JPH03213263A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To prevent a head from being attracted to a magnetic disk surface by roughing a floating rail surface in a floating rail by means of an electrical erosion-arc machining process in use of a working fluid containing fine abrasive grains. CONSTITUTION:Utilizing an electrical erosion-arc machining process which has used a working fluid containing fine abrasive grains capable of selectly grinding a part of the surface of a workpiece, a rotating polyurethane ball 17 is pressed to a floating rail surface 4 of a floating slider with a load of almost 30-50g in the working fluid 13 in which the specified fine abrasive grains are uniformly dispersed, whereby it is approximated to an interval of about 1mum or so. With a fluid bearing-like flow produced at this time, the fine abrasive grains in the working fluid 13 collide with a minute area at high speed in the horizontal direction and slide thereon. With this action, an optional minute area on the floating rail surface 4 is cut off so that roughening work is made possible. Accordingly, only the floating rail surface 4 that avoided a magnetic pole part of a magnetic head element being exposed on an extension surface of the floating rail surface 4 and the neighborhood can be roughened in a selective manner.

Description

[Detailed Description of the Invention] [Summary] Regarding a method of manufacturing a magnetic head, particularly a method of manufacturing a magnetic head that prevents adsorption to a magnetic disk surface, the magnetic head element exposed on an extended surface of a floating rail surface of a floating slider. The purpose of this technology is to selectively and moderately roughen only the surface of the floating rail without damaging the magnetic pole part of the magnetic head, in which the magnetic head element is supported on a floating slider equipped with a floating rail. In the manufacturing method, the floating rail surface of the floating rail is roughened by an EEM processing method using a processing liquid containing fine abrasive grains.

[Industrial application field]

The present invention relates to a method of manufacturing a magnetic head, and more particularly to a method of manufacturing a magnetic head that prevents adsorption to a magnetic disk surface.

In recent years, in magnetic disk drives, the flying height of the magnetic head relative to the magnetic disk surface has become smaller and smaller as the capacity has increased and recording density has increased. The media facing surface of the supported floating slider also tends to be highly smoothed.

Furthermore, as the magnetic head floats, the frequency of contact with the rotating magnetic disk surface increases, making head crashes more likely to occur. Therefore, a lubricant film is applied to the magnetic disk surface to prevent the above-mentioned problems. There is.

However, as the recording surface of the magnetic disk and the medium facing surface of the magnetic head are highly smoothed, the magnetic head tends to stick to the lubricating film surface of the magnetic disk, causing a head crash. There is a problem that the recording surface of the magnetic disk is destroyed, and there is a need for a method for easily manufacturing a magnetic head that prevents adsorption to the magnetic disk surface.

[Conventional technology]

In a conventional magnetic head, for example, as shown in FIG. 7, the airflow inflow end of the medium facing surface (facing upward to make the configuration easier to understand) is tilted toward the outflow end. A l equipped with a pair of levitation rails 2 having a surface 3 and a levitation force generating surface (hereinafter referred to as levitation rail surface) 4;
O,・TiC% ceramic, or Ni-Zn or Mn-
The structure includes a floating slider l made of ferrite such as Zn, and a thin film magnetic head element 5 supported on the end face of the airflow outflow portion of the floating slider 1 while being covered with an insulating protective film 6 made of Al 203 or the like. It has become.

The magnetic head is supported by an access arm of a head positioning mechanism (not shown) via a support spring and a gimbal spring, and is made to float above the rotating magnetic disk at minute intervals, and accessed at high speed in the radial direction of the magnetic disk. information is written to or read from any track.

[Problem to be solved by the invention]

By the way, in the process of forming the floating slider l supporting the single-film magnetic head element 5, the flying rail surface 4 of the floating slider 1 is processed to have a high flatness and the flying In order to maintain high dimensional accuracy of the magnetic pole portion 5a of the magnetic head element 5 exposed on the extended surface of the rail surface 4, conventionally, the floating rail surface 4 is polished to a flat surface with a surface roughness Ra of Znm or less by lapping or the like. Finished with precision.

However, if the floating rail surface 4 of the floating slider 1 is smoothed and flattened with too high precision, it tends to stick to the magnetic disk surface provided with a lubricating film, causing a problem that causes a head crash. Such an adsorption phenomenon can be prevented by making the flat floating rail surface 4 of the floating slider l appropriately rough by lapping with diamond abrasive grains having a grain size of 3 to 5 μm, for example. However, during the process of forming the floating slider 1, since the thin film magnetic head element 5 is already supported on the floating slider 1, when the floating rail surface 4 is roughened by lapping, the floating rail There is a problem in that the magnetic pole portion 5a of the magnetic head element 5 exposed on the extended surface of the surface 4 is also roughened, and therefore only the floating rail surface 4 may be selectively roughened without damaging the magnetic pole portion 5a. It was extremely difficult to prevent the adsorption phenomenon.

In view of the above-mentioned conventional problems, the present invention selectively roughens only the floating rail surface to an appropriate degree without damaging the magnetic pole portion of the magnetic head element exposed on the extended surface of the floating rail surface in a floating slider. It is an object of the present invention to provide a method for manufacturing a magnetic head that can prevent the attraction phenomenon.

[Means to solve the problem]

To achieve the above object, the present invention provides a method for manufacturing a magnetic head in which a magnetic head element is supported on a floating slider equipped with a floating rail, in which a magnetic head is manufactured in which a magnetic head element is supported on a floating slider equipped with a floating rail. In the method, the floating rail surface of the floating rail is roughened by an EEM processing method using a processing fluid containing fine abrasive grains.

[For production]

The present invention utilizes an Ela grinder using a machining fluid containing fine abrasive grains that enables selective grinding of a part of the surface of a workpiece.
Stic Emission Machining method (
As shown in Fig. 3, a machining liquid 13 in which predetermined fine abrasive grains are uniformly dispersed using the EEM machining method (hereinafter referred to as EEM machining method)
Inside, a rotating polyurethane ball 17 is pressed against the floating rail surface 4 of the floating slider with a load of 30 to 50 g, and
By making the abrasive particles close to each other at a distance of about 100 mm, the fine abrasive grains in the machining liquid 13 collide and slide horizontally at a high speed in a minute area (for example, 1 to 2111111φ) due to the fluid bearing flow generated at that time. Due to this action, any minute area on the floating rail surface 4 is shaved, making it possible to roughen the surface.

Therefore, only the levitation rail surface 4 can be selectively roughened, avoiding the magnetic pole portion of the magnetic heso-do element exposed on the extended surface of the levitation rail surface 4 and the vicinity thereof.

In particular, when the material of the floating slider is ferrite such as Ni-Zn or Mn-Zn, or polycrystalline material such as Al203/TiC, the machining area unit is minute, so the minute portion may be affected by the orientation of each crystal. Due to the difference in cutting speed, grain boundaries tend to appear on the machined surface, and by appropriately selecting the grain size of the fine abrasive grains in the working fluid 13, a suitable amount can be created to prevent head adsorption. Surface roughening becomes easy.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view for explaining the step of roughening the floating rail surface in the method of manufacturing a magnetic head according to the present invention;
FIG. 2 is a schematic configuration diagram of an EEM processing machine applied to roughen the surface of a floating rail.

In this embodiment, a slider block substrate made of Ni--Zn ferrite, on which a thin-film magnetic head element 5 is supported while being covered with an insulating protective film 6 made of A12i's, etc., is formed in a slider forming process as shown in FIG. A floating slider 1 having a pair of floating rails 2 having an inclined surface 3 and a floating force generating surface (hereinafter referred to as floating rail surface) 4 on the airflow inflow end side as shown in FIG. For example, in a processing container 12 on a moving table Il movable in the X-axis direction, the floating rail surface 4 is placed facing upward, and an appropriate amount of fine abrasive grains made of SiO□ with a grain size of 0.05 μm, for example, is placed. A machining fluid 13 made of colloidal silica uniformly dispersed in a dispersion medium such as water is filled, and the floating rail surface 4 of the floating slider 1 in the machining fluid 13 is filled with
Above, a polyurethane ball 17 of, for example, 50 mmφ is attached to a rotating shaft 16 of a rotary motor 15 supported via a support spring 14a on a support body 14 that can be moved in the Y-axis direction, at a rotation speed of 1100 Orp. By rotating and pressing under a load of 50 g, a water film with a thickness of about 1 μm is formed between the floating rail surface 4 and the floating rail surface 4.

Then, the polyurethane balls 17 are placed at a length of 5 m in the length direction of the floating rail surface 4, avoiding the magnetic pole part 5a of the magnetic head element 5 exposed on the extended surface of the floating rail surface 4 and the vicinity thereof.
Machining is performed by moving at a moving speed of m/min.

At this time, as shown in Fig. 4, the rotating polyurethane ball 1
7 and the floating rail surface 4, the fine abrasive grains in the working fluid 13 collide with the floating rail surface 4 at high speed horizontally and are scraped by the action of sliding. As shown by diagonal lines in FIG.
．． It becomes possible to process the rough surface 21 with a surface roughness Ra of about 0.05 μm.

FIG. 5 is a diagram showing the relationship between the surface roughness (Rmax) of the floating rail surface and the cutting amount (μm) by the EEM processing method. As is clear from this figure, the surface roughness is the cutting amount. Even if the amount increases, it does not change much, and a --like rough surface can be easily formed.

In addition, FIG. 6 shows the floating rail surface 4 in the longitudinal direction.
It is the figure which measured the surface roughness when shaved by 0.06 to 0.08 μm. From this figure, a region processed to a surface roughness (Rmax) of 0.03 to 0.04 μm is formed through the magnetic pole portion 5a and the unprocessed region in its vicinity, and an unprocessed boundary region of about 0.2 mm. It is clear that most of the floating rail surface 4 except for the vicinity of the magnetic pole portion 5a can be easily roughened by the EEM processing method.

〔Effect of the invention〕

As is clear from the above description, according to the method of manufacturing a magnetic head according to the present invention, the magnetic pole portion of the magnetic head element exposed on the extended surface of the floating rail surface of the floating slider is not damaged by the EEM processing method. This has the advantage that only the floating rail surface can be easily formed into a moderately rough surface, and has practical effects such as being able to prevent the head from adhering to the magnetic disk surface.

[Brief explanation of drawings]

FIG. 1 is a perspective view for explaining the step of roughening the floating rail surface in the method of manufacturing a magnetic head according to the present invention, and FIG. 2 is an EE applied to roughening the floating rail surface of the present invention.
A schematic configuration diagram of the M processing machine, Figure 3 is a diagram for explaining the principle of surface roughening by EEM processing method, Figure 4 is a diagram for explaining the roughening of the floating rail surface of the present invention, Figure 5 is a diagram showing the relationship between the surface roughness of the floating rail surface and the amount of cutting by the EEM processing method, Figure 6 is a diagram showing the surface roughness measured in the length direction of the floating rail surface by the EEM processing method, and Figure 7 The figure is a perspective view for explaining a conventional magnetic head. 1 to 4, 1 is a floating slider, 2 is a floating rail, 3 is an inclined surface, 4 is a floating rail surface, 5 is a thin film magnetic head element, 6 is an insulating protective film, 11 is a moving table, 12 13 is a processing container, 13 is a processing liquid, 14 is a support, I5 is a rotating motor, 16 is a rotating shaft, 17 is a polyurethane ball, and 21 is a rough surface. 3 years old 3 days ago ≦bow η＾j meeting - le cup ＾ta face and! = tEEr1mIA warm ψl glue) r age fkCσ Fig. 2 E EMIIOIN1t=z5 tj16ILq! tW
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Claims (1)

[Claims] A method for manufacturing a magnetic head in which a magnetic head element (5) is supported on a floating slider (1) equipped with a floating rail (2), comprising: a floating rail surface (4) of the floating rail (2); ,
A method for manufacturing a magnetic head, characterized in that the surface (21) is roughened by an EEM processing method using a processing liquid (13) containing fine abrasive grains.