JPH03210733A - Manufacture of display device - Google Patents
Manufacture of display deviceInfo
- Publication number
- JPH03210733A JPH03210733A JP2004990A JP499090A JPH03210733A JP H03210733 A JPH03210733 A JP H03210733A JP 2004990 A JP2004990 A JP 2004990A JP 499090 A JP499090 A JP 499090A JP H03210733 A JPH03210733 A JP H03210733A
- Authority
- JP
- Japan
- Prior art keywords
- container
- vacuum
- display device
- joining member
- joined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明&友 テレビジョン受像銑 計算機端末デイスプ
レィ等に用い本 電子管方式の平板型表示装置の製造方
法に関するものであム
従来の技術
返電 電子管方式の平板型表示装置の実用化が急ピッチ
で進んでいも
この平板型表示装置の外形法 薄厚の箱型(矩形状)で
あり、その内部に電子鳳 電子ビーム制御電極構体等が
収納されも
第2図は この様な箱型真空容器の真空排気及び真空封
止工程を、容器の一辺部を断面にして示したものであも
第2図において、8は容器内面側に蛍光体が塗布された
フェースガラス玄 このフェースガラスと容器4とて
内部に電極構体9を収納する真空容器10が形成される
ものであ翫
さて、金属で作製される容器4をフェースガラス8に接
合して真空容器10とするため&へ フェースガラス8
の周辺部に(戴 金属の接合部材6が低融点半田ガラス
5により気密に接合されていもそして、電極構体9をフ
ェースガラスs上に固定した抵 接合部材6上に金属製
の容器4を設置し接合部材6と容器4とをレーザビーム
3により気密に溶接接合すも その微 容器4内を排気
管7を介して排気装置lにより高真空に排気すも この
排気と並行して容器11全体をベーキングし最後に排気
管7を封止し表示装置を製造するものであム
発明が解決しようとする課題
上記従来の製造方法において(よ 接合部材6と容器4
をレーザ溶接で気密に接合した後に容器内を真空排気し
ていも 容器ll内が真空に排気された後で(友 大気
圧により容器4には変形が発生すa この隊 既に接合
部材6と容器4とはレーザで接合されているためへ こ
の接合部は容器4の変形を拘束しようとすム 従って、
接合部材6にζ戴 上記の変形による応力が加わり、そ
れ(戴半田ガラス5にも加わることとなも その結果低
融点半田ガラス5のクラック及び接合部材6と低融点半
田ガラス5との間の剥離等が生じてリークが発生し 不
良品となム この様な症状(表 真空容器10の真空排
気工程の初期に発生することもあれ(L その後のベー
キング工程での加温によって熱応力が更に加わって発生
することもあムあるいは製造工程中では上記クラックな
どの発生塵には至らず、市場に出荷されたのちに発生す
ることも考えられも
何れにしてL この様なリークは表示装置の信頼法 歩
留まりを著しく損なうものであも本発明は上記の問題点
を解決できる表示装置の製造法を提供するものであa
課題を解決するための手段
本発明は上記の課題を解決するたべ 接合部材と金属製
の容器の間に気密部材を挿入し 容器内を予め真空排気
し 容器及び接合部材にに大気圧をかけた状態衣 接合
部材と容器をレーザビームにより気密に接合するもので
あ翫
作用
上記手段によって、真空排気による容器の変形が生じた
後でレーザ溶接が行なわれるため顛 接合部材と半田ガ
ラスとの接合部に(上 容器の変形による応力が加わる
ことがなく、接合部の信頼性は飛躍的に向上し 従来の
課題を解決することが出来るのであa
実施例
第1図は本発明の製造方法の実施例を示すものであム
蛍光体が塗布されたフェースガラス8上に低融点半田ガ
ラス5により金属製の接合部材6を気密に接合すム 次
にフェースガラス8上に電極構体9を固定した徴 接合
部材6上に気密部材2及び金属製の容器4を設置すa
この気密部材2としてC友 本実施例の場合、表面に
シリコングリスをやや厚めに塗布したゴムを用いていも
やや厚めのシリコングリス(よ 接合部材の反り等に
よって発生すム ゴム2と接合部材との間の間隙を埋め
る作用を有するものであも 排気装置1により排気管7
を介して容器4内を真空排気すもその後レーザビーム3
により前記接合部材6と前記容器4を前記気密部材2の
内周部で気密に接合すも この段階での真空排気ζよ
例えば10−’Torrといった高真空にまで排気する
必要は全くなt〜 すなわ板 この段階での真空排気は
大気圧差により容器4に変形を生じさせることが目的
であり、上記の様な高真空であろうと例えばITorr
といった低真空であろうと容器4に加わる大気圧差は実
質的に皆無であり、容器の変形量についても差は無いか
らであム したがって、気密部材2には高度なシール性
能は必ずしも必要としな〜
そして、レーザ溶接により、接合部材6と容器4とが接
合された後床 ベーキングを行いつつ容器内を所定の真
空度にまで排気すム
本実施例で1友 上記の様く 真空排気に伴う容器4の
変形を生じさせた後へ 容器と接合部材のレーザ溶接を
行なうのて 接合部材に1友 従来例の′真空排気に伴
う容器の変形によって応力が発生することがなく、半田
ガラスのクラック発生は確実に防止され 接合部の信頼
性は飛躍的に向上すも
更く 接合部材6と容器4のレーザ接合(よ 接合部が
大気圧によって互いに強固に押圧された状態で行なわれ
るた八 レーザ接合の信頼性も従来例に比較して向上す
るものであム あるいCヨ 従来例で法 レーザ接合
部において、容器4と接合部材を加圧密着する為に必要
であった治工具が本実施例では不要となり、工程の簡素
化 短縮化が図れるものであa
発明の効果
以上の説明から明らかなよう+’w 本発明は予め容
器内を真空排気した後にレーザ接合することで、低融点
半田ガラスのクラック及び接合部材の剥離等を確実に防
止できるもので、表示装置の信頼性を大幅に向上できる
ものであも[Detailed Description of the Invention] Industrial Fields of Application The present invention & friends Television image receiving plate Used in computer terminal displays, etc. This relates to a method of manufacturing an electron tube type flat panel display device.Conventional technology Return of electron tube type The practical application of flat panel display devices is progressing at a rapid pace.The external shape of the flat panel display device is a thin box-type (rectangular shape). The figure shows the vacuum evacuation and vacuum sealing process for such a box-shaped vacuum container, with one side of the container in cross section. Face Glass Gen This face glass and container 4
A vacuum container 10 is formed that houses an electrode structure 9 therein.Now, in order to bond the container 4 made of metal to the face glass 8 to form the vacuum container 10, the face glass 8
Even if the metal bonding member 6 is hermetically bonded with the low melting point solder glass 5, the metal container 4 is placed on the resistance bonding member 6 with the electrode structure 9 fixed on the face glass s. The joining member 6 and the container 4 are then hermetically welded together using the laser beam 3.The inside of the container 4 is then evacuated to a high vacuum via the exhaust pipe 7 by the exhaust device 1.In parallel with this evacuation, the entire container 11 is and finally seals the exhaust pipe 7 to manufacture the display device.Problems to be Solved by the Invention In the conventional manufacturing method described above, the connecting member 6 and the container 4
Even if the inside of the container is evacuated after being hermetically joined by laser welding, deformation will occur in the container 4 due to atmospheric pressure. 4 because it is joined with a laser.This joint tries to restrain the deformation of the container 4. Therefore,
Stress due to the above deformation is applied to the bonding member 6 (also applied to the solder glass 5), resulting in cracks in the low melting point solder glass 5 and cracks between the bonding member 6 and the low melting point solder glass 5. Peeling may occur, causing leaks, resulting in a defective product.Such symptoms (Table 1) This may occur at the beginning of the vacuum evacuation process of the vacuum container 10 (L). It is also possible that the above-mentioned cracks and other dust may not occur during the manufacturing process, but may occur after the product is shipped to the market. Reliable Method The present invention provides a method for manufacturing a display device that can solve the above problems even if the yield is significantly impaired.Means for Solving the ProblemsThe present invention solves the above problems. An airtight member is inserted between the component and the metal container, the container is evacuated in advance, and atmospheric pressure is applied to the container and the joining member.The joining member and container are airtightly joined using a laser beam. By using the above method, laser welding is performed after the container is deformed due to vacuum evacuation. Therefore, stress due to deformation of the container is not applied to the joint between the joining member and the solder glass, and the reliability of the joint is improved. Embodiment Figure 1 shows an embodiment of the manufacturing method of the present invention.
A metal bonding member 6 is hermetically bonded to the face glass 8 coated with phosphor using a low melting point solder glass 5. Next, the electrode structure 9 is fixed on the face glass 8. 2 and metal container 4 a
In the case of this embodiment, rubber with silicone grease coated slightly thickly on the surface may be used as the airtight member 2. The exhaust pipe 7 can be removed by the exhaust system 1.
The inside of the container 4 is evacuated via the laser beam 3.
The joining member 6 and the container 4 are hermetically joined at the inner circumference of the airtight member 2.
For example, there is no need to evacuate to a high vacuum of 10-'Torr. Even if it is a vacuum, for example ITorr
Even in such a low vacuum, there is virtually no difference in atmospheric pressure applied to the container 4, and there is no difference in the amount of deformation of the container. Therefore, the airtight member 2 does not necessarily require a high degree of sealing performance. ~ Then, after the joining member 6 and the container 4 are joined by laser welding, the inside of the container is evacuated to a predetermined degree of vacuum while baking. After causing the deformation of the container 4. Laser welding of the container and the joining member is a good addition to the joining member. There is no stress generated by the deformation of the container due to vacuum evacuation as in the conventional example, and cracks in the solder glass are avoided. This can be reliably prevented, and the reliability of the joint can be dramatically improved. The reliability of the joining is also improved compared to the conventional method. This is not necessary in the embodiments, and the process can be simplified and shortened.a Effects of the InventionAs is clear from the above explanation, +'w The present invention is capable of achieving low melting point It can reliably prevent cracks in solder glass and peeling of bonded parts, and can greatly improve the reliability of display devices.
第1図は本発明の表示装置の製造方法の一実施例を示す
要部断面図 第2図は従来の製造方法を示す要部断面図
であa
2・・・気密部材、 3・・・レーザビーA4・・・容
器5・・・半田ガラ入 6・・・接合部材、 8・・・
フェースガラ入 lO・・・真空容器FIG. 1 is a cross-sectional view of a main part showing an embodiment of the method for manufacturing a display device according to the present invention. FIG. 2 is a cross-sectional view of a main part showing a conventional manufacturing method. Laserbee A4...Container 5...Solder glass included 6...Joining member 8...
Face glass included lO...vacuum container
Claims (1)
れた金属製の接合部材と、前記接合部材上に設置された
金属製の容器とを備え、前記接合部材と前記容器とを溶
接により接合する表示装置であって、前記接合部材と前
記容器の間に気密部材を配し容器内を真空排気した後に
気密部材より内周部において前記気密部材と前記容器と
を溶接により接合することを特徴とする表示装置の製造
方法。A display device comprising a face glass, a metal joining member joined to the outer periphery of the face glass, and a metal container installed on the joining member, the joining member and the container being joined by welding. An indication characterized in that an airtight member is disposed between the joining member and the container, and after the inside of the container is evacuated, the airtight member and the container are joined by welding at an inner peripheral portion of the airtight member. Method of manufacturing the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004990A JPH03210733A (en) | 1990-01-12 | 1990-01-12 | Manufacture of display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004990A JPH03210733A (en) | 1990-01-12 | 1990-01-12 | Manufacture of display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03210733A true JPH03210733A (en) | 1991-09-13 |
Family
ID=11599047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004990A Pending JPH03210733A (en) | 1990-01-12 | 1990-01-12 | Manufacture of display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03210733A (en) |
-
1990
- 1990-01-12 JP JP2004990A patent/JPH03210733A/en active Pending
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