 to which the pressing grooved rollers 93 are attached, and the pressing grooved roller 93 is connected to the common grooved roller 92 via the bearing device 95. A cylinder device 96 for approaching and separating, and a pair of grooved rollers 92, 9
A ring-shaped carriage 97 is rotatably supported between the two.

In FIGS. 1 to 4, the first transfer device 1
5 and the second transfer device 16 are movable in the lateral direction on a common rail 100 via a moving table 101, and the movement is achieved by disposing a screw shaft 102 along the rail 100, and In addition to providing a motor 103 that can freely drive in forward and reverse directions and communicating with 102,
The nut body 104 is attached to the screw shaft 1 integrally with the moving table 101.
This can be done by screwing it into 02. Note that the moving means may be of a belt type or the like in addition to the above-mentioned screw type. The guide 1 is mounted on the moving table 101.
05 and cylinder device 106
An elevating member 107 is provided which is operated by a
17C are arranged laterally. The base plate 108B of the central holding device 17B is movable up and down with respect to the elevating member 107 under the guidance of a guide 109, and is moved up and down by a cylinder device 110. The base plates 108A and 108C of the holding devices 17A and 17C on both sides are guided by a common rod 111 and can be moved toward and away from each other in the lateral direction, and the movement toward and away from each other is caused by the movement of the base plates 108A and 108C of the holding devices 17A and 17C on both sides.
Cylinder device 112 installed between 08A and 108C
A separation limit stopper 113 and an approach limit stopper 114 are provided on the elevating member 107 side. Each base plate 108A, 108B,
At the bottom of 108C are horizontal pins 115A, 115.
Swing pieces 116A, 116B, and 116C are attached to the base plate 108A and 115C so as to be able to swing back and forth around the horizontal axis via the base plates 108A and 115C, respectively.
Cylinder device (an example of a swing operation device) 117A, 117B, 1 provided between 108B and 108C
17C. Each rocking piece 116A, 1
Movable pieces 119A, 119B, 119C are attached to 16B, 116C via cylinder devices 118A, 118B, 118C, which are an example of an exit/exit operation device, and these movable pieces 119A, 118B, 1
Check device 120A, 120B, 12 at 19C
0C is fixed. 121A, 121B, 121
C indicates a guide, and 122A, 122B, and 122C indicate chuck claws.

Both cleaning devices 9 and 11 are equipped with three magnetic disks 4.
It has rollers 130 that line up and support each one separately, a rotation drive device 131 that interlocks with these rollers 130, and the like.

Next, the operation of the main parts in the above embodiment will be explained.

When the magnetic disk 4 on the unprocessed material support section 5 is taken out by the first transfer device 15, the center base plate 108B is in the raised position, and the base plates 108A and 108C on both sides are in the separated position. The swinging pieces 116A, 116B, 116C are in a vertical position, and the chuck devices 120A, 120B,
120C is retracted and the chuck claw 122
A, 122B, and 122C are moved closer together. As a result, each chuck device 120A, 120B, 1
20C are at the same level and at predetermined intervals. The first transfer device 15 in this state is stopped above the unprocessed material support section 5, and the elevating member 107 is lowered to make the chuck claws 122A, 122B, and 122C face the through holes 19 of the magnetic disk 4.
Next, the cylinder devices 118A, 118B, 118
C is activated to check the chuck devices 120A, 120.
B, 120C are advanced, and the chuck claws 122A, 122B, 1 are inserted into the through hole 19 as shown in FIG.
Inject 22C. and check device 120
A, 120B, and 120C are actuated to move the chuck claws 122A, 122B, and 122C from the imaginary lines in FIG. Next, after raising the elevating member 107 and lifting the magnetic disk 4, the chuck device 120A,
120B and 120C are moved backward. After that, the first transfer device 15 is moved to the other end side, and as shown in FIG.
It is stopped above the 18th point as shown by the solid line in FIG. Next, the cylinder devices 117A, 117B, 1
By the operation of 17C, the swinging pieces 119A, 119B,
119C to the horizontal pins 115A, 115B, 11
5C to tilt the magnetic disk 4 along the tilt axis 26. Then, the cylinder device 110 lowers the center base plate 108B, and the cylinder device 112 moves the base plates 108A, 108B on both sides closer together to form a triangular shape for passing the three magnetic disks 4 to the first double-sided processing device 8. Make it an array. Next, the elevating member 107 is lowered, and the magnetic disk 4 is placed in each carriage 97 as shown by the imaginary line in FIG.
to face each other. In this state, the cylinder device 118
A, 118B, and 118C are actuated to advance the magnetic disk 4 via the chuck devices 120A, 120B, and 120C, and insert the magnetic disk 4 into the carriage 97 as shown by the phantom line in FIG. And chuck claws 122A, 122B, 12
After releasing the holding by 2C, each part is operated in the opposite manner to the above, and the holding devices 17A, 17B, and 17C are made to stand by above.

After the magnetic disk 4 has been handed over, polishing (processing) is started. That is, the magnetic disk 4 passed into the carriage 97 has one surface covered with the polishing body 29.
The polishing body 58 is moved toward the support surface (front surface) of the polishing body 58 .
This approaching movement can be performed by swinging the lever 48 by operating the cylinder device 49 and moving the rotary shaft 44 forward through the cylinder 42. As a result, both surfaces of the magnetic disk 4 are sandwiched between the two polishing bodies 29 and 58, but at this time, some displacement is caused by the displacement of the flange material 54 around the ball bearing 53 against the spring 57. Therefore, the above-mentioned clamping is performed tightly over the entire surface. The motor 80 is operated before and after this, and both the polishing bodies 29 and 58 are rotated at a constant speed in the same direction around the inclined axis 26.
Therefore, the rotating polishing bodies 29 and 58 are brought into contact with both surfaces of the three magnetic disks 4 to perform polishing on both surfaces. During this polishing work, the polishing liquid is supplied to the supply hoses 32, 67 and the rotary joints 31, 6.
0, fluid path 30, 59, distribution path 34, 62, piping 38, 66, relay path 37, 65, radial path 3
5 and 63, and is supplied to the polishing surface from the openings 36 and 64. After the intended polishing has been performed, the polishing body 58 on the movable side is first moved away. At this time, fluid such as air or water is injected from the opening 64 through the fluid path 59 described above, thereby promoting separation between the magnetic disk 4 and the polishing body 58, so that the polishing body 58 Prevent being drawn out by others.
Next, each holding device 17A, 1 of the first transfer device 15
7B, 17C, clamp claws 122A, 122
B, 122C are operated in the same manner as in the above-described transfer operation, with only the movements of B and 122C being reversed.
Hold at 7C. With this holding action, the polishing body 29
When separating the magnetic disk 4 from the fluid path 3
Fluid is injected from the opening 36 through the
This promotes separation of the surfaces of both 29 and 4. Thereafter, the first transfer device 15 moves to the first cleaning device 9.
Then, by the same operation as described above, the magnetic disks 4 are lowered side by side onto the rollers 130 and subjected to the desired cleaning.

Note that the second transfer device 16 also performs the same operation,
The processed magnetic disk 4A is then transferred onto the processing object support section 12.

Effects of the invention According to the invention having the above configuration, the combination of the operations of each part of the transfer device allows the plurality of discs carried by the transfer device to fit into the desired pattern supported by the double-sided processing device. After arranging them as desired, they can be passed to this double-sided processing device, and further, by a reverse action, the processed disk bodies can be taken out from the double-sided processing device. This makes it possible to efficiently process a plurality of disks at the same time, and to automatically load and unload disks without manual intervention. Further, by supplying the disc body to the inclined support surface, the supplied disc body can be easily and accurately held (supported).

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, in which Fig. 1 is a side view of the transfer device, Fig. 2 is a front view of the same, Fig. 3 is a vertical side view of the holding device, and Fig. 4 is a front view of the same. , 5th
6 is a partially cutaway front view of the double-sided processing apparatus, FIG. 7 is a partially cutaway plan view of the same, and FIG. 8 is a partially cutaway side view of the same. 4...Magnetic disk (untreated disk body), 4A...
...Magnetic disk (processed disc body), 8...First double-sided processing device, 9...First cleaning device, 10...Second
Double-sided processing device, 11... Second cleaning device, 12...
Processing object support section, 15... First transfer device, 16...
Second transfer device, 17A, 17B, 17C... Holding device, 19... Magnetic disk through hole, 26... Inclined axis (rotation axis), 29... Polishing body (processing body),
58... Polishing body (processing body), 90... Support device,
97...Carriage, 101...Moveable platform, 107
...Lifting member, 108A, 108B, 108C...
...Base plate, 116A, 116B, 116
C... Rocking piece, 117A, 117B, 117C...
...Cylinder device (swing operation device), 118A, 1
18B, 118C... Cylinder device (exit/exit operation device), 119A, 119B, 119C... Movable piece,
120A, 120B, 120C...chuck device, 122A, 122B, 122C...chuck claw.

Claims (1)

[Scope of utility model registration request] A double-sided processing device that supports a plurality of discs at equal angles in the circumferential direction and processes both sides is installed with the support surface inclined, and above the double-sided processing device, there is a A horizontally movable transfer device is provided, and this transfer device is composed of a moving table, an elevating member attached to the moving table, and a plurality of horizontally disposed holding devices disposed on the elevating member. The base plate of each holding device is attached to an elevating member to perform at least one of vertical movement and lateral movement, and a rocking piece that can swing freely around the horizontal axis and a rocking operation are provided at the bottom of each base plate. What is claimed is: 1. A double-sided processing machine for a disc body, characterized in that a chuck device is provided on each swinging piece via an ingress/egress operation device.