JPH032404B2 - - Google Patents

Description

[Detailed description of the invention] [Technical field] The present invention relates to an automatic coordinate measuring machine.

[Background Art] Conventionally, three-dimensional measuring machines are known that measure the shape of an object by moving a touch signal probe three-dimensionally. Such a three-dimensional measuring machine generally has a support provided on the base so that it can move freely in the front-rear direction, that is, in the Y-axis direction, and a slider is mounted on a beam that is horizontally suspended between the upper ends of the support, in the left-right direction, that is, in the X-axis direction. A Z spindle is provided on the slider so as to be movable in the vertical direction, that is, in the Z-axis direction. The struts for these bases, the sliders for the struts, and the Z spindles for the sliders have a stacked structure in which they are assembled in this order.

Therefore, it is difficult to guarantee accuracy unless the structure is sequentially made strong from the base to the Z spindle. This is due to disadvantages of so-called automatic coordinate measuring machines in which each axis is automatically driven, such as the high horsepower of the drive source due to the heavy load, the sophisticated control system for high inertia, and the difficulty of high-speed feeding. Moreover, since the overall structure becomes larger, there is a disadvantage that it is economically disadvantageous.

Furthermore, in the case of automatic three-dimensional measuring machines, touch signal probes have conventionally been replaced manually, and an automatic three-dimensional measuring machine that can be more completely automated is desired.

[Object of the Invention] An object of the present invention is to provide an automatic three-dimensional measuring machine that can simplify the feeding mechanism, downsize the entire structure, and further promote automation.

[Structure of the Invention] The present invention makes the table movable with respect to the base, fixes the large support to the base, and provides a probe attachment/detachment mechanism that can automatically attach and detach the touch signal probe for effective automation. At the same time, a plurality of probes are held on a movable table, and a control device is provided to control the table feeding and probe attachment/detachment mechanism. The attachment and detachment of the probe uses a drive mechanism such as a table necessary for moving the object to be measured, so that the probe attachment and detachment mechanism does not require a special feeding machine, control circuit, etc. The attachment/detachment mechanism, control device, etc. enable further automation, which has great technical and economical value.

[Example] Hereinafter, an example of the present invention will be described based on the drawings.

In Figures 1 and 2 showing the overall configuration,
A base 10 made of a stone-like member such as natural stone or ceramic is horizontally installed on the installation floor 1 via a plurality of leveling jigs 30. This base 10 is formed in a substantially convex shape, and at the center of the upper surface of this convex base 10 is a first section made of a stone-like member similar to the base 10 and forming a guide surface in the Y-axis direction. guide member 11
are fixed with screws, and furthermore, on both sides of this first guide member 11, a pair of flat second guide members 12 also made of a stone-like member are partially protruded from the upper surface of the convex portion of the base 10. It is fixed with screws symmetrically. At this time, the structure for fixing the guide member 11 and the second guide member 12 to the base 10 is
This is done by passing through the first guide member 11 or the second guide member 12 and screwing the bolt 16 into the threaded hole of the fixture 14 which is adhesively fixed in the blind hole 13 provided at 0. Furthermore, in this specification, the X-axis direction means the left-right direction in FIG. 2, the Y-axis direction means the direction perpendicular to the plane of the paper in the same figure, and the Z-axis direction means the up-down direction in the same figure, that is, the vertical direction. These X, Y, and Z axes are three axes that are orthogonal to each other, with the X and Y axes being the axes in the horizontal plane and the Z axis direction being the vertical direction.

The leveling jig 30 includes a base 31 having a substantially concave side surface, and a sliding piece 3 that is slidably housed in the base 31 and has an inclined surface on its upper surface.
3, a bolt 34 that is screwed into the upper portion of the base 31 so as to be movable in the upward and downward directions and allows the sliding piece 33 to move forward and backward along the bottom surface of the base 31; and a contact piece 36 which has an inclined surface that engages with the inclined surface of the sliding piece 33 and is in contact with the lower surface of the base 10, and by turning the bolt 34, both inclined surfaces can be moved. By this action, the height position of the base 10 with respect to the installation floor 1 can be adjusted, and the horizontal position of the base 10 can be determined.

On both sides of the first guide member 11, a plurality of pairs of bend correction means 40, for example, 3 or more pairs, in fact about 16 to 32 pairs, are disposed using inclined surfaces similarly to the leveling jig 30. , the straightness of the parallel guide surfaces 18 for restricting movement in the X-axis direction formed on both sides of the first guide member 11 can be maintained.

A metal table 50 is placed on the base 10.
It is provided so as to be movable in the axial direction. An air bearing 51 that opposes the parallel guide surface 18 of the first guide member 11 is attached to the lower surface of the table 50 via a bracket 52, and also controls the vertical movement of the second guide member in the Z-axis direction. A relatively large air bearing 53 opposed to the upper guide surface 20 of the parallel guide surfaces 20 is provided,
Furthermore, air bearings 54 are mounted via brackets 55 to oppose the guide surface 20 on the lower side of the parallel guide surface 20, and each of these air bearings 5
1, 53, and 54, the table 50 can be moved on the base 10 with a slight force, and movement in the X-axis direction is restricted by the action of the first guide member 11 and the air bearing 51. Also, the second
Movement in the Z-axis direction is restricted by the action of the guide member 12 and the air bearings 53, 54, and straight movement is possible only in the Y-axis direction.

Furthermore, a Y-axis direction drive mechanism 60 is provided between the base 10 and the table 50 to drive the table 50 in the Y-axis direction. As shown in FIG. 3, this Y-axis direction drive mechanism 60 includes a motor 62 fixed to the base 10 via a bracket 61,
A feed screw shaft 64 consisting of a ball screw shaft is connected to the output shaft of the motor 62 via a coupling ring 63, and a feed screw shaft 64 is movably screwed into the feed screw shaft 64 and connected to the table 5 via a bracket 65.
An electromagnetic brake 67 for stopping the rotation of the feed screw shaft 64 comprises a nut member 66 fixed at 0, a rotating disk attached to the feed screw shaft 64, and a control unit for stopping the rotation of the rotating disk.
and a feed screw shaft 6 provided on the bracket 61.
4, a bearing 69 fixed in the groove 21 provided in the first guide member 11 and supporting the other end of the feed screw shaft 64, and a bearing 69 provided on the lower surface of the bracket 61. The electronic circuit section 70 provides a predetermined electrical signal to the motor 62 and the like.

The amount of feed of the table 50 by the motor 62 is determined by a scale 76 provided on the first guide member 11 side and a detection unit 7 provided on the bracket 52 side of the table 50, as shown in FIG.
7, and the zero point position for measuring the origin position of the table 50, that is, the absolute position, is determined by the zero mark 81 provided on the first guide member 11 side and the table 50. It is set by a zero set means 80 consisting of a detection switch 82 provided on the 50 side. Furthermore, the movement range of the table 50 is controlled by a dot 85 provided on the base 10 and a limit switch (not shown) provided on the table 50 side.

In FIG. 2, pillars 90 are fixed to both sides of the base 10, respectively. The structure of fixing the support column 90 to the base 10 consists of holes 2 provided at a plurality of locations along both sides of the base 10 in the Y-axis direction.
A through-hole 2 is inserted into the approximately pestle-shaped tightening fitting 23 inserted into the hole 2.
This is done by a bolt 25 that is screwed through the hole 4. Each of these pillars 90 is made of metal such as iron, and a beam 100 as a non-movable object side structure made of a stone-like member similar to the base 10 is horizontally fixed between the upper ends of these pillars 90. has been done. The fixing structure between the beam 100 and the column 90 is similar to the fixing structure between the column 90 and the base 10, and the structure is similar to the fixing structure between the column 90 and the base 10. The bolt 104 is inserted through a through hole 103 provided on the side of the beam 100 and is screwed into a screw hole of the tightening fitting 102. There is.

A slider 110 is supported on the beam 100 so as to be movable in the X-axis direction.
10 is an X-axis direction drive mechanism 120 consisting of a motor 122, a feed screw shaft 124, a nut member 129, etc.
The beam 100 is automatically fed in the X-axis direction by
A guide rail 105 and a slider 110 for guiding the slider 110 in the X-axis direction are provided on the back side of the slider 110.
A scale 106 for detecting the amount of movement is provided respectively.

As shown in FIG. 4, the slider 110 includes a bearing box 11 for guiding in the X-axis direction, which is provided so as to surround the beam 100 and has air bearings 111 facing each square surface of the beam 100.
2, a pair of upper and lower bearing boxes 114 for Z-axis direction guidance, each having an air bearing 113 mounted on the front surface of this X-axis direction guidance bearing box 112 and arranged inside in a rectangular planar shape; A Z-axis structure 180 inserted into the guiding bearing box 114 so as to be movable in the Z-axis direction, and a support frame 11 erected on the X-axis guiding bearing box 112.
5, and a lock provided at the upper end of the support frame 115 to prevent free rotation of the Z-axis drive mechanism 140 and prevent the Z-axis structure 180 from falling. A device 160 is provided.

The Z-axis direction drive mechanism 140 includes a motor 141 supported by the support frame 115, a bearing 143 rotatably driven by the motor 141 via a timing belt 142, and provided at the upper and lower parts of the support frame 115, respectively. 144
a feed screw shaft 145 having a relatively large screw pitch of, for example, 4 mm or more, whose upper and lower ends are rotatably supported by screws;
a nut member 146 axially movably supported by the nut member 146;
The guide rail 147 is rotatably supported by the nut member 146 and is attached to the wall surface (not shown) on the front side in FIG. 4 of the support frame 115. Z the nut member 146 along the guide rail 147
A pair of rollers 148 are guided to move easily in the axial direction but cannot be rotated, a connecting plate 149 is fixed to the nut member 146, and a thrust bearing 150 is provided on the upper and lower surfaces of the protruding end of the connecting plate 149, respectively, and a spherical portion is provided at the tip of the connecting plate 149. a bracket 152 that is connected via a set screw 151 and fixed to the upper end of the Z-axis structure 180; It can be driven in the axial direction. At this time, the influence of bending, eccentricity, etc. of the feed screw shaft 145 is affected by the thrust bearing 150, which is made axially immovable and radially movable relative to the connecting plate 149.
, and only the movement of the nut member 146 in the Z-axis direction is transmitted to the Z-axis structure 180.

The Z-axis structure 180 is made of a square tube and includes a hollow housing 181 as a Z-axis member, and has an air balance mechanism 190 inside the housing 181.
and a probe attachment/detachment mechanism 200. This air balance mechanism 190 includes a cylinder 191 that is fixed to a housing 181 and has an open bottom end.
The piston 1 is housed in the cylinder 191 and supported by the support frame 115.
92, and by supplying compressed air between the piston 192 and the upper part of the cylinder 191, the weight of the Z-axis structure 180 is supported by the action of this compressed air, and the Z-axis structure 180 The load on the feed screw shaft 145 side due to its own weight is reduced. In addition, on the back side of the housing 181 in the figure,
A scale 185 is fixed, and a detector 186 for reading the scale of this scale 185 is provided on the support frame 115. These scales 185 and detector 186 allow the Z-axis structure 18 to be
The amount of movement of 0 in the Z-axis direction is detected.

As shown in FIG. 5, the Z-axis structure 180 includes a hollow casing 181 as a Z-axis member made of the square cylinder, and inside this casing 181, an air balance mechanism 190 is disposed at the top. At the same time, a Z spindle 220 is fixed to the lower part. This Z spindle 220 has a tapered hole 219 as a probe attachment part, and houses therein a ball holder 226 with a hollow bottom serving as a probe support means so as to be movable in the axial direction. This ball holder 226 has a plurality of balls 225 movable in the radial direction and prevented from falling at its lower end, and is moved up and down by a piston rod 232 as a drive rod. This piston rod 232 is equipped with piston rods 233 in multiple stages, and these pistons 233
is housed in an actuator 235 as an extrusion means having a partition wall 234, and has a multi-stage pressure receiving surface in series. Further, the piston rod 232 is always urged upward by a disc spring 228 as a retracting means, that is, in a direction in which the ball holder 226 is constantly retracted into the small diameter guide hole 221. Guide hole 22 of this ball holder 226
When the probe holder 250 is retracted into the probe 1, the ball 225 is projected inward of the ball holder 226 by the action of the guide hole 221, so that the ball 225 can lock the pull stud 251 at the upper end of the probe holder 250. On the other hand, actuator 2
35, when the piston rod 232 is pressed downward against the disc spring 228, the ball holder 226 is pushed out from the small diameter guide hole 221, and the chuck of the probe holder 250 can be released. . Further, the movement of the piston rod 232 is detected by an axial position detecting means 238 consisting of a dog 236 and a pair of detectors 237.

The Z piston rod 220 has a protrusion 239 for positioning the probe holder 250 on its lower surface, and a fixing pin 243 as an electrical contact.
The fixing pin 243 enables electrical continuity with the probe holder 250 and the touch signal probe 270 or 280 (see FIGS. 6 and 7) attached to the holder 250.

Note that the actuator 2 as the extrusion means
35, a probe attachment/detachment mechanism 200 is constituted by a disc spring 228 as a retracting means and a ball holder 226 as a probe support means, and the touch signal probe 270 is inserted into the hole 219 of the Z spindle 220 as a probe attachment part by this probe attachment/detachment mechanism 200. , 280 probe holder 250
It is now possible to put on and take off.

The probe holder 250 has a pull stud 25 at its upper end, as shown in FIGS. 6 and 7.
1 and a flange portion 252 and a tapered surface 253 in the middle, the holder body 256 has a measuring element 271 or 281 at the lower end and a male screw 272 or 282 at the upper part. A touch signal probe 270 or 280 having a different shape is screwed and fixed. At this time, the touch signal probe 280 includes a rotating part 283 having the measuring tip 281, and a portion of the rotating part 283 can be rotated relative to the main body 284 having the male thread 282 and fixed at the rotating position. It is meant to be.

Further, on the upper surface of the flange portion 252 of the probe holder 250, there is a groove-shaped engagement recess that can be engaged with a protrusion 239 provided at the lower end of the Z spindle 220 and constitutes a positioning means together with the protrusion 239. 257 and a fixing pin 24 provided at the lower end of the Z spindle 220.
A contact pin 266 that comes into contact with the contact pin 266 is provided. Further, a pin hole 258 and an engagement groove 269 are formed on the lower surface of the flange portion 252.

In FIGS. 1 and 2, the table 5
0, a probe stocker 290 is provided. As shown in FIGS. 8 to 11, the probe stocker 290 includes a holding stand 291 fixed to one end, that is, the rear end side of the table 50, and a holding stand 291 fixed to the upper part of this holding stand 291, as well as the table 50. A plurality of holding plates 293 each having a notch 292 opened toward the other end side, that is, the front end side;
The probe holder 250 is protruded from both sides of the probe holder 250.
Pin hole 2 formed on the lower surface of the flange portion 252 of
A pin 294 and a pin 295 that can be engaged with the pin hole 268 and the engagement groove 269 and constitute a probe attitude maintaining means together with the pin hole 268 and the engagement groove 269, and a pin 294 and a pin 295 that are engageable with the pin hole 268 and the engagement groove 269 and constitute a probe attitude maintaining means, A pair of flange holders 296 made of an insulating material are provided to support the lower surface of the flange portion 252 of the probe holder 250, and a pair of flange holders 296 are located within the cutout portions of the pair of flange holders 296 to support the lower surface of the flange portion 252 of the probe holder 250. A detector 297 consisting of a reed switch or the like that detects the presence or absence,
One end is rotatably supported by brackets 298 fixed to both sides of the notch 292 on the lower surface of the holding plate 293, and the other end is swingable at a predetermined angle by a swing regulating pin 299 provided on the bracket 298. cut out part 2 on the inner surface of each
92; a leaf spring interposed between the clamping body 300 and the bracket 298 and urging the clamping body 300 to protrude inward of the notch 292; 301, and the holding plate 2 of this probe stocker 290
The probe holders 250 are placed on the probes 93 with their positions adjusted. At this time, each probe holder 250 is prevented from falling from the holding plate 293 by the action of the clamping body 300 urged by the leaf spring 301.

Although the reference numeral 310 in FIG. 1 is shown in a simplified manner, it has a display section 311 and peripheral devices such as a printer and a CRT (not shown), and further includes:
A control device that has a computer system with an internal arithmetic function storage mechanism and controls the movement of each part according to a predetermined program, 320 is an object to be measured placed on a table 50, and 26 is a Y A bellows cover that protects the axial drive mechanism 60 from dust; reference numeral 27 is a side cover. Further, the probe attachment/detachment mechanism 2
00 and the probe stocker 290 constitute an automatic probe attachment/detachment device.

Next, the operation of this embodiment will be explained.

The probe holder 250 with the touch signal probe 270 or 280 of a predetermined shape attached is set on the holding plate 293 of the probe stocker 290 fixed on the table 50, and
The object to be measured 320 is placed and fixed on top. In this state, when a predetermined command is given by the control device 310, the motor 62 of the Y-axis direction drive mechanism 60 is driven by this command, and the table 50 is moved to the left in FIG. The probe stocker 290 is moved forward so that it is located just below the Z-axis structure 180. On the other hand, along with driving the Y-axis direction drive mechanism 60, the motor 122 of the X-axis direction drive mechanism 120 is driven,
The slider 110 is moved in the X-axis direction, and the Z-axis structure 180 is moved to a position directly above a predetermined probe holder 250 placed on the probe stocker 290, and then stopped.

In this state, the motor 141 of the Z-axis direction drive mechanism 140 inside the slider 110 is activated, the Z-axis structure 180 is lowered, and the Z-axis structure 180 is moved as a probe attachment part of the Z-axis spindle 220 housed inside the Z-axis structure 180. The probe holder 250 is housed in the hole 219. At this time, as shown in FIG. 5, the actuator 235 is actuated and pushes down the piston rod 232 as a drive rod against the disk spring 228, so the ball holder 226 is removed from the guide hole 221 and the ball 225 is in a free state. Therefore, the pull stud 251 at the upper end of the probe holder 250 can be easily inserted into the ball holder 226.

Next, when the actuator 235 is deactivated, the piston rod 2 is moved by the action of the disc spring 228.
32 is raised, the pull stud 251 is retracted by the ball holder 226, the tapered surface 253 of the probe holder 250 is engaged with the hole 219, and the protrusion 239 formed at the lower end of the probe attachment/detachment mechanism 200 is inserted into the probe. The probe is inserted into the engagement recess 257 of the holder 250, and the fixing pin 243 of the probe attachment/detachment mechanism 200 is inserted into the probe holder 250.
The contact pin 266 is contacted to establish electrical continuity.

After adjusting the attachment of the probe holder 250 to the probe attachment/detachment mechanism 200 in this way,
The Y-axis direction drive mechanism 60 and the X-axis direction drive mechanism 1
20 and the Z-axis direction drive mechanism 140 are controlled by the control device 3.
The probe 281 of the touch signal probe 280 attached to the lower end of the Z-axis structure 180 is brought into contact with a predetermined position of the object to be measured 320, and the X, Y,
The position in the Z-axis direction is stored in the control device 310, and the points of contact with the object to be measured 320 by the probe 281 are sequentially measured to complete the measurement of the object to be measured 320. When measuring the object to be measured 320, when it is necessary to replace the touch signal probe 280, the Z-axis structure 180 is positioned above the probe stocker 290 in the same manner as described above, and the touch signal probe 280 is replaced. This can be done by attaching a predetermined mounted probe holder 250 to the Z-axis structure 180. At this time, the used probe holder 250 must be returned to an empty position in the notch 292 of the probe stocker 290.
After positioning the Z-axis structure 180 at position 2, the actuator 235 is activated to lower the piston rod 232 against the disc spring 228, releasing the pull stud 251 from the ball holder 226, and moving the pull stud 251 into the open state. It is only necessary to raise the Z-axis structure 180 as it is.

According to this embodiment as described above, there are the following effects.

That is, in this embodiment, since the table 50 is movable, there is no need to move the heavy support column 90, etc., and the drive mechanism, that is, the Y-axis direction drive mechanism 60, can use a small amount of power, and the inertia is also small. The stopping position of the table 50 can also be made accurately. Further, since the table 50 is guided by two parallel surfaces of the X-axis direction movement regulating member 11 and the Z-axis direction movement regulating member 12 provided on the base 10, unlike the conventional V-shaped guide groove, , can be adjusted independently in both directions, and table 5
0 guidance accuracy can be improved. Moreover, since the straightness of the parallel guide surface 18 of the X-axis direction movement regulating member 11 can be adjusted by the bend correction means 40, the guide accuracy can be improved from this point as well.
Furthermore, since the X-axis direction movement regulating member 11 and the Z-axis direction movement regulating member 12 are formed separately from the base 10, when machining their guide surfaces,
It can be processed relatively easily and with high precision. Furthermore, since a probe attaching/detaching mechanism 200 is provided within the Z-axis structure 180, a probe stocker 290 is provided on the table 50, and the table 50 is moved, automatic attachment of the touch signal probes 270, 280 is possible. It is possible to easily achieve the function of replacement. In addition, a plurality of types of touch signal probes 270 and 280 may be attached to the probe holder 250 in advance and the probe stocker 29
0, the touch signal probes 270, 280 can be replaced in about the same time as the touch signal probes 270, 280 measuring one point. Work while replacing 280 can be done extremely quickly. At this time, each time the touch signal probes 270, 280 are replaced, the origin may be checked by bringing the touch signal probes 270, 280 into contact with the origin position (not shown). , measurement accuracy can be further improved. In addition, the connection structure between the base 10 and the beam 100 and the support 90 made of stone-like members is as follows.
Tightening fittings 23, 10 inserted into holes 22, 101
Since this is done using the bolts 25, 104 which are inserted through the through holes 24, 103 in 2, reliable fixing can be achieved with a simple structure. Also, Z
Inside the shaft structure 180, an air balance mechanism 190 is provided.
is provided, the drive operation force for the Z-axis structure 180 can be extremely small, and this Z-axis structure 18
The motor 141 that drives the slider 110 can be made smaller, and the slider 110 can be made smaller and lighter. In addition, the influence of eccentricity of the feed screw shaft 145 of the Z-axis direction drive mechanism 140 is
9 and the thrust bearing 150, and can prevent an adverse effect on measurement accuracy. Furthermore, in order to speed up the drive of the Z-axis structure 180, the lead of the feed screw shaft 145 is set to be 4 mm or more, for example. However, when such a large lead is taken, the air balance of the air balance mechanism 190 If the air for use is lost for some reason, the feed screw shaft 145 may be rotated from the nut member 146 side due to the weight of the Z-axis structure 180, and the Z-axis structure 180 may fall naturally. Now, since the locking device 160 is provided to strongly lock the upper end of the feed screw shaft 145 when compressed air is lost, the feed screw shaft 145 can be effectively rotated in the opposite direction when air is lost. Therefore, damage to various parts due to falling of the Z-axis structure 180 can be prevented. Furthermore, since the driving source for the piston rod 232 in the probe attachment/detaching mechanism 200 is an actuator 235 having a plurality of pressure receiving surfaces, the probe holder 250 can be moved using relatively low pressure compressed air installed in a general factory. Even if the Belleville spring 228 holding the probe has a strong spring force, the piston rod 232 can be driven by sufficiently overcoming the spring force of the Belleville spring 228, and the probe holder 250 can be reliably attached. . Further, since the Z spindle 220 and the probe holder 250 are positioned by the protrusion 239 and the engagement recess 257, the mounting position relative to the Z spindle 220 can be set accurately.
Further, when installing the probe holder 250 in the probe stocker 290, the position is determined by the pin hole 268, the engagement groove 269, and the pins 294 and 295, so that the installation position can be accurately performed. Further, since the probe stocker 290 is provided with a clamping means consisting of a pair of clamping bodies 300, the probe holder 250 will not fall from the probe stocker 290 due to inertia caused by the movement of the table 50 or the like. There is no
Unexpected accidents can be prevented. Further, since the probe stocker 290 is provided with a detector 297, it can be immediately determined whether or not the probe holder 250 is placed. It is possible to easily detect the notch 292 that exists. Furthermore, since the base 10 and the beam 100 are made of stone-like members, it is possible to effectively prevent a decrease in accuracy due to changes over time. In addition, the base 10 and the X-axis direction movement regulating member 11
Alternatively, the contact structure with the Z-axis direction movement regulating member 12 is such that the X-axis direction movement regulating member 11 is attached to a fixing metal fitting 14 adhesively fixed in a blind hole 13 provided in the base 10.
Alternatively, since it is fixed with the bolt 16 passing through the Z-axis direction regulating member 12, the fixing can be performed simply and reliably. In addition, the structure to prevent the Z-axis structure 180 from falling when compressed air is lost does not stop the Z-axis structure 180 itself, but stops the feed screw shaft 145, so it can be locked with a light force. The structure of the locking device 160 can be simplified.

In carrying out the present invention, the support portion of the pull stud 251 in the probe attachment/detachment mechanism 200, that is, the ball holder 226, is not limited to the above structure, and may be supported by an electromagnet, a collector chuck, or the like. In addition, the probe attachment/detachment mechanism 20
The method of supporting the pull stud 251 at 0 is not limited to the method of always holding the pull stud 251 as in the above embodiment.
It may be held by the tapered surface 253 of the Z spindle 220 and the tapered hole 219 of the Z spindle 220. Further, each Y, X, Z axis direction drive mechanism 60, 120,
The motors 62, 122, 141 of 140 are AC,
This includes not only DC and pulse motors, but also air motors, hydraulic motors, etc. Further, the holding plate 293 of the probe stocker 290 is not limited to being divided into a plurality of parts as in the above embodiment, but may be configured as a single piece. More than one will be formed. Furthermore,
The probe attaching/detaching mechanism 200 is not limited to being provided within the Z-axis structure 180, but may be provided outside thereof, and its structure is not limited to the structure of the above embodiment. Further, among the three orthogonal axes X, Y, and Z, the Z axis does not necessarily have to be vertical, and the X axis may be vertical. In this case, the Z spindle 220 will be arranged horizontally. Furthermore, the touch signal probe in the present invention is not limited to the touch signal probes 270 and 280 themselves, but includes those attached to the probe holder 250.

[Effects of the Invention] As described above, according to the present invention, the structure of the driving portion can be made smaller and simpler, and an automatic three-dimensional measuring machine with further automation can be provided.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing the overall configuration of an embodiment of the present invention, Fig. 2 is a partially cutaway front view, and Fig. 3 is a partially cutaway front view.
The figure is an enlarged cross-sectional view of the Y-axis direction drive mechanism, Figure 4 is an enlarged view with a part of the slider cut away, Figure 5 is an enlarged cross-sectional view of the probe attaching/detaching mechanism, and Figure 6 is a partially cut-out view of the probe holder. 7 is a plan view of FIG. 6, FIG. 8 is an enlarged plan view of the probe stocker, FIG. 9 is an enlarged plan view of the main part of FIG. 8 with some parts cut away, and FIG. 10 11 is an enlarged front view with a portion thereof cut away, and FIG. 11 is an enlarged sectional view of FIG. 10 viewed from below. 10... Base, 11... First guide member, 12
... Second guide member, 18, 20 ... Parallel guide surface, 51, 53, 54 ... Air bearing, 60
... Y-axis direction drive mechanism, 100 ... Beam, 110 ...
...Slider, 120...X-axis direction drive mechanism, 14
0... Z-axis direction drive mechanism, 180... Z-axis structure, 200... Probe attaching/detaching mechanism, 219... Hole as a probe attachment part, 220... Spindle, 226... Ball holder, 250... Probe holder , 270, 280... touch signal probe, 271, 281... probe, 290... probe stocker, 310... control device, 320...
Object to be measured.

Claims (1)

[Claims] 1. A base with a guide surface that regulates movement in the X and Z axes of the three mutually orthogonal X, Y, and Z axes with the Y axis as the horizontal axis, and an air system that uses the guide surface of this base. Displacement in the X and Z axis directions is impossible via bearings, and the Y axis is located at the center of the base.
A table that is screwed onto a drive feed screw shaft provided along the axial direction and held on a base so as to be able to automatically feed in the Y-axis direction, and a pair of supports that are erected on both sides of the base in the X-axis direction. A beam member is horizontally suspended between the pair of supports, a slider is attached to the beam member so that it can be automatically moved in the X-axis direction, and a touch signal probe can be attached to the tip, and a Z spindle supported by a slider so as to be automatically fed; a plurality of touch signal probes held at one end of the table in the feeding direction with their mounting axes aligned with the Z axis direction; and a plurality of touch signal probes housed in the Z spindle. and a probe attachment/detachment mechanism capable of retracting the touch signal probe held on the table into the probe attachment part of the Z spindle and pushing out the touch signal probe attached to the attachment part toward the table; and the table and the Z spindle. An automatic three-dimensional measuring machine characterized by comprising: a control device that drives and controls a selected touch signal probe to align the mounting axis of the selected touch signal probe with the Z spindle axis, and operates a probe attaching/detaching device.