JPH03212949A - Burn-in system - Google Patents

Burn-in system

Info

Publication number
JPH03212949A
JPH03212949A JP2009375A JP937590A JPH03212949A JP H03212949 A JPH03212949 A JP H03212949A JP 2009375 A JP2009375 A JP 2009375A JP 937590 A JP937590 A JP 937590A JP H03212949 A JPH03212949 A JP H03212949A
Authority
JP
Japan
Prior art keywords
burn
time
additional
additional burn
fraction defective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009375A
Other languages
Japanese (ja)
Inventor
Naoki Sawamura
直樹 澤村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2009375A priority Critical patent/JPH03212949A/en
Publication of JPH03212949A publication Critical patent/JPH03212949A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To automatically execute an additional burn-in operation and to prevent dead time and failure of an operator from taking place by a method wherein an additional burn-in time selection part and a timer part are installed and the additional burn-in time is set according to the fraction defective of ICs under test. CONSTITUTION:A signal which is output from each IC 1 under test is judged at a judgment part 2. A judged result is stored in a storage part 3. Then, the fraction defective of the IC is computed at an additional burn-in time selection part 5. A signal which instructs the additional burn-in time is sent to a timer part 6. The burn-in time is changed automatically according to the fraction defective of the IC 1. A function which automatically sets an impressed voltage to the IC 1 and the input timing instead of the time may be installed. By the constitution that the additional burn-in time is set automatically by the fraction defective of the IC 1, a sure burn-in operation to obtain the IC of a prescribed quality level can be executed easily and quickly.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、半導体デバイスの初期不良の発生を加速す
るためのバーンイン装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a burn-in apparatus for accelerating the occurrence of initial defects in semiconductor devices.

〔従来の技術] 第2図は従来のバーンイン装置の構成を示すブロック図
である。図において、(1)は被測定IC1(2)は被
測定IC(1)から送られてくる出力信号を判定する判
定部、(3)は判定結果を記憶する記憶部、(4)は判
定結果を表示する表示部である。
[Prior Art] FIG. 2 is a block diagram showing the configuration of a conventional burn-in device. In the figure, (1) is an IC under test (2) is a judgment unit that judges the output signal sent from the IC under test (1), (3) is a storage unit that stores the judgment results, and (4) is a judgment unit. This is a display section that displays the results.

次に@作について説明する。各被測定IC(1)の出力
信号を判定部(2)Kより判定し、判定結果を記憶部(
3)に記憶する。次いで、バーンイン終了後判定結果を
、表示部(4)に表示する。
Next, I will explain @saku. The output signal of each IC under test (1) is judged by the judgment part (2) K, and the judgment result is stored in the storage part (
3). Next, the determination result after the burn-in is completed is displayed on the display section (4).

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のバーンイン装置は以上のように構成されていたの
で、バーンイン終了後に、判定結果によりオペレーター
が追加バーンイン時間を判断しなければならず、追加バ
ーンイン開始迄に無駄時間が発生する。追加バーンイン
時間設定のミスを起しやすいなどの問題があった。
Since the conventional burn-in apparatus is configured as described above, after the burn-in is completed, the operator must determine the additional burn-in time based on the determination result, which results in wasted time until the additional burn-in is started. There were problems such as making it easy to make mistakes in setting the additional burn-in time.

この発明は1紀のような問題点を解消するためKなされ
たもので、自動的に追加バーンインできるととも忙無駄
時間、オペレータのミスをなくすことができる。
This invention was made to solve the problems of the first generation, and can automatically perform additional burn-in and eliminate wasted time and operator mistakes.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係るバーンイン装置は、被測定ICの不良率
を自動的に算出するとともに、自動的に追加バーンイン
時間を選択し、タイマーを設定するようにしたものであ
る。
The burn-in device according to the present invention automatically calculates the defective rate of the IC to be measured, automatically selects an additional burn-in time, and sets a timer.

〔作用〕[Effect]

この発明における、追加ノ(−ンイン時間選択部は、被
測定ICの不良率の大きさにより、予め設定された不良
率と追加バーンイン時間との対応表より、適切な追加バ
ーンイン時間を選択する。
In the present invention, the additional burn-in time selection section selects an appropriate additional burn-in time from a preset correspondence table between failure rate and additional burn-in time, depending on the magnitude of the failure rate of the IC to be measured.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明するう第1
図はバーンイン装置の構成を示すブロック図である。図
におバて、(1)〜(4)は第2図の従来例に示したも
のと同等であるので説明を省略する。
Hereinafter, one embodiment of the present invention will be explained with reference to the drawings.
The figure is a block diagram showing the configuration of a burn-in device. In the figure, (1) to (4) are the same as those shown in the conventional example of FIG. 2, so their explanation will be omitted.

(5)は不良率を算出し追加バーンイン時間を選択する
追加バーンイン時間選択部、(6)はバーンイン時間を
設定するタイマ一部である。
(5) is an additional burn-in time selection unit that calculates the defective rate and selects an additional burn-in time, and (6) is a timer part that sets the burn-in time.

次に動作について説明する。各被測定IC(1)から出
力される信号を判定部Q)により判定し、判定結果を記
憶部(3)に記憶する。次いで、追加バーンイン時間選
択部(5)において被測定IC(1)の不良率を算出し
、追加バーンイン時間を指示する信号をタイマ一部(6
)に送ることによりバーンイン時間を被測定IC(1)
の不良率に応じて自動的に変更する。
Next, the operation will be explained. The signal output from each IC to be measured (1) is judged by a judging section Q), and the judgment result is stored in a storage section (3). Next, the additional burn-in time selection unit (5) calculates the defective rate of the IC under test (1), and sends a signal instructing the additional burn-in time to the timer part (6).
) to measure the burn-in time of the IC under test (1).
Automatically change according to the defective rate.

なお、上記実施例では、追加バーンイン時間を自動的に
設定する機能を設けたものを示したが、時間の代りに、
被測定IC(1)への印加電圧や入力タイミングを自動
的に設定する機能を設けてもよい。
In addition, in the above embodiment, the function to automatically set the additional burn-in time was shown, but instead of the time,
A function may be provided to automatically set the voltage applied to the IC under test (1) and the input timing.

〔発明の効果j 以上のように、この発明によれば、追加バーンイン時間
を被測定ICの不良率により自動的に設定する構成にし
たので、所定の品質レベルのrcを得るための確実なバ
ーンインを容易に速〈実施できる。
[Effects of the Invention j As described above, according to the present invention, since the additional burn-in time is automatically set based on the defective rate of the IC to be measured, it is possible to ensure the burn-in time to obtain rc of a predetermined quality level. can be carried out easily and quickly.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例によるバーンイン装置を示
すブロック図、第2図は従来のバーンイン装置を示すブ
ロック図である。 図において、(1)は被測定I C、(2)は判定部、
(3)は記憶部、(4)は表示部、(5)は追加バーン
イン時間選択部、(6)はタイマ一部である。 なお、図中、同一符号は同一、又は相当部分を示す。
FIG. 1 is a block diagram showing a burn-in device according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional burn-in device. In the figure, (1) is the IC to be measured, (2) is the determination section,
(3) is a storage section, (4) is a display section, (5) is an additional burn-in time selection section, and (6) is a part of a timer. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] デバイスの出力を判定する機能を備えたバーンイン装置
において、判定結果によりバーンイン条件を自動的に変
更する機能を備えたことを特徴とするバーンイン装置。
A burn-in device having a function of determining the output of a device, characterized in that the burn-in device has a function of automatically changing burn-in conditions based on the determination result.
JP2009375A 1990-01-17 1990-01-17 Burn-in system Pending JPH03212949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009375A JPH03212949A (en) 1990-01-17 1990-01-17 Burn-in system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009375A JPH03212949A (en) 1990-01-17 1990-01-17 Burn-in system

Publications (1)

Publication Number Publication Date
JPH03212949A true JPH03212949A (en) 1991-09-18

Family

ID=11718713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009375A Pending JPH03212949A (en) 1990-01-17 1990-01-17 Burn-in system

Country Status (1)

Country Link
JP (1) JPH03212949A (en)

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