JPH0321707U - - Google Patents

Description

[Brief explanation of drawings]

1 to 4 show embodiments embodying the present invention. FIG. 1 is a diagram illustrating the configuration of a dimension measuring device that is an embodiment of the present invention, and FIG. FIG. 3 is a diagram illustrating the configuration of another embodiment of the present invention. FIG. 4 is a diagram illustrating the configuration of another embodiment of the present invention. FIG. FIG. 2 is a diagram illustrating the configuration of an embodiment. In the figure, 20...Polarization constant optical fiber, 30, 80
, 96... Optical transmitting/receiving section, 38, 82, 98... Optical sensor head section, 200... Moving mirror, 400, 5
00...Measurement mechanism.

Claims (1)

[Claims for Utility Model Registration] 1. Transmission and reception of light between an optical transmitter/receiver and an optical sensor head via an optical fiber, and interference light obtained by interfering a reference light and a measurement light. A dimension measuring device using an optical fiber sensor device that performs measurements based on phase changes, wherein the movable mirror of the optical sensor head section is arranged on the movable side of the measuring mechanism, and the main body of the optical sensor head section is fixed to the measuring mechanism. A dimension measuring device characterized by being placed on the side. 2 The optical fiber sensor device includes a single fixed polarization optical fiber for transmission that transmits light in two transmission modes whose polarization planes are orthogonal to each other, and a fixed polarization optical fiber for extracting reference light and measurement light having the same frequency. an optical transmitting/receiving unit that detects two types of interference light that are incident on the polarization optical fiber and returned through the polarization-controlled optical fiber and converts them into electrical signals; The reference light and the measurement light are taken out, and as the phase of the measurement light is changed by the expansion and contraction of the measuring mechanism, the phase of the light intensity change is changed, and the phase of the light intensity change is changed. and an optical sensor head section for inputting light into the polarization-controlled optical fiber so that two types of interference light whose beams are shifted by 90 degrees from each other are transmitted in two transmission modes of the polarization-controlled optical fiber, determining the amount of phase change of the interference light based on two types of A-phase and B-phase electrical signals whose phases are shifted by 90 degrees corresponding to the types of interference light, and measuring the amount of displacement of the measuring mechanism; The dimension measuring device according to claim (1), which measures the dimensions of an object to be measured. 3. The optical fiber sensor device includes a single transmission polarization optical fiber that transmits light in two transmission modes whose polarization planes are orthogonal to each other, and the reference light and measurement light are incident on the polarization constant optical fiber, The reference light and measurement light are transmitted in one and the other of the two transmission modes, and interference light is generated based on the reference light and measurement light returned via the polarization constant optical fiber. an optical transmitter/receiver that detects a change in light intensity and converts it into an electrical signal, and changes the phase of the measurement light transmitted by the polarization-constant optical fiber by expanding and contracting the measuring mechanism;
2. The dimension measuring device according to claim 1, further comprising an optical sensor head section that causes the reference light and measurement light to enter the polarization-constant optical fiber so as to be transmitted in a transmission mode opposite to that of the forward path. 4. The optical fiber sensor device includes a constant polarization optical fiber for transmission that transmits light in two transmission modes in which the planes of polarization are orthogonal to each other, and two types of linearly modified optical fibers in which the planes of polarization are orthogonal to each other and have different frequencies. the two types of linear changes are transmitted in one and the other of the two transmission modes, and the two types of interference light returned in the two transmission modes of the constant polarization optical fiber are respectively detected. an optical transmitter/receiver that converts the signal into an electrical signal, and divides the two types of linearly polarized light transmitted by the constant polarization optical fiber into the reference light and measurement light, respectively, and converts the frequency of the measurement light into the measurement light. The reference light is changed by the expansion and contraction of the scale mechanism, and the polarization planes of the two types of linear changes included in either the reference light or the measurement light are rotated by 90° in opposite directions. and an optical sensor head section that combines the measurement light and the measurement light and makes it enter the polarization-controlled optical fiber. 2. The dimension measuring device according to claim 1, wherein the dimension measuring device measures the amount of displacement of the object to be measured.