JPH03184765A - Duplex lapping method - Google Patents

Abstract

PURPOSE:To set parallelism for a polishing surface and squareness to a work axis so accurately by rotating both upper and lower surface plates at equi- velocity in the same direction and thereby lapping a workpiece. CONSTITUTION:A work 6 held by each carrier 3 is held between both upper and lower surface plates 1 and 2, while these plates are rotated at equi-velocity in the same direction as making these carriers 3 into planetary motion through a sun gear 4 and an internal gear 5 whereby both sides of the work 6 are lapped. At time, since these upper and lower surface plates 1, 2 are rotated at equi-velocity in the same direction, tensile force acting on both upper and lower surfaces of the work 6 comes to the same direction and the same size, so that any reverse tensile force will not act on both the upper and lower surfaces of the work 6, therefore such a possibility that the work 6 might be polished aslant is not longer caused to happen.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a double-sided lapping method for simultaneously lapping both sides of a workpiece such as a mechanical component, optical component, or electrical component made of metal, glass, ceramic, etc. be.

[Prior Art] Conventionally, double-sided lapping of a workpiece as described above has generally been performed using a four-way wrapping machine. This wrapping machine consists of upper and lower surface plates, a carrier disposed between these surface plates, and a sun gear and an internal gear that move the carrier in planetary motion. While rotating the workpiece, both sides of the workpiece held by the carrier interlocked with the planets between these surface plates are lapped, and the sun gear,
By appropriately setting the rotation ratio of the internal gear 1 and the upper and lower surface plates, the upper and lower surfaces of the workpiece can be polished by the same amount.

However, in the lapping process using the 4-way method, the upper and lower surfaces of the workpiece are each pulled in the direction of rotation of the surface plate, so when the upper and lower surface plates are rotated in opposite directions, the upper surface of the workpiece Tensile forces in opposite directions act on the upper and lower surfaces of the workpiece, causing the workpiece to tilt and be machined while being tilted. Therefore, there was a drawback that the parallelism of the polishing surface and the perpendicularity to the workpiece axis deteriorated. This tendency becomes more pronounced as the thickness (height) of the work increases.

Is it possible to prevent the workpiece from tilting by lapping with a 2-way method in which the upper and lower surface plates are fixed?In the case of this 2-way method, it is better than the 4-way method in which the surface plates are rotated. Since the relative speed between the workpiece and the surface plate is low, the polishing rate is low and the polishing efficiency is poor.

[Problems to be Solved by the Invention] An object of the present invention is to improve processing accuracy by preventing tilting of a workpiece during processing in a four-way lapping process in which upper and lower surface plates are rotated.

[Means for Solving the Problems] In order to solve the above problems, the method of the present invention involves sandwiching a workpiece held by a carrier between upper and lower surface plates, and moving the carrier to a planetary planet using a sun gear and an internal gear. It is characterized by lapping both sides of the work by rotating the upper and lower surface plates in the same direction at a constant speed while moving.

[Specific Examples of the Invention] Hereinafter, the method of the present invention will be explained in more detail with reference to the drawings.

FIG. 1 schematically shows a four-way type double-sided wrapping machine used to carry out the method of the present invention. It is equipped with a plurality of carriers 3 disposed between these surface plates 1 and 2, a sun gear 4 and an internal gear 5 that mesh with the carriers 3, and both gears 4 and 5 drive the carriers 3 in a planetary gear shape. However, the workpiece 6 held by the carrier 3 is sandwiched between the upper and lower sides at a constant distance of 1.2 mm, and both surfaces thereof are subjected to lapping, and this point is the same as that of a known lapping machine.

In order to drive the upper and lower surface plates 1.2, the sun gear 4, and the internal gear 5, there is an upper surface plate shaft 8 that can be freely engaged with and detached from the upper surface plate 1 via a tri-huff, and a lower surface plate shaft that is integrated with the lower surface plate 2. 8 and sun gear 4
A sun gear shaft lO, which is integrated with the internal gear 5, and an internal gear shaft 11, which is integrated with the internal gear 5, are arranged coaxially with each other, and driven gears 12, 13, 14, and 15 are attached to the lower end of each shaft, respectively. The drive shaft 16, which is disposed parallel to these shafts 8.8°10, II, has the above-mentioned driven gears +2.13, 14.
．． Multiple drive gears corresponding to 15+7.18.19.2
0 is attached, and the driving gear 17 and the driven gear 12 are connected to the driving gear 18 and the driven gear 13 via the idle gear 25.
The drive gears 19 and 20 and the driven gears 14 and 15 are in direct mesh with each other through the idle gear 26, and the transmission gear 21 attached to the lower end of the drive shaft 16 is fixed to the rotating shaft of the motor 23. The transmission gear 22 meshes with the transmission gear 22.

The number of teeth of the driven gear 12 attached to the upper surface plate shaft 8 and the driven gear 13 attached to the lower surface plate shaft 9.

Number of teeth on idle gear 25, 28, and two drive gears 1
The number of teeth (7.18) is the same, so that the upper and lower surface plates 1.2 rotate in the same direction at the same speed. On the other hand, regarding the sun gear 4 and the internal gear 5, the driven gears 14 and 15 and the driving gears Is and 20 have different numbers of teeth, thereby enabling the carrier 3 to be driven like a planetary gear.

The wrapping machine having the above configuration holds the workpiece 6 held by each carrier 3 between the upper and lower constants 51jl, 2, and moves the carrier 3 in a planetary motion with the sun gear 4 and the internal gear 5, while moving the workpiece 6 up and down. Both sides of the workpiece 6 are lapped by rotating the surface plates 1 and 2 in the same direction at a constant speed.

At this time, since the upper and lower surface plates 1.2 are rotating at the same speed in the same direction, the tensile forces acting on the upper and lower surfaces of the workpiece 6 are in the same direction and the same magnitude, and are directed in opposite directions to the upper and lower surfaces of the workpiece 6. Since no tensile force acts on the workpiece 6, the workpiece 6 is not polished at an angle.

The wrapping machine shown in Figure Wg1 has a single motor 23
A one-motor system is adopted in which the sun gear 4 and the internal gear 5 are driven by a fixed upper and lower fit, 2, but as shown in FIG. A one-motor system, a three-motor system where the sun gear 4 and the internal gear 5 are each driven by independent motors, and the upper and lower gears 11.2 are driven by a common motor, and the sun gear 4 and the internal gear 5 are driven by a common motor. Alternatively, a four-motor system may be used in which the upper and lower surface plates 1.2 are both driven by independent motors.

[Effects of the Invention] As described above, according to the present invention, the upper and lower surface plates are rotated in the same direction at a constant speed to perform the lapping process on the workpiece, so that the forces acting on the upper and lower surfaces of the workpiece are applied in the same direction and at a constant speed. The diameter of the grinding surface is the same, and the workpiece is not tilted due to forces acting in opposite directions on the upper and lower surfaces of the workpiece, as would be the case when rotating the demarcation plate in the opposite direction. The angle can be accurately determined and high-precision machining can be performed. Furthermore, compared to the two-way method in which the marking surface plate is fixed, since the upper and lower surface plates are rotating, the relative speed between the surface plate and the workpiece can be increased, resulting in a decrease in polishing efficiency. This has the advantage that not only is there no problem, but also that the surface plate can be corrected quickly.

[Brief explanation of drawings]

1 and 2 are schematic diagrams of a double-sided wrapping machine suitably used for carrying out the method of the present invention. l◆・Upper surface plate, 2..Lower surface plate, 3..Carrier, 4..Sun gear, 5..Internal gear, S.
·work.

Claims (1)

[Claims] 1. A workpiece held on a carrier is sandwiched between upper and lower surface plates, and the carrier is moved in planetary motion by a sun gear and an internal gear, while the upper and lower surface plates are rotated in the same direction at a constant speed to remove the workpiece. A double-sided wrapping method characterized by wrapping.