JPH03211751A - Substrate transfer device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application 1] This invention relates to an apparatus for transferring a substrate such as a glass substrate of a liquid crystal display device stored in a storage groove of a cassette to a storage groove of another cassette.

[Prior Art] When manufacturing a liquid crystal display device, thin film transistors, etc. are formed on the glass substrates while transporting the glass substrates with, for example, 24 glass substrates stored in the storage groove of a cassette. . Furthermore, when heating a glass substrate, a cassette containing the glass substrate is inserted into a heating furnace. In this case, if the glass substrates are heated with the glass substrates stored in all storage grooves of the cassette, the glass substrates cannot be heated uniformly, so the glass substrates are stored in every other storage groove of the cassette. Heating the glass substrate.

Conventionally, in order to store glass substrates in every other storage groove of a cassette, a worker uses vacuum tweezers to remove one glass substrate from a cassette that has glass substrates stored in all the storage grooves.
Pull out every other glass substrate, and place the glass substrate in one of the other cassettes.
It is inserted into the storage groove of the tsuoki.

[Problem to be solved by the invention]

However, in this case, the migration process takes a lot of time,
Foreign matter adheres to the glass substrate, causing scratches on the glass substrate.

This invention was made in order to solve the above-mentioned problems, and it is possible to perform substrate transfer work in a short time, without foreign matter adhering to the substrate, and without causing scratches on the substrate. The purpose is to provide equipment.

[Means for Solving the Problems] In order to achieve this object, the present invention provides a substrate transfer device that transfers a substrate stored in a cassette having a plurality of storage grooves to a value cassette. A partial pusher is provided having a main body provided in the main body, and a partial pusher member attached to the main body and provided at a position corresponding to a part of the storage groove of the cassette.

1 Function 1 In this substrate transfer device, only the substrates stored in the storage grooves partially located at positions corresponding to the pushing members can be transferred.

[Embodiment 1] FIG. 1 is a partially cutaway schematic plan view showing a substrate transfer apparatus according to the present invention, FIG. 2 is a partially cutaway schematic front view, and FIG. 3 is a left side view. In the figure, l is a base, 2 is a part of the pusher, 3 is part of the main body of the pusher 2, and 5 the main body 3 is movable in the left and right direction on the plane of the first drawing. 4 is main body 3
A rod-shaped partial pushing member is attached, 5 is a bushing, and 6 is a main body of the bushing 5. The main body 6 is movable in the horizontal direction in the plane of the drawing. 7 is a push member attached to the main body 6, 8 is a mounting table attached to the base l, 9 is a mounting table attached to the base l, and 10 is a base I.
1 is a locking device attached to the mounting table 9; 12 is a locking screw of the locking device 11; 13 is a cassette; 14 is a cassette 1;
In the storage groove 3, some pushing members 4 are placed in the first and third storage grooves from the top.
They are provided at positions corresponding to the 5th and 5th storage grooves 14. 15 is a protrusion provided at the bottom of the cassette 13, and 16 is a glass substrate.

In this substrate transfer device, as shown in FIG. Place the unhoused cassette 13b on the mounting table 9.
The cassette 13b is placed on the mounting table 9 using the locking device 11.
After adjusting the height of the cassette 13b on the left side of the paper in FIG.
If the glass substrates 16 are moved to the right side of the paper in FIG. Glass substrates 16 are placed in the third and fifth storage grooves 14.
can be in a stored state. Next, the cassette 1 in which the glass substrates 16 are stored in every other storage groove 14 is placed.
3a.

After inserting the cassette 13b into a heating furnace and heating the glass substrate 16, the cassette 13a is placed on the mounting table 8 as shown in FIG.
Place it on the cassette! 3b on the mounting table 9, fix the cassette 13b to the mounting table 9 with the locking device 11, adjust the height of the cassette 13b on the left side of the paper in FIG. If the three glass substrates 16 stored in the storage groove 14 of the cassette 13a are moved to the right side j of the paper in FIG.
4, the glass substrates 16 can be stored in all the storage grooves 14 of the cassette 13b.

In this way, in this substrate transfer device, the glass substrate 16 is moved by the pusher 2, so the transfer work can be carried out in a short period of time, foreign matter does not adhere to the glass substrate 16, and the glass substrate 16 is moved. 16, no scratches occur. Moreover, since the height adjustment screw 10 is provided, the heights of the storage grooves 14 of the two cassettes 13 can be matched, so that the glass substrate 16 can be reliably transferred. Furthermore, since the locking device 11 is provided, it is possible to prevent the cassette I3 from falling over when the glass substrate 16 is transferred.

In the above embodiment, the partial pushing members 4 were provided at positions corresponding to the first, third, and fifth storage grooves 14 from the top, but the partial pressing members 4 were provided in the positions corresponding to the first, third, and fifth storage grooves 14 from the top. It may be provided at a position corresponding to.

Further, in the above embodiment, the rod-shaped partially pushing member 4 is used, but a plate-shaped partially pushing member may also be used. Furthermore, if a means for attaching and detaching the partial push member 4 is provided at a position corresponding to the storage groove 14 of the main body 3, the partial push member 4 can be attached to a position corresponding to any storage groove 14. Furthermore, if a drive device that drives some of the pushers 2 and all of the pushers 5 and a control device that controls these drive devices are provided, some of the pushers 2 and all of the pushers 5 can be moved automatically.

[Effects of the Invention] As explained above, in the substrate transfer apparatus according to the present invention, since the substrate is partially moved by the pusher, the transfer work can be carried out in a short time, and there is no possibility that foreign matter will adhere to the substrate. There is no risk of scratches on the board. As described above, the effects of this invention are remarkable.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway schematic plan view showing a substrate transfer apparatus according to the present invention, FIG. 2 is a partially cutaway schematic front view, FIG. 3 is a left side view, and FIGS. 4 and 5 are Figure 1~
FIG. 4 is an explanatory diagram of the operation of the substrate transfer apparatus shown in FIG. 3; ■ 2... Partial pusher 3... Main body 4... Partial pushing member 3... Cassette 4... Storage groove 2nd Figure 3 Figure 3-m- Main body 4---91〒 Shitarooo 4 --- Jl again, sue] 1 Fig. 4

Claims (1)

[Claims] 1. In a substrate transfer device that transfers a substrate stored in a cassette having a plurality of storage grooves to another cassette, a main body is movably provided, and one of the storage grooves of the cassette is attached to the main body. 1. A substrate transfer apparatus comprising a partial pusher having a partial push member provided at a position corresponding to the partial pusher.