JPH03214506A - Manufacture of piezoelectric ceramic - Google Patents
Manufacture of piezoelectric ceramicInfo
- Publication number
- JPH03214506A JPH03214506A JP2006916A JP691690A JPH03214506A JP H03214506 A JPH03214506 A JP H03214506A JP 2006916 A JP2006916 A JP 2006916A JP 691690 A JP691690 A JP 691690A JP H03214506 A JPH03214506 A JP H03214506A
- Authority
- JP
- Japan
- Prior art keywords
- magnesium
- piezoelectric ceramics
- compound
- niobium
- magnesium niobate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000011777 magnesium Substances 0.000 claims abstract description 34
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 28
- 150000002681 magnesium compounds Chemical class 0.000 claims abstract description 6
- 150000002822 niobium compounds Chemical class 0.000 claims abstract description 6
- 238000001027 hydrothermal synthesis Methods 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 3
- 150000002611 lead compounds Chemical class 0.000 claims description 3
- 150000003609 titanium compounds Chemical class 0.000 claims description 3
- 150000003755 zirconium compounds Chemical class 0.000 claims description 3
- 238000001354 calcination Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 abstract description 21
- 239000002994 raw material Substances 0.000 abstract description 13
- 239000000463 material Substances 0.000 abstract description 5
- 230000009257 reactivity Effects 0.000 abstract description 5
- 229910052758 niobium Inorganic materials 0.000 abstract description 4
- 239000010955 niobium Substances 0.000 abstract description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract description 4
- 229910019653 Mg1/3Nb2/3 Inorganic materials 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 7
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 5
- 239000001095 magnesium carbonate Substances 0.000 description 5
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 5
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 5
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910000018 strontium carbonate Inorganic materials 0.000 description 2
- 229910014031 strontium zirconium oxide Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- SPAGIJMPHSUYSE-UHFFFAOYSA-N Magnesium peroxide Chemical compound [Mg+2].[O-][O-] SPAGIJMPHSUYSE-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229960004995 magnesium peroxide Drugs 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- -1 oxides Chemical class 0.000 description 1
- YHBDIEWMOMLKOO-UHFFFAOYSA-I pentachloroniobium Chemical compound Cl[Nb](Cl)(Cl)(Cl)Cl YHBDIEWMOMLKOO-UHFFFAOYSA-I 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
〔産業上の利用分野Ｊ
本発明は圧電体セラミックスの製造方法に関し、特にＰ
ｂＴｉＯｚ−ＰｂＺｒＯｓ−Ｐｂ （Ｍｇ＋ｙｘＮｂｚ
ｉ３）Ｏｓ系圧電体セラミックスの製造方法に関するも
のである。
ＰｂＴｉＯａ−ＰｂＺｒＯｘ−Ｐｂ （Ｍｇ＋７３Ｎｂ
ｚｉｓｌ ０３系材料は、高誘電率の圧電体材料として
使用されている（例えば特公昭４４−１７１０３号明細
書など）．〔従来の技術Ｊ
この種の圧電体セラミックスは、その材料として各元素
を含む個別の化合物（例えば、酸化物、炭酸塩など）を
混合し、この混合物を仮焼後、成形し、更に焼成した後
、分極処理を行なうことにより、製造されている。
［発明が解決しようとする課題］
しかしながら、近年、アクチュエーターや圧電スピーカ
ーなどの高品質の圧電セラミックス製品のために、より
高誘電率で変換効率の高い圧電体セラミックス材料が要
望されている。
［課題を解決するための手段］
本発明者らは高誘電率・高変換効率の圧電体セラミック
スの製造について，鋭意研究を進めた結果、ＰｂＴｉＯ
３−ＰｂＺｒＯｉ−Ｐｂ （Ｍｇ＋ｚｘＮｂｚｚｉｌ
Ｏｓ系圧電体セラミックスの製造に際して、その原料化
合物、特にニオブとマグネシウムの原料を特定すること
により、高品質の圧電体セラミックスが得られるとの知
見を得て、本発明を完成させるに至った．すなわち、本
発明は、ニオブ化合物、鉛化合物、チタニュウム化合物
，ジルコニウム化合物及びマグネシウム化合物を混合、
仮焼、焼成、分極するＰｂＴｚ０３−ＰｂＺｒＯｉ−Ｐ
ｂ ｆＭｇ＋ｚｓＮｂｚｚｚｌ０３系圧電体セラミック
スの製造方法において、ニオブ化合物及びマグネシウム
化合物として平均粒径が２１ＩＩｉ以下のニオブ酸マグ
ネシウム（Ｍｇ＋ｚｘＮｂｚｚａＯｚｌを用いることを
特徴とする圧電体セラミックスの製造方法である。
（ニオブ酸マグネシウム）
本発明で用いられるニオブ酸マグネシウムは、圧電体セ
ラミックスの原料配合の際に予め合成しておく。
ニオブ酸マグネシウムは、例えば、ニオブの化合物であ
る五酸化ニオブとマグネシウムの化合物である炭酸マグ
ネシウムを等モルで混合し、８００〜１０００℃で反応
させることにより合成される．その際、必ずしも、ニオ
ブ酸マグネシウムは単一相でなく、主成分を構成する組
成であればよい。
本発明においては、この様にして得られたニオブ酸マグ
ネシウムを、ボールミルやビーズミルなどで粉砕し、微
細で反応性の高い粉末として使用することが必要である
．粉砕して得られた粉末の平均粒径は２ｕ■以下、望ま
しくは、 ■ｌＩＩ１以下のサブミクロン粒子である。
２μ層以上の平均粒径の粉末では反応性が乏しく、特性
の向上があまり認められない。
反応性が高く、微細であるニオブ酸マグネシウムとして
は，水や溶媒に可溶性の二才プとマグネシウムの塩を加
水分解して得られた湿式合成の粉末、該塩を熱分解して
得られた粉末などがある．この種の方法で得られた粉末
の平均粒径はｌＩＩｆｆｉ以下であり、極めて反応性に
富んでいる。とりわけ、水熱反応で合成されたニオブ酸
マグネシウムは、低い温度で合成されるため特に反応性
が高く、平均粒径が１．０ｇｏ＋以下の微細な粉末が得
られ、本発明の原料としては特に好ましいものである。
水熱反応の合成による二才プ酸マグネシウムは、例えば
、ニオブの化合物である五酸化ニオブとマグネシウムの
化合物である酸化マグネシウムとを等モルで混合し、こ
の混合粉末と水とを白金容器に入れ、１００〜５００ｋ
ｇ／ｃ■２の圧力で、３００〜６００℃に保持すること
により得られる。
（その他の原材料）
その他、本発明に使用する鉛化合物、チタニウム化合物
及びジルコニウム化合物としては、それぞれの元素の酸
化物、炭酸塩、硝酸塩、塩化物、硫化物など、焼成して
、最終的にＰｂＴｉＯａＰｂＺｒＯｓ−ＰｂｆＭｇ＋ｚ
３Ｎｂｉｚｉ）Ｏａ系化合物を形成するものであれば良
く、特にその形態を限定しない．圧電体セラミックスの
組成としては、高性能な圧電材料である以下の組成物、
（ＰｂＴｔ０３１−｛ＰｂＺｒＯｉ）ｙ−（Ｐｂ（Ｍｇ
＋ｚｓＮｂａｚｓ）Ｏａ）ｚ（ここで、ｘ．ｙ及びＺは
モル％を示し、ｘ ＝８２〜］ ． ｙ ＝９５〜ｌ
． ｚ ＝８８〜ｌ、ｘ＋ｙ＋ｚ ＝１００である．
）
である．
なお、本発明の組成物としては，上記の組成のうち、ｐ
ｂがＳｒで１〜２０原子％置換された組成物であっても
よく、また、上記組成を基本とし、特性向上のために微
量の添加物を添加した組成物であってもよい．
（圧電体セラミックス）
上記の各原料を、最終的に必要とする組成に配合した後
の工程については，慣用の方法を用いることができる．
例えば、配合した原料粉末をポールミルなどを用いて混
合粉砕した後、得られた粉末を８００〜１０００℃で１
〜５時間大気雰囲気中で仮焼する。その後、仮焼粉末を
必要な形状に成形し、大気雰囲気下１１００〜１３５０
℃で１〜５時間焼成し、焼成物を分極することにより、
本発明の圧電体セラミックスが得られる．分極の条件と
しては特に限定しないが、６０〜ｌロ０℃で１． ５
〜５ｋＶ／ｍａ＋の電圧を１〜３０分印加するのがその
目安となる．[Industrial Field of Application J] The present invention relates to a method for manufacturing piezoelectric ceramics, and particularly to a method for manufacturing piezoelectric ceramics.
bTiOz-PbZrOs-Pb (Mg+yxNbz
i3) This invention relates to a method for manufacturing Os-based piezoelectric ceramics. PbTiOa-PbZrOx-Pb (Mg+73Nb
ZISL 03-based materials are used as piezoelectric materials with high dielectric constants (for example, Japanese Patent Publication No. 17103/1983). [Prior art J] This type of piezoelectric ceramic is made by mixing individual compounds (e.g. oxides, carbonates, etc.) containing each element as its material, calcining this mixture, shaping it, and then firing it. After that, it is manufactured by performing a polarization treatment. [Problems to be Solved by the Invention] However, in recent years, there has been a demand for piezoelectric ceramic materials with higher dielectric constants and higher conversion efficiency for high-quality piezoelectric ceramic products such as actuators and piezoelectric speakers. [Means for Solving the Problems] As a result of intensive research into the production of piezoelectric ceramics with high dielectric constant and high conversion efficiency, the present inventors found that PbTiO
3-PbZrOi-Pb (Mg+zxNbzzil
When producing Os-based piezoelectric ceramics, we discovered that high-quality piezoelectric ceramics can be obtained by specifying the raw material compounds, especially niobium and magnesium raw materials, which led us to complete the present invention. That is, the present invention mixes a niobium compound, a lead compound, a titanium compound, a zirconium compound, and a magnesium compound,
Calcined, fired and polarized PbTz03-PbZrOi-P
b fMg+zsNbzzl03-based piezoelectric ceramic manufacturing method, characterized in that magnesium niobate (Mg+zxNbzzaOzl) having an average particle size of 21IIi or less is used as the niobium compound and the magnesium compound. (Magnesium Niobate) Magnesium niobate used in the present invention is synthesized in advance when blending raw materials for piezoelectric ceramics. Magnesium niobate can be obtained by mixing, for example, niobium pentoxide, which is a compound of niobium, and magnesium carbonate, which is a compound of magnesium. It is synthesized by mixing in moles and reacting at 800 to 1000°C.At this time, magnesium niobate is not necessarily in a single phase, but may have a composition that constitutes the main component. It is necessary to grind the magnesium niobate obtained in the same way using a ball mill or bead mill to obtain a fine, highly reactive powder.The average particle size of the powder obtained by grinding is 2 μ or less. , desirably, submicron particles of 1 II or less. Powders with an average particle diameter of 2 μ layers or more have poor reactivity and little improvement in properties is observed. Magnesium niobate, which has high reactivity and is fine, There are wet-synthesized powders obtained by hydrolyzing salts of Nisaipu and magnesium that are soluble in water or solvents, and powders obtained by thermally decomposing the salts. The average particle size of the powder is less than 1IIffi, and it is extremely reactive.In particular, magnesium niobate synthesized by hydrothermal reaction has particularly high reactivity because it is synthesized at a low temperature, and the average particle size is A fine powder of 1.0 go+ or less is obtained, which is particularly preferable as a raw material for the present invention.Magnesium niobium chloride synthesized by hydrothermal reaction can be produced by combining, for example, niobium pentoxide, which is a compound of niobium, and magnesium. Mix equimolar amounts of magnesium oxide, which is a compound of
It is obtained by maintaining the temperature at 300 to 600°C at a pressure of g/c 2. (Other raw materials) In addition, the lead compounds, titanium compounds, and zirconium compounds used in the present invention include oxides, carbonates, nitrates, chlorides, and sulfides of the respective elements. -PbfMg+z
The form is not particularly limited as long as it forms a 3Nbizi) Oa-based compound. The composition of piezoelectric ceramics is as follows, which is a high-performance piezoelectric material: (PbTt031-{PbZrOi)y-(Pb(Mg
+zsNbazs)Oa)z (where x.y and Z indicate mol%, x = 82 ~]. y = 95 ~ l
．． z=88~l, x+y+z=100.
). In addition, the composition of the present invention includes p of the above compositions.
It may be a composition in which b is substituted with 1 to 20 atomic % of Sr, or it may be a composition based on the above composition, with trace amounts of additives added to improve properties. (Piezoelectric ceramics) Conventional methods can be used for the steps after blending the above raw materials into the final required composition. For example, after mixing and pulverizing the blended raw material powder using a pole mill or the like, the obtained powder is heated at 800 to 1000°C for 1
Calcinate in air atmosphere for ~5 hours. After that, the calcined powder is molded into the required shape and
By firing at ℃ for 1 to 5 hours and polarizing the fired product,
The piezoelectric ceramic of the present invention is obtained. The conditions for polarization are not particularly limited, but are 60 to 10 liters at 0°C. 5
The standard is to apply a voltage of ~5kV/ma+ for 1 to 30 minutes.
【実施例］
実施例１
五酸化ニオブ（Ｎｂ２０ｓ）と炭酸マグネシウム（Ｍｇ
ＣＯ．）を等モルづつ樹脂ボール及びミルを用いて混合
した．この混合物を白金ルツポに入れ、大気雰囲気中９
００℃で２時間焼成して、ニオブ酸マグネシウムの粉末
を得た。得られた粉末を樹脂ボール及びミルを用いて１
６時間粉砕し、ニオブ酸マグネシウムの原料粉末とした
。セデイグラフを用いて測定したこの粉末の平均粒径は
１．６μｍであった。
上記のニオブ酸マグネシウムと酸化鉛，炭酸ストロンチ
ウム、酸化ジルコニウム及び酸化チタンを
Ｐｂｏ ９ｓｓｒｏ．ｏｓ（Ｍｇ＋ｙ３Ｎｚｚ３）０
．３？５Ｔ１０．ｓｒ５Ｚｒｏ ２ｓＬとなるように
配合し、樹脂ポール及びミルを用いて混合粉砕した。得
られた混合粉末をアルミナルツポに入れ、大気雰囲気中
９５０℃で２時間仮焼し、得られた仮焼粉末を乳ばちを
用いて解砕し、直径１５１ＩＩＩＩ＋厚さ３ｌＩＩＩ１
の円板を、３５０ｋｇ／ｃがの圧力でプレス成形した。
アルミナルッポに入れた白金板上に上記の成形体を置き
、１２５０℃、２時間焼成して焼結体を得た．
得られた焼結体を厚さ２ｍｍに研磨し、両面に電極とし
て銀ペーストを焼きつけ、８０℃で２． ５ＫＶ／＋ｎ
ｗの電圧を５分間印加して分極せしめ、圧電体セラミッ
クスを得た。
得られた圧電体セラミックスのｌＭＨｚでの誘電率（ε
ｒ）と変換効率である電気機械結合係数（κｒ）をＬＣ
Ｒメーターを用いて測定した。得られた結果を第１表に
示す．
実施例２
実施例ｌと同様にして五酸化二オプと炭酸マグネシウム
とから合成したニオブ酸マグネシウムを、ジルコニアビ
ーズ及び樹脂ミルでＩＯ時間粉砕したもの（平均粒径０
．９μｆｌｌ）を原料粉末のニオブ酸マグネシウムとし
た以外、実施例ｌと同様に行なった。
得られた圧電体セラミックスの特性測定結果を第１表に
示す。
実施例３
水熱合成で得られた市販のニオブ酸マグネシウム（堺化
学工業■製、平均粒径０．６μｍｌを用いた以外、実施
例１と同様に行なった。
得られた圧電体セラミックスの特性測定結果を第１表に
示す．
比較例１
ニオブ酸マグネシウムを合成せず、五酸化ニオブ、炭酸
マグネシウム、酸化鉛、炭酸ストロンチウム、酸化ジル
コニウム及び酸化チタンを直接原料として、実施例ｌと
同様に行なった。
得られた圧電体セラミックスの特性測定結果を第１表に
示す。
比較例２
実施例１と同様にして五酸化ニオブと炭酸マグネシウム
とから合成した二才プ酸マグネシウム粉末（平均粒径３
．５μｍ）を、粉砕せずに原料粉末として用いた以外、
実施例１と同様に行なった。
得られた圧電体セラミックスの特性測定結果を第１表に
示す。
第
１
表
［発明の効果】
第１表に示す結果から明らかなように、原料として平均
粒径が２ｕｍ以下のニオプ酸マグネシウムを用いること
により、得られる圧電体セラミックスの特性は従来のも
のと比較して大幅に向上する。本発明により、従来の製
造工程、設備を変えることなく、高品質の圧電体セラミ
ックスを製造することができる。[Example] Example 1 Niobium pentoxide (Nb20s) and magnesium carbonate (Mg
C.O. ) were mixed in equal moles using a resin ball and a mill. This mixture was put into a platinum retouching pot, and 9
The mixture was fired at 00° C. for 2 hours to obtain magnesium niobate powder. The obtained powder was milled using a resin ball and a mill.
The mixture was ground for 6 hours to obtain raw material powder of magnesium niobate. The average particle size of this powder, measured using a Sedigraph, was 1.6 μm. The above magnesium niobate, lead oxide, strontium carbonate, zirconium oxide and titanium oxide were added to Pbo 9ssro. os(Mg+y3Nzz3)0
．． 3?5T10. The mixture was blended to become sr5Zro 2sL, and mixed and ground using a resin pole and a mill. The obtained mixed powder was placed in an aluminum pot and calcined at 950°C for 2 hours in the air, and the obtained calcined powder was crushed using a mortar to form a powder with a diameter of 151III and a thickness of 3LIII1.
A disc was press-formed at a pressure of 350 kg/cm. The above-mentioned molded body was placed on a platinum plate placed in an aluminum pot and fired at 1250°C for 2 hours to obtain a sintered body. The obtained sintered body was polished to a thickness of 2 mm, silver paste was baked on both sides as electrodes, and 2. 5KV/+n
A voltage of W was applied for 5 minutes to cause polarization, thereby obtaining piezoelectric ceramics. The dielectric constant (ε
r) and the electromechanical coupling coefficient (κr), which is the conversion efficiency, by LC
Measured using an R meter. The results obtained are shown in Table 1. Example 2 Magnesium niobate synthesized from dioptic pentoxide and magnesium carbonate in the same manner as in Example 1 was pulverized for IO hours using zirconia beads and a resin mill (average particle size 0).
．． The same procedure as in Example 1 was carried out except that 9μfl) was used as the raw material powder of magnesium niobate. Table 1 shows the results of measuring the characteristics of the piezoelectric ceramics obtained. Example 3 The same procedure as in Example 1 was carried out except that a commercially available magnesium niobate obtained by hydrothermal synthesis (manufactured by Sakai Chemical Industry Co., Ltd., average particle size 0.6 μml) was used. Characteristics of the obtained piezoelectric ceramics The measurement results are shown in Table 1. Comparative Example 1 The same procedure as in Example 1 was conducted without synthesizing magnesium niobate and using niobium pentoxide, magnesium carbonate, lead oxide, strontium carbonate, zirconium oxide, and titanium oxide as raw materials directly. The results of measuring the properties of the piezoelectric ceramics obtained are shown in Table 1. Comparative Example 2 Two-year-old magnesium peroxide powder synthesized from niobium pentoxide and magnesium carbonate in the same manner as in Example 1 (average particle size 3
．． 5 μm) was used as the raw material powder without being crushed.
The same procedure as in Example 1 was carried out. Table 1 shows the results of measuring the characteristics of the piezoelectric ceramics obtained. Table 1 [Effects of the Invention] As is clear from the results shown in Table 1, by using magnesium niopeate with an average particle size of 2 um or less as a raw material, the properties of the piezoelectric ceramics obtained are compared with conventional ones. significantly improved. According to the present invention, high quality piezoelectric ceramics can be manufactured without changing conventional manufacturing processes and equipment.
Claims (2)
ジルコニウム化合物及びマグネシウム化合物を混合、仮
焼、焼成、分極するＰｂＴｉＯ＿３−ＰｂＺｒＯ＿３−
Ｐｂ（Ｍｇ＿１＿／＿３Ｎｂ＿２＿／＿３）Ｏ＿３系圧
電体セラミックスの製造方法において、ニオブ化合物及
びマグネシウム化合物として平均粒径が２１以下のニオ
ブ酸マグネシウム（Ｍｇ＿１＿／＿３Ｎｂ＿２＿／＿３
Ｏ＿２）を用いること０を特徴とする圧電体セラミック
スの製造方法。(1) Niobium compounds, lead compounds, titanium compounds,
PbTiO_3-PbZrO_3- for mixing, calcining, firing, and polarizing zirconium compounds and magnesium compounds
In the method for producing Pb(Mg_1_/_3Nb_2_/_3)O_3-based piezoelectric ceramics, magnesium niobate (Mg_1_/_3Nb_2_/_3) with an average particle size of 21 or less is used as a niobium compound and a magnesium compound.
A method for producing piezoelectric ceramics, characterized by using O_2).
下のニオブ酸マグネシウムを用いることを特徴とする請
求項１に記載の方法。(2) The method according to claim 1, characterized in that magnesium niobate synthesized by a hydrothermal reaction and having an average particle size of 1.0 μm or less is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00691690A JP3243692B2 (en) | 1990-01-16 | 1990-01-16 | Manufacturing method of piezoelectric ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00691690A JP3243692B2 (en) | 1990-01-16 | 1990-01-16 | Manufacturing method of piezoelectric ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03214506A true JPH03214506A (en) | 1991-09-19 |
| JP3243692B2 JP3243692B2 (en) | 2002-01-07 |
Family
ID=11651559
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00691690A Expired - Lifetime JP3243692B2 (en) | 1990-01-16 | 1990-01-16 | Manufacturing method of piezoelectric ceramics |
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| Country | Link |
|---|---|
| JP (1) | JP3243692B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04149059A (en) * | 1990-10-09 | 1992-05-22 | Shizuoka Univ | Ceramic piezoelectric body |
-
1990
- 1990-01-16 JP JP00691690A patent/JP3243692B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04149059A (en) * | 1990-10-09 | 1992-05-22 | Shizuoka Univ | Ceramic piezoelectric body |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3243692B2 (en) | 2002-01-07 |
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