JPH0320687B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a three-dimensional measuring machine, and more particularly to an improvement of a Z-axis structure that supports a touch signal probe.

[Background Art] In general, three-dimensional measuring machines are known that move a touch signal probe three-dimensionally relative to an object to be measured and bring it into contact with the object, and measure the shape of the object using signals from the touch signal probe. The so-called
In order to achieve effective automation in CNC coordinate measuring machines, it is necessary to be able to automatically exchange various touch signal probes.

However, conventionally, the touch signal probe has been replaced manually, and even if it were to be automated, it was thought that a separate probe attachment/detachment mechanism would have to be provided outside the coordinate measuring machine. If this is installed in the main body of the measuring machine, the accuracy cannot be maintained unless the entire main body is strengthened by the weight of the probe attachment/detaching mechanism.This reinforcement further increases the weight of the main body, further increasing its strength. As a result, the drive source and the like become larger, which is disadvantageous both technically and economically.

Furthermore, when attaching the touch signal probe to a Z-axis structure, a structure is desired that can ensure positioning accuracy without placing a burden on the electric circuit.

Furthermore, when it is necessary to change the direction of the probe of the touch signal probe during measurement, it would be very time consuming and inefficient to attach and detach the touch signal probe each time. There is also a desire for a structure in which the direction of the probe can be changed while it is attached to the Z-axis structure.

[Object of the Invention] The object of the present invention is to provide a Z-type structure that retains a touch signal probe even if a touch signal probe attaching/detaching mechanism is installed.
The weight of the shaft structure does not need to be that large, which not only prevents the equipment from becoming large and economically disadvantageous, but also allows the touch signal probe to be mounted accurately and reliably, and the direction (angle) of the probe ) To provide a Z-axis structure of a coordinate measuring machine that can be changed.

[Structure of the Invention] The present invention provides a Z-axis structure that is slidably and non-rotatably supported in the measuring instrument body, and is provided with a hollow Z-spindle that cannot be displaced in the axial direction.
A mounting part for a touch signal probe is provided at the tip of the spindle, and probe supporting means is provided in the Z spindle for attaching and detaching the touch signal probe to the mounting part by utilizing axial displacement of a drive rod, and the probe supporting means is provided. A spring is provided that always biases the drive rod in one axial direction, and a compressed air actuator is provided that forcibly displaces the drive shaft in the opposite direction against the biasing force of the spring. The hollow Z spindle reduces weight, and the probe support means is actuated via a drive rod built into the Z spindle using a simple and lightweight mechanism using a spring and compressed air actuator, increasing the size of the structure. The invention further includes a multi-angular position meshing means such as a locking coupling having a pair of meshing members, an axial drive means for releasing the meshing state of the pair of meshing members of the meshing means, and By providing an angular positioning mechanism equipped with a rotary drive means that changes the meshing angle position of the meshing member, it is possible to change the rotational direction angular position of the Z spindle and, in turn, change the direction of the probe of the touch signal probe attached to this Z spindle. This is intended to achieve the above objective.

[Example] Hereinafter, an example of the present invention will be described based on the drawings.

In Figures 1 and 2 showing the overall configuration,
A base 10 made of a stone-like material such as natural stone or ceramic is installed horizontally on the installation floor 1.
0 is formed in a substantially convex shape, and at the center of the upper surface of the convex base 10 is a first guide member made of a stone-like member similar to the base 10 and forming a guide surface in the Y-axis direction. 11 are fixed with screws, and furthermore, on both sides of this first guide member 11, a pair of flat second guide members 12 also made of stone-like members are partially protruded from the upper surface of the convex portion of the base 10. It is fixed with screws symmetrically. Here, in this specification, the X-axis direction means the left-right direction in FIG. 2, the Y-axis direction means the direction perpendicular to the plane of the paper in the same figure, and the Z-axis direction means the vertical direction in the same figure, Therefore, these X, Y, and Z axes are three axes that are orthogonal to each other, with the X and Y axes being the axes in the horizontal plane and the Z axis direction being the vertical direction.

A metal table 50 is placed on the base 10.
It is provided so as to be movable in the axial direction. An air bearing 51 facing the parallel guide surface 18 of the first guide member 11 is attached to the lower surface of the table 50 via a bracket 52.
Upper and lower parallel guide surfaces 20 of the second guide member 12
An air bearing 53 facing the air bearing 53 and an air bearing 54 via a bracket 55 are respectively installed, and each of these air bearings 51, 53, 5
4 allows the table 50 to move on the base 10 with a slight force, and movement in the X-axis direction is restricted by the action of the first guide member 11 and the air bearing 51. Guide member 1
2 and air bearings 53 and 54, movement in the Z-axis direction is restricted and straight movement is possible only in the Y-axis direction.

Furthermore, a Y-axis direction drive mechanism 60 is provided between the base 10 and the table 50 to drive the table 50 in the Y-axis direction. As shown in FIG. 3, this Y-axis direction drive mechanism 60 includes a motor 62 fixed to the base 10 via a bracket 61, and is screwed onto a feed screw shaft 64 driven by the motor 62. The nut member 66 is attached to the bracket 6.
5, and as the feed screw shaft 64 rotates, the table 50 is moved in the axial direction of the feed screw shaft 64 via a nut member 66. At this time, the feed screw shaft 64 is disposed within the groove 21 of the first guide member 11.
Further, the amount of feed of the table 50 is measured by a Y-axis direction displacement detection means (not shown).

In FIG. 2, pillars 90 are fixed to both sides of the base 10, respectively. These pillars 9
0 are each made of metal such as iron, and between the upper ends of these pillars 90, a gauze 100 as a non-moving object side structure made of a stone-like member similar to the base 10 is horizontally fixed. . A slider 110 is supported on the canopy 100 so as to be movable in the X-axis direction.
22, is automatically fed in the X-axis direction by an X-axis direction drive mechanism 120 consisting of a feed screw shaft 124, a nut member 129, etc., and the amount of movement is X (not shown).
The displacement is measured by an axial displacement detection means.

As shown in FIG. 4, the slider 110 is provided with a bearing box 11 for guiding in the X-axis direction, which is provided so as to surround the canal 100 and has air bearings 111 facing each square surface of the canal 100.
2, a pair of upper and lower bearing boxes 114 for Z-axis direction guidance, each having an air bearing 113 mounted on the front surface of this X-axis direction guidance bearing box 112 and arranged inside in a rectangular planar shape; A Z-axis structure 180 inserted into the guiding bearing box 114 so as to be movable in the Z-axis direction, and a support frame 11 erected on the X-axis guiding bearing box 112.
5, and a lock provided at the upper end of the support frame 115 to prevent free rotation of the Z-axis drive mechanism 140 and prevent the Z-axis structure 180 from falling. A device 160 is provided.

The Z-axis direction drive mechanism 140 includes a motor 141 supported by the support frame 115, and is capable of rotationally driving a feed screw shaft 145 via a timing belt 142. A nut member 146 is screwed onto the feed screw shaft 145, and the nut member 146 is unrotatably guided in the axial direction by a pair of rollers 148 and a guide rail 147 fixed to the support frame 115. The connecting plate 1 is fixed to the nut member 146.
49 is held by the bracket 152 fixed to the upper end of the Z-axis structure 180 so as to be immovable in the axial direction but movable in the radial direction. It is now possible to communicate. At this time, the influence of bending, eccentricity, etc. of the feed screw shaft 145 is absorbed by the radial slippage between the connecting plate 146 and the bracket 152, and the Z-axis structure 180 has no effect on the movement of the nut member 146 in the Z-axis direction. only the information is being transmitted.

The Z-axis structure 180 is made of a square tube and includes a hollow housing 181 as a Z-axis member, and has an air balance mechanism 190 inside the housing 181.
and a probe attachment/detachment mechanism 200. This air balance mechanism 190 includes a cylinder 191 that is fixed to a housing 181 and has an open bottom end.
A piston rod 194 is housed in the cylinder 191 and is attached to the support frame 115.
By supplying compressed air between the piston 192 and the upper part of the cylinder 191, the weight of the Z-axis structure 180 is supported by the action of this compressed air. This is intended to reduce the load on the feed screw shaft 145 due to the weight of the Z-axis structure 180. Also,
The amount of movement of the Z-axis structure 180 in the Z-axis direction is detected by a Z-axis displacement detection means (not shown).

As shown in FIG. 5, the probe attachment/detachment mechanism 200 includes an indexing motor 20 housed and supported within an upper case 201 attached to a housing 181.
2, an intermediate sleeve 204 connected to the output shaft of the indexing motor 202 via a gear train 203 and rotatably supported by the upper case 201; and a shaft connected to the intermediate sleeve 204 via a coupling 205. The lower case 206 is coupled to be movable in direction and transmit rotation, and is rotatably supported by a lower case 206 supported by the casing 181, and together with the motor 202, gear train 203, intermediate sleeve 204, and coupling 205 constitute rotational driving means. A sleeve 207, a first gear 211 fixed to the lower end of the sleeve 207 and constituting one engagement member of a carbic coupling 210 serving as a multi-angle position engagement means; The carboxylic coupler 2 is configured to be able to engage at the position.
The second gear 21 constituting the other meshing member of 10
2, a diaphragm 213 as a rotation preventing member that attaches the second gear 212 to the lower case 206 in a vertically movable but non-rotatable manner; The piston 214 for vertically moving the gear is slidably fitted into the piston 214 and is fixed to the lower case 206.
A gear vertical movement cylinder 215 which together with 14 constitutes an axial drive means, and a gear vertical movement piston 21 which is interposed between this gear vertical movement cylinder 215 and the gear vertical movement piston 214.
a spring 216 that always biases the second gear 212 fixed to the lower end of the sleeve 207 via a diaphragm 213 toward the first gear 211; 211 and is rotatably supported by the lower case 206 via radial air bearings 217 and thrust air bearings 218 at two upper and lower locations, and a probe holder 250 at the lower end.
A hollow Z spindle 22 having a tapered hole 219 as a holder attachment part into which one end can be inserted.
0 and the upper and lower radial air bearings 217
and an air pipe 222 that supplies compressed air to the thrust air bearing 218 through passages formed in the lower case 206, etc. A drive rod 22 equipped with a ball holder 226 as a probe support means having a plurality of balls 225 that are movable in direction and prevented from falling.
7, and a small-diameter guide hole formed in the Z spindle 220 for biasing the ball holder 226 interposed between the upper end of the drive rod 227 and the Z spindle 220 in a direction to draw it into the Z spindle 220. 221 causes the ball 225 to protrude inward and close the pull stud 2 of the probe holder 250.
A disc spring 228 serves as a retracting means for locking the drive rod 227, and a lower end thereof is brought into contact with the upper end of the drive rod 227 via a ball 229, and is housed in the sleeve 207 so as to be slidable in the axial direction. an intermediate shaft 230, and a piston rod 232 whose lower end is in contact with the upper end of the intermediate shaft 230 via a ball 231 and which is movable in the vertical direction.
The upper case 201 accommodates a plurality of pistons 233 fixed to the upper end of the piston rod 232 in a slidable manner, partitions each piston 233 with a partition wall 234, and has a plurality of serial multistage pressure receiving surfaces. an actuator 235 fixed to the piston rod 232; a dog 236 fixed to the middle of the piston rod 232;
a piston rod axial position detecting means 238 having a pair of detectors 237 supported by a piston rod axial position detecting means 238; a protrusion 239 protruding from the lower end of the Z spindle 220 for positioning the probe holder 250; a pin 241 which is provided so as to be protrusive and retractable and is always urged in the protruding direction by a spring 240 to establish electrical continuity with the probe holder 250; and the intermediate sleeve 204.
The intermediate sleeve 204 is composed of a rotary disk 246 fixed to the upper case 201 and a detector 247 supported by the upper case 201.
Furthermore, the rotary encoder 245 detects the rotation angle of the first gear 211. Here, a rotary drive means consisting of the indexing motor 202, etc., a carbyk coupling 210 as a multi-stage angular position engagement means, a diaphragm 213 as a rotation preventing member, and a cylinder 21.
An angular positioning mechanism is constituted by an axial drive means such as 5 and a spring 216 as a biasing means (the diaphragm 213 also acts as a part of the biasing means).

With such a configuration, the probe attachment/detachment mechanism 20
0 operates the actuator 235 against the disc spring 228, lowers the drive rod 227, allows the ball holder 226 to escape from the guide hole 221, and allows the ball 225 to move in the radial direction. When the pull stud 251 of the probe holder 250 is inserted into the probe holder 250 and the actuator 235 is deactivated in this state and the drive rod 227 is raised by the disc spring 228, the ball holder 226
Then, the pull stud 251 of the probe holder 250 is pulled into the hole 219 of the Z spindle 220, and the pull stud 251 can be locked and held by the action of the guide hole 221 and the ball 225, and the probe holder 250 is locked and held. Alternatively, the gear vertical movement cylinder 215 is operated without being held, and the gear vertical movement piston 214 is moved by the spring 216.
When the second gear 212 and the first gear 211 of the carbic coupling 210 are disengaged by raising the gear train 203 against the
The first gear 211 is rotated via the intermediate sleeve 204, the coupling ring 205, and the sleeve 207, and when the gear vertical movement cylinder 215 is deactivated while the first gear 211 is rotated by a predetermined angle, the spring 21
6 and the diaphragm 213, the second gear 212 is lowered together with the gear vertical movement piston 214, and the second gear 212 and the first gear 211 are meshed at a position different from the initial position, and the first The meshing angle between gear 211 and second gear 212 will be changed. This first gear 211
As the ball holder 2 rotates, the Z spindle 220 is also rotated via the sleeve 207.
The probe holder 250 held by the probe holder 26 can also be rotated to change the angular position of the probe holder 250, or the position of the protrusion 239 fixed to the lower end of the Z spindle 220 can be changed to change the position of the probe holder 250 to be attached next. This means that the mounting angle can be changed. At this time, the rotation angle of the first gear 211 is determined by the rotation angle of the rotary disk 246 fixed in the middle of the intermediate sleeve 204 and the upper case 204.
It is detected by a rotary encoder 245 consisting of a detector 247 supported by a rotary encoder 247.

The probe holder 250 has a pull stud 25 at its upper end, as shown in FIGS. 6 and 7.
1 and a flange portion 252 and a tapered surface 253 in the middle, the holder body 256 has a measuring element 271 or 281 at the lower end, and a male thread 272 or 282 at the upper part. A touch signal probe 270 or 280 having a different shape is screwed and fixed. At this time, the touch signal probe 280 includes a rotating part 283 having the measuring tip 281, and a portion of the rotating part 283 can be rotated relative to the main body 284 having the male thread 282 and fixed at the rotating position. It is meant to be.

Further, on the upper surface of the flange portion 252 of the probe holder 250, there is a groove-shaped engagement recess that can be engaged with a protrusion 239 provided at the lower end of the Z spindle 220 and constitutes a positioning means together with the protrusion 239. 257 and a fixing pin 24 provided at the lower end of the Z spindle 220.
3 is provided with a contact pin 266 (see FIG. 7). Further, a pin hole 268 and an engagement groove 269 are formed on the lower surface of the flange portion 252.

In FIGS. 1 and 2, the table 5
0, a probe stocker 290 is provided. As shown in FIG. 8, this probe stocker 290 includes a holding base 291 fixed to one end, that is, the rear end side of the table 50, and this holding base 291.
1, a holding plate 293 having a plurality of notches 292 opened toward the other end side, that is, the front end side of the table 50, and spaced apart from the top surface of the table 50 by a predetermined distance; A pin hole 268 and an engagement groove 26 are provided on the upper surface of the probe holder 293 to protrude from both sides of the notch 292 and are formed on the lower surface of the flange portion 252 of the probe holder 250.
The holding plate 293 of the probe stocker 290 includes a pin 294 and a pin 295 that can be engaged with the probe stocker 290 and constitute a probe attitude maintaining means together with the pin hole 268 and the engagement groove 269.
The probe holders 250 are placed thereon with their positions adjusted.

Although the reference numeral 310 in FIG. 1 is shown in a simplified manner, it has a display section 311 and peripheral devices such as a printer and a CRT (not shown), and further includes:
Reference numeral 320 represents a table 50, which is a control device that includes a computer system having arithmetic functions, storage functions, etc., and controls the movement of each part according to a predetermined program.
The objects to be measured placed thereon include a bellows cover 26 for dustproofing the Y-axis direction drive mechanism 60, and a side cover 27. Further, the probe attachment/detachment mechanism 200 and the probe stocker 290 constitute an automatic probe attachment/detachment device.

Next, the operation of this embodiment will be explained.

The probe holder 250 with the touch signal probe 270 or 280 of a predetermined shape attached is set on the holding plate 293 of the probe stocker 290 fixed on the table 50, and
The object to be measured 320 is placed and fixed on top. In this state, when a predetermined command is given by the control device 310, the motor 62 of the Y-axis direction drive mechanism 60 is driven by this command, and the table 50 is moved forward to the left in FIG. 1 via the feed screw shaft 64, etc. The probe stocker 290 is positioned just below the Z-axis structure 180. On the other hand, along with driving the Y-axis direction drive mechanism 60, the X-axis direction drive mechanism 120
The motor 122 of is driven, and the slider 110 is
The Z-axis structure 180 is moved in the axial direction to a position directly above a predetermined probe holder 250 placed on the probe stocker 290, and then stopped.

In this state, the motor 141 of the Z-axis direction drive mechanism 140 inside the slider 110 is activated, the Z-axis structure 180 is lowered, and the Z-axis structure 180 is moved as a probe attachment part of the Z-axis spindle 220 housed inside the Z-axis structure 180. The probe holder 250 is now housed in the hole 219. At this time, in FIG. 5, the actuator 235 is activated and the drive rod 22
7 is pressed down against the disc spring 228,
The ball holder 226 is removed from the guide hole 221 and the ball 225 is in a free state. Therefore, the pull stud 251 at the upper end of the probe holder 250
can be easily inserted into the ball holder 226.

Next, when the actuator 235 is deactivated, the drive rod 227 is raised by the action of the disc spring 228, so the pull stud 251 is retracted by the ball holder 226, and the probe holder 250
The tapered surface 253 of is engaged with the hole 219, and
The protrusion 239 formed at the lower end of the probe attachment/detachment mechanism 200 is connected to the engagement recess 25 of the probe holder 250.
7, and the pin 240 of the probe attachment/detachment mechanism 200 is inserted into the contact pin 26 of the probe holder 250.
6 for electrical continuity.

With the probe holder 250 held in the probe attachment/detachment mechanism 200 of the Z-axis structure 180 in this manner, the probe 2 of the touch signal probe 280 is
81, the gear vertical movement cylinder 215 of the probe attaching/detaching mechanism 200 is actuated to raise the gear vertical movement piston 214 against the spring 216, and the first gear 211 and second gear 212 are moved upwardly. This can be done by disengaging the first gear 211 and rotating the first gear 211 by a predetermined angle by driving the indexing motor 202 in this state and rotating the first gear 211 through the gear train 203 and the intermediate sleeve 204.

In this way, after the probe holder 250 is attached to the probe attaching/detaching mechanism 200 and the attachment angle is adjusted, the Y-axis direction drive mechanism 60,
Axial drive mechanism 120 and Z-axis drive mechanism 1
40 is driven by a command from the control device 310, the probe 281 of the touch signal probe 280 attached to the lower end of the Z-axis structure 180 is brought into contact with a predetermined position of the object to be measured 320, and the probe 281 is driven at the time of contact. A control device 31 controls the position in the X, Y, and Z axis directions.
0, and sequentially measure the point of contact with the object to be measured 320 with this probe 281.
0 measurement ends. When measuring the object to be measured 320, when it is necessary to replace the touch signal probe 280, the Z-axis structure 180 is positioned above the probe stocker 290 in the same manner as described above, and the touch signal probe 280 is replaced. A predetermined probe holder 250 placed thereon is connected to the Z-axis structure 180.
This can be done by attaching it to At this time, the used probe holder 250 must be returned to an empty position in the notch 292 of the probe stocker 290. After positioning the object 180, actuating the actuator 235;
Lowering the drive rod 227 against the disk spring 228,
Release the grip of the pull stud 251 by the ball holder 226, and move the Z-axis structure 1 in this open state.
All you have to do is raise 80.

According to this embodiment as described above, there are the following effects.

That is, in this embodiment, the Z spindle 220 is hollow, and the ball holder 226 as a probe support means is provided in the Z spindle 220 so that the probe holder 250 can be attached and detached. probe 270,
280 can be automatically exchanged. Further, because of this, the weight of the Z-axis structure 180 is only slightly increased, and the weight of the Z-axis structure 180 and the slider 1 that supports it are reduced.
10, the increase in the strength of the gauze 100, the struts 90, etc. can be minimized, and the overall size of the device will not increase. Furthermore, since a probe attaching/detaching mechanism 200 is provided within the Z-axis structure 180, a probe stocker 290 is provided on the table 50, and the table 50 is moved, automatic attachment of the touch signal probes 270, 280 is possible. The replacement function can be achieved compactly and easily. In addition, since a plurality of types of touch signal probes 270, 280 are attached to the probe holder 250 in advance and prepared on the probe stocker 290 after adjusting their posture, the task of replacing the touch signal probes 270, 280 is easy. It can be performed in about the same amount of time as the one-point measurement operation using the probes 270 and 280,
The work while replacing the touch signal probes 270, 280 can be done extremely quickly. At this time, each time the touch signal probes 270 and 280 are replaced, the touch signal probe 270 and
You can also check the origin by touching 280, and if you check the origin every time you replace it like this,
Measurement accuracy can be further improved. Furthermore, since the piston rod 232, that is, the drive rod 227 in the probe attachment/detachment mechanism 200 is driven by an actuator 235 having a plurality of pressure-receiving surfaces, relatively low-pressure compressed air installed in a general factory can be used. Even if the disk spring 228 holding the probe holder 250 has a strong spring force, the drive rod 227 can be driven by sufficiently overcoming the spring force of the disk spring 228, and the probe holder 250 can be securely attached. can be done. Further, the Z spindle 220 and the probe holder 250 are connected to the protrusion 2
39 and the engagement recess 257, the mounting position relative to the Z spindle 220 can be set accurately. Also, when installing the probe holder 250 in the probe stocker 290, the pin hole 268 and the engagement groove 269 and the pin 29
4 and 295, the installation position can be determined accurately. Also,
Ball holder 226 as probe support means
Since this structure simply holds the ball 225, it can be manufactured easily and at low cost. Furthermore, since the disk spring 228 always urges the drive rod 227 in the retracting direction, the probe holder 250 will not fall even if the air supply to the actuator 235 is cut off.

FIG. 9 shows another embodiment of the present invention,
In this embodiment, the structure of the Z-axis structure 180 is simplified. Here, the same or equivalent components as in the embodiment described above are denoted by the same reference numerals to simplify the explanation.

That is, in this embodiment, the Z spindle 200 is not supported by an air bearing but by a normal ball bearing, and the drive rod 227 is extended to eliminate the intermediate rod 230 of the previous embodiment, and also serves as the piston rod 232. Furthermore, the axial position detection means 238 provided along the piston rod 232 is eliminated. In addition, the intermediate sleeve 204 is extended to eliminate the coupling 205 of the previous embodiment, and the sleeve 207 is also used, and the rest is substantially the same except for the difference in shape.

Even in such a configuration, the probe holder 2
50 can be replaced in the same manner as in the previous embodiment, and this embodiment is advantageous because the structure is simple, lightweight, and inexpensive.

In carrying out the present invention, the support portion of the pull stud 251 in the probe attachment/detachment mechanism 200, that is, the ball holder 226, is not limited to the above structure, and may be supported by an electromagnet, a collector chuck, or the like. In addition, the probe attachment/detachment mechanism 20
The method of supporting the pull stud 251 at 0 is not limited to the method of always holding the pull stud 251 as in the above embodiment.
It may be held by the tapered surface 253 of the Z spindle 220 and the tapered hole 219 of the Z spindle 220. Further, each Y, X, Z axis direction drive mechanism 60, 120,
The motors 62, 122, 141 of 140 are AC,
This includes not only DC and pulse motors, but also air motors, hydraulic motors, etc. Furthermore, X, Y, Z
Of the three orthogonal axes, the Z axis does not necessarily have to be vertical; the X axis may also be vertical; in this case, the Z axis
The axial spindle 220 will be arranged horizontally. Furthermore, the touch signal probe in the present invention is not limited to the touch signal probes 270 and 280 themselves, but also includes those attached to the probe holder 250.

[Effects of the Invention] As described above, according to the present invention, even if a touch signal probe attachment/detachment mechanism is installed, the weight of the Z-axis structure does not increase significantly, and probe attachment and measurement can be ensured. This has the effect of providing a Z-axis structure of an automatic three-dimensional measuring machine that can also change the direction of the child.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing the overall configuration of an embodiment of the present invention, Fig. 2 is a front view thereof, Fig. 3 is an enlarged side view of the Y-axis direction drive mechanism, and Fig. 4 is a partially cutaway view of the slider. FIG. 5 is an enlarged sectional view of the probe attaching/detaching mechanism; FIG. 6 is an enlarged side view with a part of the probe holder cut away; FIG. 7 is a plan view of FIG. 6;
FIG. 8 is an enlarged plan view of the probe stocker, and FIG. 9 is an enlarged sectional view showing a probe attaching/detaching mechanism in another embodiment of the present invention. 10... Base, 60... Y-axis direction drive mechanism, 100
... Glue, 110... Slider, 120... X-axis direction drive mechanism, 140... Z-axis direction drive mechanism, 180... Z-axis structure, 200... Probe attaching/detaching mechanism, 202... Indexing motor, 203... Gear train, 204...
Intermediate sleeve, 205...Cup ring, 207...
Sleeve, 210...Curvy coupling as multi-angular position engagement means, 211, 212...First and second gears constituting a pair of engagement members, 21
3...Diaphragm as a rotation prevention member, 214
... Piston for vertical movement of gear, 215 ... Cylinder for vertical movement of gear, 216 ... Spring forming a part of biasing means, 219 ... Hole as probe attachment part, 220
... Z spindle, 225 ... Ball, 226 ... Ball holder as probe support means, 227 ... Drive rod, 228 ... Belleville spring as retraction means, 23
2...Piston rod, 233...Piston, 235
... Atchiator as extrusion means, 250... Probe holder, 270, 280... Touch signal probe, 271, 281... Measuring head, 290... Probe stocker, 310... Control device, 320... Measured object.

Claims (1)

[Scope of Claims] 1. A hollow Z-axis structure supported by the main body so as to be freely slidable in the axial direction; supported within this structure so as to be rotatable about the axis and not displaceable in the axial direction, and having a touch signal at the tip thereof. a hollow Z-spindle having a probe attachment part; a rotational-direction detent member mounted on the Z-axis structure side so as to be axially displaceable and non-rotatable; and capable of engaging with each other at multiple angular positions in the circumferential direction. A multi-angular position meshing means having a pair of meshing members, one meshing member being attached to the Z spindle and the other meshing member being attached to the rotational direction stopper member; a biasing means that always biases in the direction of meshing, an axial drive means that overcomes the biasing means and releases the other meshing member from the meshing state with the one meshing member, and the axial drive means When a pair of meshing members are in the open state, one meshing member is
An angular positioning mechanism having a rotation drive means for rotating the spindle by a predetermined angle to change the meshing angle position of the pair of meshing members; housed in the Z spindle and capable of protruding and retracting into the touch signal probe attachment part of the Z spindle; a drive rod that operates the probe support means and extends in the axial direction; a spring that biases the drive rod in a direction in which the probe support means always operates to support the probe; A probe attachment/detachment mechanism comprising: a pneumatic actuator having an axial multi-stage pressure-receiving surface for pressing the probe support means in the opening operation direction against the urging force of the three-dimensional measuring machine. Z-axis structure.