JPH03216285A - Chamber device for joining at ordinary temperature - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a room-temperature bonding chamber device with excellent versatility.

[Prior Art] The friction welding method is a method in which materials to be joined are brought into contact with each other and subjected to relative rotational motion, and the materials are joined by utilizing the frictional heat generated at the joining surfaces.

Fig. 4 shows an example of a friction welding device, in which a rotary chuck d is attached to a flywheel b rotated by an electric motor a, and rotates while clamping one of the welding materials C, and a rotary chuck d is mounted on the same axis as the rotary chuck d. a fixed chuck 9 which is arranged so as to clamp the other bonding material e opposite to the bonding material C, and is provided so as to be movable toward and away from the rotary chuck d along a guide member r; A pressing device h consisting of a hydraulic cylinder or the like is provided for moving the bonding materials C and θ to press the bonding materials C and θ.

While the rotary chuck d to which one of the bonding materials C is attached is rotated at a constant rotation speed, the fixed chuck to which the other bonding material e is attached is advanced by the pressing device h, so that the bonding surface of the bonding materials C and C is When the two parts are pressed together, the friction part becomes red hot and softens, and the rotational energy is consumed by heat generation, so that the rotational movement rapidly decelerates and comes to a natural stop, completing the pressing process. In the above, a method is also adopted in which a brake is applied to stop the rotation when the friction part reaches an appropriate temperature.

Generally, the pressing pressure after the rotation is stopped is maintained as an offset pressure, or is further increased to perform an offset.

During the above-mentioned friction welding, there are oxides, thin gas adsorption films, dirt, etc. on the welding surfaces that interfere with the welding, so these are decomposed during the friction or caused by large pressure to form burrs at the joint as shown in Figure 5. High bonding strength is obtained by extruding the material to the outside and activating it, and the temperature of the friction part in conventional methods usually rises to just below the melting point of the material.

However, in the conventional method described above, in order to activate the joint surface and obtain a strong joint, a strong pressing force is used to form a sufficient burr at the joint.
There was a problem in that the plastic deformation of the bonding materials C and C was significant and required a robust device and a large driving force.

Furthermore, even if the joining surfaces are activated by strong pressing force as described above, the red heat of the frictional parts causes deterioration of the quality of the joining parts and decreases in strength, which narrows the range of materials that can be joined. It had problems such as:

For this reason, in recent years, by applying frictional force to the joint surfaces of the joining materials in a vacuum or an inert gas atmosphere,
It is possible to join with extremely small frictional force, and by activating the joining surfaces by energizing both joining materials in an inert gas atmosphere and discharging between the joining surfaces, it is possible to join with extremely small frictional force. Room-temperature bonding methods are being researched.

[Problem to be solved by the invention] However, when bonding is performed in the vacuum or inert gas atmosphere, the structure for maintaining the atmosphere becomes large,
Another problem is that there are restrictions on the shapes of materials that can be joined.

The present invention achieves a vacuum or inert gas atmosphere with a small configuration, and can be applied to various bonding devices, and furthermore, has versatility that is not restricted by the shape of the materials to be bonded. The purpose is to provide an excellent room-temperature bonding device.

[Means for Solving the Problems] The present invention provides an airtight chamber having a connection port connectable to a vacuum generator or an inert gas introduction device, an opening/closing lid provided on the airtight chamber, and an airtight chamber facing the airtight chamber. A material having an insertion hole formed correspondingly in the wall, which is inserted through each of the two insertion holes via a local sealing device, and has a connecting portion at its outer end and a removable chuck at its inner end. The present invention relates to a room-temperature bonding chamber device characterized by comprising a support shaft.

[Function] The bonding material is attached to the removable chucks placed opposite each other in the airtight chamber by removing the opening/closing lid, then closing the opening/closing lid, and further maintaining the inside of the airtight chamber in a vacuum or inert gas atmosphere. After that, joining is performed by applying frictional force to the joining materials, or by applying frictional force after activating the joining surfaces.

In the above, since the bonding material is attached to and detached from the detachable chuck in an airtight chamber, any bonding material that can be fixed by the detachable chuck can be easily attached and bonded regardless of the shape.

Since the airtight chamber is shaped to surround the attaching/detachable chuck part, the capacity is small and the operation for maintaining the vacuum or inert gas atmosphere is easy.

In addition, since it is small in size and has a continuous portion at the outer end of the material support shaft, it can be easily applied to various devices for joining by transportation.

[Example] Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the present invention, in which a room-temperature bonding chamber device 1 of the present invention is provided between a drive shaft 3 provided in a rotary drive device 2 and a suppression shaft 5 provided in a suppression device 4. The case is shown below.

The room-temperature bonding chamber device 1 has an airtight chamber 7 that defines a required space 6 therein, and insertion holes 8.9 are formed in corresponding left and right walls of the airtight chamber 7. An airtight chamberer 7 is installed in the insertion hole 8 on the side of the cage.
One rotating side material support shaft 11 extending inwardly and outwardly is inserted through a local sealing device 10 directed toward is integrally provided with a connecting portion l3 that can be connected to and disconnected from the drive shaft 3. Further, on the outer peripheral part of the material support shaft II, there is a member l4 for fixing the material support shaft l1.
A bearing 15 is provided for supporting the shaft.

Further, the other insertion hole 9 is provided with the other suppression side material support shaft 17 that also passes through the expansion and contraction device l6 provided on the outside of the airtight chamber 7. In addition to showing the detachable chuck l8, there is also a connecting part 19 at the outer end that can be connected to and disconnected from the suppression shaft 5.
It's all prepared.

Further, on the outer peripheral part of the material support shaft l7, the material support shaft l7
A bearing 26 for supporting the fixing member l4 is also provided.

The expansion and contraction device 16 is inserted into the insertion hole 9 of the airtight chamber 7.
A fixed end plate 20 fixed to airtightly surround the outer surface, a bellows 2l having one end fixed to the fixed end plate 20,
A movable end plate 22 fixed to the other end of the bellows 2l and a rotation prevention plate 23 for preventing rotation of the movable end plate 22 are used as the backbone, and the material support shaft l7 of the movable end plate 22 is inserted through the movable end plate 22. A local curling device 25 is provided outside the hole 24 .

The airtight chamber 7 is supported on a support base 27, and a connection port 28 is provided at a predetermined position on its outer periphery, and a vacuum generator or a vacuum generator is connected to the connection port 28 via a conduit 29. An inert gas introduction device 30 is connected.

Moreover, an opening/closing lid 32 is provided above the airtight chamber 7 and can be kept airtight with a sealing material 3l.

Reference numeral 33 in the figure is an air vent hole for forming an inert gas atmosphere, and reference numeral 34 in FIG.

In addition, in the apparatus shown in FIG. 1, a power source 37 is connected to the material support shafts 11.17 on the rotating side and the suppressing side, so that electric discharge can be generated between the joining materials 35.36 supported on the detachable chucks 12.18. That's what I do.

The local sealing device 10.25 includes a support fitting 39 that forms an annular concave space 38 that is open on the inside in the radial direction on the outside of the insertion hole 8, as shown in FIG. 3 using the local sealing device IO as an example. An annular seal body 4l is fixed in the concave space 38 via a seal ring 40.
or inserted.

The seal body 4l includes an inner seal plate 42 and an outer seal plate 43.
The sealing material 44 is made of a synthetic resin material having the required elastic deformability and high abrasion resistance. ing.

An annular coil spring 45 having a high elasticity is inserted into the C-shaped interior of the sealing material 44.

In the above configuration, the inner diameter of the sealing body 4l is much smaller than the outer diameter of the bonding material 35 etc. that performs sealing, so when the bonding material 35 is aligned and pushed inside the sealing body 4l, the inner diameter As the seal plate 42 expands, the coil spring 45 becomes compressed as shown in FIG. This ensures high sealing performance.

When using the room temperature bonding chamber device l of the present invention,
The material support shaft 11 is connected to the drive shaft 3 of the rotary drive device 2 via the connection part 13, and the material support shaft l7 is connected to the connection part l.
9 to the pressing shaft 5 of the pressing device 4, and supports the airtight chamber 7 by the support base 27, and supports the bearing 1.
5 and 26 are supported on the fixing member l4.

Furthermore, a vacuum generator or an inert gas introduction device 3o is connected to the connection port 28 via a conduit 29.

Further, the opening/closing lid 32 is removed, and bonding materials 35 and 36 are inserted therefrom and attached to the detachable chucks 12 and 18, respectively.

In the above state, the vacuum generator or the inert gas introducing device 30 is operated to vacuum the space 6 in the airtight chamber 7.
Alternatively, it is maintained in an inert gas atmosphere or an inert atmosphere containing less than loppa of oxygen. At this time, if the airtight chamber 7 is to have an inert gas atmosphere, the air vent hole 3
3 and replace the air with inert gas while letting out the air.Next, while rotating the joining material 35 with the rotary drive device 2, press the joining material 36 with the suppression device 4, and the vacuum or inert gas will be replaced. The atmosphere activates the bonding surfaces well, and good bonding is achieved with small frictional force.

Prior to bonding in the inert gas atmosphere, when power is applied to the material support shafts l1 and l7 from the power source 37, the bonding material 35
．． Since the joint surface is further activated by the electric discharge between the joints 36 and 36, a good joint can be achieved with a smaller frictional force.

According to the room temperature bonding chamber device 1, the opening/closing lid 32
By attaching and detaching the chuck 12. Bonding material 3 to 18
5.36 can be easily attached and detached, and if the material can be fixed with the detachable chuck 12.18, its shape,
Bonding can be performed without being limited by size.

Further, the room temperature bonding chamber device l has a connecting portion 13.
．． The present invention can be applied to devices for performing various types of bonding via 19.

Furthermore, since the airtight chamber 7 is equipped with an expansion/contraction device 16 having a bellows 2l, the material support shaft 1
Even if 7 is pressed and moved, a good seal can be maintained with a simple local seal device 25.

Furthermore, it is also easily possible to rotate the material support shaft l7 on the suppression side. In that case, the detent plate 23
Therefore, the bellows 2l and the movable end plate are prevented from being twisted.

Furthermore, prior to the above-mentioned joining, the joining surface of the joining material 35.3G can be positively activated by a physical activation method in a vacuum or an inert gas atmosphere, thereby making it strong with a small frictional force. ◎Figure 2 shows an example of the above-mentioned physical activation method, in which a processing tool storage chamber is provided on the opposite side of the airtight chamber 7 from the observation window 34. An operating arm 48 is fixed to a processing tool 47 made of a file, diamond polishing, etc., which is provided in the airtight chamber 7 and has a protrusion 46 provided therein.
is passed through an arm insertion opening 49 formed in the outer wall of the processing tool storage chamber 46 and equipped with a local sealing device 10 similar to that described above.

In this case, cutting is performed by pressing the processing tool 47 against the joint surface of one of the rotated joint materials 35 to release active material, and the other joint material 3G is
The processing tool 47 is moved to cut the joint surface. At this time, the operator can work while observing the internal situation through the peephole 34. When the activation work is completed, the processing tool 47 is stored in the processing tool storage chamber 46 as shown by the imaginary line so as not to interfere with the joining.

It should be noted that the chamber device for room temperature bonding of the present invention is not limited to the above-described embodiments, and it goes without saying that various changes can be made without departing from the gist of the present invention.

[Effects of the Invention] As explained above, according to the room temperature bonding chamber device of the present invention, various excellent effects as described below can be achieved.

(i) Since the bonding material can be attached to and detached from the removable chuck in an airtight chamber via the opening/closing lid, any bonding material that can be fixed with the detachable chuck can be easily attached and detached regardless of its shape or size. It can be attached to a chuck and bonding can be performed in a vacuum or inert gas atmosphere.

(i) Since the airtight chamber is shaped to surround the attaching/detachable chuck portion, the capacity can be reduced and the operation for maintaining the chamber in a vacuum or inert gas atmosphere is easy.

(2) Since it is small and has a connecting part at the outer end of the material support shaft, it can be easily applied to various joining devices by transportation.

[Brief explanation of drawings]

FIG. 1 is a cutaway side view of one embodiment of the present invention, and FIG.
An enlarged sectional view showing an example of the configuration seen from the ■-■ direction in the figure,
FIG. 3 is an enlarged cross-sectional view of a local sealing device, FIG. 4 is a side view showing an example of a conventional friction welding device, and FIG. 5 is a cross-sectional view of a joined portion joined by a conventional friction welding device. 1 is a room temperature bonding chamber device, 7 is an airtight chamber,
8 and 9 are insertion holes, IO is a local sealing device, 11 is a material support shaft, 12 is a detachable chuck, 13 is a connecting portion, 17 is a material supporting shaft, 18 is a detachable chuck, 19 is a connecting portion, 25 is a local sealing device , 28 is a connection port, 30 is a vacuum generator or inert gas introduction device, and 32 is an opening/closing lid. Figure 2 Figure 4 Figure 5

Claims (1)

[Claims] 1) An airtight chamber having a connection port that can be connected to a vacuum generator or an inert gas introducing device, an opening/closing lid provided on the airtight chamber, and an insertion hole formed corresponding to the opposing wall of the airtight chamber. , characterized in that it is provided with a material support shaft that is inserted into each of the two insertion holes via a local sealing device, has a connecting portion at its outer end, and has a detachable chuck at its inner end. Chamber equipment for room temperature bonding.