JPH03189912A - Production of nonmagnetic substrate for magnetic head - Google Patents
Production of nonmagnetic substrate for magnetic headInfo
- Publication number
- JPH03189912A JPH03189912A JP1327423A JP32742389A JPH03189912A JP H03189912 A JPH03189912 A JP H03189912A JP 1327423 A JP1327423 A JP 1327423A JP 32742389 A JP32742389 A JP 32742389A JP H03189912 A JPH03189912 A JP H03189912A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- magnetic head
- sintering
- rate
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、金属性磁性膜を蒸着するための非磁性の磁気
ヘッド用基板(Coo−NiO系)の製造方法に関する
もので、特に常圧焼結あるいはホットプレスにおける昇
温速度に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a non-magnetic magnetic head substrate (Coo-NiO system) for depositing a metallic magnetic film, and particularly relates to a method for manufacturing a non-magnetic magnetic head substrate (Coo-NiO system) on which a metallic magnetic film is deposited. Or it relates to the rate of temperature increase in hot press.
従来技術
従来、Coo−Ni0系の磁気ヘッド用非磁性基板の製
造方法として、本発明者等は、以下の工程からなる製造
方法が有効であるとして既に開示した。(出願昭63−
243995 )すなわち、■原料粉を混合し、ふるい
分けを行なう混合工程、■CIP成形した混合粉を仮焼
し、粉砕した後ふるい分けを行なう仮焼工程、■仮焼粉
を1μm以下に微粉砕する工程、■微粉砕粉を20μm
以」二の球形に造粒する工程、■造粒粉をCIP成形す
る工程、■成形体を焼結する工程、■焼結体をHI P
処理する工程である。さらに、成形体の焼結については
、常圧焼結あるいはホットプレスを用い、1000℃以
」二で酸素雰囲気下で処理することとした。Prior Art Conventionally, as a method for manufacturing a Coo-NiO-based nonmagnetic substrate for a magnetic head, the present inventors have already disclosed that a manufacturing method comprising the following steps is effective. (Application filed in 1986-
243995) That is, ■ a mixing process in which raw material powder is mixed and sieved; ■ a calcination process in which the CIP-formed mixed powder is calcined, pulverized, and then sieved; ■ a process in which the calcined powder is pulverized to 1 μm or less ,■ Finely ground powder to 20μm
2) Step of granulating into spherical shape, ■ Step of CIP molding the granulated powder, ■ Step of sintering the molded body, ■ Step of HI-Ping the sintered body.
This is a processing step. Furthermore, the molded body was sintered using normal pressure sintering or hot pressing at a temperature of 1000° C. or higher in an oxygen atmosphere.
さらに、結晶粒径が5μm以下の焼結体を製造するため
には、ホットプレスが有効であり、処理温度を1150
〜1300℃とすることを発見し、これも開示した。(
出願率o1214207)
これらの製造方法では、焼結における昇温速度に関する
厳密な規定はなく、昇温速度は極力遅い方がよいが、1
℃/分程度が望ましいとした。(出願昭63−2439
95 )しかし、その製造条件によっては焼結が不十分
な部分が存在し、均一な焼結体が得られないという欠点
があった。Furthermore, in order to produce a sintered body with a crystal grain size of 5 μm or less, hot pressing is effective, and the processing temperature is 1150 µm or less.
~1300°C, and this was also disclosed. (
Application rate o1214207) In these manufacturing methods, there are no strict regulations regarding the temperature increase rate during sintering, and it is better to keep the temperature increase rate as slow as possible, but 1
The desired rate was approximately ℃/min. (Application filed 1986-2439
95) However, depending on the manufacturing conditions, there are parts where sintering is insufficient, and a uniform sintered body cannot be obtained.
通常、昇温速度が速い場合、加熱中に焼結体内部に温度
勾配が生じ、焼結の不均一性の原因となる。すなわち、
表面付近では、気孔が急激に除去され、気孔濃度に差が
生じるためである。Normally, when the heating rate is high, a temperature gradient occurs inside the sintered body during heating, which causes non-uniform sintering. That is,
This is because pores are rapidly removed near the surface, resulting in a difference in pore concentration.
発明が解決しようとする問題点
本発明は、」二足の欠点を解決したもので、具体的には
Coo−Ni0系の磁気ヘッド用非磁性基板の製造方法
における成形体の焼結方法について、その昇温速度を規
定し、均な焼結体を得る方法を提供することが目的であ
る。Problems to be Solved by the Invention The present invention solves two drawbacks, specifically, regarding a method for sintering a molded body in a method for manufacturing a Coo-Ni0-based nonmagnetic substrate for a magnetic head. The purpose is to provide a method for obtaining a uniform sintered body by specifying the temperature increase rate.
発明の構成
即ち、本発明は、Coo−NiO系の磁気ヘッド用非磁
性基板の常圧焼結あるいはホットプレスにおいて、90
0℃から950℃までを0.5℃/分以下の速度で昇温
することを特徴とする磁気ヘッド用非磁性基板の製造方
法に関する。Structure of the Invention That is, the present invention provides a method for pressureless sintering or hot pressing of a Coo-NiO-based nonmagnetic substrate for a magnetic head.
The present invention relates to a method of manufacturing a non-magnetic substrate for a magnetic head, characterized in that the temperature is raised from 0° C. to 950° C. at a rate of 0.5° C./min or less.
問題点を解決するための手段及び作用
本発明者等は、Coo−Ni0系セラミツクスについて
従来より研究を進めてきたが、その製造方法における成
形体の焼結方法について詳細に検討した結果、900℃
から950℃までを0.5℃/分以下の速度で昇温した
場合、焼結が不七分である部分がなく、均一な焼結体が
得られることを見い出した。Means and Function for Solving the Problems The present inventors have been conducting research on Coo-Ni0 series ceramics, and as a result of detailed study on the method of sintering the molded body in the manufacturing method thereof, it was found that 900°C
It has been found that when the temperature is raised from 1 to 950° C. at a rate of 0.5° C./min or less, a uniform sintered body can be obtained without any unevenly sintered parts.
本発明者等は、C0O−NiO系セラミックスの焼結特
性を調査し、900〜950℃の範囲で収縮が始まり焼
結が開始されることを把握した。このことから、この温
度範囲では極力昇温速度を遅くした方が有効である。The present inventors investigated the sintering characteristics of COO-NiO ceramics and found that shrinkage begins and sintering begins in the range of 900 to 950°C. For this reason, it is more effective to slow down the temperature increase rate as much as possible in this temperature range.
また、この温度範囲での昇温速度が0.5℃/分を超え
る場合、焼結体内で気孔濃度に差が生じ、中心部はど気
孔濃度が高く、均一な焼結体が得られないことがわかっ
た。Additionally, if the temperature increase rate exceeds 0.5°C/min in this temperature range, there will be a difference in pore concentration within the sintered body, and the pore concentration will be high in the center, making it impossible to obtain a uniform sintered body. I understand.
さらに、大気中でのCooとGo、O,との平衡温度(
700〜800℃)以下では昇温速度は焼結に無関係で
あるため、使用する炉の仕様に合わせて速くすることが
可能であることも把握した。Furthermore, the equilibrium temperature of Coo, Go, O, in the atmosphere (
It was also found that the rate of temperature increase is irrelevant to sintering at temperatures below 700 to 800°C, so it is possible to increase the rate according to the specifications of the furnace used.
これらのことがら昇温速度は次のように分けるのが望ま
しい。Based on these factors, it is desirable to divide the temperature increase rate into the following categories.
0700℃までは使用する炉の仕様に合わせて速くする
0700℃以」−900℃までは0.5〜b■900℃
から950℃までは0.5℃/分以下
■950℃以上処理温度までは0.5〜b以下、全体の
製造方法を具体的に述べる。Up to 0700℃, speed up according to the specifications of the furnace used.Below 0700℃" -900℃: 0.5~b■900℃
0.5° C./min or less from 950° C. to 950° C. ■ 0.5 to b or less from 950° C. to processing temperature The overall manufacturing method will be described in detail.
市販の各酸化物を原料として、所望組成になるよう秤量
し、ボールミルにより混合する。Commercially available oxides are used as raw materials, weighed to give the desired composition, and mixed in a ball mill.
混合は例えばエタノール中湿式ボールミルで10〜30
時間行なう。Mixing is carried out for example in a wet ball mill in ethanol for 10 to 30 minutes.
Do time.
乾燥後、CIP成形し、例えばAr中850′−!−1
100℃で仮焼し、次いで粗砕機を用いて粉砕し、10
0〜200μmの篩で篩分けを行なう。After drying, CIP molding is performed, for example, 850'-! -1
Calcined at 100℃, then crushed using a coarse crusher,
Sieving is performed using a 0-200 μm sieve.
仮焼粉はさらに例えばエタノール中温式ポルミルで20
〜72時間処理し、1μm以下に微粉砕する。The calcined powder is further heated, for example, with ethanol at a medium temperature of 20%.
Treat for ~72 hours and pulverize to less than 1 μm.
これを造粒後、CIP成形し、0ア中、常圧焼結あるい
はホットプレス処理を行なう。After granulation, this is subjected to CIP molding, followed by pressureless sintering or hot press treatment in an oven.
常圧焼結の条件は、+230−1400℃、1〜12時
間が望ましく、ホットプレスでは、Co○/ N i
0モル比に対応させて1100〜1300℃で、100
〜500 kg / crd、1〜8時間が望ましい。The conditions for pressureless sintering are preferably +230-1400°C for 1-12 hours, and in hot press, Co○/Ni
At 1100-1300°C corresponding to 0 molar ratio, 100
~500 kg/crd, 1-8 hours is preferred.
昇温速度は、以下のように4範囲に分けるのが望ましい
。0700℃までは使用する炉の仕様に合わせて速くす
るのが好ましい。0900℃までは0.5〜3°C/分
、0900℃から950℃までは0.5℃/分以下、■
それ以」二処理温度までは0.5〜b
この焼結体を更にHT P処理する。これは、強度を向
」ユさせるために好ましい。条件としては、800〜1
200kg/cボ、1000〜]250℃、1〜2時間
が望ましい。HT P処理温度は、焼結温度より低い方
が望ましい。It is desirable to divide the temperature increase rate into four ranges as shown below. It is preferable to increase the speed up to 0700°C depending on the specifications of the furnace used. 0.5 to 3°C/min up to 0900°C, 0.5°C/min or less from 0900°C to 950°C, ■
From then on, the sintered body is further subjected to HTP treatment at a temperature of 0.5 to 2. This is preferred to improve strength. The conditions are 800-1
200 kg/c, 1000~]250°C, 1 to 2 hours is preferable. The HTP treatment temperature is desirably lower than the sintering temperature.
乙のようにして得られた焼結体は、緻密で均一性に優れ
ていることが確認できた。It was confirmed that the sintered body obtained as in Example B was dense and had excellent uniformity.
実施例
組成式CoxNi、xo、(x=0.7)で表わされる
酸化物をNip、Cooより調整した。これに添加材と
してA I、0.を2. Owし%加えた。混合は、
エタノール中温式ポルミルで22時間処理した。Example An oxide represented by the compositional formula CoxNi, xo, (x=0.7) was prepared from Nip and Coo. Additives to this include AI, 0. 2. Ow and added %. The mixture is
It was treated with ethanol medium temperature polmir for 22 hours.
乾燥後、CIP成形し、A r +41 ] 000℃
で仮焼後、I 504 m以下に粉砕した。After drying, CIP molding and A r +41 ] 000°C
After calcining, the powder was pulverized to I 504 m or less.
仮焼粉をさらにエタノール中湿式ボールミルで70時間
処理し、1fzm以下に微粉砕した。これを造粒後、C
IP成形し、0.中、ホットプレスにて1250℃で5
時間焼結した。The calcined powder was further treated in a wet ball mill in ethanol for 70 hours and pulverized to 1 fzm or less. After granulating this, C
IP molded, 0. Medium, hot press at 1250℃ 5
Sintered for hours.
昇温速度は、以下のとおりとした。The temperature increase rate was as follows.
0〜700℃ 5℃/分 0700〜900℃ 1℃/分 〜8 0900〜950℃ 0.3℃/分 ■950〜12508C1℃/分 この焼結体の特性を表1に示す。0~700℃ 5℃/min 0700~900℃ 1℃/min ~8 0900-950℃ 0.3℃/min ■950~12508C1℃/min Table 1 shows the properties of this sintered body.
比較例として、1250℃までをどの温度範囲も等しい
昇温速度3℃/分で昇温した場合、即ち900℃から9
50℃までの温度範囲における昇温速度が速い場合の焼
結体の特性を示す。As a comparative example, when the temperature is raised at the same rate of 3°C/min in all temperature ranges up to 1250°C, that is, from 900°C to 9°C.
The characteristics of the sintered body when the temperature increase rate is fast in the temperature range up to 50°C are shown.
(2)これにより、焼結体の特性にむらがなく、基板加
工時の歩留向」二等の経済性に利点がある。(2) As a result, the characteristics of the sintered body are uniform, and there is an advantage in economical efficiency such as yield rate during substrate processing.
Claims (1)
圧焼結あるいはホットプレスにおいて、900℃から9
50℃までを0.5℃/分以下の速度で昇温することを
特徴とする磁気ヘッド用非磁性基板の製造方法(1) In pressureless sintering or hot pressing of a CoO-NiO-based nonmagnetic substrate for a magnetic head,
A method for manufacturing a non-magnetic substrate for a magnetic head, characterized by raising the temperature up to 50°C at a rate of 0.5°C/min or less
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1327423A JPH0782618B2 (en) | 1989-12-19 | 1989-12-19 | Method for manufacturing non-magnetic substrate for magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1327423A JPH0782618B2 (en) | 1989-12-19 | 1989-12-19 | Method for manufacturing non-magnetic substrate for magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03189912A true JPH03189912A (en) | 1991-08-19 |
| JPH0782618B2 JPH0782618B2 (en) | 1995-09-06 |
Family
ID=18198998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1327423A Expired - Lifetime JPH0782618B2 (en) | 1989-12-19 | 1989-12-19 | Method for manufacturing non-magnetic substrate for magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0782618B2 (en) |
-
1989
- 1989-12-19 JP JP1327423A patent/JPH0782618B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0782618B2 (en) | 1995-09-06 |
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