JPH03217219A - Method for manufacturing porous polymer membrane - Google Patents

Method for manufacturing porous polymer membrane

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Publication number
JPH03217219A
JPH03217219A JP1052590A JP1052590A JPH03217219A JP H03217219 A JPH03217219 A JP H03217219A JP 1052590 A JP1052590 A JP 1052590A JP 1052590 A JP1052590 A JP 1052590A JP H03217219 A JPH03217219 A JP H03217219A
Authority
JP
Japan
Prior art keywords
film
porous
layer
irradiation
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1052590A
Other languages
Japanese (ja)
Inventor
Yasuyo Matsumoto
松本 安世
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP1052590A priority Critical patent/JPH03217219A/en
Publication of JPH03217219A publication Critical patent/JPH03217219A/en
Pending legal-status Critical Current

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  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PURPOSE:To obtain a porous polymer film having large separation efficiency by irradiating both sides of the polymer film with ions so that the porous layer side having fine holes has larger irradiation damages than the other side having cylindrical holes to chemically etch the film. CONSTITUTION:The one side of a polymer film (polycarbonate, etc.) is subjected to ion irradiation (accelerated ions such as argon ions, etc., are convenient for use) which is necessary to form a porous layer (B) having cylindrical holes. Then the other side of the film is irradiated with ion kind and irradiation quantity which satisfy the requirement to form a fine-porous supporting body layer (A), and preferably, this layer is formed in such a manner that the holes penetrate into the layer (A). Thereby, irradiation quantity in the porous layer (A) is larger than that for formation of the porous layer (B). Moreover, it is preferable that the porous layer (A) is easily etched than the porous layer (B). By irradiating both sides of the polymer film to give irradiation damage and to chemically etch the film as above described, the porous film having large separation efficiency and excellent strength is obtained.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、多孔性高分子膜の製造方法の改良に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to improvements in methods for producing porous polymer membranes.

さらに、本発明は、精密濾過膜や限外濾過膜等として利
用しうる分離膜に好適な多孔性高分子膜の製造方法の改
良に関する。
Furthermore, the present invention relates to an improvement in a method for producing a porous polymer membrane suitable for a separation membrane that can be used as a microfiltration membrane, an ultrafiltration membrane, or the like.

(従来の技術及び課題) 従来、分離膜等に使用する微孔性の多孔膜は、機械的に
高分子膜(フイルム)又は繊維状物を(不完全)延伸す
る技術、化学的に高分子の溶解度差を利用する技術、ま
た、溶媒可溶の固体微粒子を混入後、溶出する技術、焼
結により多孔膜とする技術、気泡入り高分子シートの圧
漬による技術など従来公知の多孔化手段により製造され
ている。
(Conventional techniques and issues) Conventionally, microporous membranes used for separation membranes, etc. have been produced by mechanically stretching a polymer membrane (film) or fibrous material (incompletely), or by chemically Conventionally known porous means include techniques that utilize the solubility difference between the two, techniques that involve mixing and eluting solvent-soluble solid particles, techniques that create a porous membrane by sintering, and techniques that involve pressing a bubble-filled polymer sheet. Manufactured by.

その多孔形態も三次元網目状、独立気泡型、連通型など
不規則な有孔を有するもの、また、連続的に孔径が変わ
るなど種々様々にわたっている。
The pore forms vary widely, including those with irregular pores such as three-dimensional network, closed cell type, and open-cell type, as well as those with continuously changing pore diameters.

そして、その多孔膜中の見掛けの孔径も不均一であって
、対象とする被分離物の精製または除去の分離効率に限
界がある。
Moreover, the apparent pore diameter in the porous membrane is also non-uniform, and there is a limit to the separation efficiency for purifying or removing the object to be separated.

機械的に(不完全)延伸したフイルムとして四弗化エチ
レン樹脂が知られているが、この膜は延伸により見掛け
の孔径を制御しているため分離効率に限界がある。
Tetrafluoroethylene resin is known as a mechanically (incompletely) stretched film, but this membrane has a limit in separation efficiency because the apparent pore diameter is controlled by stretching.

また、化学的に処理された膜としてセルロースエステル
、ボリアミド、ポリスルホン等があり、これらの樹脂を
良溶媒に溶がした後、貧溶媒と接触させ多孔質膜を得る
溶解度差を利用するもの力4ある。この構造は多孔層の
上に緻密層または多孔質スキン層を有している。この膜
の孔径制御は、溶媒の種類、濃度、温度等を制御ことに
よるもので、見掛けの孔径も不均一で、分離効率に限界
がある。
In addition, chemically treated membranes include cellulose ester, polyamide, polysulfone, etc., and these resins are dissolved in a good solvent and then brought into contact with a poor solvent to obtain a porous membrane using the difference in solubility. be. This structure has a dense layer or a porous skin layer on top of the porous layer. The pore size of this membrane is controlled by controlling the type, concentration, temperature, etc. of the solvent, and the apparent pore size is nonuniform, which limits the separation efficiency.

近年、緻密な高分子フィルムにイオンを照射した後、損
傷部分を化学的にエッチングすることにより多孔膜が得
られることが明らかになっているこのような例として、
特公昭52−3987号公報、特開昭54−11971
号公報、特開昭59117546号公報等に記載の技術
が知られている。このようにして得られる分離膜は、均
一な孔径が得られ、分離効率が良い。
In recent years, it has become clear that a porous film can be obtained by irradiating a dense polymer film with ions and then chemically etching the damaged areas.
Japanese Patent Publication No. 52-3987, Japanese Patent Publication No. 54-11971
The techniques described in Japanese Patent Application Laid-open No. 59117546 and the like are known. The separation membrane obtained in this way has a uniform pore size and has good separation efficiency.

しかし、このような膜には、イオンが貫通するためのフ
イルムの厚さが必要であり、工業用として市販されてい
るイオン加速器を利用する場合、イオンのエネルギーは
たかだか10MeV以下であって、膜厚に限界がある。
However, such a membrane requires a film thickness for ions to penetrate, and when using a commercially available ion accelerator for industrial use, the ion energy is at most 10 MeV or less, and the membrane cannot be penetrated. There is a limit to the thickness.

また、分離膜として利用する場合、膜強度を保持するた
めに、最低限厚みが10lIm以上が好ましく、このよ
うなフイルムの場合、イオンが貫通しないか、貫通して
も穿孔がフィルム方向に均一であり、且つ孔の長さが長
いために分離時の抵抗が大きくなり分離に要する時間が
長くなる.(課題を解決するための手段) 本発明者らは、微孔性多孔膜(A)とシリンダー状の穿
孔を有する多孔膜(B)とを組合せることに着目すると
共に、イオン照射処理の仕方に工夫を凝らすことにより
、表裏面にそれぞれ微孔性多孔膜(A)とシリンダー状
の穿孔を有する多孔膜(B)とを合わせ有する多孔性高
分子膜を製造できることを見出して従来の問題点を解決
出来、本発明を完成するに至った。
In addition, when used as a separation membrane, in order to maintain membrane strength, the minimum thickness is preferably 10 lIm or more; in the case of such a film, ions either do not penetrate, or even if they do, the perforations are uniform in the direction of the film. In addition, because the length of the hole is long, the resistance during separation becomes large and the time required for separation becomes long. (Means for Solving the Problems) The present inventors have focused on combining a microporous membrane (A) and a porous membrane having cylindrical perforations (B), and have also focused on the method of ion irradiation treatment. It was discovered that by devising techniques, it was possible to produce a porous polymer membrane that had both a microporous membrane (A) and a porous membrane with cylindrical perforations (B) on the front and back surfaces, respectively, and solved the problems of the conventional method. This problem was solved and the present invention was completed.

すなわち、本発明は; 微孔性の多孔層(A)及びシリンダー状の穿孔を有する
層(B)からなる多孔性高分子膜の製造方法において、
高分子膜の両面から、微孔性の多孔層(A)側がシリン
ダー状の穿孔を有する層(B)よりも照射損傷が大きく
なるようにイオン照射し、次いで化学的にエッチング処
理することを特徴とする、多孔性高分子膜の製造方法で
ある。
That is, the present invention provides: A method for producing a porous polymer membrane comprising a microporous layer (A) and a layer (B) having cylindrical perforations,
It is characterized by ion irradiation from both sides of the polymer membrane so that the microporous layer (A) side suffers more irradiation damage than the layer with cylindrical perforations (B), and then chemically etched. This is a method for producing a porous polymer membrane.

更に、本発明を具体的に説明する。Furthermore, the present invention will be specifically explained.

本発明の方法に用いる高分子膜としては、照射損傷と化
学的エッチング処理が適用されうる種々の高分子膜(フ
イルム)が挙げられ、具体的にはポリカーボネート、ポ
リアリレート、ポリフェニレンエーテル、ポリエステル
、硝酸セルロース、酢酸セルロース、ポリ弗化ビニリデ
ン、ポリテトラフルオロエチレン、ポリアクリロニトリ
ル等の高分子膜(フイルム)が挙げられる。
Examples of the polymer film used in the method of the present invention include various polymer films to which irradiation damage and chemical etching treatments can be applied, including polycarbonate, polyarylate, polyphenylene ether, polyester, and nitric acid. Examples include polymer films such as cellulose, cellulose acetate, polyvinylidene fluoride, polytetrafluoroethylene, and polyacrylonitrile.

本発明に用いられる高エネルギーイオン(粒子)として
は、高分子膜(フイルム)を貫通して所望の照射損傷を
形成しうる公知の種々の荷電、非荷電粒子を意味し、具
体的には、核分裂性物質の核分裂によって得られる核分
裂片、放射性同位;一内糺ハ)Vシ襦l▼トプ冫凰た4
り2−帖1uyf+m二占5匣I▼よって得られる加速
イオン等が挙げられるが、この加速器による加速イオン
を用いるのが工業上簡便である。そのエネルギー域とし
ては、I M e V以上が適当である。
The high-energy ions (particles) used in the present invention refer to various known charged and uncharged particles that can penetrate a polymer membrane (film) and form desired irradiation damage, and specifically, Fission fragments obtained by fission of fissile material, radioactive isotopes;
Examples include accelerated ions obtained by 2-chapter 1 uyf + m binary 5 box I▼, but it is industrially convenient to use accelerated ions produced by this accelerator. The appropriate energy range is I M e V or higher.

特に、加速イオンとしては、アルゴンイオン、酸素イオ
ン、窒素イオン、ニッケルイオンなどが挙げられる。
In particular, examples of accelerated ions include argon ions, oxygen ions, nitrogen ions, and nickel ions.

また、イオン照射の雰囲気としては、とくに制限されな
いが、空気中、真空下、あるいはオゾン、酸素などの活
性ガス下で行いうる。
Further, the atmosphere for ion irradiation is not particularly limited, but may be performed in air, under vacuum, or under an active gas such as ozone or oxygen.

本発明に用いる化学的エッチング処理には、一般に、化
学処理エッチング剤に高分子膜(フィルム)を所定時間
浸漬させて行う、いわゆる湿式エッチング処理が好適に
適用できる。
Generally, so-called wet etching treatment, which is performed by immersing a polymer membrane (film) in a chemical etching agent for a predetermined period of time, can be suitably applied to the chemical etching treatment used in the present invention.

使用する化学的エッチング剤としては、水酸化ナトリウ
ム、水酸化カリウム等のアルカリ溶液や過マンガン酸カ
リ、次亜塩素酸ナトリウム等の酸化剤や、塩酸、硫酸、
弗化水素酸等の酸性溶液が挙げられる。さらに、界面活
性剤としての効果のどを添加しても良い。
Chemical etching agents used include alkaline solutions such as sodium hydroxide and potassium hydroxide, oxidizing agents such as potassium permanganate and sodium hypochlorite, hydrochloric acid, sulfuric acid,
Examples include acidic solutions such as hydrofluoric acid. Furthermore, a substance having an effect as a surfactant may be added.

本発明においては、まず、高分子膜(フイルム)の片側
から、シリンダー状の穿孔を有する多孔層(B)を形成
するのに必要なイオン照射をする。
In the present invention, first, ion irradiation necessary to form a porous layer (B) having cylindrical perforations is performed from one side of a polymer membrane (film).

この際に、照射するイオン量は穿孔の重なりを考慮して
109個/ c+I1以下にすることが好ましい。
At this time, it is preferable that the amount of ions to be irradiated is 109 ions/c+I1 or less, taking into consideration the overlap of the perforations.

次に、他方の面からは微孔性の多孔質支持体層(A)を
得るのに充分なイオン種及び照射量を照射して、穿孔が
多孔層(^)に貫通していることが好ましい。
Next, from the other side, ion species and irradiation amount sufficient to obtain a microporous porous support layer (A) are irradiated, and it is confirmed that the perforations penetrate into the porous layer (^). preferable.

従って、この場合、照射量は微孔性の多孔層(A)の側
が、シリンダー状の穿孔を有する多孔層(B)の形成に
必要な照射量よりも大きいことが必要である。
Therefore, in this case, it is necessary that the irradiation amount on the microporous porous layer (A) side is larger than the irradiation amount required to form the porous layer (B) having cylindrical perforations.

さらに、微孔性の多孔層(A)はシリンダー状の穿孔を
有する多孔層(B)よりもエッチングされやすいことが
好ましく、このために、微孔性の多孔層(A)の側の照
射イオンは質量の大きなイオンが好ましい。
Furthermore, the microporous porous layer (A) is preferably etched more easily than the porous layer (B) having cylindrical perforations, and for this reason, the irradiated ions on the side of the microporous porous layer (A) is preferably an ion with a large mass.

このようにして高分子膜(フイルム)の両面から照射し
て照射損傷を与えた高分子膜(フィルム)を、化学的に
エソチングすることによりその両面にそれぞれ微孔性の
多孔層(A)とシリンダー状の穿孔を有する多孔層(B
)とを合わせ持つ多孔性高分子膜が得られる。
By chemically etching the polymer membrane (film) which has been damaged by irradiation by irradiating both sides of the polymer membrane (film) in this way, a microporous porous layer (A) is formed on each side of the polymer membrane (film). Porous layer with cylindrical perforations (B
) can be obtained.

この場合、化学的エッチング処理は前記イオン照射処理
と同時に行っても良い。
In this case, the chemical etching process may be performed simultaneously with the ion irradiation process.

この多孔性高分子膜は、同一のイオン種、エネルギーで
照射して得られる穿孔膜に比較して、膜厚が厚いものも
可能であり、この多孔性高分子膜は微孔性の多孔質支持
体層(A)とシリンダー状の穿孔を有する多孔層(B)
とからなり穿孔層単独の膜よりも機械的強度が強い。
This porous polymer membrane can be thicker than a perforated membrane obtained by irradiation with the same ion species and energy; Support layer (A) and porous layer with cylindrical perforations (B)
It has stronger mechanical strength than a membrane with a perforated layer alone.

(作用) 本発明の方法で得られた多孔性高分子膜は、微孔性の多
孔質支持体層(A)とシリンダー状の穿孔を有する多孔
層(B)とが1枚の高分子膜(フイルム)を形成してい
て界面を有しないので、界面剥離等の問題も起こらない
(Function) The porous polymer membrane obtained by the method of the present invention has a microporous support layer (A) and a porous layer (B) having cylindrical perforations in one polymer membrane. (film) and does not have an interface, so problems such as interfacial peeling do not occur.

また、本発明の方法により得られる多孔性高分子膜は、
一般のイオン照射による多孔膜に比して膜厚を10μm
程度と薄《することができ、被分離物を分離・除去する
処理速度が早くなる。
Furthermore, the porous polymer membrane obtained by the method of the present invention is
The film thickness is 10 μm compared to the porous film made by general ion irradiation.
The separation and removal process speed is faster.

また、本発明の方法により得られる多孔性高分子膜は、
微孔性の多孔質支持体層(A)とシリンダー状の穿孔を
有する多孔層(B)とを有するので、優れた分離能を発
揮する。
Furthermore, the porous polymer membrane obtained by the method of the present invention is
Since it has a microporous support layer (A) and a porous layer (B) having cylindrical holes, it exhibits excellent separation ability.

(実施例) 本発明を下記の実施例により説明するが、これは本発明
の範囲を制限するものでない。
(Examples) The present invention will be illustrated by the following examples, which are not intended to limit the scope of the invention.

実施例1 厚さ10μmのポリカーボネートフイルムの一方から、
ヘリウムイオンをIXIO’個/ c+fi照射した後
、フイルムの裏面からアルゴンイオンをIX 1 0 
10個/Clll照射した。このフイルムを6NのNa
OH水溶液に50゜Cで10時間エノチングすることに
より、0.01μmの孔径を有する穿孔層が得られると
ともに、表面に凹凸を有する多孔質支持体層も形成され
た。
Example 1 From one side of a 10 μm thick polycarbonate film,
After irradiating IXIO'/c+fi helium ions, argon ions were irradiated from the back side of the film.
10 pieces/Clll were irradiated. This film was washed with 6N Na
By enoching in an OH aqueous solution at 50° C. for 10 hours, a perforated layer with a pore diameter of 0.01 μm was obtained, and a porous support layer with an uneven surface was also formed.

実施例2 実施例1と同様に厚さ12μmのポリアリレートフイル
ムの一方から、酸素イオンをI X 1 0I1個/d
照射した後、フイルムの裏面からアルゴンイオンを1×
1011個/d照射した。このフイルムを6NのNaO
H水溶液に50゜C下で6時間エッチングすることによ
り、0.1μmの孔径を有する穿孔層が得られるととも
に、多孔質支持体層も形成された。
Example 2 As in Example 1, oxygen ions were extracted from one side of a polyarylate film with a thickness of 12 μm at I
After irradiation, argon ions were applied 1x from the back side of the film.
1011 pieces/d were irradiated. This film was coated with 6N NaO
By etching in an H aqueous solution at 50° C. for 6 hours, a perforated layer with a pore size of 0.1 μm was obtained, and a porous support layer was also formed.

実施例3 実施例1と同様に厚さ10μmのポリーpフェニレンエ
ーテルフイルムの一方から、M素イオンを1×10s個
/d照射した後、フイルムの裏面からニッケルイオンを
IXIO”個/ ci照射した。このフイルムを3(l
dの5NのNaOH+20dのエタノール溶液に45゜
Cで6時間エノチングした。この結果、0.1μmの孔
径を有する穿孔層が得られるとともに、表面に凹凸を有
する多孔質支持体層も形成された。
Example 3 As in Example 1, one side of a 10 μm thick poly p-phenylene ether film was irradiated with 1×10 s/d of M elementary ions, and then nickel ions were irradiated with IXIO”/ci from the back side of the film. .3(l) of this film
Enotation was carried out in 5N NaOH + 20d ethanol solution at 45°C for 6 hours. As a result, a perforated layer having a pore diameter of 0.1 μm was obtained, and a porous support layer having an uneven surface was also formed.

比較例1 厚さ10μmのポリカーボネートフイルムの一方から、
窒素イオンを1×10′1個/d照射した後、フイルム
の裏面からアルゴンイオンを1×108個/d照射した
。このフイルムを6NのNaOH水溶液に50゜Cで4
時間エッチングすることにより、窒素イオン照射側は0
.1μmの孔径を有する穿孔層、アルゴンイオン照射側
は0.2μmの孔径を有する穿孔からなる多孔層が得ら
れた。
Comparative Example 1 From one side of a 10 μm thick polycarbonate film,
After irradiating with nitrogen ions at 1×10'1/d, the film was irradiated with 1×108 argon ions/d from the back side of the film. This film was soaked in a 6N NaOH aqueous solution at 50°C for 4 hours.
By etching for a long time, the nitrogen ion irradiation side becomes 0.
.. A porous layer with a pore diameter of 1 μm and a porous layer with a pore diameter of 0.2 μm on the argon ion irradiation side were obtained.

窒素イオン穿孔がアルゴンイオン穿孔の多孔層に貫通す
る確率が非常に小さくて、分離膜として利用できない。
The probability that nitrogen ion perforations penetrate the porous layer of argon ion perforations is very small, so it cannot be used as a separation membrane.

比較例2 厚さ10μmのボリカーボネートフイルムの一方から、
窒素イオンをIXIO’個/d照射した後、フイルムの
裏面からヘリウムイオンを1×101個/d照射した。
Comparative Example 2 From one side of a polycarbonate film with a thickness of 10 μm,
After irradiating with IXIO' nitrogen ions/d, the film was irradiated with 1×101 helium ions/d from the back side of the film.

このフイルムを6NのNaOH水溶液に50゜Cで3時
間エッチングすることにより、窒素イオン照射側は0.
1μmの孔径を有する穿孔層、質量の小さなヘリウム照
射側は照射損傷が小さ《て表面の凹凸の程度は僅かであ
り、多孔層は形成されない。
By etching this film in a 6N NaOH aqueous solution at 50°C for 3 hours, the nitrogen ion irradiation side became 0.
The perforated layer having a pore diameter of 1 μm and the helium irradiation side having a small mass have little irradiation damage, the degree of surface irregularity is slight, and no porous layer is formed.

(発明の効果) 本発明の製造方法により得られた多孔性高分子膜は、孔
径の均一なシリンダー状の穿孔層を有しているので分離
効率が大きく、且つ微孔性多孔層が支持・補強体として
の役割を果たし、強度的にも優れた多孔膜を与える。
(Effects of the Invention) The porous polymer membrane obtained by the production method of the present invention has a cylindrical perforation layer with a uniform pore diameter, so it has a high separation efficiency, and the microporous porous layer supports and supports the membrane. It serves as a reinforcing body and provides a porous membrane with excellent strength.

また、本発明の製造方法によると、穿孔層の厚みは照射
条件(イオン種、エネルギー等)により任意に変えるこ
とができ、1 pm以下の厚みの薄い穿孔層の形成も可
能である. また、本発明の製造方法によると、市販の加速器でも、
フイルムの両方から照射するためにイオンの飛′程より
も厚いフイルムにも適用できる。
Furthermore, according to the manufacturing method of the present invention, the thickness of the perforated layer can be arbitrarily changed depending on the irradiation conditions (ion species, energy, etc.), and it is also possible to form a perforated layer as thin as 1 pm or less. Furthermore, according to the manufacturing method of the present invention, even with a commercially available accelerator,
Because the film is irradiated from both sides, it can be applied to films that are thicker than the ion range.

Claims (1)

【特許請求の範囲】[Claims] 微孔性の多孔層(A)及びシリンダー状の穿孔を有する
層(B)からなる多孔性高分子膜の製造方法において、
高分子膜の両面から、微孔性の多孔層(A)側がシリン
ダー状の穿孔を有する層(B)よりも照射損傷が大きく
なるようにイオン照射し、次いで化学的にエッチング処
理することを特徴とする、多孔性高分子膜の製造方法。
In a method for producing a porous polymer membrane comprising a microporous layer (A) and a layer having cylindrical perforations (B),
It is characterized by ion irradiation from both sides of the polymer membrane so that the microporous layer (A) side suffers more irradiation damage than the layer with cylindrical perforations (B), and then chemically etched. A method for producing a porous polymer membrane.
JP1052590A 1990-01-22 1990-01-22 Method for manufacturing porous polymer membrane Pending JPH03217219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1052590A JPH03217219A (en) 1990-01-22 1990-01-22 Method for manufacturing porous polymer membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1052590A JPH03217219A (en) 1990-01-22 1990-01-22 Method for manufacturing porous polymer membrane

Publications (1)

Publication Number Publication Date
JPH03217219A true JPH03217219A (en) 1991-09-25

Family

ID=11752665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1052590A Pending JPH03217219A (en) 1990-01-22 1990-01-22 Method for manufacturing porous polymer membrane

Country Status (1)

Country Link
JP (1) JPH03217219A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004508184A (en) * 2000-09-12 2004-03-18 アールト,カリ Water purification equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004508184A (en) * 2000-09-12 2004-03-18 アールト,カリ Water purification equipment

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