JPH03217076A - Surface treatment of internal-layer base material for multilayer copper-clad laminated board - Google Patents
Surface treatment of internal-layer base material for multilayer copper-clad laminated boardInfo
- Publication number
- JPH03217076A JPH03217076A JP1205690A JP1205690A JPH03217076A JP H03217076 A JPH03217076 A JP H03217076A JP 1205690 A JP1205690 A JP 1205690A JP 1205690 A JP1205690 A JP 1205690A JP H03217076 A JPH03217076 A JP H03217076A
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- base material
- layer base
- internal
- treatment liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業」二の利用分野〕
本発明は、エポキシ樹脂等の絶縁材を用いた多層銅張積
層板の内層基材の表面処理方法に関するものであり、特
に内層基材の銅箔の酸化処理面と樹脂層との接着性を向
上させる表面処理方法に関するものである。[Detailed Description of the Invention] [Field of Application in Industry] The present invention relates to a method for surface treatment of an inner layer base material of a multilayer copper clad laminate using an insulating material such as an epoxy resin, and in particular to a method for surface treatment of an inner layer base material of a multilayer copper clad laminate using an insulating material such as an epoxy resin. The present invention relates to a surface treatment method for improving the adhesion between the oxidized surface of copper foil and a resin layer.
近年、銅張積層板の諸特性に対する要求はますます厳し
くなってきている。特に産業用や民生用1
のプリント配線板用の銅張積層板にその傾向が顕著であ
る。例えば高密度化の要求により信号線はますます細く
なり、信頼性の確保のため銅箔と樹脂間の接着強度が重
要となっている。また多層化の傾向も顕著で、銅箔の接
着強度は、銅箔粗化面のみならず、銅箔光沢面とこれに
密着する樹脂層との間においても一層重要になってきて
いる。In recent years, requirements for various properties of copper-clad laminates have become increasingly strict. This tendency is particularly noticeable in copper-clad laminates for industrial and consumer printed wiring boards. For example, demand for higher density has made signal lines thinner and thinner, and the strength of the bond between copper foil and resin has become important to ensure reliability. In addition, there is a remarkable trend toward multilayering, and the adhesive strength of copper foil is becoming more important not only between the roughened surface of the copper foil, but also between the shiny surface of the copper foil and the resin layer that adheres to it.
第2図は内層基材製造後の多層基板製造工程に至る多層
銅張積層板の製造工程を示す系統図である。FIG. 2 is a system diagram showing the manufacturing process of a multilayer copper-clad laminate, which includes the manufacturing process of a multilayer board after manufacturing the inner layer base material.
一般に内層基材としては0.5〜0 . 6mm程度の
厚さの両面銅張積層板が用いられており、エッチング等
により両面の銅箔にパターニング(a)を行って所定の
回路パターンを形成したのち、整面(b)、水洗(c)
、乾燥(d)の各工程を行う。そして酸化処理工程(e
)において、銅箔の回路パターンを酸化処理して表面に
酸化膜を形成したのち、乾燥(f)を行う。その後表面
処理工程(g)において、一般にカップリング剤を含む
カップリング処理液を表面処理液として表面処理を行い
、乾燥工程(h)を2
経たのち、多層基板製造工程(i)に入る。多層基板製
造工程(i)では、表面処理を行った内層基材と、ガラ
スクロスーエポキシ樹脂よりなるプリプレグとを交互に
積層し、最外層に銅箔を積層して加熱加圧成形すること
により多層銅張積層板を製造する。Generally, the inner layer base material is 0.5 to 0. A double-sided copper-clad laminate with a thickness of about 6 mm is used, and after patterning (a) on the copper foil on both sides by etching etc. to form a predetermined circuit pattern, the surface is leveled (b) and washed with water (c). )
, drying (d). and oxidation treatment step (e
), the copper foil circuit pattern is oxidized to form an oxide film on the surface, and then dried (f). Thereafter, in a surface treatment step (g), surface treatment is performed using a coupling treatment liquid that generally contains a coupling agent, and after a drying step (h), the multilayer substrate manufacturing step (i) is started. In the multilayer board manufacturing process (i), the surface-treated inner layer base material and the prepreg made of glass cloth-epoxy resin are alternately laminated, and the outermost layer is laminated with copper foil and then heated and pressure molded. Manufactures multilayer copper-clad laminates.
第3図は従来の表面処理装置を示す断面図であり、図に
おいて、(1)は内層基材、(2)はその両側に積層さ
れた銅箔の回路パターン、 (3)は表面処理液、(4
)は処理液層である。Figure 3 is a cross-sectional view showing a conventional surface treatment device. In the figure, (1) is the inner layer base material, (2) is the copper foil circuit pattern laminated on both sides of the inner layer base material, and (3) is the surface treatment liquid. , (4
) is the processing liquid layer.
従来の内層基材(1)の表面処理方法は、カップリング
剤を含むカップリング処理液からなる表面処理液(3)
を処理液槽(4)の中に入れ、その中に被処理材である
回路パターン(2)を形成した内層基材(1)を浸漬し
た後、引上げて乾燥し、表面処理膜を内層基材(1)表
面に形成する。そして乾燥後、内層基材(1)を次工程
の多層基板製造工程に供している。The conventional surface treatment method for the inner layer base material (1) is to use a surface treatment liquid (3) consisting of a coupling treatment liquid containing a coupling agent.
is placed in a treatment liquid tank (4), and the inner layer base material (1) on which the circuit pattern (2) is formed, which is the material to be treated, is immersed therein, then pulled up and dried, and the surface treated film is placed on the inner layer base material. Formed on the surface of material (1). After drying, the inner layer base material (1) is subjected to the next multilayer board manufacturing process.
しかしながら、上記のような従来の表面処理方3
法においては、単に被処理材である内層基材(1)を、
カップリング剤を含む表面処理液(3)に浸漬したのち
、引上げて乾燥する方法であったので、表面処理液の粘
度や組成の如何に拘らず、内層基材(1)の表面には銅
箔の回路パターン(2)が形成されている部分と、形成
されていない部分があるため、内層基材の表面に均一な
表面処理膜を一様に形成することができない。このため
多層基板製造工程で、表面処理膜とこれに密着する樹脂
層間でフクレ、ハガレを生じたり、製造後の多層基板に
接着力の著しいバラツキを生じたり、実装時にハンダに
よるフクレやハガレを生じることがあり、著しく信頼性
を損うという問題点があった。However, in the conventional surface treatment method 3 mentioned above, the inner layer base material (1), which is the material to be treated, is simply
This method involved immersing the inner layer substrate (1) in a surface treatment liquid (3) containing a coupling agent, then pulling it up and drying it. Since there are parts where the circuit pattern (2) of the foil is formed and parts where it is not formed, it is not possible to uniformly form a uniform surface treatment film on the surface of the inner layer base material. For this reason, during the multilayer board manufacturing process, blistering and peeling may occur between the surface treatment film and the resin layer that adheres to it, significant variations in adhesive strength may occur in the multilayer board after manufacturing, and blistering and peeling may occur due to solder during mounting. There was a problem in that reliability was significantly impaired.
従来、表面処理液は水や溶剤並みの粘度であり、表面処
理膜は無色透明で、その厚さが極めて薄いので、表面処
理膜の付着状態と接着力の関係について充分な検討がな
されていなかった。Conventionally, surface treatment liquids have a viscosity similar to that of water or solvents, and surface treatment films are colorless and transparent, and their thickness is extremely thin, so the relationship between the adhesion state of the surface treatment film and its adhesive strength has not been sufficiently studied. Ta.
本発明は前記の問題点を解決するためになされたもので
、表面処理膜を内層基材表面に一様に形成して、多層基
板の内層基材との接着力を安定化4
するとともに向上させ、その信頼性を高めることができ
る多層銅張積層板用内層基材の表面処理方法を提案する
ことを目的とする。The present invention has been made to solve the above-mentioned problems, and by uniformly forming a surface treatment film on the surface of the inner layer substrate, it stabilizes and improves the adhesion force with the inner layer substrate of the multilayer substrate. The purpose of the present invention is to propose a surface treatment method for inner layer substrates for multilayer copper-clad laminates, which can increase the reliability of multilayer copper-clad laminates.
本発明の多層銅張積層板用内層基材の表面処理方法は、
多層鋼張積層板を形成するための内層基材の銅箔の酸化
膜表面に表面処理を行う方法において、表面粗さを5〜
150μmに調整した転写ローラにより表面処理液を内
層基材の表面に転写して均一に付着させ,表面処理膜を
形成する方法である。The method for surface treatment of an inner layer base material for a multilayer copper-clad laminate of the present invention includes:
In a method of surface-treating the surface of the oxide film of copper foil as an inner layer base material for forming a multilayer steel clad laminate, the surface roughness is set to 5 to 5.
In this method, a surface treatment liquid is transferred onto the surface of the inner layer base material using a transfer roller adjusted to have a thickness of 150 μm, and the surface treatment liquid is uniformly adhered thereto to form a surface treatment film.
本発明で使用する表面処理液としては、例えばシランカ
ツプリング剤、チタネートカップリング剤、または両者
の混合カップリング剤などのカップリング剤を0.3〜
5重量%含む表面処理液があげられる。As the surface treatment liquid used in the present invention, a coupling agent such as a silane coupling agent, a titanate coupling agent, or a mixed coupling agent of both may be used in an amount of 0.3 to
An example is a surface treatment liquid containing 5% by weight.
本発明の多層銅張積層板用内層基材の表面処理方法にお
いては、表面粗さを5〜150μmに調整した転写ロー
ラにより表面処理液を内層基材に転写5−
し、均一に付着させて表面処理を行い、表面処理膜を形
成する。In the method for surface treatment of an inner layer base material for a multilayer copper-clad laminate according to the present invention, a surface treatment liquid is transferred to the inner layer base material using a transfer roller whose surface roughness is adjusted to 5 to 150 μm, and the surface treatment liquid is uniformly adhered to the inner layer base material. Surface treatment is performed to form a surface treatment film.
従来のように表面処理液に被処理材である内層基材を浸
漬して引上げると、その表面に付着した表面処理液が内
層基材表面のハジキや液ダマリのため表面に均一に付着
せず、一様な表面処理膜を形成できないが、これは被処
理材の内層基材の表面に表面処理液が接触した際の表面
張力が大きいためである。このため本発明では、表面粗
さを上記範囲に調整した転写ローラにより表面処理液を
内層基材に転写することにより、内層基材の表面に表面
処理液を均一に付着させ、これにより一様な表面処理膜
を形成する。When the inner layer substrate, which is the material to be treated, is immersed in a surface treatment liquid and pulled up as in the conventional method, the surface treatment liquid attached to the surface does not adhere uniformly to the surface due to repellency or liquid clumps on the surface of the inner layer substrate. First, a uniform surface treatment film cannot be formed, but this is because the surface tension is large when the surface treatment liquid comes into contact with the surface of the inner layer base material of the material to be treated. Therefore, in the present invention, by transferring the surface treatment liquid onto the inner layer base material using a transfer roller whose surface roughness is adjusted to the above range, the surface treatment liquid is uniformly adhered to the surface of the inner layer base material. Forms a surface treatment film.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
第1図は実施例で使用する表面処理装置の断面図であり
、図において、第3図と同一符号は同一または相当部分
を示す。表面処理装置は,表面処理液(3)を入れる1
対の処理液槽(4)と、処理液槽(4)内の表面処理液
(3)に一部が接するように設け−6−
られた1対の汲上ローラ(5)と、汲上ローラ(5)と
接するように対向して設けられた1対の転写ローラ(6
)とを有している。転写ローラ(6)は表面粗さを5〜
150μmに調整した金属、硬質プラスチック等の硬質
ローラや、軟質プラスチック、ゴム等の軟質ローラなど
が使用でき、吊下治具(7)により吊下げられた内層基
材(1)の表面に両側から接し、汲上ローラ(5)によ
り汲上げられた表面処理液(3)を内層基材(1)に転
写するようになっている。FIG. 1 is a cross-sectional view of a surface treatment apparatus used in an example, and in the figure, the same reference numerals as in FIG. 3 indicate the same or corresponding parts. The surface treatment device consists of 1 in which the surface treatment liquid (3) is placed
A pair of treatment liquid tanks (4), a pair of pumping rollers (5) provided so as to partially contact the surface treatment liquid (3) in the processing liquid tank (4), and a pumping roller (5) provided so as to partially contact the surface treatment liquid (3) in the processing liquid tank (4). A pair of transfer rollers (6) provided facing each other so as to be in contact with
). The surface roughness of the transfer roller (6) is 5~
A hard roller made of metal, hard plastic, etc. adjusted to 150 μm, or a soft roller made of soft plastic, rubber, etc. can be used. The surface treatment liquid (3) pumped up by the pumping roller (5) is transferred onto the inner layer base material (1).
内層基材(1)の表面処理方法は、汲上ローラ(5)お
よび転写ローラ(6)を回転させながら、転写ローラ(
6)間を吊下治具(7)により吊下げた内層基材(1)
を通過させることにより、汲上ローラ(5)により汲上
げられた表面処理液(3)を転写ローラ(6)によって
内層基材(1)に転写し、表面処理液(3)を内層基材
(1)の表面に均一に付着させる。The surface treatment method for the inner layer base material (1) includes rotating the transfer roller (5) and the transfer roller (6).
6) Inner layer base material (1) suspended by a hanging jig (7) between
, the surface treatment liquid (3) pumped up by the pumping roller (5) is transferred to the inner layer base material (1) by the transfer roller (6), and the surface treatment liquid (3) is transferred to the inner layer base material (1). 1) Apply it uniformly to the surface.
このとき転写ローラ(6)は内層基材(1)のソリや曲
り、あるいはその表面の回路パターン(2)の有無によ
る凹凸にも拘らず、内層基材(1)の両面に圧着し、内
層基材(1)表面の凹凸面の全てに一様一7
に表面処理液(3)を付着させる。転写ローラ(6)は
内層基材(1)への抑圧、ローラ間のギャップ、ローラ
の材質などにより表面処理液(3)の付着状態をコント
ロールすることができ、特にその表面に設けた粗度によ
る微細な凹凸により、表面処理液(3)の汲上ローラ(
5)からの受取と内層基材(1)の表面への付着を均一
に行うことができる。At this time, the transfer roller (6) presses against both sides of the inner layer base material (1), despite the warpage or bending of the inner layer base material (1), or the unevenness caused by the presence or absence of the circuit pattern (2) on its surface. The surface treatment liquid (3) is uniformly applied to all the uneven surfaces of the base material (1). The adhesion state of the surface treatment liquid (3) to the transfer roller (6) can be controlled by controlling the inner layer base material (1), the gap between the rollers, the material of the roller, etc., and especially the roughness provided on the surface. Due to the fine irregularities caused by the surface treatment liquid (3), the pumping roller (
5) can be uniformly received from the inner layer base material (1) and attached to the surface of the inner layer base material (1).
実施例1
まず内層基材(1)として、両面に厚さ70μmの銅箔
を張った全体の厚さ0.60mmのガラスクロスーエポ
キシ樹脂の銅張積層板を用いた。まず第2図のパターニ
ング(a)工程として、両面の銅箔に所定のパターンと
なるようにレジストを付与し,エッチングなどによりパ
ターニングし、回路パターン(2)を形成する。このパ
ターン面を整面(b),水洗(c)、および乾燥(d)
シた後,酸化処理工程(e)として、黒化処理液(亜塩
素酸ナトリウム31g/Q、水酸化ナトリウム15g/
Q、リン酸三ナトリウム12g/Illの水溶液)中に
95℃で2分間浸漬して酸化膜を形成した後、150℃
のオーブン中で15分間乾燥(f)さ8ー
せた。Example 1 First, as the inner layer base material (1), a copper-clad laminate made of glass cloth-epoxy resin having a total thickness of 0.60 mm and having a copper foil of 70 μm thick on both sides was used. First, in the patterning step (a) shown in FIG. 2, a resist is applied to the copper foil on both sides so as to form a predetermined pattern, and patterning is performed by etching or the like to form a circuit pattern (2). This pattern surface is leveled (b), washed with water (c), and dried (d).
After the oxidation treatment step (e), a blackening treatment solution (sodium chlorite 31g/Q, sodium hydroxide 15g/Q) is applied.
Q. After forming an oxide film by immersing it in an aqueous solution of trisodium phosphate (12 g/Ill) at 95°C for 2 minutes, it was immersed at 150°C.
Dry (f) for 15 minutes in an oven.
次に表面処理工程(g)として、カップリング処理液(
β一(3,4エポキシシク口ヘキシル)エチルトリメト
キシシラン 2重量%、酢酸0.5重量%、エタノール
60重量%、水37.5重量%)からなる表面処理液(
3)を用い、これを第1図の表面処理装置の処理液槽(
4)に満して汲上ローラ(5)により汲上げ、一方パタ
ーニングおよび酸化膜を形成した内層基材(1)を吊下
治具(7)により吊下げて、表面粗さが20〜30μm
になるように研磨したフッ素樹脂(テフロン)皮膜を有
する直径50mmのゴムローラ(硬さ: JIS A
40゜)からなる転写ローラ(6)間を、押圧力500
gの条件で通過させ,表面処理液(3)を内層基材(1
)に転写して付着させた。その後、室温で10分間風乾
し、次にこれをオーブン内にて110℃で30分間乾燥
(h)シて、カップリング剤の表面処理膜を形成した。Next, as a surface treatment step (g), a coupling treatment solution (
A surface treatment solution (2% by weight of β-(3,4-epoxyhexyl)ethyltrimethoxysilane, 0.5% by weight of acetic acid, 60% by weight of ethanol, 37.5% by weight of water)
3) and transfer it to the treatment liquid tank (
4) and pumped up with a pumping roller (5), and on the other hand, the inner layer base material (1) on which the patterning and oxide film were formed was suspended by a hanging jig (7), and the surface roughness was 20 to 30 μm.
A rubber roller with a diameter of 50 mm that has a fluororesin (Teflon) film polished to a hardness of JIS A.
A pressing force of 500° is applied between the transfer rollers (6) consisting of
The surface treatment liquid (3) is passed through the inner layer base material (1) under the conditions of g.
) and attached to it. Thereafter, it was air-dried at room temperature for 10 minutes, and then dried in an oven at 110° C. for 30 minutes (h) to form a surface-treated film of the coupling agent.
この表面処理膜を形成した内層基材(1)は、多層基板
製造工程(i)において、ガラスクロスーエボキシ樹脂
よりなるプリプレグ(図示せず)と交互に必要層数を積
層し、最外層に銅箔を積層してプレス成形することによ
り、多層銅張積層板を得た。In the multilayer board manufacturing process (i), the inner layer base material (1) on which this surface treatment film is formed is laminated with a required number of layers alternately with a prepreg (not shown) made of glass cloth-epoxy resin, and the outermost layer is A multilayer copper-clad laminate was obtained by laminating copper foil and press-molding.
比較例1
第3図の表面処理装置を用いたほかは、実施例1と同様
にして、多層銅張積層板を得た。Comparative Example 1 A multilayer copper-clad laminate was obtained in the same manner as in Example 1, except that the surface treatment apparatus shown in FIG. 3 was used.
上記実施例1および比較例1の多層銅張積層板について
、その表面処理した銅箔とプリプレグ間の引剥し力を測
定した。結果を表1に示す。Regarding the multilayer copper-clad laminates of Example 1 and Comparative Example 1, the peeling force between the surface-treated copper foil and the prepreg was measured. The results are shown in Table 1.
表1
*1 :引剥し力はJIS−C−6481. 5.7に
より試験した。Table 1 *1: Peeling force is JIS-C-6481. Tested according to 5.7.
また転写ローラ(6)の表面粗さと、表面処理液(3)
の均一付着性について実験した結果、表面粗さは5〜1
50μm程度とすることにより、均一付着が可能である
ことがわかった。Also, the surface roughness of the transfer roller (6) and the surface treatment liquid (3)
As a result of experiments on uniform adhesion, the surface roughness was 5 to 1.
It was found that uniform adhesion was possible by setting the thickness to about 50 μm.
なお、本発明の方法においては、単にカップリング剤を
含む表面処理液のみならず、一般市販のプライマーや接
着剤なども表面処理液として同様に用いることができる
。In addition, in the method of the present invention, not only a surface treatment liquid containing a coupling agent but also a commonly available primer or adhesive can be used as the surface treatment liquid.
また、上記実施例において、均一に表面処理膜を形成す
るための転写ローラ(6)は、1対のみに限らず、数対
設置し、段階的に処理するようにしてもよい。さらに転
写ローラ(6)の表面への粗度の付与は、表面に筒状の
メッシュを被覆したり、スポンジ状の材料を配したもの
などでもよい。Further, in the above embodiment, the number of transfer rollers (6) for uniformly forming the surface treatment film is not limited to one pair, but several pairs may be installed to perform the treatment in stages. Further, roughness may be imparted to the surface of the transfer roller (6) by coating the surface with a cylindrical mesh or by disposing a sponge-like material.
以上のように、本発明によれば、表面粗さを調整した転
写ローラにより表面処理液を内層基材に転写して均一に
付着させることにより、内層基材表面に一様な表面処理
膜をムラなく容易に形成することができ、これにより接
着力が安定するとともに、そのレベルを向上させること
ができ、多層銅張積層板の歩留および信頼性の向上に寄
与できる効果がある。As described above, according to the present invention, a uniform surface treatment film is formed on the surface of the inner layer base material by transferring the surface treatment liquid onto the inner layer base material and making it adhere uniformly using a transfer roller with adjusted surface roughness. It can be formed easily and evenly, thereby stabilizing the adhesive force and improving its level, which has the effect of contributing to improving the yield and reliability of multilayer copper-clad laminates.
第1図は実施例の表面処理装置の断面図、第2図は多層
銅張積層板の製造工程を示す系統図、第3図は従来の表
面処理装置の断面図である。
各図中、同一符号は同一または相当部分を示し、(1)
は内層基材、(2)は回路パターン、 (3)は表面処
理液、(4)は処理液槽、(5)は汲上ローラ、(6)
は転写ローラ、(7)は吊下治具である。FIG. 1 is a sectional view of a surface treatment apparatus according to an embodiment, FIG. 2 is a system diagram showing the manufacturing process of a multilayer copper-clad laminate, and FIG. 3 is a sectional view of a conventional surface treatment apparatus. In each figure, the same reference numerals indicate the same or corresponding parts, (1)
is the inner layer base material, (2) is the circuit pattern, (3) is the surface treatment liquid, (4) is the treatment liquid tank, (5) is the pumping roller, (6)
is a transfer roller, and (7) is a hanging jig.
Claims (1)
の酸化膜表面に表面処理を行う方法において、表面粗さ
を5〜150μmに調整した転写ローラにより表面処理
液を内層基材の表面に転写して均一に付着させ、表面処
理膜を形成することを特徴とする多層銅張積層板用内層
基材の表面処理方法。(1) In a method of surface-treating the oxide film surface of copper foil as an inner layer base material for forming a multilayer copper-clad laminate, a surface treatment liquid is applied to the inner layer base material using a transfer roller with a surface roughness adjusted to 5 to 150 μm. A method for surface treatment of an inner layer base material for a multilayer copper-clad laminate, characterized by forming a surface treatment film by transferring and uniformly adhering it to the surface of the material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1205690A JPH03217076A (en) | 1990-01-22 | 1990-01-22 | Surface treatment of internal-layer base material for multilayer copper-clad laminated board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1205690A JPH03217076A (en) | 1990-01-22 | 1990-01-22 | Surface treatment of internal-layer base material for multilayer copper-clad laminated board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03217076A true JPH03217076A (en) | 1991-09-24 |
Family
ID=11794946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1205690A Pending JPH03217076A (en) | 1990-01-22 | 1990-01-22 | Surface treatment of internal-layer base material for multilayer copper-clad laminated board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03217076A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63108796A (en) * | 1986-10-27 | 1988-05-13 | 東芝ケミカル株式会社 | Manufacture of multilayer printed board |
-
1990
- 1990-01-22 JP JP1205690A patent/JPH03217076A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63108796A (en) * | 1986-10-27 | 1988-05-13 | 東芝ケミカル株式会社 | Manufacture of multilayer printed board |
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