JPH03214423A - Method for inspecting application nonuniformity defect of magnetic recording medium - Google Patents

Method for inspecting application nonuniformity defect of magnetic recording medium

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Publication number
JPH03214423A
JPH03214423A JP819390A JP819390A JPH03214423A JP H03214423 A JPH03214423 A JP H03214423A JP 819390 A JP819390 A JP 819390A JP 819390 A JP819390 A JP 819390A JP H03214423 A JPH03214423 A JP H03214423A
Authority
JP
Japan
Prior art keywords
magnetic recording
recording medium
medium
wavelength
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP819390A
Other languages
Japanese (ja)
Inventor
Masaru Itaya
大 板谷
Hiroyuki Wakasugi
若杉 弘幸
Hiroshi Shudo
首藤 広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP819390A priority Critical patent/JPH03214423A/en
Publication of JPH03214423A publication Critical patent/JPH03214423A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To quickly perform the inspection of an application nonuniformity defect with high reliability by scanning and irradiating a magnetic recording medium with a laser beam with wavelength of 600-700nm by using a scanner, and detecting transmission light. CONSTITUTION:The magnetic recording medium 1 is a subject to be inspected, and the medium 1 is scanned and irradiated with an optical beam obtained from an HeNe laser 2 from both sides on one side in a direction nearly perpendicular to the travel direction of the medium 1 by using the scanner 3. Also, an optical fiber convergence system 4 is provided at the other plane side of the medium 1, and light transmitting the medium 1 is converged, and is detected with an optical sensor 5. At this time, it is possible to automatically and quickly detect the application nonuniformity defect of the medium 1 without the problem of heat evolution, in a wide area with superior sensitivity and high reliability by setting the wavelength of the laser 2 between 600-700nm, which attains labor saving, high reliability and acceleration in the inspection.

Description

【発明の詳細な説明】 〔産業上の利用分野] 本発明は、高分子フィルム上に7−Fez01を主成分
とする磁性粉を結合剤とともに塗布してなる塗布型の磁
気記録媒体の製造工程における磁気記録媒体の塗布むら
欠陥を検査する方法に関する.(発明の概要) 本発明は、高分子フィルム上に7−Fez03を主成分
とする磁性粉を結合剤とともに塗布してなる塗布型の磁
気記録媒体の製造工程における磁気記録媒体の塗布むら
欠陥を、磁気記録媒体に波長が60on−ないし700
n―のレーザ光をスキャナを用いて走査して照射し、そ
の透過光を検出することによって、磁気記録媒体の広範
囲の領域を感度よく迅速に、信顛性よく検査できる方法
を提供しようとするものである。
Detailed Description of the Invention [Industrial Application Field] The present invention relates to a manufacturing process of a coated magnetic recording medium in which magnetic powder containing 7-Fez01 as a main component is coated on a polymer film together with a binder. This paper relates to a method for inspecting coating unevenness defects on magnetic recording media. (Summary of the Invention) The present invention solves the coating unevenness defect of a magnetic recording medium in the manufacturing process of a coated magnetic recording medium in which magnetic powder containing 7-Fez03 as a main component is coated on a polymer film together with a binder. , the magnetic recording medium has a wavelength of 60 on- to 700 on-
The present invention aims to provide a method that can inspect a wide range of magnetic recording media sensitively, quickly, and reliably by scanning and irradiating n- laser light using a scanner and detecting the transmitted light. It is something.

〔従来の技術〕[Conventional technology]

磁気記録媒体として、高分子フィルム上にr −Pez
03を主成分とする磁性粉を塗布・乾燥し、磁性層を形
成して作製される塗布型の磁気記録媒体は広く使用され
ている。この場合、塗布むらにより特に磁性層の薄いと
ころがあると、その部分は磁気記録媒体としての特性を
満足に示さなくなり重大な欠陥となる。
r-Pez on a polymer film as a magnetic recording medium
Coating-type magnetic recording media, which are manufactured by coating and drying magnetic powder containing 0.03 as a main component to form a magnetic layer, are widely used. In this case, if the magnetic layer is particularly thin in some areas due to coating unevenness, those areas will no longer exhibit satisfactory characteristics as a magnetic recording medium, resulting in a serious defect.

従って、塗布型の磁気記録媒体の製造工程においては、
そのような塗布むら欠陥を早く検知して、製品に含まれ
ないようにしなければならない。この検査のための従来
の方法の一例として第4図に目視による検査法を模式的
に示す。ここで、■は被検査体である磁気記録媒体、4
2は照明のための蛍光体、43は検査者の肉眼である。
Therefore, in the manufacturing process of coated magnetic recording media,
It is necessary to quickly detect such uneven coating defects and prevent them from being included in products. As an example of a conventional method for this inspection, FIG. 4 schematically shows a visual inspection method. Here, ■ is the magnetic recording medium that is the object to be inspected, and 4
2 is a phosphor for illumination, and 43 is the naked eye of the examiner.

走行する(図中の矢印方向に)磁気記録媒体lを透過す
る透過光の目視による検査は、欠陥の検出感度はよいが
、検査者の疲労を伴い、見落としも生し易くまた検査の
高速化には対応し難いという問題がある。第5図は自動
化された類偵の欠陥検査の従来例を模式的に示したもの
であって、磁気記録媒体の磁性層に生じたピンホールや
キズ欠陥を検査する方法である。ここで、1は被検査体
である磁気記録媒体、52はハロゲンランプ、53はC
CDリニアイメージセンサである。
Visual inspection using transmitted light that passes through a traveling magnetic recording medium (in the direction of the arrow in the figure) has good defect detection sensitivity, but it is tiring for the inspector, is prone to oversights, and requires faster inspection. has a problem that is difficult to deal with. FIG. 5 schematically shows a conventional example of automated defect inspection, which is a method for inspecting pinholes and scratch defects occurring in the magnetic layer of a magnetic recording medium. Here, 1 is a magnetic recording medium to be inspected, 52 is a halogen lamp, and 53 is a carbon
It is a CD linear image sensor.

この方法では、走行する(図中の矢印方向に)磁気記録
媒体Iの一方の面側からハロゲンランプ52のような強
力な光源で照明を行い、他の面倒に設けたCCDリニア
イメージセンサ53で透過光及びその位置を検出するも
のである。この方法は、白色光源を用いているためにピ
ンホールのように磁性層がほぼ完全に脱落した欠陥の検
出には感度が高く有効であるが、磁性層がわずか薄くな
った塗布むらを検出する怒度は極めて低い。この方法に
おいて、後述の作用の項で述べる理由で、光源側ないし
センサ側に、波長600nmないし700nmの光フィ
ルタを付加することによって、塗布むらに対する検出感
度を多少改善できるが、この方法では、光の利用率が低
く強力な光源を必要とするので、光源からの発熱の磁気
記録媒体への影響も大きな問題である. 〔発明が解決しようとする課題〕 本発明は、前述の現状に鑑み提案されるものであり、7
−Fe2O3を磁性層の主成分とする塗布型の磁気記録
媒体の磁性層の、特に所定厚よりも薄くなった塗布むら
欠陥を、発熱の問題もなく、感度よく、迅速に、信鎖性
よく検査できる磁気記録媒体の塗布むら欠陥の検査方法
を提供することを課題とする。
In this method, one side of the traveling magnetic recording medium I (in the direction of the arrow in the figure) is illuminated with a strong light source such as a halogen lamp 52, and a CCD linear image sensor 53 installed on the other side is used to illuminate the magnetic recording medium I. It detects transmitted light and its position. Because this method uses a white light source, it is highly sensitive and effective in detecting defects such as pinholes where the magnetic layer has almost completely fallen off, but it is also effective in detecting coating unevenness where the magnetic layer has become slightly thinner. Anger level is extremely low. In this method, the detection sensitivity for coating unevenness can be improved somewhat by adding an optical filter with a wavelength of 600 nm to 700 nm on the light source side or sensor side, for reasons described in the section on operation below. Since the utilization rate of magnetic recording media is low and a powerful light source is required, the effect of heat generated from the light source on the magnetic recording medium is also a major problem. [Problems to be Solved by the Invention] The present invention is proposed in view of the above-mentioned current situation.
- Resolve coating unevenness defects in magnetic layers of coated magnetic recording media whose main component is Fe2O3, especially when the thickness is thinner than a predetermined thickness, with high sensitivity, speed, and reliability without the problem of heat generation. An object of the present invention is to provide a method for inspecting coating unevenness defects in a magnetic recording medium.

〔課題を解決するための手段] 本発明は、高分子フィルム上にγ−FezO.,を主成
分とする磁性粉を結合剤とともに塗布してなる塗布型の
磁気記録媒体の塗布むら欠陥を検査する方法であって、
塗布むらの中でも特に所定の塗布厚よりも薄くなった塗
布むらを磁気記録媒体の広範囲の領域について、感度よ
く、迅速に、信軌性よく、しかも発熱などの問題もなく
検査するために、磁気記録媒体に波長が600nmない
し700nmのレーザ光をスキャナを用いて走査して照
射し、磁気記録媒体を透過する透過光を検出することに
よって検査する磁気記録媒体の塗布むら欠陥の検査方法
である.ここで、レーザ光の光源として特に限定するも
のではないが、波長633nn+のHe−Neレーザは
良質のレーザビームが得られ、しかも低価格であるので
特に好ましい.また、レーザ光を走査するスキャナとし
ては、ガルバノミラ一式、ポリゴンミラー式、ホログラ
ム式、音響光学式などいずれのものも使用できる, 〔作用〕 高分子フィルム上に7−Fez03を主成分とする磁性
粉を結合剤とともに塗布してなる塗布型の磁気記録媒体
は磁性粉の光透過特性によって、波長が略600nmよ
り短い光を殆ど透過せず、それより波長が長くなるに従
って光を透過し易くなる傾向をもっている.従って、そ
のような磁気記録媒体の塗布むらを検出する光の波長と
しては、少なくとも600ns以上である必要がある。
[Means for Solving the Problems] The present invention provides γ-FezO. , a method for inspecting coating unevenness defects in a coated magnetic recording medium formed by coating a magnetic powder containing a binder together with a binder, the method comprising:
In order to inspect a wide area of a magnetic recording medium for coating unevenness, especially coating unevenness that has become thinner than a predetermined coating thickness, with high sensitivity, speed, and reliability, and without problems such as heat generation, magnetic This is a method for inspecting coating unevenness defects in magnetic recording media by scanning and irradiating the recording medium with a laser beam having a wavelength of 600 nm to 700 nm using a scanner and detecting the transmitted light that passes through the magnetic recording medium. Here, the light source of the laser beam is not particularly limited, but a He-Ne laser with a wavelength of 633 nn+ is particularly preferable because it provides a high-quality laser beam and is inexpensive. In addition, as a scanner for scanning laser light, any of the following can be used: a galvano mirror set, a polygon mirror type, a hologram type, an acousto-optic type, etc. Due to the light transmission properties of the magnetic powder, a coated magnetic recording medium coated with a binder hardly transmits light with a wavelength shorter than approximately 600 nm, and tends to transmit light more easily as the wavelength becomes longer. I have. Therefore, the wavelength of light for detecting such coating unevenness on a magnetic recording medium needs to be at least 600 ns or more.

一方、余り波長が長いと、所定の塗布厚に対する透過光
量が大きくなり過ぎて、薄くなった塗布むらの検出感度
は低くなってしまう。以上の観点から行った実験の結果
として、本発明の目的である塗布むらの検出には、波長
600n−ないし700r++++の光源を用いるのが
よい。また、レーザ光源から得られる光ビームをスキャ
ナを用いて走査することによって、被検査体である磁気
記録媒体の広い領域について塗布むら欠陥を惑度よく迅
速に検査できる。またこの場合、光源による発熱は殆ど
問題にならない。
On the other hand, if the wavelength is too long, the amount of transmitted light for a predetermined coating thickness becomes too large, and the detection sensitivity of thin coating unevenness becomes low. As a result of experiments conducted from the above viewpoint, it is preferable to use a light source with a wavelength of 600n- to 700r++++ for detecting coating unevenness, which is the object of the present invention. Further, by scanning a light beam obtained from a laser light source using a scanner, it is possible to quickly and accurately inspect a wide area of a magnetic recording medium, which is an object to be inspected, for coating unevenness defects. Further, in this case, heat generated by the light source hardly becomes a problem.

〔実施例〕〔Example〕

本発明の実施例を図面を参照して以下に説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明の磁気記録媒体の塗布むら欠陥の検査方
法の実施例を示す概要図である。ここで、lは磁気記録
媒体、2は波長633nmのHe−Neレーザ、3はガ
ルハノミラー式スキャナ、4は光ファイバ集光系、5は
光センサである。被検査体である磁気記録媒体1は、幅
広のポリエステルフィルム上にCo被着したy−Fe.
03からなる磁性粉と結合剤として塩ビー酢ビ共重合体
及びポリウレタン樹脂を含む磁性層を形成した塗布型の
磁気記録媒体である。tle−Neレーザ2から得られ
る波長が633nmの光ビームをスキャナ3を用いて、
磁気記録媒体lに一方の面側から磁気記録体1の走行方
向(図中の矢印方向)と略直角方向に走査して照射する
。一方、磁気記録媒体1の他面側に光ファイバ集光系4
が設けてあり、磁気記録媒体を透過した光はファイバ集
光系4で集光され、その他端に配設した光センサ5で検
出される. 第2図は、この実施例の方法による磁気記録媒体の塗布
むら欠陥の検出結果の一例を示す。第2図で透過光強度
が鋭くピークを示しているところが、薄くなった塗布む
ら欠陥の存在を示している。
FIG. 1 is a schematic diagram showing an embodiment of the method for inspecting coating unevenness defects in a magnetic recording medium according to the present invention. Here, l is a magnetic recording medium, 2 is a He-Ne laser with a wavelength of 633 nm, 3 is a Galhano mirror scanner, 4 is an optical fiber condensing system, and 5 is an optical sensor. The magnetic recording medium 1 to be inspected is a y-Fe.
This is a coating-type magnetic recording medium formed with a magnetic layer containing magnetic powder consisting of 0.03 and a vinyl chloride-vinyl acetate copolymer and a polyurethane resin as a binder. Using a scanner 3, a light beam with a wavelength of 633 nm obtained from the tle-Ne laser 2 is
The magnetic recording medium 1 is irradiated from one side by scanning in a direction substantially perpendicular to the running direction of the magnetic recording medium 1 (arrow direction in the figure). On the other hand, an optical fiber condensing system 4 is provided on the other side of the magnetic recording medium 1.
The light transmitted through the magnetic recording medium is collected by a fiber focusing system 4 and detected by an optical sensor 5 provided at the other end. FIG. 2 shows an example of the detection results of coating unevenness defects on a magnetic recording medium by the method of this embodiment. In FIG. 2, the sharp peak of the transmitted light intensity indicates the presence of a thinned coating unevenness defect.

第3図では比較のために、光源として波長780n一の
半導体レーザを用いた場合の検出結果の一例を曲線Aで
、また波長544n一のHe−Ne レーザを用いた場
合の検出結果の一例を曲線Bで示す。
For comparison, in Figure 3, curve A shows an example of the detection results when a semiconductor laser with a wavelength of 780n is used as the light source, and curve A shows an example of the detection results when a He-Ne laser with a wavelength of 544n is used as the light source. It is shown by curve B.

波長780n一の半導体レーザを用いた場合には、曲線
Aで示されるように、欠陥以外の部分でもかなりの透過
光強度があり、そのために塗布むら欠陥の識別が難し《
なる。一方、波長544nmのHe−Neレーザを用い
た場合には、曲線Bで示されるように塗布むらの有無に
かかわらず殆ど光が透過していない.なお、本実施例で
は透過光の集光のために光ファイバ集光系4を使用した
が、このような集光系を用いずに、直接光走査域を受光
できる光センサを設けても同様の検出が可能である。
When a semiconductor laser with a wavelength of 780n is used, as shown by curve A, there is considerable transmitted light intensity even in areas other than defects, which makes it difficult to identify coating unevenness defects.
Become. On the other hand, when a He-Ne laser with a wavelength of 544 nm is used, as shown by curve B, almost no light is transmitted regardless of the presence or absence of uneven coating. Although the optical fiber condensing system 4 was used to condense the transmitted light in this embodiment, the same effect can be achieved even if an optical sensor that can directly receive light in the optical scanning area is provided without using such a condensing system. It is possible to detect

〔発明の効果〕〔Effect of the invention〕

以上で説明したように、y−Fe.0.を主成分とする
磁性粉を用いた塗布型の磁気記録媒体の製造工程におい
て、磁気記録媒体の塗布むら欠陥を波長600nmない
し700ns+のレーザ光を走査して、その透過光を検
出することによって、磁気記録媒体の塗布むら欠陥を広
い領域について、発熱の問題もなく、感度よく、迅速に
、信鎖性よく、自動的に検出できるので、検査における
省大化、高信頼性化、高速化ができ、その効果は著しく
大きい。
As explained above, y-Fe. 0. In the manufacturing process of a coating-type magnetic recording medium using magnetic powder mainly composed of, by scanning a laser beam with a wavelength of 600 nm to 700 ns+ to detect uneven coating defects on the magnetic recording medium and detecting the transmitted light, Uneven coating defects on magnetic recording media can be detected automatically over a wide area without the problem of heat generation, with high sensitivity, quickly, and with good reliability, resulting in smaller, more reliable, and faster inspections. Yes, the effect is extremely large.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の磁気記録媒体の塗布むら欠陥の検査方
法の実施例を示す概要図、第2図は実施例で得られた塗
布むら欠陥の検出結果の一例、第3図は比較のための検
出結果例で、曲線Aは波長780nsの半導体レーザを
用いた場合、曲線Bは波長544n一のHe−Ne レ
ーザを用いた場合を示す。 第4図は従来の目視による磁気記録媒体の塗布むら欠陥
の検査方法を模式的に示した図、第5図は自動化された
従来のビンホール欠陥の検査の方法の一例を模式的に示
した図である。なお、各図面中の共通なものには同じ番
号を付した。 1−・−−−−−一・−・・磁気記録媒体2 −一一一
−−−−−−−− H e − N e (波長633
nm)レーザ3−−−−−−−−−−・一・−ガルバノ
ミラ一式スキャナ4−・・・・−−−−−−−−一光フ
ァイバ集光系5・・・・一・・・−・・一・・一光セン
サ挟査方渚の実施イ々1]と示す梃き図 検出紹果の−{ηlコ 第3図 比較のr:f)の挟出革吉果イ々1」
FIG. 1 is a schematic diagram showing an example of the inspection method for coating unevenness defects in magnetic recording media of the present invention, FIG. 2 is an example of detection results for coating unevenness defects obtained in the example, and FIG. 3 is a comparative example. In this example, curve A shows the case where a semiconductor laser with a wavelength of 780 ns is used, and curve B shows the case where a He-Ne laser with a wavelength of 544 nm is used. Fig. 4 is a diagram schematically showing a conventional visual inspection method for coating unevenness defects on magnetic recording media, and Fig. 5 is a diagram schematically showing an example of an automated conventional method for inspecting bottle hole defects. It is. Note that the same numbers are given to common parts in each drawing. 1-・-----1・-・Magnetic recording medium 2-111--------He-Ne (wavelength 633
nm) Laser 3---------・1・-Galvanometer mirror set scanner 4---・・・1 Optical fiber condensing system 5・・1・・-...1...Implementation of one light sensor pinching direction 1] The result of the detection of the lever diagram shown as -{ηl Figure 3 Comparison of r:f) ”

Claims (1)

【特許請求の範囲】[Claims] 高分子フィルム上にγ−Fe_2O_3を主成分とする
磁性粉を結合剤とともに塗布してなる磁気記録媒体の塗
布むら欠陥を検査する方法において、前記磁気記録媒体
に波長が600nmないし700nmのレーザ光をスキ
ャナを用いて走査して照射し、前記磁気記録媒体を透過
する透過光を検出することによって検査することを特徴
とする磁気記録媒体の塗布むら欠陥の検査方法。
In a method for inspecting coating unevenness defects in a magnetic recording medium obtained by coating a polymer film with magnetic powder mainly composed of γ-Fe_2O_3 together with a binder, a laser beam with a wavelength of 600 nm to 700 nm is applied to the magnetic recording medium. 1. A method for inspecting coating unevenness defects in a magnetic recording medium, characterized in that inspection is performed by scanning and irradiating using a scanner and detecting transmitted light that passes through the magnetic recording medium.
JP819390A 1990-01-19 1990-01-19 Method for inspecting application nonuniformity defect of magnetic recording medium Pending JPH03214423A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP819390A JPH03214423A (en) 1990-01-19 1990-01-19 Method for inspecting application nonuniformity defect of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP819390A JPH03214423A (en) 1990-01-19 1990-01-19 Method for inspecting application nonuniformity defect of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH03214423A true JPH03214423A (en) 1991-09-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP819390A Pending JPH03214423A (en) 1990-01-19 1990-01-19 Method for inspecting application nonuniformity defect of magnetic recording medium

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JP (1) JPH03214423A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548821B1 (en) 1999-06-21 2003-04-15 Komag, Inc. Method and apparatus for inspecting substrates
US6566674B1 (en) 1999-06-21 2003-05-20 Komag, Inc. Method and apparatus for inspecting substrates

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548821B1 (en) 1999-06-21 2003-04-15 Komag, Inc. Method and apparatus for inspecting substrates
US6566674B1 (en) 1999-06-21 2003-05-20 Komag, Inc. Method and apparatus for inspecting substrates

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