JPH0319993Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an ultrasonic cleaning device, and more particularly to an ultrasonic cleaning device that can ultrasonically clean magnetic heads, fired members, magnetic members, and various other electronic components without causing chipping. .

Since dirt such as oil and powder adheres to the magnetic head during the manufacturing process, it is necessary to remove this dirt by ultrasonic cleaning. The principle of cleaning using ultrasonic waves is thought to be that the repeated generation and destruction of bubbles in a liquid due to cavitation causes dirt adhering to the member to be cleaned to be impacted and removed. However, when cleaning something like a magnetic head, the ferrite core on the front surface of the magnetic head is exposed from the case and this surface is polished, so if you perform unlimited ultrasonic cleaning, the accuracy of the surface roughness on the front surface of the head will be reduced. This can hinder, and in some cases, even damage. In particular, if ultrasonic cleaning is performed with the front surface of the magnetic head facing downward, the ferrite crystal grains in the core will peel off and fall off from the surface, causing so-called chipping, where the surface is chipped when viewed microscopically, resulting in a defective product. Mau. This chipping phenomenon is thought to be due to the core crystal grains peeling off due to the surface erosion caused by the cavitation described above and falling off under their own weight.

In order to prevent such drop-off of crystal grains, ultrasonic oscillator units are placed vertically apart, and between these units, the member to be cleaned is held with the surface to be cleaned facing upward, and ultrasonic cleaning is performed ( Utsukai No. 57-55580)
is proposed. With this configuration, cleaning can be performed without impairing the surface roughness accuracy of the machined surface of the member to be cleaned, so it is particularly useful for cleaning various materials with polished surfaces, magnetic heads, etc. Although it has a mechanism for adjusting the height position of the upper ultrasonic oscillator, the upper and lower ultrasonic oscillators and the mounting part of the object to be cleaned are fixed during cleaning operation, so floating in the liquid that occurs during cleaning operation is It was extremely difficult to clean the entire surface uniformly and thoroughly because of the dirt.

In the present invention, by arranging the part to be cleaned with the micro-machined surface facing upward and by configuring the ultrasonic oscillation unit to be moved relative to the part to be cleaned during the cleaning operation, it is possible to An object of the present invention is to provide an ultrasonic cleaning device that can effectively clean each surface without causing chipping or deterioration of surface roughness accuracy.

For this purpose, the ultrasonic cleaning device according to the present invention is provided with a lower ultrasonic oscillator and an upper ultrasonic oscillator, each with adjustable output, in the cleaning tank so that the processed surface of the parts to be cleaned faces upward. and a part to be cleaned attachment part for holding between the two oscillation parts, and furthermore, both or one of the upper and lower ultrasonic oscillation parts is provided within a horizontal plane with respect to the part to be cleaned part attachment part. It is held in a tank so that it can reciprocate or rotate, and is provided with a drive mechanism.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a side sectional view showing an ultrasonic cleaning device according to an embodiment of the present invention in a state in which it is in operation. A lower ultrasonic oscillator 3 is disposed at the bottom of the cleaning tank 1, and a mounting jig 5 for holding a magnetic head 4, which is a component to be cleaned, is disposed at the bottom via a support 2.
is provided. This jig 5 has a plurality of stepped holes 5a penetrating vertically, and the magnetic head 4 is held in each stepped portion of the holes 5a.
In this case, the magnetic head 4 is arranged so that its polished front surface (magnetic medium running surface) 4a faces upward.
a, whereby the magnetic head polishing surface 4
a and the bottom surface 4b of the head are exposed vertically through the hole, and a part of the side part of the head is also exposed from the jig 5. The precision-finished surface of the part to be cleaned becomes the front surface of the magnetic head, that is, the magnetic medium running surface with the magnetic gap.

Above the magnetic head 4 attached to the mounting jig 5 and inside the cleaning tank, an upper ultrasonic oscillator 6 is fixed to a suitable support frame 7.
is held so as to be able to slide left and right on the guide plate 16. The upper and lower ultrasonic oscillating units 6 and 3 are arranged so as to oscillate ultrasonic waves in directions facing each other, and each has a separate output adjustment device 1.
connected to the ultrasonic oscillator 12 via 0, 11;
This allows the outputs of the upper and lower ultrasonic oscillators 6, 3 to be individually varied. The cleaning tank 1 is filled with a cleaning liquid 14 such as water, alcohol, acetone, or trichlorethylene, and the above-mentioned upper and lower ultrasonic oscillators 6, 3, jig 5, magnetic head 4, etc. It is immersed in the cleaning liquid 14.

In the embodiment shown in FIG. 1, as described above, the upper ultrasonic oscillator 6 is configured to be able to reciprocate in the lateral direction with a predetermined stroke together with the support frame 7. In this case, the reciprocating cycle is, for example, 1
cycles/second or less, and as a means for this reciprocating movement, a pinion shaft 13 and a pinion 8 are attached to the support frame 7, and a rack 9 formed on the guide plate 16 and meshing with the pinion 8.
and a reversible motor (not shown) connected to the shaft end of a pinion shaft extending through the tank wall. However, the drive mechanism according to the present invention is not limited to the structure described above, and includes, for example, a piston-cylinder device or a feed screw driven by a motor outside the bath, and a nut fixed to the part to be cleaned that is screwed into the feed screw. A screw mechanism consisting of the following can also be effectively employed. In the case of a piston-cylinder device, a cylinder is installed outside the tank, and a piston rod passes through the cleaning tank 1 parallel to the direction of movement of the parts to be cleaned and is connected to an end of the support frame 7 for the parts to be cleaned. Needless to say, the portion penetrating the tank wall is provided with a suitable sealing device to prevent liquid leakage.

With such a configuration, for example, while operating the reversible motor to reciprocate the upper ultrasonic oscillating unit 6, the upper and lower ultrasonic oscillating units 6, 3 are oscillated to generate ultrasonic waves in the liquid. . magnetic head 4
Since the polished surface 4a faces upward, the ferrite crystal grains on the surface do not peel off under their own weight even when subjected to ultrasonic cleaning action, and adhere to the magnetic head 4 without causing chipping. Dirt such as oil and dirt is removed. Since the upper ultrasonic oscillation unit 6 facing the part to be cleaned moves from side to side, it is not affected by floating objects, and even polyhedral or complex-shaped objects can be cleaned evenly on each surface, and even finely machined surfaces can be effectively cleaned. Washed. The output of the ultrasonic oscillator 12 is adjusted or the moving speed of the ultrasonic oscillator is changed depending on the degree of contamination or the shape and type of the parts to be cleaned.

FIG. 2 is a side sectional view of another embodiment of the present invention. In this embodiment, the lower ultrasonic oscillator 3 is rotatably supported by a rotating shaft 15 passing through the bottom of the tank so as to be able to rotate around the shaft. The rotating shaft 15 is connected to a motor 17 outside the tank, and the lower ultrasonic oscillator 3 is rotationally driven by the urging of this motor. In this embodiment as well, the machined surface of the part to be cleaned is mounted facing upward, so micro-machined surfaces and multiple surfaces can be cleaned without damaging the machined surface and avoiding floating objects, as in the embodiment shown in Figure 1. done effectively.

Although each of the above-mentioned embodiments is configured to move only one of the upper and lower ultrasonic oscillating units 6, 3, the present invention is not necessarily limited to such an embodiment; Both ultrasonic oscillation units may be moved. Various means are also adopted for the drive mechanism.
In addition, in the embodiment shown in FIG. 2, the jig 5 is formed into a circular shape as a whole, and a plurality of through holes are formed in this circular plate to support objects to be cleaned. You can also choose to wash things all at once. Furthermore, the height position of the upper ultrasonic oscillation section 6 may be adjusted.

As described above, according to the present invention, the part to be cleaned is installed between the upper and lower ultrasonic oscillators with the surface that requires surface roughness accuracy facing upward, and these ultrasonic oscillators are configured to be moved. Therefore, the cleaning effect can be further enhanced while maintaining surface accuracy even on finely machined surfaces.

[Brief explanation of drawings]

FIG. 1 is a schematic side sectional view of an ultrasonic cleaning device according to one embodiment of the present invention, and FIG. 2 is a partial side sectional view of another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Cleaning tank, 2... Support column, 3... Lower ultrasonic oscillator, 4... Parts to be cleaned (magnetic head), 5...
... Jig, 6 ... Upper ultrasonic oscillator, 8 ... Rack, 9 ... Pinion, 10, 11 ... Output adjustment device, 12 ... Ultrasonic oscillator, 14 ... Cleaning liquid, 1
5... Rotating shaft, 16... Guide plate, 17... Motor.

Claims (1)

[Scope of utility model registration request] Inside the cleaning tank, a lower ultrasonic oscillator and an upper ultrasonic oscillator, each with adjustable output, are installed vertically and horizontally so that they are immersed in the cleaning liquid in the tank, with the precision-finished surface of the parts to be cleaned facing upward. A mounting section for placing the part to be cleaned is provided horizontally between the lower and upper ultrasonic oscillating sections, and the upper and/or lower ultrasonic oscillating sections are mounted relative to the mounting section. The mounting portion has a plurality of stepped holes penetrating vertically, the mounting portion having a plurality of vertically penetrating stepped holes;
A component to be cleaned is placed in each step of the stepped hole so that at least an upper portion thereof is exposed, and a plurality of components to be cleaned are configured to simultaneously face the upper ultrasonic oscillating section. An ultrasonic cleaning device characterized by: