JPH03198210A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To obtain the head of a multitrack structure which is short in magnetic path and has a high sensitivity by sandwiching main magnetic poles with two pieces of composite core blocks, then providing grooves on a slider surface, providing windings in the grooves, forming a protective film and executing working to a spherical surface. CONSTITUTION:The main magnetic poles 5 are sandwiched by two pieces of composite core blocks formed by joining ceramics plates for sliders and soft magnetic materials for auxiliary magnetic poles, by which a block is formed. The grooves are then formed in the thickness direction and transverse direction on both sides of the main magnetic poles 5 and the thin-film windings for recording and reproducing are formed spirally in the grooves while the thin films are formed in multiple layers by interposing insulating layers in the patterns of one turn around the main magnetic poles 5 so as to insulate the same from the auxiliary magnetic poles. After the protective film is formed thereon, the slider surface 14 is worked to the spherical surface. The magnetic path up to the point where the magnetic flux from a medium intersects with the windings is short and the main magnetic pole excitation type single magnetic pole head of the multitruck structure having the high sensitivity is, therefore, obtd.

Description

[Detailed description of the invention] B1 Purpose of the invention [Industrial application field] The present invention is a thin film magnetic head for perpendicular recording. do.

[Prior art] When performing high-density magnetic recording, there are two methods: a recording method in which the magnetic medium is magnetized along the direction of relative movement with the magnetic head, the so-called longitudinal recording method, and the other in the thickness direction of the magnetic medium. A so-called perpendicular recording method, which is a recording method in which magnetization is performed, has been used, but it is known that the perpendicular recording method is more advantageous when performing high-density recording.

This is because in the longitudinal recording method, the self-demagnetizing field increases as the recording signal becomes shorter in wavelength, whereas in the perpendicular recording method, the self-demagnetizing field within the magnetic layer can be made smaller.

The following two main types of perpendicular magnetic heads used in this perpendicular recording system have been proposed in the past.

1. A ring-type magnetic head similar to the longitudinal recording method used in combination with a perpendicularly magnetized film, that is, a single-layer film medium consisting only of a recording layer.

2. A single-pole magnetic head of main pole excitation type having an auxiliary pole used in combination with a double-layered film medium having a high permeability film under a perpendicular magnetization film.

Note that when attempting to perform even higher density recording with the magnetic heads described in items 1 and 2 above, the main pole excitation type single-pole magnetic head described in item 2 is better in terms of the steepness of the magnetic field perpendicular to the medium. It's advantageous. Conventionally, a slider 20, a main magnetic pole 21, a reinforcing glass 22, and an auxiliary magnetic pole 23 as shown in FIG.
, a bulk type consisting of a winding 24, etc., or a slider/thin film forming substrate 25 as shown in FIG.
A thin film type magnetic pole composed of a main magnetic pole 26, an auxiliary magnetic pole 27, a winding 28, etc. is being considered.

[Problem to be solved by the invention]

In the conventional main pole excitation type single pole magnetic head for perpendicular recording as shown in FIGS. 13 and 14 described above, the magnetic flux from the medium has a long magnetic path before interlinking with the recording/reproducing winding. There is a structural problem in that the magnetic flux is attenuated and it is difficult to obtain good sensitivity.Furthermore, when converting to two tracks or more multi-tracks, it is necessary to install the recording and reproducing windings,
In addition, there are structural problems such as a disadvantage in achieving high track density as a magnetic head due to the formation space, and a multi-track main pole excitation type single pole magnetic head has not yet been proposed.

An object of the present invention is to provide a main pole excitation type single pole thin film magnetic head for perpendicular recording which has good head sensitivity and has an in-line multi-track structure, which solves the above-mentioned drawbacks.

1. Structure of the Invention [Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides two composite core blocks in which a ceramic plate for a slider and a block for a soft magnetic auxiliary magnetic pole are bonded together. A groove is formed from the slider side by sandwiching the main magnetic pole held between the soft magnetic auxiliary magnetic pole blocks in the thickness direction and the width direction, and an insulating layer is interposed in the groove to form a multilayer structure, with the main magnetic pole at the center. , a main-pole-excited single-pole thin-film magnetic head for perpendicular recording, which has a configuration in which a thin-film recording/reproducing winding is formed in a spiral shape, a protective film is formed to fill the groove thereon, and the slider surface is processed into a spherical surface; A head with a similar structure in the track width direction is formed with the main pole inline, and a main pole excitation type single pole thin film magnetic head for perpendicular recording is capable of inline multi-tracking. Form an outlet for each thin film winding, electrically connect the terminal of the thin film winding for recording and reproducing formed spirally around the main pole to the outlet, and connect the terminal of the winding for recording and reproducing to the outlet. This is a main pole excitation type single pole thin film magnetic head for perpendicular recording that is configured to be taken out from the back of the magnetic head.

That is, the present invention uses two composite core blocks in which a ceramic plate for a slider and a soft magnetic block for an auxiliary magnetic pole are bonded together, and after sandwiching the main magnetic pole from the ceramic side for the slider to the soft magnetic block for the auxiliary magnetic pole, the main magnetic pole A groove is formed in the slider sandwiching the auxiliary magnetic pole in the thickness direction and the width direction, and in the groove, the auxiliary magnetic pole is insulated, and the main magnetic pole is formed into a spiral pattern with an insulating layer interposed in a single-turn pattern to form a multilayer structure. A main pole excitation type single pole thin film magnetic head for perpendicular recording, characterized in that a thin film winding for recording and reproducing is formed in a shape, a protective film is formed thereon to fill the groove, and the slider surface is processed into a spherical surface, and In the above-mentioned magnetic head, an in-line multi-head magnetic head is characterized in that heads with a similar structure in the track width direction are formed so that the main magnetic poles are on the same line, and furthermore, the auxiliary magnetic poles of adjacent heads are magnetically insulated from each other. Main pole excitation single pole thin film magnetic head for perpendicular recording of tracks;
And in the magnetic head described above, an outlet for each thin film winding is formed in advance with a conductor on one side of the composite core block, and an insulating layer is interposed in a single winding pattern around the main pole to form a multilayer structure. The main magnetic pole excitation for perpendicular recording is characterized in that a terminal of a spirally formed recording/reproducing thin film winding is electrically connected to the outlet, and the terminal of the recording/reproducing winding is taken out from the back surface of the magnetic head. The present invention provides a type single pole thin film magnetic head.

[Effect]

A thin film magnetic head using the structure of the thin film magnetic head according to the present invention has a short magnetic path until the magnetic flux from the medium interlinks with the winding for recording and reproducing, and furthermore, the space for forming the winding for recording and reproducing is small. As a result, the magnetic circuit from the main pole to the auxiliary pole can be miniaturized, and a main pole-excited single-pole thin film magnetic head for in-line multi-track perpendicular recording can be realized, and the winding terminals can be easily taken out from the back of the head.

〔Example〕

An in-line two-track perpendicular recording main pole excitation type single pole thin film magnetic head will be described below as an embodiment of the present invention. As shown in Fig. 2, a predetermined number of soft magnetic Ni-Zn ferrite blocks 1 for auxiliary magnetic poles with a thickness of III and non-magnetic crystallized glass plates 2 with a thickness of 40 microns are laminated alternately. Heat treatment is performed at 850° C. to obtain a primary bonded core block 41.

Next, as shown in FIG. 3(a), the glass bonding surface of the ceramic plate of the secondary bonded core block 42 is made by glass-bonding the primary bonded core block 41 and the zirconia-alumina ceramic plate 3 that will become the slider at 830°C. and a zirconia-alumina ceramic plate 3 for a slider cut perpendicular to both the crystallized glass plate 2 and the crystallized glass plate 2.
, a cut surface 47 of a composite core block A43 shown in FIG. 3(b) consisting of a crystallized glass plate 2 and a Ni--Zn ferrite 1 is mirror-polished. Next, as shown in Figure 4, a film of Fe-3i-AI-N alloy is formed on the end face of the mirror-finished composite core block to a desired thickness (for example, 0.3 microns) by sputtering or vapor deposition. Then, by using an etching method such as an ion beam method or a chemical method to obtain a desired track width (for example, 60 microns), two main magnetic poles 5 are formed in pairs at intervals of 40 microns with the crystallized glass 2 in between.
．． Formed at a pitch of 0.4 mm. Next, as shown in FIG. 5, an insulating layer 6 made of SiO2 is applied to a desired thickness (by sputtering or vapor deposition) on the mirror-finished cut surface 47 of the unprocessed composite core block A43. After forming a film with a thickness of, for example, 1 micron), a conductive film 7 made of Cu or the like is deposited to a desired thickness (for example, 20 microns) by a method such as vapor deposition.
to form a composite core block C45 (FIG. 5), and then winding terminal portions 71, 72.
The terminals 73 and 74 are processed into a desired shape as shown in FIG. 6 using a chemical etching method. As shown in FIG. 7, a protective block 9 made of zirconia-alumina ceramics is bonded with a resin layer 8, which also serves as a mold for the terminal portion, to create a composite core block D46. Next, as shown in FIG. 8, a composite core block B and a composite core block D are bonded with resin so as to sandwich the main magnetic pole 5 processed into the composite core block B, thereby creating a composite core block E48. Next, as shown in FIG. 9, the main magnetic pole is placed at a desired distance from the main magnetic pole of the composite core block E48 in the thickness direction (for example, 30 microns) and the width direction (0 micron).
A groove with a depth of 50 microns and a width of 40 microns is formed from the slider side using a dicing machine. Next, as shown in FIGS. 10 and 11, an insulating layer 10 of 5i02 or the like is formed in the groove by sputtering, and the recording/reproducing winding 12 is formed by repeating the film forming method and etching method described above. The main magnetic pole 5 is rotated once with a desired width (for example, 15 microns) and a desired thickness (for example, 3 microns), and this is continuously formed in a spiral shape while being laminated with an insulating layer interposed between them, and recording and reproducing are performed. (In this example, a 10-turn winding was formed). Then the 12th
As shown in the figure, a recording/reproducing winding 12 is formed as a thin film, and a protective film 11 made of zirconia-alumina ceramics, which is the same material as the slider, is formed by sputtering on the thin film, and the above-mentioned coil forming groove 13 is further buried. After processing the protective film 11 up to this point, it is cut into core chips using a dicing machine. Finally, as shown in FIG. 1, the slider surface 14, which will become the sliding surface, is polished into a spherical surface using a tape polishing device.
The main pole 5 is exposed on the sliding surface to complete a two-track perpendicular recording main pole excitation type single pole thin film magnetic head.

If a thin film magnetic head with the above configuration is used, the magnetic path from the medium to the point where the magnetic flux interlinks with the recording/reproducing winding becomes shorter, and the space for forming the recording/reproducing winding becomes smaller. The magnetic circuit from the main pole to the auxiliary pole has been miniaturized, and an in-line, two-track, main-pole-excited single-pole thin-film magnetic head for perpendicular recording has been realized.

In addition to the above embodiment, in-line multi-track perpendicular recording having a desired number of tracks can be achieved by arranging a desired number of magnetic heads with the same structure in the track width direction to form the main magnetic pole in-line. Needless to say, a main pole excitation type single pole thin film magnetic head can be obtained.

C1 Effects of the invention [Effects of the invention] As described above, according to the present invention, the magnetic path from the medium to the point where the magnetic flux interlinks with the recording/reproducing winding is shortened, and the recording/reproducing winding is A small, high-sensitivity main-pole-excited single-pole thin-film magnetic head for perpendicular recording that has a smaller magnetic circuit from the main pole to the auxiliary pole because the line formation space is smaller, and is highly sensitive and capable of in-line multi-tracking. It is now possible to provide

[Brief explanation of drawings]

FIG. 1 shows an external perspective view of a two-track perpendicular recording main pole excitation type single pole thin film magnetic head according to an embodiment of the present invention. FIG. 2 shows an external perspective view of a primary bonded core block in which crystallized glass and soft magnetic blocks used in the embodiment shown in FIG. 1 are laminated and bonded. FIG. 3 shows an external perspective view of a secondary bonded core block in which the primary bonded core block shown in FIG. 2 and the slider ceramic plate are bonded together, and a composite core block A obtained by cutting the block. Figure 3(a) shows the secondary bonded core block
Figure (b) is an external perspective view showing the composite core block A. FIG. 4 shows an external perspective view of a composite core block B in which a main magnetic pole is formed on the composite core block A of FIG. 3. FIG. 5 is an external perspective view of composite core block C in which an insulating layer and a conductive film for terminal formation are formed on another composite core block of composite core block A shown in FIG. 3 on which the main magnetic pole is not formed. shows. FIG. 6 shows an external perspective view of the composite core block C shown in FIG. 5 in which a terminal portion for taking out windings is formed on the composite core block C. FIG. 7 shows an external perspective view of a composite core block D in which a protective block is adhered to the composite core block C of FIG. 6. FIG. 8 shows an external perspective view of a composite core block E in which the composite core block B of FIG. 4 and the composite block D of FIG. 7 are bonded together. FIG. 9 shows an external perspective view of the composite core block E shown in FIG. 8, in which winding grooves are formed on the slider surface of the composite core block E. FIG. 10 is a perspective view of a composite core block E in which a winding is formed in a groove around the main pole of the slider surface of the composite core block E shown in FIG. FIG. 11 shows an enlarged external perspective view of the winding portion of the composite core block E shown in FIG. 10. FIG. 12 shows an external perspective view of a core chip cut after forming a protective film on the sliding surface and winding portion of the composite core block E shown in FIG. 11. FIG. 13 shows an external perspective view of a conventional bulk type perpendicular recording main pole excitation type single magnetic pole head. FIG. 14 shows an external perspective view of a conventional main pole excitation type single pole thin film head for perpendicular recording. DESCRIPTION OF SYMBOLS 1...Ni-Zn ferrite block, 2...Crystalline glass plate, 3...Ceramics plate (for slider), 41...-Secondary bonded core block, 42...Secondary bonded core block, 43...Composite core block A, 44
... Composite core block B, 45 ... Composite core block C146 ... Composite core block D, 47 ... Cut surface, 48 ... Composite core block E, 5 ... Main pole,
6... Insulating layer, 7... Conductor film, 71.72.73
．． 74... Terminal portion, 8... Resin layer, 9... Protective block, 10... Insulating layer, 11... Protective film, 12
... Recording/reproducing winding, 13... Groove, 14... Slider surface, 20... Slider, 21... Main magnetic pole,
22... Reinforcing glass, 23... Auxiliary magnetic pole, 24...
... Winding wire, 25 ... Slider and thin film forming substrate, 2
6...Main magnetic pole, 27...Auxiliary magnetic pole, 28...Winding.

Claims (1)

[Claims] 1. After sandwiching the main magnetic pole from the slider ceramic side to the auxiliary magnetic pole soft magnetic block with two composite core blocks in which a slider ceramic plate and an auxiliary magnetic pole soft magnetic block are joined, A groove is formed in the slider sandwiching the main magnetic pole in the thickness direction and width direction, and in the groove, an insulating layer is interposed in a single-turn pattern around the main magnetic pole, insulating it from the auxiliary magnetic pole, to form a multilayer structure. , a main-pole-excited single-pole thin-film magnetic head for perpendicular recording, characterized in that a thin-film recording/reproducing winding is formed in a spiral shape, a protective film is formed thereon to fill the groove, and the slider surface is processed into a spherical surface. . 2. In the magnetic head according to claim 1, heads having a similar structure in the track width direction are formed so that the main magnetic poles are on the same line, and further, the auxiliary magnetic poles of adjacent heads are magnetically insulated from each other. This is an inline multi-track perpendicular recording main pole excitation type single pole thin film magnetic head. 3. In the magnetic head according to claim 1, an electrical conductor is used to form an outlet for each thin film winding in advance on one side of the composite core block, and an insulating layer is formed in a single-turn pattern around the main pole. The terminal of the thin film winding for recording and reproducing formed in a spiral shape is electrically connected to the outlet, and the terminal of the winding for recording and reproducing is taken out from the back surface of the magnetic head. Main pole excitation type single pole thin film magnetic head for perpendicular recording.