JPH03212942A - Multi-collet - Google Patents

Abstract

PURPOSE:To collect a plurality of electronic device components without fail and to supply them efficiently to correct positions by disposing a plurality of suction members on the same plane at a prescribed position of a substrate and by making them movable in reciprocation between a position of proximity to the substrate and a position of withdrawal therefrom. CONSTITUTION:Suction members 2A to 2E are constructed so that positions of lowering and rising thereof are changeable respectively, and they are disposed so that they can be fitted with positions of horizontal disposition of electronic device components supplied onto a substrate. Any one of the members 2A to 2E is moved to the position of lowering, while the other suction members are held at the positions of rising and withdrawal, and the electronic device component is sucked on the fore end face of one suction member. Next, this suction member is moved to the position of rising by an operation of a piston 22, while the other components are sucked and held in the same way by moving a main-body part 5 horizontally. Then, all the members 2A to 2E are moved collectively by lowering the part 5 or by operating the piston 22, and thereby the electronic device components are placed simultaneously on the substrate. According to this constitution, a plurality of electronic device components can be transferred to and mounted on the substrate or the like efficiently and reliably and productivity can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a multi-collet used to suck and hold electronic device parts such as semiconductor device parts, transfer them, and place them on a substrate, etc. This invention relates to a multi-collet that can suction and hold electronic device components and transport them all at once.

[Prior Art] In manufacturing ICs, LSIs, etc., in the process of bonding electronic device parts such as semiconductor pellets to package substrates, collets are used to suction and hold the semiconductor pellets and transfer them. There is.

FIG. 3 is an explanatory cross-sectional view showing an example of a multi-collet, and the multi-collet 1 is composed of a fixedly disposed suction vibrator 3 and a rotating member 4 that is rotatable around the axis of the vibrator 3. Suction members 28 to 2d are disposed at the distal ends of the rotating member 4 in four directions, respectively. The suction vibrator 3 is provided with one ventilation hole 3A, and is configured to communicate with any one of the ventilation passages 4a to 4d extending from each of the suction members 28 to 2d into the rotating member 4. In Figure 3, ventilation hole 3A
is connected to the suction member 2c via the ventilation path 4c, and the suction vibrator 3 is connected to a suction device (not shown) such as a vacuum pump, and the electronic device component A is connected to the suction member 2c by negative pressure. Suction and hold at the tip.

In addition, when picking up different types of electronic device components, the rotating member 4 is rotated 90" or 180 degrees, and the suction members 28 to 28 have openings suitable for the size of the electronic device components.
2d is selected and used.

[Problems to be Solved by the Invention] However, since the multi-collet 1 simply suctions and holds electronic device components one by one and transfers them to a substrate, etc., it is difficult to mount, for example, multiple types of electronic device components on one substrate. In order to change the suction member, the rotating member 4 must be rotated each time the multi-collet 1 reciprocates, and the entire multi-collet 1 must be reciprocated multiple times.
Therefore, there is a problem that production takes a long time and production efficiency is extremely low.

Furthermore, when placing a plurality of electronic device components on one board, each electronic device component must be supplied to an accurate position, but when using the multi-collet 1, it is necessary to Since the suction members 28 to 2d are rotated and converted sequentially, the movement and positioning control of the multi-collet itself becomes extremely complicated, and a complicated movement device and movement control are required.

Furthermore, since a plurality of electronic device parts may be supplied from separate locations, it is also necessary to efficiently collect and hold these electronic device parts.

Therefore, the present inventor provides a multi-collet that can reliably collect a plurality of electronic device components from a component supply position and efficiently supply them to an accurate position when placing a plurality of electronic device components on a board or the like. After repeated research for this purpose, we were able to complete the present invention.

[i1! Means for Solving the Problems] The present invention has achieved the above object, in which a plurality of suction members are arranged facing the same plane at positions corresponding to predetermined positions on the substrate, and each suction member is attached to the substrate. On the other hand, the gist is that the device is configured to be able to freely move back and forth between a close position and a retreat position.

[Operation and Examples] FIG. 1 is a partially cutaway side view showing a typical example of the present invention. A hollow suction tube 11 is connected to the suction member 2A that suctions and holds the electronic device component A, and the suction tube 11 is connected to the connecting member 20 via a ball spline guide 12. The hollow hole 11a of the suction tube 11 is communicated with a suction passage 14, and the suction passage 14 is connected to a vacuum pump (not shown) via a connector 14a, and the electronic device component is suctioned and held at the opening at the tip of the suction member 2A. The structure is such that a negative pressure is applied.

On the other hand, the connecting member 20 is connected to the piston 2 via a connecting ring 21.
Connected to 2. The piston 22 is fitted in a cylinder chamber 25A formed in the cylinder 25 so as to be able to rise and fall freely, and the cylinder chamber 25A is connected to the compressed air supply path 24 and the connector 2.
It is connected to a compressor, etc. (not shown) via 4a. Further, a sealing member 26 is fitted into the same outer part of the piston 22, and a piston guide 22a is fitted to the lower part of the piston 22.
A pressure spring 23 is disposed on the outside of the piston guide 22a via a spring retainer 23a, and urges the piston 22 upward. That is, when compressed air is introduced into the cylinder chamber 25A, the piston 22 is pressed downward (the state shown in FIG. 1), and the connecting ring 21 and the connecting member 20 are moved downward. This lowering is performed until the connecting member 20 comes into contact with the seat surface 5A of the main body portion 5. Since the suction tube 11 is fitted to the main body 5 through a ball spline guide 12 so as to be able to move up and down, the suction member 2A is held in the lowered position by the downward movement of the piston 22 along the axial direction. do.

When the compressed air in the cylinder chamber 25A is discharged, the piston 22 is raised by the biasing force of the pressure spring 23, and the suction member 2A can be pulled upward via the connecting member 20 and the like and maintained in the raised position. Suction member 20~
Similar to the suction member 2A, the suction member 2E (see FIG. 2) is configured to be convertible between a lowered position and a raised position, and the horizontal positional relationship of each suction member 2A to 2E is determined based on the electronic device components supplied onto the board. It is arranged so as to be compatible with the horizontal installation position.

For example, as shown in FIG. 2, the operation of a multi-collet equipped with five suction members 2A to 2E is performed as follows: move any one of the suction members 2A to 2E to the lowered position,
The other suction members are held in the raised and retracted positions, and an electronic device component is attracted to the tip surface of one suction member. The suction member is moved to the raised position by the operation of the piston 22, and the main body 5 is moved horizontally to another electronic device component supply section. Next, the other suction member is moved to the lowered position in the same manner as described above to suction the electronic device component. Then, all the suction members 2A to 2E sequentially suction and hold the electronic device components, and the entire main body 5 is horizontally moved to the suction members 2A to 2E.
are arranged so as to face directly above a predetermined position of a substrate, etc., and all the suction members 2A to 2E are collectively placed on the substrate by lowering the main body 5 or by operating each piston. Incidentally, an arbitrary number of electronic device components may be separately placed on the board or the like, if necessary. In addition, if there is a suction member that is not used in the above operation, it can be checked by keeping it retracted and held in the raised position. Therefore, the suction members 2A to 2E can be arbitrarily selected and used.

The means for raising and lowering the connecting frame 21, the connecting member 20, etc. is not limited to the above example, and may employ any known lifting means such as a rack/binion means or a screw fitting means.

[Effects of the Invention] Since the present invention is configured as described above, it is now possible to supply a plurality of electronic device components to a substrate or the like by moving the multi-collet in one stroke. Further, since the suction member can be arbitrarily changed to the close position or the retracted position, electronic device components can be smoothly attracted and held from different supply positions.

With these features, it has become possible to efficiently and reliably transport and mount multiple electronic device components onto a board, etc., thereby improving productivity.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway side view showing a typical embodiment of the present invention, FIG. 2 is a bottom view seen from the direction of arrow 11 in FIG. 1, and FIG.
The figure is an explanatory cross-sectional view showing a conventional multi-collet. 1... Multi-collet 2A to 2E, 2a to 2d... Suction member 3... Suction vibe 5... Main body portion 11a... Hollow hole 12... Pole sply 14... Suction passage 21. ... Connection frame 23 ... Pressure spring 25 ... Cylinder 48 to 4d ... Air passage 11 ... Suction pipe 11b ... Spline groove guide 20 ... Connection member 22 ... Piston 24 ...・Compressed air supply path 26...Sealing member

Claims (1)

[Claims] A multi-collet is provided with a plurality of suction members that temporarily hold electronic device components by suction, the plurality of suction members are arranged facing the same plane at positions corresponding to predetermined positions on a substrate, and A multi-collet characterized in that each suction member is configured to be able to freely move back and forth between a close position and a retracted position with respect to the substrate.