JPH0318751B2 - - Google Patents
Info
- Publication number
- JPH0318751B2 JPH0318751B2 JP60029638A JP2963885A JPH0318751B2 JP H0318751 B2 JPH0318751 B2 JP H0318751B2 JP 60029638 A JP60029638 A JP 60029638A JP 2963885 A JP2963885 A JP 2963885A JP H0318751 B2 JPH0318751 B2 JP H0318751B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- copper
- electrode
- tungsten
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は循環するレーザ媒質ガスを放電励起
し、レーザ発振を行なうガスレーザ発振装置に関
するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a gas laser oscillation device that performs laser oscillation by exciting a circulating laser medium gas by discharge.
従来の技術
第１図に従来のガスレーザ発振装置の放電用電
極の概略図を示す。１は銅電極、２は放電管であ
る。レーザ媒質ガスは放電管２の中で放電励起さ
れ、全反射鏡３と出力鏡４との間で増幅されレー
ザ光を発振する。この時、放電電流は電極表面全
体もしくは一部を流れる。BACKGROUND ART FIG. 1 shows a schematic diagram of a discharge electrode of a conventional gas laser oscillation device. 1 is a copper electrode, and 2 is a discharge tube. The laser medium gas is discharge-excited in the discharge tube 2, amplified between the total reflection mirror 3 and the output mirror 4, and oscillates a laser beam. At this time, the discharge current flows through the entire or part of the electrode surface.
発明が解決しようとする問題点
ところがこの銅電極１では、放電電流を増大さ
せていくと銅電極表面の電流の局所的集中がおこ
り、放電の拡がりが悪くなる。したがつて効率よ
くレーザ媒質ガスを放電励起できず、出力が伸び
なやむ傾向がある。この様子を第２図に示す。第
２図ａに示すように、放電電流が小さい場合は銅
電極表面上に一様に分布していた電流密度が電流
の増大により、第２図ｂに示すように局所的集中
もひきおこしている。特に局所的集中をおこしや
すいのはレーザ媒質ガスの流れのないところに面
した電極表面部分である。Problems to be Solved by the Invention However, in this copper electrode 1, when the discharge current is increased, local concentration of current occurs on the surface of the copper electrode, and the spread of the discharge becomes poor. Therefore, the laser medium gas cannot be excited by discharge efficiently, and the output tends to be sluggish. This situation is shown in FIG. As shown in Figure 2a, when the discharge current was small, the current density was uniformly distributed on the surface of the copper electrode, but as the current increased, local concentration also occurred as shown in Figure 2b. . Local concentration is particularly likely to occur on the electrode surface portion facing the area where the laser medium gas does not flow.
問題点を解決するための手段
この問題点を解決するために本発明は、ガスレ
ーザ発振装置の放電用電極の材質を少なくともタ
ングステンと銅からなる焼結合金としたものであ
る。Means for Solving the Problem In order to solve this problem, the present invention uses a sintered alloy consisting of at least tungsten and copper as the material of the discharge electrode of the gas laser oscillation device.
作 用
上記構成により、レーザ媒質ガスをより効率よ
く励起できる。Effect With the above configuration, the laser medium gas can be excited more efficiently.
実施例
以下、本発明の実施例について第３図乃至第５
図を参照して説明する。Embodiments The embodiments of the present invention will be described in Figures 3 to 5 below.
This will be explained with reference to the figures.
第３図において、１１は放電用電極であり、タ
ングステンと銅の焼結合金よりなり、タングステ
ンと銅の質量比は70：30である。１２は放電管で
ある。 In FIG. 3, a discharge electrode 11 is made of a sintered alloy of tungsten and copper, and the mass ratio of tungsten and copper is 70:30. 12 is a discharge tube.
上記構成において、放電用電極１１は銅とタン
グステンの焼結合金よりなるが、銅とタングステ
ンの電気伝導度が異なるため、銅からの電流放出
が中心となる。このためタングステンのすき間の
銅の部分から電子が放出されることになる。この
様子を第３図に示す。このため銅粒子からの電子
放出による銅粒子の発熱をタングステン粒子が拡
散させ、電極表面上のプラズマを抑制するという
効果がある。このタングステン粒子による発熱の
拡散が最も効果的にあらわれるのは、銅粒子の表
面積とタングステン粒子の表面積が等しい時であ
る。このとき銅粒子とタングステン粒子の質量比
は30％：70％となる。なお銅とタングステンの質
量比と出力の関係を第４図に示す。 In the above configuration, the discharge electrode 11 is made of a sintered alloy of copper and tungsten, but since copper and tungsten have different electrical conductivities, current is mainly emitted from the copper. Therefore, electrons are emitted from the copper portion between the tungsten gaps. This situation is shown in FIG. Therefore, the tungsten particles diffuse the heat generated by the copper particles due to electron emission from the copper particles, and have the effect of suppressing plasma on the electrode surface. The diffusion of heat generated by the tungsten particles is most effective when the surface area of the copper particles and the surface area of the tungsten particles are equal. At this time, the mass ratio of copper particles and tungsten particles is 30%:70%. The relationship between the mass ratio of copper and tungsten and the output is shown in FIG.
また、第５図に示すように、銅とタングステン
の焼結合金よりなる焼結合金電極１３の両側に絶
縁物１４を位置させることにより放電用電極を構
成すると、レーザ媒質ガス流れに面した焼結合金
電極１３の表面からのみ放電させることができ、
放電面上のガス圧、冷却等の条件が均一化され、
より放電電流の局所的集中を防ぐ効果が得られ
る。 In addition, as shown in FIG. 5, when the discharge electrode is constructed by placing insulators 14 on both sides of the sintered alloy electrode 13 made of a sintered alloy of copper and tungsten, the sintered alloy electrode 13 is made of a sintered alloy of copper and tungsten. It is possible to discharge only from the surface of the combined gold electrode 13,
Conditions such as gas pressure and cooling on the discharge surface are made uniform,
The effect of preventing local concentration of discharge current can be obtained.
発明の効果
以上の説明から明らかなように本発明によれば
レーザ媒質ガスをより効率よく励起できることに
より、同出力でより小型の経済的なガスレーザ発
振装置を提供でき、その効果は大である。Effects of the Invention As is clear from the above description, according to the present invention, the laser medium gas can be excited more efficiently, thereby providing a smaller and more economical gas laser oscillation device with the same output, which is highly effective.
第１図は従来のガスレーザ発振装置の要部断面
図、第２図ａは同装置における放電電流が小さい
場合の要部断面図、第２図ｂは同装置における放
電電流が大きい場合の要部断面図、第３図は本発
明の一実施例を示すガスレーザ発振装置の要部断
面図、第４図は同装置の放電用電極の銅の質量比
と出力の関係を示す特性図、第５図は本発明の他
の実施例を示すガスレーザ発振装置の要部断面図
である。
１１……放電用電極、１２……放電管。
Figure 1 is a sectional view of the main part of a conventional gas laser oscillation device, Figure 2a is a sectional view of the main part of the same device when the discharge current is small, and Figure 2b is the main part of the same device when the discharge current is large. 3 is a sectional view of a main part of a gas laser oscillation device showing an embodiment of the present invention, FIG. 4 is a characteristic diagram showing the relationship between the copper mass ratio and output of the discharge electrode of the same device, and FIG. The figure is a sectional view of a main part of a gas laser oscillation device showing another embodiment of the present invention. 11...Electrode for discharge, 12...Discharge tube.
Claims (1)
ザ発振を行なうガスレーザ発振装置において、放
電用電極の材質を少なくともタングステンと銅か
らなる焼結合金とし、かつ前記放電用電極はレー
ザ媒質ガスの流れに接する面のみを電極面として
形成したことを特徴とするガスレーザ発振装置。1. In a gas laser oscillation device that performs laser oscillation by discharge exciting circulating laser medium gas, the material of the discharge electrode is a sintered alloy consisting of at least tungsten and copper, and the discharge electrode is in contact with the flow of the laser medium gas. A gas laser oscillation device characterized in that only a surface is formed as an electrode surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60029638A JPS61188980A (en) | 1985-02-18 | 1985-02-18 | Gas laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60029638A JPS61188980A (en) | 1985-02-18 | 1985-02-18 | Gas laser oscillation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61188980A JPS61188980A (en) | 1986-08-22 |
| JPH0318751B2 true JPH0318751B2 (en) | 1991-03-13 |
Family
ID=12281620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60029638A Granted JPS61188980A (en) | 1985-02-18 | 1985-02-18 | Gas laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61188980A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3817145C2 (en) * | 1987-06-03 | 1996-02-01 | Lambda Physik Forschung | Electrode for pulsed gas lasers and their use |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6184883A (en) * | 1984-10-02 | 1986-04-30 | Matsushita Electric Ind Co Ltd | Gas laser oscillator |
| JPS61147590A (en) * | 1984-12-21 | 1986-07-05 | Matsushita Electric Ind Co Ltd | Gas laser |
-
1985
- 1985-02-18 JP JP60029638A patent/JPS61188980A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61188980A (en) | 1986-08-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |