JPH03218650A - Transfer equipment - Google Patents
Transfer equipmentInfo
- Publication number
- JPH03218650A JPH03218650A JP1279247A JP27924789A JPH03218650A JP H03218650 A JPH03218650 A JP H03218650A JP 1279247 A JP1279247 A JP 1279247A JP 27924789 A JP27924789 A JP 27924789A JP H03218650 A JPH03218650 A JP H03218650A
- Authority
- JP
- Japan
- Prior art keywords
- transfer station
- cassette
- semiconductor wafer
- transfer
- transport vehicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Multi-Process Working Machines And Systems (AREA)
- General Factory Administration (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体製造における機械による自動搬送と作
業者による手動搬送の切り替えを容易に行なう搬送設備
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a conveyance facility for easily switching between automatic conveyance by a machine and manual conveyance by an operator in semiconductor manufacturing.
第３図は、従来の半導体ウェハカセットの斜視図であり
、第４図は従来の半導体生産工場の搬送システムを示す
構成図である。FIG. 3 is a perspective view of a conventional semiconductor wafer cassette, and FIG. 4 is a configuration diagram showing a conventional transportation system of a semiconductor production factory.
第３図において、（１）は半導体ウェハ（以下、「ウェ
ハ」と呼ぶ）であり、《２月よ半導体ウェハを複数枚収
納する半導体ウェハカセット（以下、［カセット」と呼
ぶ）である。In FIG. 3, (1) is a semiconductor wafer (hereinafter referred to as "wafer"), and is a semiconductor wafer cassette (hereinafter referred to as "cassette") that stores a plurality of semiconductor wafers.
第４図において、《５》はカセットを複数個搬送する搬
送車であり、（６）は搬送車が走行する搬送車走行路で
ある。（７）は搬送車がカセットの積み降ろしや、取り
出しをする移載ステーシ１ンであり、移載ステーション
は、搬送車が移載ステーシタンに対してカセットを積み
降ろす搬送車積み降ろし場所（７ａ）、搬送車が移載ス
テーシ曹ンからカセットを取り出す搬送車取り出し場所
（７ｂ） ％異なるロボット間の受渡しを行なうロボッ
ト受渡し場所（７Ｃ）、移載ステーション内の上記各場
所の間でカセットを搬送する移載ステーション搬送ロボ
ット（７ｄ）から楕成されている。（８）はウェハ処理
装置（９）と移載ステーション（７）間でカセットを搬
送する移送ロボットであり、（９）はウェハを加工処理
するウェハ処理装置である。Ｑ（ｌは上記搬送車（５）
、移載ステーション（７》、ウェハ処理装置Ｑ１の複数
個を制御する上位計算機で、θ〃は上位計算機の端末で
ある。In FIG. 4, ``5'' is a conveyance vehicle that conveys a plurality of cassettes, and (6) is a conveyance vehicle travel path along which the conveyance vehicle travels. (7) is a transfer station 1 where the transport vehicle loads and unloads cassettes, and the transfer station is a transport vehicle loading/unloading area (7a) where the transport vehicle loads and unloads cassettes from the transfer station. , the transport vehicle take-out location (7b) where the transport vehicle takes out the cassette from the transfer station; the robot transfer location (7C) where the transport vehicle transfers the cassettes between different robots; the transport vehicle transports the cassettes between the above locations within the transfer station; The transfer station has an oval configuration consisting of a transfer robot (7d). (8) is a transfer robot that transports the cassette between the wafer processing device (9) and the transfer station (7), and (9) is the wafer processing device that processes the wafer. Q (l is the above transport vehicle (5)
, a transfer station (7), and a host computer that controls a plurality of wafer processing devices Q1, and θ〃 is a terminal of the host computer.
次に動作について説明する。通常、移載ステーシ甘ン（
７）間でのカセット（２）の搬送は、上位計算機ＱＱの
指示に基づき、搬送車（５）によって行なわれるが、搬
送車（５）が故障の時、搬送車（５）の搬送負荷が高い
時等の場合で、以下のような、作業者による搬送が行な
われる。Next, the operation will be explained. Usually, the transfer station is
The transport of the cassette (2) between 7) is carried out by the transport vehicle (5) based on instructions from the host computer QQ, but when the transport vehicle (5) is out of order, the transport load of the transport vehicle (5) is In cases such as when the temperature is high, the following transportation is carried out by workers.
作業者は、移載ステーション（７）の搬送車取り出し場
所（７ｂ）上のカセット（２冫のカセット名を、同カセ
ット（２月こ収納されたウェハ（１）上に刻印された名
前より認識する。次に作業者は、上位計算機００の端末
σ〃に向かい、上記のカセット名をキーにして、端末（
ロ）を操作し上位計算機０１がデータとして有している
上記カセット（２）の進捗上の位置から、上記カセット
（２）を離脱させる。作業者は、移載ステーション（７
ノに向かい、上記カセット（２）を取り出し、搬送先で
ある移載ステーション（７）に向かい、上記カセット（
２）をこの移載ステーション（７）上の搬送車積み降ろ
し場所（７ａ）に置く。次に作業者は、端末αｋへ向か
い、上記のカセット名をキーにして、端末（ロ）を操作
し、上記移載ステーション（７）上の積み降ろし場所（
７ａ） Ｉこ相当する進捗上の位置へ上記カセット（２
）を復活させる。この後は、搬送車（５月こより積み降
ろされた場合と同一になり、上記カセット（２）は、上
位計算機αＱの指示により移載ステーシ習ン搬送ロボッ
ト（７ｄ）により、搬送車積み降ろし場所（７ａ）から
、受渡し場所（７Ｃ）へと送られ、移送ロボット（８）
により、受渡し場所（７Ｃ）からウェハ処理装置（９冫
へと搬送される。The operator recognizes the name of the cassette (2nd cassette) on the transfer station (7)'s transport vehicle take-out location (7b) from the name engraved on the same cassette (wafer (1) stored in February). Next, the worker heads to the terminal σ of the host computer 00, uses the above cassette name as a key, and enters the terminal (
b) to remove the cassette (2) from the position on the progress of the cassette (2) that the host computer 01 has as data. The worker is at the transfer station (7
Go to the transfer station (7), take out the cassette (2), head to the transfer station (7), and take out the cassette (2).
2) is placed at the transport vehicle loading/unloading area (7a) on this transfer station (7). Next, the worker heads to the terminal αk, operates the terminal (B) using the above cassette name as a key, and uses the loading/unloading location (
7a) Move the above cassette (2) to the corresponding progress position.
) to be revived. After this, the procedure will be the same as when the transport vehicle was loaded and unloaded from May, and the cassette (2) will be transferred to the transport vehicle loading and unloading location by the transfer station learning transport robot (7d) according to instructions from the host computer αQ. (7a), is sent to the delivery location (7C), and is transferred to the transfer robot (8).
The wafer is transported from the delivery location (7C) to the wafer processing device (9C).
従来の搬送設備は以上のように構成されているので、作
業者によって搬送しなければならないとき、作業者が移
載ステーションからカセットを取り出す場合と、移載ス
テーシ１ンにカセットを積み降ろす場合とに、端末を用
いて上位計算機に通信しなければならないので、操作が
複雑であり、わずらわしく、誤りが発生しやすい。Conventional transport equipment is configured as described above, so when a cassette has to be transported by a worker, there are two cases: when the worker takes out the cassette from the transfer station, and when the worker loads and unloads the cassette from the transfer station. Moreover, since it is necessary to communicate with the host computer using a terminal, the operation is complicated, cumbersome, and error-prone.
この発明は上記のような問題点を解消するためになされ
たもので、作業者による搬送を行なう場合、わずらわし
い端末操作を行なうことなく、また、誤りを発生するこ
となく、簡単な操作で、カセットの搬送を行える搬送設
備を得ることを目的とする。This invention was made to solve the above-mentioned problems, and when transporting cassettes by an operator, the cassette can be easily transported without having to perform troublesome terminal operations or causing errors. The purpose is to obtain conveyance equipment that can convey.
この発明に開わる搬送設備は、カセットに取り付けられ
たＩＤカードと、移載ステーションに設けられたＩＤカ
ードを読みとるＩＤカード認識装置を取り付けた読み取
り場所、搬送車が移載ステーシ四ンからカセットを取り
出す場所に対応して上位計算機への作業者の入力手段、
それぞれの場所の間でカセットを搬送する搬送手段とを
備えている。The transport equipment according to the present invention includes an ID card attached to a cassette, a reading place equipped with an ID card recognition device installed at the transfer station, and a transport vehicle that picks up the cassette from the transfer station. An operator input means to the host computer corresponding to the extraction location;
and conveying means for conveying the cassette between the respective locations.
本発明によれば、作業者が上記入力手段を用いることに
より、上位計算機は搬送車取り出し場所に対応する情報
を与えて、上位計算機は搬送車の稼働状態を確認し、そ
の情報に基づいて移載ステーション内の搬送手段を制御
し、また上記ＩＤカードの情報を上記ＩＤカード認識装
置が読みとることにより、その情報を元に、上位計算機
は移載ステーションを制御する。According to the present invention, when the worker uses the input means, the host computer gives information corresponding to the location where the transport vehicle is taken out, the host computer checks the operating state of the transport vehicle, and transfers the transport vehicle based on the information. The host computer controls the transfer station by controlling the transport means in the loading station, and by having the ID card recognition device read the information on the ID card, based on the information.
第１図は、半導体ウェハカセットの斜視図であり、第２
図は本発明に関わる１実施例を示した半導体生産工場の
搬送システムの構成図である。同一部分または相当部分
には同一符号を付する。FIG. 1 is a perspective view of a semiconductor wafer cassette;
The figure is a configuration diagram of a transportation system in a semiconductor production factory showing one embodiment of the present invention. Identical or equivalent parts are given the same reference numerals.
第１図において、（３）はＩＣカードであり、（４）は
ＩＤカードを読みとるＩＤカード認識装置である。In FIG. 1, (3) is an IC card, and (4) is an ID card recognition device that reads the ID card.
ＩＤカード（３）は通信部（３ｂ）によって光通信を行
ない、ＩＤカード認識装置（４）と通信し、表示部（３
ａ）には、，カセット集等の情報を表示する。（２）は
上記ＩＤカードを取り付けられるようになったカセット
である。The ID card (3) performs optical communication through the communication section (3b), communicates with the ID card recognition device (4), and displays the display section (3).
In a), information about cassette collections, etc. is displayed. (2) is a cassette to which the above ID card can be attached.
第２図において、（７）は搬送車がカセットの積み降ろ
しや、取り出しをする移載ステーシ１ンであり、移載ス
テーションは、従来と同様の（７ａχ（７ｂ）、（７Ｃ
）、（７ｄ）と、ＩＤカードを読みとるＩＤカード認識
装置を備えたＩＤカード読み取り場所（７ｅ）、搬送車
取り出し場所（７ｂ）に対応し作業者による搬送が可能
であるかの問い合わせを上位計算機に伝える入力手段（
７ｆ）、上記入力手段（７ｆ）に対応し、作業者による
搬送が許可できない場合辰示するランブＣ’ｔｇ） ｓ
作業者が移載ステーション（７》にカセット（２》を積
み降ろす作業者積み降ろし場所（７ｈ）、作業者が移載
ステーシ，ンからカセットを取り出す作業者取り出し場
所（７１）、作業者が移載ステーション（７）にカセッ
ト（２）を積み降ろしたことを上位計算機ａＯに伝える
作業者積み降ろし完了ボタン（７ｊ）から構成されてい
る。（８）， （９３％ （１０は従来と同様である。In Fig. 2, (7) is a transfer station 1 where the transport vehicle loads and unloads cassettes and takes them out.
), (7d), the ID card reading location (7e) equipped with an ID card recognition device that reads ID cards, and the transportation vehicle removal location (7b), the host computer inquires whether transportation by the worker is possible. Input means (
7f), a ramp C'tg) that corresponds to the input means (7f) and indicates when transportation by the worker is not permitted.
A worker loading and unloading area (7h) where a worker loads and unloads a cassette (2) from the transfer station (7), a worker unloading area (71) where a worker takes out a cassette from the transfer station, It consists of an operator loading/unloading completion button (7j) that informs the host computer aO that the cassette (2) has been loaded and unloaded at the loading station (7).(8), (93% (10 is the same as before) be.
次に動作について説明する。通常、移載ステーシ蓼ン間
でのカセット（２〕の搬送は、上位計算機αＯの指示に
基づき、搬送車（５冫によって行なわれるが、搬送車（
５）が故障の時、搬送車（５冫が搬送負荷が高い時等の
場合で、以下のような作業者による搬送が行なわれる。Next, the operation will be explained. Normally, the transport of the cassette (2) between the transfer stations is carried out by a transport vehicle (5) based on instructions from the host computer αO.
When the transport vehicle (5) is out of order, the transport is carried out by the following workers, such as when the transport vehicle (5) is under a heavy transport load.
作業者は、移載ステーション（７）の搬送車取り出し場
所（７ｂ）上のカセット（２）のカセット名を、ＩＤカ
ード（３）の表示部分（３ａ）に表示されている名前か
ら認識する。次に作業者は、搬送車取り出し場所に対応
する入力手段（７ｆ）を操作する。The operator recognizes the cassette name of the cassette (2) on the transport vehicle take-out location (7b) of the transfer station (7) from the name displayed on the display portion (3a) of the ID card (3). Next, the operator operates the input means (7f) corresponding to the transport vehicle take-out location.
上位計算機αＱがすでに、搬送車（５）にその情報を受
けた搬送車取り出し場所（７ｂ）上のカセット（２）を
搬送するように命令していたならば、ランプ（７ｇ）を
表示することにより、作業者による取り出しの不許可を
作業者に伝える。逆に作業者による搬送が可能であれば
、上位計算機ＱＧがデータとして有している上記カセッ
ト（２）の進捗上の位置から、上記カセット（２）を手
動搬送の仕掛かりとし、移載ステーシ曹ン搬送ロボット
（７ｄ）を用いて搬送車取り出し場所（７ｂ）から作業
者取り出し場所（７１）に搬送する。作業者は、作業者
取り出し場所（７１）から、上記カセット（２）を取り
出し、搬送先である移載ステーシ町ン（７》に向かい、
上記カセット（２）をこの移載ステーション（７）上の
作業者積み降ろし場所（７ｈ）に置く。つぎの作業者は
、作業者積み降ろし完了ボタン（７ｊ）を押すと、カセ
ット（２）は移載ステーシ１ン搬送ロボット（７ｄ）に
よりＩＤカード読み取り場所（７ｅ）に搬送され、上位
計算機ａ０は上記カセット（２）のカセット名を、ＩＤ
カード（３）をＩＤカード認識装ｉｔ （４）により読
みとることによって認識し、手動搬送の仕掛かりから、
上記移載ステーシ．ン（７）上の進捗上の位置へ上記カ
セット（２）を移す。この後は、搬送車（５）により積
み降ろされた場合と同一となり、上記カセット（２）は
、上位計算機ＱＱの指示により移載ステーション搬送ロ
ボット（７ｄ）により、受渡し場所（７Ｃ）へと送られ
、移送ロボット（８）により、ウェハ処理装置（９）へ
と送られる。If the host computer αQ has already commanded the transport vehicle (5) to transport the cassette (2) on the transport vehicle removal location (7b) that received the information, the lamp (7g) should be displayed. This notifies the worker that removal is not permitted. On the other hand, if it is possible for the operator to transport the cassette (2), the cassette (2) is considered to be in the process of manual transport based on the progress position of the cassette (2) that the host computer QG has as data, and the transfer station is moved. The carrier robot (7d) is used to transport the vehicle from the vehicle take-out location (7b) to the worker take-out location (71). The worker takes out the cassette (2) from the worker take-out location (71) and heads to the transfer station town (7) where it will be transported.
The cassette (2) is placed at the worker loading/unloading area (7h) on this transfer station (7). When the next worker presses the worker loading/unloading completion button (7j), the cassette (2) is transported to the ID card reading location (7e) by the transfer station 1 transport robot (7d), and the host computer a0 Enter the cassette name of the above cassette (2) as ID.
The card (3) is read and recognized by the ID card recognition device (4), and the card (3) is recognized during manual transport.
The above transfer station. Move the cassette (2) to a position on the progress line (7). After this, the process is the same as when the cassette (2) is loaded and unloaded by the transport vehicle (5), and the cassette (2) is sent to the delivery location (7C) by the transfer station transport robot (7d) according to instructions from the host computer QQ. The wafer is transferred to the wafer processing device (9) by the transfer robot (8).
以上のようにこの発明によれば、搬送車が移載ステーシ
ョンからカセットを取り出す場所に対応して上位計算機
への作業者の入力手段を備えたこと、また、カセットに
ＩＤカード取り付け、移載ステーシ１ンにＩＤカードを
読みとるＩＤカード認識装置を備え付けたＩＤカード読
み取り場所を設けたことにより、機械による自動搬送か
ら作業者による手動搬送の切り替えの端末での操作が不
用となり、容易になる。As described above, according to the present invention, the transport vehicle is provided with an operator input means to the host computer corresponding to the location where the cassette is taken out from the transfer station, and the ID card is attached to the cassette, and the transfer station By providing an ID card reading place equipped with an ID card recognition device for reading ID cards in one machine, it becomes easy to switch from automatic conveyance by a machine to manual conveyance by an operator by eliminating the need for an operation at a terminal.
第１図は、本発明に関わる半導体ウェハカセットの斜視
図であり、第２図は本発明に係わる１実施例を示した半
導体生産工場の搬送システムを示す構成図である。第３
図は、従来の半導体ウェハカセットの斜視図であり、第
４図は従来の半導体生産工場の搬送設備を示す構成図で
ある。
図において、（１）は半導体ウェハ、（２）は半導体ウ
ェハカセット、（３）は■Ｄカード、（４）はＩＤカー
ド認識装置、（５）は搬送車、（７）は移載ステーシ，
ン、（７ａ）は搬送車積み降ろし場所、（７ｂ）は搬送
車取り出し場所、（７ｄ）は移載ステーション搬送ロボ
ット、（７ｅ）はＩＤカード読み取り場所、（７ｆ）は
搬送車取り出し場所対応入力手段、（７ｈ）は作業者積
み降ろし場所、（７１）は作業者取り出し場所、００は
上位計算機である。
なお、図中、同一符号は同一、又は相当部分を示す。FIG. 1 is a perspective view of a semiconductor wafer cassette according to the present invention, and FIG. 2 is a configuration diagram showing a transport system of a semiconductor production factory showing one embodiment of the present invention. Third
This figure is a perspective view of a conventional semiconductor wafer cassette, and FIG. 4 is a configuration diagram showing a conveyance facility of a conventional semiconductor production factory. In the figure, (1) is a semiconductor wafer, (2) is a semiconductor wafer cassette, (3) is a ■D card, (4) is an ID card recognition device, (5) is a transport vehicle, (7) is a transfer station,
(7a) is the vehicle loading/unloading location, (7b) is the vehicle unloading location, (7d) is the transfer station transport robot, (7e) is the ID card reading location, (7f) is the input corresponding to the vehicle unloading location. Means, (7h) is a worker loading/unloading place, (71) is a worker unloading place, and 00 is a host computer. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
導体ウェハカセットと、上記半導体ウェハカセットを複
数個搬送する搬送車と、上記搬送車が上記半導体ウェハ
カセットを積み降ろし取り出す移載ステーションと、上
記搬送車と上記移載ステーションの複数個の制御を行な
う上位計算機からなる半導体ウェハ搬送設備において、
上記半導体ウェハカセットにＩＤカードを取り付け、上
記移載ステーションに、上記ＩＤカードを読み取る認識
装置を取り付けたＩＤカードの読み取り場所を設け、ま
た、上記移載ステーションに、上記搬送車が上記移載ス
テーションから上記半導体ウェハカセットを取り出す場
所と、上記搬送車が上記移載ステーションに上記半導体
ウェハカセットを積み降ろす場所と、作業者が上記移載
ステーションから上記半導体ウェハカセットを取り出す
場所と、作業者が上記移載ステーションに上記半導体ウ
ェハカセットを積み降ろす場所とを独立に複数個有し、
上記搬送車が上記移載ステーションから上記半導体カセ
ットを取り出す場所に対応する上位計算機への作業者の
入力手段を設け、上記のそれぞれの場所の間で上記半導
体ウェハカセットを上位計算機に基づき搬送する搬送手
段とを設けたことを特徴とする搬送設備。A semiconductor wafer, a semiconductor wafer cassette that stores a plurality of the semiconductor wafers, a transport vehicle that transports a plurality of the semiconductor wafer cassettes, a transfer station where the transport vehicle loads and unloads the semiconductor wafer cassettes, and a transport vehicle. In semiconductor wafer transfer equipment consisting of a host computer that controls a plurality of the above-mentioned transfer stations,
An ID card is attached to the semiconductor wafer cassette, and the transfer station is provided with an ID card reading place equipped with a recognition device for reading the ID card, and the transfer station is provided with an ID card reading place, and the transfer station is provided with an ID card reading place. A place where the semiconductor wafer cassette is taken out from the transfer station, a place where the carrier vehicle loads and unloads the semiconductor wafer cassette from the transfer station, a place where the worker takes out the semiconductor wafer cassette from the transfer station, and a place where the worker takes out the semiconductor wafer cassette from the transfer station. The transfer station has multiple independent locations for loading and unloading the semiconductor wafer cassettes,
A means for inputting an operator to a host computer corresponding to a location where the transport vehicle takes out the semiconductor cassette from the transfer station is provided, and the semiconductor wafer cassette is transported between each of the locations based on the host computer. A conveyance facility characterized by being provided with a means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27924789A JPH07105430B2 (en) | 1989-10-25 | 1989-10-25 | Transport equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27924789A JPH07105430B2 (en) | 1989-10-25 | 1989-10-25 | Transport equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03218650A true JPH03218650A (en) | 1991-09-26 |
| JPH07105430B2 JPH07105430B2 (en) | 1995-11-13 |
Family
ID=17608488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27924789A Expired - Fee Related JPH07105430B2 (en) | 1989-10-25 | 1989-10-25 | Transport equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07105430B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677305A (en) * | 1992-07-30 | 1994-03-18 | Mitsubishi Electric Corp | Semiconductor processing apparatus and method, and semiconductor processing apparatus module |
| US5372471A (en) * | 1991-12-13 | 1994-12-13 | United Microelectronics Corporation | Single semiconductor wafer transfer method and manufacturing system |
| JP2000236011A (en) * | 1999-02-12 | 2000-08-29 | Samsung Electronics Co Ltd | Substrate carry-in / out system and carry-in / out method |
-
1989
- 1989-10-25 JP JP27924789A patent/JPH07105430B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5372471A (en) * | 1991-12-13 | 1994-12-13 | United Microelectronics Corporation | Single semiconductor wafer transfer method and manufacturing system |
| JPH0677305A (en) * | 1992-07-30 | 1994-03-18 | Mitsubishi Electric Corp | Semiconductor processing apparatus and method, and semiconductor processing apparatus module |
| JP2000236011A (en) * | 1999-02-12 | 2000-08-29 | Samsung Electronics Co Ltd | Substrate carry-in / out system and carry-in / out method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07105430B2 (en) | 1995-11-13 |
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|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
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| LAPS | Cancellation because of no payment of annual fees |