JPH03217078A - Surface treatment of internal-layer base material for multilayer copper-clad laminated board - Google Patents

Surface treatment of internal-layer base material for multilayer copper-clad laminated board

Info

Publication number
JPH03217078A
JPH03217078A JP1205890A JP1205890A JPH03217078A JP H03217078 A JPH03217078 A JP H03217078A JP 1205890 A JP1205890 A JP 1205890A JP 1205890 A JP1205890 A JP 1205890A JP H03217078 A JPH03217078 A JP H03217078A
Authority
JP
Japan
Prior art keywords
surface treatment
base material
layer base
internal
treatment liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1205890A
Other languages
Japanese (ja)
Inventor
Minoru Kimura
稔 木村
Michio Futakuchi
二口 通男
Yutaka Kaizumi
家泉 豊
Shoichi Nagata
永田 庄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1205890A priority Critical patent/JPH03217078A/en
Publication of JPH03217078A publication Critical patent/JPH03217078A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To enable a surface treatment film to be formed uniformly on an internal-layer base surface for stabilizing and improving adhesion force with the internal-layer base material of a multilayer substrate and for enhancing the reliability by performing surface treatment of the internal-layer base material by using a surface treatment liquid which is obtained by mixing an interface activator where a specific amount of interface activator is mixed into a surface treatment liquid including a specific amount of coupling agent. CONSTITUTION:In a method for performing surface treatment onto an oxidized film surface of a copper foil of an internal-layer base material for forming a multilayer copper-clad laminated board, surface treatment of the internal-layer base material is performed and a surface treatment film is formed by using an interface activator mixed surface treatment liquid which is obtained by mixing a 0.05-3wt.% interface activator into a surface treatment liquid which includes 0.3-5wt.% coupling agent. For example, a surface treatment liquid including an interface activator where a 0.05wt.% fluorine interface activator is added to a coupling treatment liquid (beta-(3,4-epoxycyclohexyl)ethyltrimethoxysilane 2wt.%, an acetic acid 0.5wt.%, an ethanol 60wt.%, a water 37.5wt.%) is used as a surface treatment process g for dipping the internal-layer base material where patterning and an oxide film are formed. After that, the surface treatment film is formed after drying at room temperature and further drying h at 110 deg.C.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、エポキシ樹脂等の絶縁材を用いた多層銅張積
層板の内層基材の表面処理方法に関するものであり、特
に内層基材の銅箔の酸化処理面と樹脂層との接着性を向
上させる表面処理方法に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for surface treatment of an inner layer base material of a multilayer copper-clad laminate using an insulating material such as an epoxy resin, and particularly relates to a surface treatment method for an inner layer base material of a multilayer copper clad laminate using an insulating material such as an epoxy resin. The present invention relates to a surface treatment method for improving the adhesion between an oxidized surface of copper foil and a resin layer.

〔従来の技術〕[Conventional technology]

近年、銅張積層板の諸特性に対する要求はます■= ます厳しくなってきている。特に産業用や民生用のプリ
ント配線板用の銅張積層板にその傾向が顕著である。例
えば高密度化の要求により信号線はますます細くなり、
信頼性の確保のため銅箔と樹脂間の接着強度が重要とな
っている。また多層化の傾向も顕著で、銅箔の接着強度
は、銅箔粗化面のみならず、銅箔光沢面とこれに密着す
る樹脂層との間においても一層重要になってきている。
In recent years, requirements for the various properties of copper-clad laminates have become increasingly strict. This tendency is particularly noticeable in copper-clad laminates for industrial and consumer printed wiring boards. For example, due to the demand for higher density, signal lines are becoming thinner and thinner.
Adhesion strength between the copper foil and resin is important to ensure reliability. In addition, there is a remarkable trend toward multilayering, and the adhesive strength of copper foil is becoming more important not only between the roughened surface of the copper foil, but also between the shiny surface of the copper foil and the resin layer that adheres to it.

第2図は内層基材製造後の多層基板製造工程に至る多層
銅張積層板の製造工程を示す系統図である。
FIG. 2 is a system diagram showing the manufacturing process of a multilayer copper-clad laminate, which includes the manufacturing process of a multilayer board after manufacturing the inner layer base material.

一般に内層基材としては0.5〜0 . 6mm程度の
厚さの両面銅張積層板が用いられており、エッチング等
により両面の銅箔にパターニング(a)を行って所定の
回路パターンを形成したのち、整面(b)、水洗(C)
、乾燥(d)の各工程を行う。そして酸化処理工程(e
)において、銅箔の回路パターンを酸化処理して表面に
酸化膜を形成したのち、乾燥(f)を行う。その後表面
処理工程(g)において、一般にカンプリング剤を含む
カップリング処理液を表2 面処理液として表面処理を行い、乾燥工程(h)を経た
のち、多層基板製造工程(i)に入る。多層基板製造工
程(i)では、表面処理を行った内層基材と、ガラスク
ロスーエポキシ樹脂よりなるプリプレグと髪交互に積層
し、最外層に銅箔を積層して加熱加圧成形することによ
り多層銅張積層板を製造する。
Generally, the inner layer base material is 0.5 to 0. A double-sided copper-clad laminate with a thickness of about 6 mm is used. After patterning (a) on the copper foil on both sides by etching etc. to form a predetermined circuit pattern, the surface is leveled (b) and washed with water (C). )
, drying (d). and oxidation treatment step (e
), the copper foil circuit pattern is oxidized to form an oxide film on the surface, and then dried (f). Thereafter, in the surface treatment step (g), surface treatment is performed using a coupling treatment solution that generally contains a campling agent, and after passing through the drying step (h), the multilayer substrate manufacturing step (i) is performed. In the multilayer board manufacturing process (i), a surface-treated inner layer base material, prepreg made of glass cloth-epoxy resin and hair are alternately laminated, and copper foil is laminated on the outermost layer and then heated and pressure molded. Manufactures multilayer copper-clad laminates.

第1図は表面処理装置を示す断面図であり、図において
、(1)は内層基材、(2)はその両側に積層された銅
箔の回路パターン、(3)は表面処理液、(4)は処理
液層である。
FIG. 1 is a cross-sectional view showing the surface treatment apparatus. In the figure, (1) is the inner layer base material, (2) is the copper foil circuit pattern laminated on both sides thereof, (3) is the surface treatment liquid, ( 4) is a processing liquid layer.

従来の内層基材(1)の表面処理方法は、カップリング
剤を含むカップリング処理液からなる表面処理液(3)
を処理液槽(4)の中に入れ、その中に被処理材である
回路パターン(2)を形成した内層基材(1)を浸漬し
た後、引上げて乾燥し、表面処理膜を内層基材(1)表
面に形成する。そして乾燥後、内層基材(1)を次工程
の多層基板製造工程に供している。
The conventional surface treatment method for the inner layer base material (1) is to use a surface treatment liquid (3) consisting of a coupling treatment liquid containing a coupling agent.
is placed in a treatment liquid tank (4), and the inner layer base material (1) on which the circuit pattern (2) is formed, which is the material to be treated, is immersed therein, then pulled up and dried, and the surface treated film is placed on the inner layer base material. Formed on the surface of material (1). After drying, the inner layer base material (1) is subjected to the next multilayer board manufacturing process.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

3 しかしながら、上記のような従来の表面処理方法におい
ては、単に被処理材である内層基材(1)を、カップリ
ング剤を含む表面処理液(3)に浸漬したのち、引上げ
て乾燥する方法であったので、表面処理液の粘度や組成
の如何に拘らず、内層基材(1)の表面には銅箔の回路
パターン(2)が形成されている部分と、形成されてい
ない部分があるため、内層基材の表面に均一な表面処理
膜を一様に形成することができない。このため多層基板
製造工程で、表面処理膜とこれに密着する樹脂層間でフ
クレ、ハガレを生じたり、製造後の多層基板に接着力の
著しいバラツキを生じたり、実装時にハンダによるフク
レやハガレを生じることがあり、著しく信頼性を損うと
いう問題点があった。
3 However, in the conventional surface treatment method as described above, the inner layer base material (1), which is the material to be treated, is simply immersed in a surface treatment liquid (3) containing a coupling agent, and then pulled up and dried. Therefore, regardless of the viscosity or composition of the surface treatment liquid, there are parts on the surface of the inner layer base material (1) where the copper foil circuit pattern (2) is formed and parts where it is not formed. Therefore, a uniform surface treatment film cannot be uniformly formed on the surface of the inner layer base material. For this reason, during the multilayer board manufacturing process, blistering and peeling may occur between the surface treatment film and the resin layer that adheres to it, significant variations in adhesive strength may occur in the multilayer board after manufacturing, and blistering and peeling may occur due to solder during mounting. There was a problem in that reliability was significantly impaired.

従来、表面処理液は水や溶剤並みの粘度であり、表面処
理膜は無色透明で、その厚さが極めて薄いので、表面処
理膜の付着状態と接着力の関係について充分な検討がな
されていなかった。
Conventionally, surface treatment liquids have a viscosity similar to that of water or solvents, and surface treatment films are colorless and transparent, and their thickness is extremely thin, so the relationship between the adhesion state of the surface treatment film and its adhesive strength has not been sufficiently studied. Ta.

本発明は前記の問題点を解決するためになされたもので
、表面処理膜を内層基材表面に一様に形4 成して、多層基板の内層基材との接着力を安定化すると
ともに向上させ、その信頼性を高めることができる多層
銅張積層板用内層基材の表面処理方法を提案することを
目的とする。
The present invention has been made in order to solve the above-mentioned problems, and it forms a surface treatment film uniformly on the surface of the inner layer base material to stabilize the adhesive force with the inner layer base material of the multilayer substrate. The purpose of the present invention is to propose a surface treatment method for an inner layer base material for a multilayer copper-clad laminate, which can improve the reliability of the inner layer substrate.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の多層銅張積層板用内層基材の表面処理方法は、
多層銅張積層板を形成するための内層基材の銅箔の酸化
膜表面に表面処理を行う方法において、カップリング剤
を0.3〜5重量%含む表面処理液に、界面活性剤を0
.05〜3重量%混合した界面活性剤混入表面処理液を
用いて内層基材の表面処理を行い、表面処理膜を形成す
る方法である。
The method for surface treatment of an inner layer base material for a multilayer copper-clad laminate of the present invention includes:
In a method of surface-treating the surface of an oxide film of copper foil as an inner layer base material for forming a multilayer copper-clad laminate, 0.0% of a surfactant is added to a surface treatment solution containing 0.3 to 5% by weight of a coupling agent.
.. In this method, the inner layer base material is surface treated using a surface treatment liquid containing a surfactant mixed in an amount of 05 to 3% by weight to form a surface treatment film.

本発明で使用する表面処理液のカップリング剤としては
、例えばシランカツブリング剤、チタネー1〜力ソプリ
ング剤、または両者の混合カップリング剤などがあげら
れる。また界面活性剤としては、フッ素系界面活性剤、
その他の界面活性剤があげられる。
Examples of the coupling agent for the surface treatment liquid used in the present invention include a silane coupling agent, a titanium coupling agent, and a mixed coupling agent of both. In addition, as surfactants, fluorine-based surfactants,
Other surfactants may be mentioned.

〔作 用〕[For production]

本発明の多層銅張積層板用内層基材の表面処理方法にお
いては、カップリング剤および界面活性剤を含む表面処
理液に内層基材を浸漬して表面処理を行い、表面処理膜
を形成する。
In the method for surface treatment of an inner layer base material for a multilayer copper-clad laminate of the present invention, the inner layer base material is immersed in a surface treatment liquid containing a coupling agent and a surfactant to perform surface treatment to form a surface treatment film. .

従来のカップリング処理液からなる表面処理液に、被処
理材である内層基材を浸漬して引上げると、その表面に
付着した表面処理液が内層基材表面のハジキや液ダマリ
のため表面に均一に付着せず、一様な表面処理膜を形成
できないが、これは被処理材の内層基材の表面に表面処
理液が接触した際の表面張力が大きいためである。この
ため本発明では、従来の表面処理液に界面活性剤を添加
することにより、その表面張力を緩和して表面処理液を
内層基材になじみ易くし、これにより一様な表面処理膜
を形成する。
When the inner layer base material, which is the material to be treated, is immersed in a surface treatment liquid consisting of a conventional coupling treatment liquid and pulled up, the surface treatment liquid adhering to the surface of the inner layer base material may cause repellency or liquid clumps on the surface of the inner layer base material, causing the surface The surface treatment liquid does not adhere uniformly to the inner layer of the material to be treated, and a uniform surface treatment film cannot be formed. This is because the surface tension is high when the surface treatment liquid contacts the surface of the inner layer base material of the material to be treated. For this reason, in the present invention, by adding a surfactant to the conventional surface treatment liquid, the surface tension is relaxed and the surface treatment liquid is made more compatible with the inner layer base material, thereby forming a uniform surface treatment film. do.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例について説明する。 Examples of the present invention will be described below.

実施例1 まず内層基材(1)として、両面に厚さ70μmの銅箔
を張った全体の厚さ0.60mmのガラスク口スーエボ
キシ樹脂の銅張積層板を用いた。まず第2図の6 パターニング(a)工程として、両面の銅箔に所定のパ
ターンとなるようにレジストを付与し、エッチングなど
によりパターニングし、回路パターン(2)を形成する
。このパターン面を整面(b)、水洗(c)、および乾
燥(d)シた後、酸化処理工程(e)として、黒化処理
液(亜塩素酸ナトリウム31g#l、水酸化ナトリウム
15g/Q、リン酸三ナトリウム12g/Ωの水溶液)
中に95℃で2分間浸漬して酸化膜を形成した後、15
09Cのオーブン中で15分間乾燥(f)させた。
Example 1 First, as the inner layer base material (1), a copper-clad laminate made of glass-covered soot epoxy resin having a total thickness of 0.60 mm and having copper foil 70 μm thick on both sides was used. First, in step 6 of patterning (a) in FIG. 2, a resist is applied to the copper foil on both sides so as to form a predetermined pattern, and patterning is performed by etching or the like to form a circuit pattern (2). After smoothing (b), washing with water (c), and drying (d) this patterned surface, a blackening treatment solution (sodium chlorite 31g#l, sodium hydroxide 15g#l/ Q, aqueous solution of trisodium phosphate 12g/Ω)
After forming an oxide film by immersing it in water at 95°C for 2 minutes,
Dry (f) for 15 minutes in an oven at 09C.

次に表面処理工程(g)として、カップリング処理液(
β一(3,4エポキシシク口ヘキシル)エチルトリメト
キシシラン2重量%、酢酸0.5重量%、エタノール6
0重量%、水37.5重量%)にフッ素系界面活性剤フ
ロラードFC−430 (スリーエム(株)製、商品名
)を0.05重量%加えた界面活性剤人の表面処理液(
3)を用い、第1図の表面処理装置の処理液槽(4)に
満し、パターニングおよび酸化膜を形成した内層基材(
1)を吊下治具(図示せず)により固定して、表面処理
液(3)中に吊下げ浸漬した。
Next, as a surface treatment step (g), a coupling treatment solution (
β-(3,4 epoxycyclohexyl)ethyltrimethoxysilane 2% by weight, acetic acid 0.5% by weight, ethanol 6
A surfactant human surface treatment solution (0% by weight, 37.5% by weight of water) and 0.05% by weight of the fluorosurfactant Florado FC-430 (manufactured by 3M Co., Ltd., trade name) was added.
3) was used to fill the treatment liquid tank (4) of the surface treatment apparatus shown in Figure 1, and the inner layer substrate (4) on which the patterning and oxide film had been formed was applied.
1) was fixed with a hanging jig (not shown) and suspended and immersed in the surface treatment liquid (3).

7 その後、室温でIO分間風乾し、次にこれをオーブン内
にて、110℃で30分間乾燥(h)シて、カップリン
グ剤の表面処理膜を形成した。
7 Thereafter, it was air-dried at room temperature for 10 minutes, and then dried in an oven at 110° C. for 30 minutes (h) to form a surface-treated film of the coupling agent.

この表面処理膜を形成した内J一基材(1)は、多層基
板製造工程(i)において、ガラスクロスーエボキシ樹
脂よりなるプリプレグ(図示せず)と交互に必要層数を
積層し、最外層に銅箔を積層してプレス成形することに
より、多層銅張積層板を得た。
In the multilayer board manufacturing process (i), the J-1 base material (1) on which this surface treatment film was formed was laminated alternately with a prepreg (not shown) made of glass cloth and epoxy resin in the required number of layers, and then A multilayer copper-clad laminate was obtained by laminating copper foil on the outer layer and press-molding.

実施例2 フッ素系界面活性剤フロラードFC−430の添加量を
0.3重量%にし、その他は実施例1と同様にして、多
層銅張積層板を得た。
Example 2 A multilayer copper-clad laminate was obtained in the same manner as in Example 1 except that the amount of the fluorosurfactant Florard FC-430 was 0.3% by weight.

実施例3 フッ素系界面活性剤フロラードFC−430の添加量を
0.5重量%にし、その他は実施例1と同様にして、多
層銅張積層板を得た。
Example 3 A multilayer copper-clad laminate was obtained in the same manner as in Example 1 except that the amount of the fluorosurfactant Florard FC-430 was 0.5% by weight.

実施例4 フッ素系界面活性剤フロラードFC−430の添加景を
1.0重量%にし、その他は実施例1と同様にして、多
層銅張積層板を得た。
Example 4 A multilayer copper-clad laminate was obtained in the same manner as in Example 1 except that the fluorosurfactant Florard FC-430 was added in an amount of 1.0% by weight.

8ー 比較例1 フッ素系界面活性剤を添加しないカップリング処理液を
用いて、実施例1と同様にして、多層銅張積層板を得た
8 - Comparative Example 1 A multilayer copper-clad laminate was obtained in the same manner as in Example 1 using a coupling treatment liquid to which no fluorosurfactant was added.

上記実施例1〜4および比較例1の多層銅張積層板につ
いて、その表面処理した銅箔とプリプレグ間の引剥し力
を測定し、表面処理膜の外観状態を調べた。結果を表1
に示す。
Regarding the multilayer copper-clad laminates of Examples 1 to 4 and Comparative Example 1, the peeling force between the surface-treated copper foil and the prepreg was measured, and the appearance of the surface-treated film was examined. Table 1 shows the results.
Shown below.

表1 上記実施例において、界面活性剤はフッ素系界面活性剤
を用いたが、添加により表面張力を下げ、表面処理液の
ハジキや液ダマリを防止して、均一な表面処理を行うこ
とができる界面活性剤やレベリング剤は、本発明の界面
活性剤として使用可能=9 である。
Table 1 In the above examples, a fluorine-based surfactant was used as the surfactant, but its addition lowers the surface tension, prevents repellency and clumps of the surface treatment solution, and enables uniform surface treatment. Surfactants and leveling agents can be used as surfactants in the present invention = 9.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明によれば,カップリング剤および
界面活性剤を含む表面処理液を用いることにより、特別
な処理装置を必要とせず、内層基材表面に一様な表面処
理膜をムラなく容易に形成することができ、これにより
接着力が安定するとともに、そのレベルを向上させるこ
とができ、多層銅張積層板の歩留および信頼性の向上に
寄与できる効果がある。
As described above, according to the present invention, by using a surface treatment liquid containing a coupling agent and a surfactant, a uniform surface treatment film can be formed on the inner layer base material surface without the need for special treatment equipment. This makes it possible to stabilize the adhesive force and improve its level, which has the effect of contributing to improving the yield and reliability of multilayer copper-clad laminates.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は表面処理装置の断面図、第2図は多層銅張積層
板の製造工程を示す系統図である。 図中、(1)は内層基材、(2)は回路パターン、(3
)は表面処理液、(4)は処理液槽である。
FIG. 1 is a sectional view of the surface treatment apparatus, and FIG. 2 is a system diagram showing the manufacturing process of a multilayer copper-clad laminate. In the figure, (1) is the inner layer base material, (2) is the circuit pattern, and (3) is the inner layer base material.
) is a surface treatment liquid, and (4) is a treatment liquid tank.

Claims (1)

【特許請求の範囲】[Claims] (1)多層銅張積層板を形成するための内層基材の銅箔
の酸化膜表面に表面処理を行う方法において、カップリ
ング剤を0.3〜5重量%含む表面処理液に、界面活性
剤を0.05〜3重量%混合した界面活性剤混入表面処
理液を用いて内層基材の表面処理を行い、表面処理膜を
形成することを特徴とする多層銅張積層板用内層基材の
表面処理方法。
(1) In a method of surface-treating the surface of an oxide film of copper foil as an inner layer base material for forming a multilayer copper-clad laminate, a surface treatment solution containing 0.3 to 5% by weight of a coupling agent is added with a surfactant. An inner layer base material for a multilayer copper-clad laminate, characterized in that the inner layer base material is surface-treated using a surfactant-containing surface treatment liquid containing 0.05 to 3% by weight of a surfactant to form a surface treatment film. surface treatment method.
JP1205890A 1990-01-22 1990-01-22 Surface treatment of internal-layer base material for multilayer copper-clad laminated board Pending JPH03217078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1205890A JPH03217078A (en) 1990-01-22 1990-01-22 Surface treatment of internal-layer base material for multilayer copper-clad laminated board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1205890A JPH03217078A (en) 1990-01-22 1990-01-22 Surface treatment of internal-layer base material for multilayer copper-clad laminated board

Publications (1)

Publication Number Publication Date
JPH03217078A true JPH03217078A (en) 1991-09-24

Family

ID=11795002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1205890A Pending JPH03217078A (en) 1990-01-22 1990-01-22 Surface treatment of internal-layer base material for multilayer copper-clad laminated board

Country Status (1)

Country Link
JP (1) JPH03217078A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118394A (en) * 1980-02-22 1981-09-17 Fujitsu Ltd Method of manufacturing multilayer circuit board
JPS5944894A (en) * 1982-09-08 1984-03-13 日立化成工業株式会社 Method of producing multilayer printed circuit board
JPS60141876A (en) * 1983-12-28 1985-07-26 Mitsubishi Metal Corp Activating solution for electroless plating and activating method using it
JPS62156282A (en) * 1985-12-27 1987-07-11 Hitachi Chem Co Ltd Pretreating solution for electroless plating
JPS6437081A (en) * 1987-08-03 1989-02-07 Matsushita Electric Works Ltd Multilayer printed wiring board

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118394A (en) * 1980-02-22 1981-09-17 Fujitsu Ltd Method of manufacturing multilayer circuit board
JPS5944894A (en) * 1982-09-08 1984-03-13 日立化成工業株式会社 Method of producing multilayer printed circuit board
JPS60141876A (en) * 1983-12-28 1985-07-26 Mitsubishi Metal Corp Activating solution for electroless plating and activating method using it
JPS62156282A (en) * 1985-12-27 1987-07-11 Hitachi Chem Co Ltd Pretreating solution for electroless plating
JPS6437081A (en) * 1987-08-03 1989-02-07 Matsushita Electric Works Ltd Multilayer printed wiring board

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