JPH0321708U - - Google Patents
Info
- Publication number
- JPH0321708U JPH0321708U JP8261589U JP8261589U JPH0321708U JP H0321708 U JPH0321708 U JP H0321708U JP 8261589 U JP8261589 U JP 8261589U JP 8261589 U JP8261589 U JP 8261589U JP H0321708 U JPH0321708 U JP H0321708U
- Authority
- JP
- Japan
- Prior art keywords
- code plate
- rotary
- angle
- electron beam
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Description
第１図は本考案に係る角度測定装置を示す構成
図、第２図および第３図は第１図装置の動作を説
明するための図である。
１……電子ビーム光学系、２……ロータリース
テツパ、３……回転テーブル、４……回転コード
板、５……二次電子、６……二次電子検出器、１
１……電子ビーム、４１……スリツト。
FIG. 1 is a block diagram showing an angle measuring device according to the present invention, and FIGS. 2 and 3 are diagrams for explaining the operation of the device shown in FIG. 1. 1...Electron beam optical system, 2...Rotary stepper, 3...Rotary table, 4...Rotary code plate, 5...Secondary electron, 6...Secondary electron detector, 1
1...electron beam, 41...slit.
Claims (1)
定装置において、回転コード板を一定の角度で回
転させるロータリーステツパと、前記回転コード
板に電子ビームを走査して照射する電子ビーム光
学系と、前記回転コード板から発生する二次電子
を検出する二次電子検出器とを備え、ロータリー
ステツパが回転コード板をスリツトのピツチに対
応する間隔でステツプ状に回転し各位置において
二次電子検出器から出力される信号に基づいてス
リツト角度を測定するように構成したことを特徴
とする角度測定装置。 An angle measuring device for measuring the slit angle of a rotary code plate includes: a rotary stepper that rotates the rotary code plate at a constant angle; an electron beam optical system that scans and irradiates the rotary code plate with an electron beam; A rotary stepper rotates the rotary code plate in steps at intervals corresponding to the pitch of the slits, and detects secondary electrons generated from the code plate at each position. An angle measuring device characterized in that it is configured to measure a slit angle based on an output signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8261589U JPH0612488Y2 (en) | 1989-07-13 | 1989-07-13 | Angle measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8261589U JPH0612488Y2 (en) | 1989-07-13 | 1989-07-13 | Angle measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0321708U true JPH0321708U (en) | 1991-03-05 |
| JPH0612488Y2 JPH0612488Y2 (en) | 1994-03-30 |
Family
ID=31629591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8261589U Expired - Lifetime JPH0612488Y2 (en) | 1989-07-13 | 1989-07-13 | Angle measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612488Y2 (en) |
-
1989
- 1989-07-13 JP JP8261589U patent/JPH0612488Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612488Y2 (en) | 1994-03-30 |
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