JPH03182070A - Connector - Google Patents

Connector

Info

Publication number
JPH03182070A
JPH03182070A JP1319513A JP31951389A JPH03182070A JP H03182070 A JPH03182070 A JP H03182070A JP 1319513 A JP1319513 A JP 1319513A JP 31951389 A JP31951389 A JP 31951389A JP H03182070 A JPH03182070 A JP H03182070A
Authority
JP
Japan
Prior art keywords
terminal member
contact
hole
terminal
contacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1319513A
Other languages
Japanese (ja)
Inventor
Mika Miyatake
宮武 美香
Yoshinori Uchida
内田 芳則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1319513A priority Critical patent/JPH03182070A/en
Priority to KR1019900010886A priority patent/KR910013618A/en
Publication of JPH03182070A publication Critical patent/JPH03182070A/en
Priority to KR2019940003777U priority patent/KR940004434Y1/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts

Landscapes

  • Connector Housings Or Holding Contact Members (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)

Abstract

PURPOSE:To shorten the distance between two terminal members to be connected, increase the contacting points and reduce the operating force, by allowing no component parts to exist between the terminal members, and pinching them by a contacting piece in a specified structure. CONSTITUTION:Terminal members 50, 60 are pinched by contacting pieces 20, 20 and connected electrically. The contacting pieces 20, 20 are borne by shaft with the aid of a bolt 4, which penetrates a through hole 51 bored at one end of the terminal member 50, and thereto a certain compression force is applied through a compressive spring 3 and a tube 14. A U-groove 20c at the tip of each contacting piece 20, 20 is detained with a guide pin 8, and they are in contact with the terminal member 50 at points A, B while with the other one 60 at point C. There are no parts interposed between these terminal members 50, 60, which are thus capable of approaching. The gap between the contacting pieces at the point C is dependent upon the protruding amount of a protrusion 20d provided on the contacting piece so as to be convenient for operation.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、例えば引出し形遮断器の主回路端子と配電
盤の端子とを接続するためのコネクタに関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a connector for connecting, for example, a main circuit terminal of a draw-out type circuit breaker and a terminal of a switchboard.

[従来の技術] 従来のコネクタを第4図および第5図を用いて説明する
。第4図は各端子を接続した状態を示す図であり、また
、第5図は各端子どおしを接続していない初期状態を示
す図である。
[Prior Art] A conventional connector will be explained with reference to FIGS. 4 and 5. FIG. 4 is a diagram showing a state in which each terminal is connected, and FIG. 5 is a diagram showing an initial state in which each terminal is not connected.

第4図において、棒状(又は板状)の端子部材5および
6はそれぞれ紙面に垂直な方向において長方形断面を有
′している。一方の端子部材5の両側面には板状の接触
片2.2が設けられている。紙面に垂直な方向において
、板状の接触片2の厚さは端子部材5および6の幅より
も薄い。そのため、一般的に複数の接触片2を紙面に垂
直な方向に並列し、それぞれガイド棒2a、 2aによ
り一体として動作するように連結して用いられる。端子
部材5を挟んで対向する各接触片2.2の間には端子部
材6に対して所定の接触圧力を発生するように引張ばね
3が設けられている。各接触片2.2は端子部材5を例
えば接触点2aにおいて引張ばね3の付勢力によって挟
持しているだけである。したがって、紙面に垂直方向の
ガタを除去し、また端子部材5の長手方向における脱落
を防止するためクラスタ15が設けられている。
In FIG. 4, rod-shaped (or plate-shaped) terminal members 5 and 6 each have a rectangular cross section in a direction perpendicular to the plane of the paper. Plate-shaped contact pieces 2.2 are provided on both side surfaces of one terminal member 5. The thickness of the plate-shaped contact piece 2 is thinner than the width of the terminal members 5 and 6 in the direction perpendicular to the paper surface. Therefore, generally, a plurality of contact pieces 2 are arranged in parallel in a direction perpendicular to the plane of the drawing and are connected to each other by guide rods 2a, 2a so that they operate as a unit. A tension spring 3 is provided between each contact piece 2.2 facing each other with the terminal member 5 in between so as to generate a predetermined contact pressure against the terminal member 6. Each contact piece 2.2 merely clamps the terminal element 5, for example at the contact point 2a, by the biasing force of the tension spring 3. Therefore, clusters 15 are provided to eliminate backlash in the direction perpendicular to the plane of the paper and to prevent the terminal members 5 from falling off in the longitudinal direction.

[発明が解決しようとする課題] 従来のコネクタにおいては、第4図に示すように端子部
材5および6の間に引張ばね3やクラスタ15が設けら
れているため、端子部材6がクラスタ15等と接触しな
いように端子部材5と6の間の距離lを長<シなければ
ならないという問題を有していた。
[Problems to be Solved by the Invention] In the conventional connector, as shown in FIG. 4, the tension spring 3 and the cluster 15 are provided between the terminal members 5 and 6. There was a problem in that the distance l between the terminal members 5 and 6 had to be long to avoid contact with the terminal members 5 and 6.

また、1つの接触片2についてみれば5.各端子部材5
および6とはそれぞれ点5aおよび6aの2点で接触す
るだけであり接触部としての信頼性に欠けるという問題
点を有していた。
Also, if you look at one contact piece 2, 5. Each terminal member 5
and No. 6 have a problem in that they are in contact only at two points, points 5a and 6a, and lack reliability as a contact portion.

さらに、コネクタが使用されていない状態にあっては、
例えば第5図に示すように、引張ばね3の付勢力によっ
て各接触片2.2がその先端部近傍2Cにおいて接触し
、また端子部材5とは点2bにおいて接触するのみであ
る。そのため、各接触片2゜2は端子部材5に対して不
安定に保持されるという問題点および引張ばね3の付勢
力に抗して端子部材6を接触片2.2の間に押入するに
は大きな操作力を必要とするという問題点を有していた
。
Additionally, when the connector is not in use,
For example, as shown in FIG. 5, each contact piece 2.2 comes into contact near its tip 2C due to the biasing force of the tension spring 3, and only makes contact with the terminal member 5 at a point 2b. Therefore, each contact piece 2.2 is held unstable relative to the terminal member 5, and it is difficult to push the terminal member 6 between the contact pieces 2.2 against the biasing force of the tension spring 3. had the problem of requiring a large amount of operating force.

この発明は以上のような問題点を解決するためになされ
たものであり、各端子部材間の距離を短かくし、接触点
を増加させかつ操作力を軽くしたコネクタを提供するこ
とを目的としている。
This invention was made to solve the above problems, and aims to provide a connector in which the distance between each terminal member is shortened, the number of contact points is increased, and the operating force is lightened. .

[課題を解決するための手段] この発明に・係るコネクタは、 長方形断面を有する板状体でその板状の面の−の端面近
傍に貫通穴を有する棒状又は板状の端子部材、 前記−の端面に対して前記貫通穴よりも遠い位置におい
て、前記位置の端面に対して平行に前記端子部材を貫通
して設けられたガイドピン、前記貫通穴を係合し、前記
端子部材の厚さよりも厚い環状スペーサ部材、 前記ガイドピンと係合する係合部と、前記貫通穴と対向
する穴部と他の端子部材と接触するための凸状接触部と
を有し、前記端子部材に設けられたガイドピンと前記係
合部とが係合しかつ前記凸状接触部どおしが対抗するよ
うに前記端子部材の両側面に設けられた2枚の接触片、 前記2枚の接触片の穴部と環状スペーサ部材とを貫通し
て設けられたガイド部材と前記2枚の接触片のいずれか
一方との間に設けられ、前記2枚の接触片の凸状接触部
に挟持力を付勢する圧縮ばね、 を具備して・いる。
[Means for Solving the Problems] A connector according to the present invention includes: a rod-shaped or plate-shaped terminal member that is a plate-shaped body having a rectangular cross section and has a through hole near the - end face of the plate-shaped surface; A guide pin provided through the terminal member parallel to the end surface of the terminal member at a position farther from the end surface of the through hole than the through hole engages with the through hole, and a thick annular spacer member, the spacer member having an engaging portion that engages with the guide pin, a hole portion that faces the through hole, and a convex contact portion that makes contact with another terminal member; two contact pieces provided on both sides of the terminal member such that the guide pin and the engaging portion engage with each other and the convex contact portions oppose each other; and holes in the two contact pieces. a guide member that is provided through the annular spacer member and one of the two contact pieces, and applies a clamping force to the convex contact portion of the two contact pieces. It is equipped with a compression spring.

[作用] ガイド部材は例えばボルト、ナツトおよびワッシャ等で
あり、圧縮ばねの付勢力により2枚の接触片と端子部材
とは一体に結合される。ガイド部材は各接触片に設けら
れた穴部および端子部材に設けられた環状スペーサ部材
の穴を貫通しているため、端子部材の−の端面と他の端
子部材の端面との間には何も存在せず、両端子間の距離
は必要最低限度の安全距離でよい。
[Operation] The guide member is, for example, a bolt, nut, washer, etc., and the two contact pieces and the terminal member are integrally connected by the biasing force of the compression spring. Since the guide member passes through the hole provided in each contact piece and the hole in the annular spacer member provided in the terminal member, there is nothing between the negative end face of the terminal member and the end face of the other terminal member. There is no such thing, and the distance between both terminals may be the minimum necessary safe distance.

環状スペーサ部材は端子部材よりも厚いため、コネクタ
が使用されていない初期状態(他の端子部材が挿入され
ていない状態)でも2枚の接触片と端子部材とが同時に
密着することはない。ここで各接触片の凸状接触部の突
出量をスペーサ部材の厚みの半分以下とすれば、各凸状
接触部は接触することなくその間隔は所定の間隔に保た
れる。
Since the annular spacer member is thicker than the terminal member, the two contact pieces and the terminal member do not come into close contact with each other at the same time even in the initial state when the connector is not in use (a state in which no other terminal member is inserted). Here, if the protrusion amount of the convex contact portion of each contact piece is set to less than half the thickness of the spacer member, the convex contact portions will not come into contact and the distance between them will be maintained at a predetermined interval.

2枚の接触片と端子部材とは接触片の係合部例えばU字
溝や小判穴等と端子部材を貫通するガイドピンとが係合
することにより相互に一定の位置関係に安定し゛て保た
れる。また、コネクタを使用した状態において、−の端
子部材と一つの接触片とは係合部近傍例えばU字溝の両
側の2箇所で接触し、他の端子部材と当該接触片とは前
記凸状接触部により接触するため、従来例と比べて接触
点が増加する。
The two contact pieces and the terminal member are stably maintained in a fixed positional relationship with each other by the engagement of the engaging portion of the contact piece, such as a U-shaped groove or oval hole, with a guide pin that passes through the terminal member. It will be done. In addition, when the connector is in use, the negative terminal member and one contact piece are in contact with each other at two places near the engaging portion, for example, on both sides of the U-shaped groove, and the other terminal member and the contact piece are in contact with each other in the convex shape. Since contact is made through the contact portion, the number of contact points increases compared to the conventional example.

[実施例] この発明に係るコネクタを、その一実施例を示す第1図
、第2図および第3図を用いて説明する。
[Example] A connector according to the present invention will be described with reference to FIGS. 1, 2, and 3 showing an example thereof.

図において、端子部材50は例えば引出形しゃ断器等の
端子である。また端子部材60は配電盤等の固定枠に設
けられた端子である。いずれも紙面に垂直な方向に長方
形断面を有する棒状又は板状の端子部材である。端子部
材50の厚さをt!、端子部材60の厚さをt2とする
( J= t2)。端子部材50はその−の端面SOa
の近傍に貫通穴51を有している。
In the figure, a terminal member 50 is, for example, a terminal of a drawer-type breaker or the like. Further, the terminal member 60 is a terminal provided on a fixed frame such as a switchboard. All of them are rod-shaped or plate-shaped terminal members having a rectangular cross section in a direction perpendicular to the plane of the paper. The thickness of the terminal member 50 is t! , the thickness of the terminal member 60 is assumed to be t2 (J=t2). The terminal member 50 has a negative end surface SOa.
It has a through hole 51 near it.

貫通穴51には端子部材50の厚さL!よりも厚い所定
寸法【3(第3図に示す)を有する環状スペーサ7が嵌
合している。また端子部材50にはその端面50aに対
して貫通穴51よりも遠い位置にガイドピン8が側面5
0bから50cに向って貫通するように設けられている
。端子部材50の側面50bおよび50cにはそれぞれ
接触片zOがその一端部に設けられた凸状接触部20a
が対向するように設けられている。接触片20の他端部
は第2図に示すようにガイドピン8と係合するためのU
字状の溝20cが設けられ、またこのU字状の満20c
の両側部は接触状態を改善するために凸状に形成されて
いる。したがって、接触片20は端子部材60とは点A
の裏面近傍において接触し、また端子部材50とは点B
およびCの裏面近傍において接触する。さらに接触片2
0の中央部近傍には端子部材50の貫通穴5工と対向す
るように穴20bが設けられている。また、穴20bの
近傍は圧縮ばね3の付勢力を垂直に受けるために打出し
等により突起20dが形成されている。各接触片20の
穴20bおよびスペーサ部材7をボルト4が貫通して設
けられている。ボルト4の頭部には板状のワッシャ9が
設けられさらにボルト4にはチューブ14が嵌装されて
いる。ワッシャ9は−の接触片20(例えば図中下方)
の突起20dに当接する。
The through hole 51 has a thickness L of the terminal member 50! An annular spacer 7 having a predetermined thickness [3 (shown in FIG. 3)] is fitted therein. Further, a guide pin 8 is provided on the side surface 5 of the terminal member 50 at a position farther from the through hole 51 with respect to the end surface 50a.
It is provided so as to penetrate from 0b toward 50c. The side surfaces 50b and 50c of the terminal member 50 each have a convex contact portion 20a provided with a contact piece zO at one end thereof.
are arranged to face each other. The other end of the contact piece 20 has a U for engaging with the guide pin 8 as shown in FIG.
A U-shaped groove 20c is provided, and this U-shaped groove 20c
Both side portions of are formed in a convex shape to improve the contact condition. Therefore, the contact piece 20 is different from the terminal member 60 at point A.
is in contact with the terminal member 50 near the back surface thereof, and the terminal member 50 is at point B.
and C come into contact near the back surface. Furthermore, contact piece 2
A hole 20b is provided near the center of the terminal member 0 so as to face the five through holes of the terminal member 50. Further, in the vicinity of the hole 20b, a protrusion 20d is formed by punching or the like in order to vertically receive the urging force of the compression spring 3. A bolt 4 is provided to pass through the hole 20b of each contact piece 20 and the spacer member 7. A plate-shaped washer 9 is provided on the head of the bolt 4, and a tube 14 is fitted into the bolt 4. The washer 9 is a negative contact piece 20 (for example, lower in the figure)
abuts against the protrusion 20d.

方、他の接触・片20(例えば図中上方)の側において
、ボルト4には2枚の皿状のワッシャ10および11と
、各ワッシャ10と11の間に設けられた圧縮ばね3が
それぞれ貫通して設けられている。さらに、ボルト4の
ねじ部にはナツト12が螺合し、ワッシャ11を介して
圧縮ばね3を圧縮する。圧縮ばね3はワソンヤlOを介
して接触片20の突起20dに所定の圧力を付勢してい
る。なお、ナツト12の上方には止めナツト13がボル
ト4のねじ部と螺合している。前途のボルト4に嵌装さ
れているチューブは所定の長さに規定されており、ナツ
ト12の締付位置を規制する。これにより圧縮ばね3の
初期圧縮量が一定に保たれ、接触片20に付勢される接
触圧力も一定に保たれる。第3図に初期状態を示す。
On the other hand, on the side of the other contact piece 20 (for example, the upper part in the figure), the bolt 4 has two plate-shaped washers 10 and 11, and a compression spring 3 provided between each washer 10 and 11, respectively. It is installed through. Further, a nut 12 is screwed into the threaded portion of the bolt 4, and compresses the compression spring 3 via the washer 11. The compression spring 3 applies a predetermined pressure to the protrusion 20d of the contact piece 20 via the pressure spring 10. Note that a locking nut 13 is screwed onto the threaded portion of the bolt 4 above the nut 12. The tube fitted into the bolt 4 in front has a predetermined length and regulates the tightening position of the nut 12. As a result, the initial compression amount of the compression spring 3 is kept constant, and the contact pressure applied to the contact piece 20 is also kept constant. FIG. 3 shows the initial state.

このとき、各接触片20は圧縮ばね3の付勢力によリス
ペーサ部材7に当接している。各接触片20の凸状接触
部2Od間の距離を端子部材60の厚さ12(第1図に
示す)よりも小さい所定寸法L3とするためには、各凸
状接触部20dの突出fit4を、(4= 丁 (tコ
ーL3) となるように゛すればよい。
At this time, each contact piece 20 is in contact with the re-spacer member 7 due to the biasing force of the compression spring 3. In order to set the distance between the convex contact portions 2Od of each contact piece 20 to a predetermined dimension L3 smaller than the thickness 12 (shown in FIG. 1) of the terminal member 60, the protrusion fit4 of each convex contact portion 20d is , (4= d (t ko L3)).

[発明の効果] 以上のように構成されたこの発明に係るコネクタにおい
て、接触片20に接触圧力を付勢するための圧縮ばね3
が−の端子部材50および各接触片2゜を貫通するガイ
ド部材であるボルト4、ナツト12およびワッシャ10
. IIにより保持されているため、−の端子部材50
と他の端子部材60との間には何の構成部品も存在せず
、第1図に示すように両端子部材50.60の間隔を最
小安全寸法Llにまで短縮することができ、コネクタの
寸法を小さくすることができる。
[Effects of the Invention] In the connector according to the present invention configured as described above, the compression spring 3 for applying contact pressure to the contact piece 20 is provided.
A bolt 4, a nut 12 and a washer 10 which are guide members passing through the terminal member 50 and each contact piece 2°.
.. Since it is held by II, the negative terminal member 50
There are no components between the terminal member 50 and the other terminal member 60, and as shown in FIG. Dimensions can be reduced.

また、第2図に示すように接触片20と端子部材60と
は点Aの裏面近傍において接触し、また接触片20と端
子部材50とは点BおよびCの裏面近傍において接触す
るため、従来例と比べて接触点が増加し信頼性が向上す
る。
Furthermore, as shown in FIG. 2, the contact piece 20 and the terminal member 60 contact near the back surface of point A, and the contact piece 20 and the terminal member 50 contact near the back surface of points B and C. Compared to the example, the number of contact points increases and reliability is improved.

さらに、第3図に示すようにコネクタが使用されていな
い初期状態において、スペーサ部材7により各接触片2
0の凸状接触部20dの間隔は一定(L3)に保持され
る“ため初期状態は安定しており、端子部材60を各接
触片20の間に押入する際の操作力も低減される。
Furthermore, as shown in FIG. 3, in the initial state when the connector is not in use, each contact piece 2 is
Since the interval between the two convex contact portions 20d is kept constant (L3), the initial state is stable, and the operating force required to push the terminal member 60 between the contact pieces 20 is reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明に係るコネクタの使用状態を示す側面
図である。第2図は同平面図である。第3図は第1図に
示すコネクタの未使用の初期状態を示す側面図である。 第4図は従来のコネクタの使用状態を示す側面図である
。第5図は従来のコネクタの未使用の初期状態を示す図
である。 図中、3は圧縮ばね、4はボルト、7はスペーサ部材、
8はガイドビン、9,10.IIはワッシヤ、12.1
3はナツト、20は接触片、20dは凸状接触部、20
bは穴部、20cはガイド溝、20dは突起、50.6
0は端子部材、51は貫通穴である。
FIG. 1 is a side view showing the state in which the connector according to the invention is used. FIG. 2 is a plan view of the same. FIG. 3 is a side view showing the connector shown in FIG. 1 in an unused initial state. FIG. 4 is a side view showing a conventional connector in use. FIG. 5 is a diagram showing a conventional connector in an unused initial state. In the figure, 3 is a compression spring, 4 is a bolt, 7 is a spacer member,
8 is a guide bin, 9, 10. II is Washya, 12.1
3 is a nut, 20 is a contact piece, 20d is a convex contact part, 20
b is a hole, 20c is a guide groove, 20d is a protrusion, 50.6
0 is a terminal member, and 51 is a through hole.

Claims (1)

【特許請求の範囲】[Claims] (1)長方形断面を有する板状体でその板状の面の一の
端面近傍に貫通穴を有する棒状又は板状の端子部材、 前記一の端面に対して前記貫通穴よりも遠い位置におい
て、前記一の端面に対して平行に前記端子部材を貫通し
て設けられたガイドピン、 前記貫通穴と係合し、前記端子部材の厚さよりも厚い環
状スペーサ部材、 前記ガイドピンと係合する係合部と、前記貫通穴と対向
する穴部と他の端子部材と接触するための凸状接触部と
を有し、前記端子部材に設けられたガイドピンと前記係
合部とが係合しかつ前記凸状接触部どおしが対向するよ
うに前記端子部材の両側面に設けられた2枚の接触片、 前記2枚の接触片の穴部と環状スペーサ部材とを貫通し
て設けられたガイド部材、 前記ガイド部材と前記2枚の接触片のいずれか一方との
間に設けられ、前記2枚の接触片の凸状接触部に挟持力
を付勢する圧縮ばね、 を具備するコネクタ。
(1) A rod-shaped or plate-shaped terminal member that is a plate-shaped body with a rectangular cross section and has a through hole near one end surface of the plate-shaped surface, at a position farther than the through hole with respect to the one end surface, a guide pin provided to penetrate the terminal member parallel to the one end surface; an annular spacer member that engages with the through hole and is thicker than the terminal member; and an engagement member that engages with the guide pin. a hole portion facing the through hole and a convex contact portion for contacting another terminal member, the guide pin provided on the terminal member engages with the engaging portion, and two contact pieces provided on both sides of the terminal member so that the convex contact portions face each other; a guide provided through the hole of the two contact pieces and the annular spacer member; A connector comprising: a compression spring that is provided between the guide member and either one of the two contact pieces and applies a clamping force to the convex contact portion of the two contact pieces.
JP1319513A 1989-12-08 1989-12-08 Connector Pending JPH03182070A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1319513A JPH03182070A (en) 1989-12-08 1989-12-08 Connector
KR1019900010886A KR910013618A (en) 1989-12-08 1990-07-18 Connecta
KR2019940003777U KR940004434Y1 (en) 1989-12-08 1994-02-28 Connecta

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1319513A JPH03182070A (en) 1989-12-08 1989-12-08 Connector

Publications (1)

Publication Number Publication Date
JPH03182070A true JPH03182070A (en) 1991-08-08

Family

ID=18111066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1319513A Pending JPH03182070A (en) 1989-12-08 1989-12-08 Connector

Country Status (2)

Country Link
JP (1) JPH03182070A (en)
KR (1) KR910013618A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100196626A1 (en) * 2009-02-04 2010-08-05 Applied Materials, Inc. Ground return for plasma processes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100196626A1 (en) * 2009-02-04 2010-08-05 Applied Materials, Inc. Ground return for plasma processes
US9382621B2 (en) * 2009-02-04 2016-07-05 Applied Materials, Inc. Ground return for plasma processes

Also Published As

Publication number Publication date
KR910013618A (en) 1991-08-08

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