JPH03210494A - Grid plate for shielding radiation measurement elements - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a radiation measuring element, and particularly relates to a grid plate having a plurality of slits through which radiation passes.

Conventional technology For X-ray measurements, for example, 1'L with a thickness of about 0.5 mm.

A CdTe single crystal with a width of about 1 m and a length of 1 to 2 cm can be used as a sensor chip.

A surface with a width of 1 mm and a length of 1 to 2 cm is used as the surface to be irradiated with X-rays.A grid plate having a plurality of slits is arranged in front of the surface, and the sensor chip is attached to an appropriate Functionally, the electrodes can be configured to perform an operation equivalent to an integrated system of independent elements corresponding to individual slits.
The sensor chip may be configured to measure the amount of X-rays transmitted through each slit of the grid.
Even though it is shown in No. 6, the size of the slit (
In order to improve the above-mentioned positional resolution, which affects the positional resolution in X-ray measurement, it is necessary to reduce the size of the slit, which is commonly done by etching. ing.

As is well known, in the etching process that requires shape accuracy, it is necessary to use a thin plate whose side etching does not affect the shape accuracy.
When both shape accuracy and thickness are required (such as when the required thickness is not obtained by stacking etched thin plates), on the actual lunar surface, the above strip-shaped sensor chip is
The problem to be solved by the invention is that it is necessary to extend the measurement range by arranging a plurality of grid plates linearly in the length direction. When trying to obtain a shielding grid plate in which the opening width of the slit is small relative to the thickness and the shape accuracy is high, the required thickness can be obtained by etching grid plates thinner than the opening width and laminating them. the number you were getting
In addition, the etching process was expensive in terms of materials and man-hours (Kame) The corners of the slit are rounded, and X-rays are blocked at that part, effectively reducing the sensitivity. It is necessary to expand the measurement range by arranging a plurality of grid plates linearly in the length direction, but in this case, it is difficult to position each grid plate individually with respect to the sensor chip with high precision. To solve the above-mentioned problems, it is an object of the present invention to provide a new shielding grid plate. The first groove was machined in the shape of
and the second member is joined so that they are overlapped in the direction of incidence of radiation. By forming concave portions that match the convex portions and connecting them, a shielding grid plate that can integrally shield radiation from multiple sensor chips can be obtained.By the method described above, the grid plate is divided into slits. By processing grooves, joining them, and connecting them in the direction in which the slits are arranged, it is possible to create a grid plate using thick plates.
Further, FIG. 1 is a diagram showing an embodiment of the present invention, which allows highly accurate connection of individual grids. FIG. 1(f)
Electrodes 58 for driving the sensor chip 6 as a plurality of elements as described above are formed at a constant pitch on the sensor chip 6 (both ends are shown for simplicity). (only electrodes shown). Figure 1 (a
), (c)! ! 1 shows grid plates 1a and 1b constituting the grid plate of the present invention. Figure 1(b),
(d) (i) The right side view of Figures (a) and (b) respectively shows the slit 2 corresponding to the am electrode 5. After dividing the structure, groove the slit 2 using a dicing saw, etc. (＼ Then, the grid plate 1
a and the grid plate 1b by joining them at the joint part 4a so as to close the opening part 3 of the groove part (the slits 2 are also formed at the same pitch as the electrodes 5). (omitted).

Also, Fig. 1(e) corresponds to the bottom view when Figs. 1(a) and 1(b) are viewed as a front view, and as shown in this figure, the joint 4b in the longitudinal direction (Machining a convex part on one side of the melon grid plate in the slit arrangement direction and a concave part matching the convex part on the other side and connecting them to form an integrated structure.) Integrating the radiation of multiple sensor chips. The purpose of the present invention is to obtain a highly accurate shielding grid plate that can be shielded.

Further, FIG. 2 shows another embodiment. The effect of the present invention is shown in Figures (a) and (b) where the joint is made with uneven surfaces, and (C) and (d) where the joint is diagonally joined. The thickness of the shielding grid plate is thick (both can be slit with high precision, and the shielding grid plate compatible with multiple sensor chips can be easily obtained with high precision).

[Brief explanation of drawings]

FIG. 1 is a block diagram of an embodiment of the present invention. FIG. 2 is a block diagram of a relaxed embodiment of the present invention. 1a, 1b...grid maple 2...groove f! L, 3
...To open the groove 4a...Joining air 4b...Joining expansion 5...Electrode 6...Sensor chip

Claims (3)

[Claims] (1) A grid plate having a plurality of slits that transmit radiation, and a first grid plate having a number of comb-like grooves.
A grid plate for shielding a radiation measuring element, comprising: a member; and a second member that is in close contact with the first member and closes the opening of the groove. (2) Shielding of the radiation measuring element according to claim 1, wherein the closing portion of the grid plate is formed by joining the first member and the second member such that they overlap with each other with respect to the incident direction of the radiation. grid board. (3) A convex portion is formed on one surface of both ends of the grid plate in the direction in which the slits are arranged, and a concave portion that aligns with the convex portion is formed on the other surface of the first member, the second member, or the first and second members. 2. The shielding grid plate for a radiation measuring element according to claim 1, wherein the grid plate is formed on a member.