JPH03218936A - Rare earth element-doped quartz glass and its production - Google Patents

Rare earth element-doped quartz glass and its production

Info

Publication number
JPH03218936A
JPH03218936A JP1339990A JP1339990A JPH03218936A JP H03218936 A JPH03218936 A JP H03218936A JP 1339990 A JP1339990 A JP 1339990A JP 1339990 A JP1339990 A JP 1339990A JP H03218936 A JPH03218936 A JP H03218936A
Authority
JP
Japan
Prior art keywords
rare earth
earth element
quartz glass
glass
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1339990A
Other languages
Japanese (ja)
Inventor
Kazuo Kamiya
和雄 神屋
Hidenori Mimura
榮紀 三村
Noboru Edakawa
登 枝川
Hisahiro Yoshida
尚弘 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
KDDI Corp
Original Assignee
Shin Etsu Chemical Co Ltd
Kokusai Denshin Denwa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Kokusai Denshin Denwa KK filed Critical Shin Etsu Chemical Co Ltd
Priority to JP1339990A priority Critical patent/JPH03218936A/en
Publication of JPH03218936A publication Critical patent/JPH03218936A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/01433Reactant delivery systems for delivering and depositing additional reactants as liquids or solutions, e.g. for solution doping of the porous glass preform
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/50Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with alkali metals

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)

Abstract

PURPOSE:To improve the intensity of emission spectrum and laser characteristics by incorporating rare earth elements and alkali metal chlorides oxides into quartz glass. CONSTITUTION:A porous glass base material having 0.3-1.0g/cm<3> average volume density is obtained by depositing fine particles of glass which are obtained from hydrolysis of Si compd. such as SiCl4 in flame. Then this base material is immersed in an org. solvent (e.g. methanol) solution containing a soluble salt of rare earth element (e.g. ErCl3), dried in air, immersed in an org. solvent solution containing alkali metal oxide (e.g. LiCl2), dried by heating at 30-80 deg.C, and sintered at 1100-1800 deg.C in a He gas atmosphere to form transparent glass.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は希土類ドープ石英ガラス、特には光ファイバレ
ーザーなどに有用とされる機能性の希土類元素ドープ石
英ガラスおよびその製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to rare earth element-doped quartz glass, particularly to a functional rare earth element-doped quartz glass useful for optical fiber lasers and the like, and a method for producing the same.

[従来の技術コ Nd, Yb, }lo、Gdなとの希土類元素イオン
をドープしたガラスがレーザー作用を示すことは知られ
ており、このものは母体ガラスがアルカリまたはアルカ
リ土類酸化物などを含む多成分系のけレ1酸塩あるいは
リン酸塩ガラスとされており、これについてはリン酸塩
系のものが特にすぐれた物性を示すものとされているが
、これには熱伝導性が劣り、化学的耐久性にも問題があ
るという欠点がある。
[Conventional technology] It is known that glass doped with rare earth element ions such as Nd, Yb, }lo, and Gd exhibits laser action. It is said to be a multi-component chelate or phosphate glass, and phosphate-based glass is said to exhibit particularly excellent physical properties, but it also has thermal conductivity. It has the drawbacks of being inferior and having problems with chemical durability.

このため、母体ガラスとして石英ガラスを使用するもの
が提案されており、このものは機能性を有しており、石
英ガラス系光ファイバとの接続も容易であることから光
ファイバレーザー、光増幅器として応用されている。
For this reason, products using quartz glass as the matrix glass have been proposed, and because they have functionality and are easy to connect with silica glass optical fibers, they can be used as optical fiber lasers and optical amplifiers. It is applied.

また、この希土類元素ドープ石英ガラスの製造について
は希土類塩化物原料を高温加熱で蒸発させて供給する、
MCVD法が知られており(特公表63−501711
号公報参照)、これについてはけい素化合物の火炎加水
分解で生成したシリカガラス微粒子を堆積して得た多孔
質カラス母材に希土類元素化合物を添加したのち、高温
で焼結して透明ガラス化する方法も知られている(特公
昭58−3980号公報参照)。
In addition, for the manufacture of this rare earth element-doped quartz glass, rare earth chloride raw materials are evaporated by high-temperature heating and supplied.
The MCVD method is known (Special Publication No. 63-501711).
Regarding this, a rare earth element compound is added to a porous glass matrix obtained by depositing silica glass particles produced by flame hydrolysis of a silicon compound, and then sintered at high temperature to form transparent glass. A method is also known (see Japanese Patent Publication No. 58-3980).

[発明が解決しようとする課題コ しかし、このMCVD法は希土類塩化物を高温加熱て蒸
発して反応系に供給するものてあるために供給量の制御
か困難であり、さらには大型の母材を得ることが難しい
という不利があるし、このMCVD法および上記した多
孔質ガラス母材を使用する方法で作られた希土類元素ド
ープ石英ガラスには希土類イオンの分散が均一でないた
めに良好なレーザー特性、強度の大きい発光スペクトル
を得ることがてきないという欠点がある。
[Problems to be solved by the invention] However, since this MCVD method involves heating the rare earth chloride at high temperature to evaporate and supplying it to the reaction system, it is difficult to control the supply amount, and furthermore, it requires a large base material. However, rare earth element-doped silica glass made by this MCVD method and the above-mentioned method using a porous glass matrix has good laser properties because the rare earth ions are not uniformly dispersed. However, the drawback is that it is not possible to obtain a high-intensity emission spectrum.

そのため、この種の石英ガラスの製造についてはこの反
応系にP205やAρ203を添加して希土類イオンを
均一に分散させて発光効率を高める方法も提案されてい
る(特公昭63−41858号公報参照)か、希土類イ
オンはP205またはAI203とネットワークを形成
する確率が低いために発光効率の改善は必ずしも十分で
はなく、これについてはより一層の高効率化が求められ
ている。
Therefore, for the production of this type of quartz glass, a method has been proposed in which P205 and Aρ203 are added to the reaction system to uniformly disperse rare earth ions and increase luminous efficiency (see Japanese Patent Publication No. 41858/1983). However, since rare earth ions have a low probability of forming a network with P205 or AI203, the improvement in luminous efficiency is not necessarily sufficient, and in this regard, even higher efficiency is required.

[課題を解決するための千段コ 本発明はこのような不利を解決することのてぎる希土類
元素ドープ石英ガラスおよびその製造方法に関するもの
であり、これは石英ガラスに希土類元素とアルカリ金属
酸化物を含有させてなることを特徴とする希土類元素石
英ガラス、およひけい素化合物の火炎加水分解によって
生成したシリカガラス微粒子を堆積して得た多孔質ガラ
ス母材を希土類元素イオンを含む可溶性塩の溶液に浸漬
したのち、これをアルカリ金属化合物の溶液に浸漬して
から乾燥し、つぎにこの多孔質ガラス母材を高温で焼結
し透明ガラス化することを特徴とする希土類元素ドープ
石英ガラスの製造方法に関するものである。
[Several Steps to Solve the Problems] The present invention relates to a rare earth element-doped quartz glass and a method for producing the same which can solve these disadvantages. A porous glass base material obtained by depositing silica glass fine particles produced by flame hydrolysis of a rare earth element ion and a soluble salt containing a rare earth element ion. A rare earth element-doped quartz glass characterized in that the porous glass base material is sintered at a high temperature to become transparent glass. The present invention relates to a manufacturing method.

すなわち、本発明者らは希土類元素イオンが石英ガラス
中に均一に分散されている希土類元素ドープ石英ガラス
およびその製造方法について種々検討した結果、この石
英ガラスについてはこれを希土類元素とアルカリ金属酸
化物を含有するものとするとその発光効率の高められる
こと、このアルカリ金属酸化物についてはK.Rbでも
効果はあるがLi, Naが顕著な効果を示すことを見
出すと共に、この製造方法についてはけい素化合物の火
炎加水分解で生成させたシリカガラス微粒子を堆積させ
て多孔質ガラス母材を作り、これを希土類元素イオンを
含む可溶性塩の溶液に浸漬して多孔質ガラス母材にこの
塩を滲透させ、ついでアルカリ金属化合物の溶液に浸漬
し、乾燥したのち、この多孔貿ガラス母材を高温で焼結
して透明ガラス化して石英ガラスとすると、希土類元素
とアルカリ金属酸化物が均一に分散された希土類元素ト
ブ石英ガラスが得られることを見出して本発明を完成さ
せた。
That is, the present inventors have conducted various studies on rare earth element-doped quartz glass in which rare earth element ions are uniformly dispersed in the quartz glass, and its manufacturing method. Regarding this alkali metal oxide, K. Although Rb is effective, it was discovered that Li and Na showed a remarkable effect, and in this production method, a porous glass base material was created by depositing silica glass fine particles produced by flame hydrolysis of a silicon compound. This is immersed in a solution of a soluble salt containing rare earth element ions to permeate the salt into the porous glass matrix, then immersed in a solution of an alkali metal compound, dried, and then heated to a high temperature. The present inventors have completed the present invention by discovering that when sintered to make transparent vitrification into quartz glass, rare earth element tob quartz glass in which rare earth elements and alkali metal oxides are uniformly dispersed can be obtained.

以下にこれをさらに詳述する。This will be explained in further detail below.

[作 用] 本発明の希土類元素ドープ石英ガラスは石英ガラスに希
土類元素とアルカリ金属酸化物とを均に分散させたもの
である。
[Function] The rare earth element-doped quartz glass of the present invention has a rare earth element and an alkali metal oxide uniformly dispersed in quartz glass.

本発明の希土類元素ドープ石英ガラスを構成する石英ガ
ラスは公知の方法で作られる人工石英カラスとすればよ
い。したがってこれは例えば四塩化けい素などのような
けい素化合物を酸水素火炎と共に耐熱性の担体に当て、
ここに生成したガラス微粒子を例えば石英ガラス棒上に
堆積させて多孔質ガラス母材をつくり、ついでこれを高
温で焼結して透明ガラス化するという方法で作ったもの
とすればよい。
The quartz glass constituting the rare earth element-doped quartz glass of the present invention may be an artificial quartz glass made by a known method. Therefore, this involves exposing a silicon compound, such as silicon tetrachloride, to a heat-resistant carrier together with an oxyhydrogen flame.
The glass particles thus generated may be deposited, for example, on a quartz glass rod to create a porous glass base material, which is then sintered at high temperature to form transparent glass.

他方、この石英ガラスに分散される希土類元素はネオシ
ム、エルビウム、ユーロピウム、セリウムなどとすれば
よいが、これらは後記するように希土類元素の可溶性塩
溶液とし多孔買ガラス母材に含侵されるので希土類元素
の塩化物、硝酸塩として添加すれはよく、また、この石
英カラスに分散されるアルカリ金属酸化物とはナトリウ
ム、カリウム、リチウム、ルビジュウムなどの酸化物と
されるが、これも後記するように多孔質ガラス母材に溶
液として含浸されるのでこれはこれらアルカリ金属の塩
化物、硝酸塩などの可溶性塩として使用し、ついて加熱
して酸化物とするようにすれはよい。
On the other hand, the rare earth elements dispersed in this quartz glass may be neosim, erbium, europium, cerium, etc.; Elements are often added as chlorides and nitrates, and the alkali metal oxides dispersed in this quartz glass are oxides of sodium, potassium, lithium, rubidium, etc., but these are also porous as described later. Since it is impregnated into a glass base material as a solution, it can be used as a soluble salt such as a chloride or nitrate of these alkali metals, and then heated to form an oxide.

本発明の希土類元素ドープ石英ガラスは後記するように
けい素化合物の火炎加水分解て生成したガラス微粒子か
ら作った多孔買ガラス母材に希土類系化合物とアルカリ
金属化合物を含浸させたのち、これを高温で透明ガラス
化することによって得ることかできるが、このものは希
土類元素と共にアルカリ金属酸化物を含有している希土
類元素のみでドープされているものにくらべて発光効率
が高く、したがって光ファイバレーザー、光増幅器とし
て有利に使用できるという有用性が与えられる。
The rare earth element-doped quartz glass of the present invention is produced by impregnating a porous glass base material made from glass particles produced by flame hydrolysis of a silicon compound with a rare earth compound and an alkali metal compound, as described later. However, this material has higher luminous efficiency than that doped only with a rare earth element, which contains an alkali metal oxide together with a rare earth element, and is therefore suitable for optical fiber lasers. It has the utility of being advantageously used as an optical amplifier.

なお、この石英ガラスに添加される希土類元素の量は従
来公知の希土類元素ドープ石英ガラスと同様でよく、し
たがってこれは石英ガラスに対して50〜100,00
0 ppmの範囲とすればよく、ここに添加されるアル
カリ金属酸化物はNa, K、Li, Rhのいずれで
あってもよく、K, Rhでも効果はるが、これはイオ
ン半径の小さいLi, Naが顕著な効果を示すので、
これはLi, Naとするが好ましく、この添加量は石
英ガラスに対し0.5重量%未満の微量ではその効果が
少なく、20重量%より多くしてもそれ以上の効果は期
待することができないので0.5〜20重量%の範囲と
すればよい。
Note that the amount of rare earth elements added to this quartz glass may be the same as that of conventionally known rare earth element-doped silica glass, and therefore, the amount of rare earth elements added to the quartz glass is 50 to 100,000.
The alkali metal oxide added here may be any of Na, K, Li, and Rh. K and Rh are also effective, but this is not true for Li, which has a small ionic radius. , Since Na shows a remarkable effect,
It is preferable to use Li or Na as the added amount.If the amount added is less than 0.5% by weight based on the quartz glass, the effect will be small, and if it is more than 20% by weight, no further effect can be expected. Therefore, it may be in the range of 0.5 to 20% by weight.

つぎに本発明の希土類元素ドープ石英ガラスの製造方法
について述べる。
Next, a method for producing rare earth element-doped quartz glass of the present invention will be described.

本発明の希土類元素ドープ石英カラスを構成する石英ガ
ラスは前記したように四塩化けい素などのけい素化合物
の火炎加水分解法て作られた多孔質ガラス母材を透明ガ
ラス化することによって作ったものとされるが、この多
孔質ガラス母材は担体として石英ガラスを使用する公知
のVAD法.OVA法で作られたものとすればよい。し
かし、このものは後述する希土類元素可溶性塩の溶液に
浸漬したとき、またはアルカリ金属化合物の溶液に浸漬
したときに微粒子間の凝集力が失われて破壊しないだけ
の機械的強度を有するものであることが必要とされるの
で、平均かさ密度が0.3g/cm3以上のものとする
ことがよいが、この多孔質ガラス母材を希土類元素の可
溶性塩溶液に浸漬したときの希土類元素溶液の拡散、お
よびアルカリ金属化合物溶液に含浸したときのアルカリ
金属化合物の拡散を容易にするためにはかさ密度か0.
1g/cm3以下のものとすることがよい。なお、この
多孔質ガラス母材はシリカ単独のものであってもよいか
、けい素化合物の火炎加水分解によるシリカ生成時にけ
い素化合物に光ファイバ用のドーバントとしてよく知ら
れている四塩化ゲルマニウムなどを添加してゲルマニア
(Ge02)を含有させたものとしてもよいし、さらに
は光導波構造を形成するのに必要な屈折率分布を有する
ものとしてもよい。
The quartz glass constituting the rare earth element-doped quartz glass of the present invention is made by transparently vitrifying a porous glass base material made by flame hydrolysis of a silicon compound such as silicon tetrachloride, as described above. However, this porous glass matrix can be prepared using the known VAD method using quartz glass as a carrier. It may be one made using the OVA method. However, this material has enough mechanical strength that the cohesive force between the fine particles will not be lost and the material will not break when immersed in a solution of a soluble salt of a rare earth element or a solution of an alkali metal compound, which will be described later. Therefore, it is preferable to have an average bulk density of 0.3 g/cm3 or more. However, when this porous glass base material is immersed in a soluble salt solution of rare earth elements, the diffusion of the rare earth element solution , and to facilitate the diffusion of the alkali metal compound when impregnated with the alkali metal compound solution, the bulk density should be 0.
It is preferable that the amount is 1 g/cm3 or less. The porous glass base material may be made of silica alone, or may be made of germanium tetrachloride, which is well known as a dopant for optical fibers, added to the silicon compound when silica is produced by flame hydrolysis of the silicon compound. It may be added to contain germania (Ge02), or it may have a refractive index distribution necessary for forming an optical waveguide structure.

この多孔質ガラス母材はこれを希土類元素の可溶性塩の
溶液に浸漬してこの多孔質ガラス母材に希土類元素化合
物を均一に含浸させ、ついでアルカリ金属化合物溶液に
浸漬してアルカリ金属化合物を均一に含浸させる。ここ
に使用される希土類元素の可溶性塩は溶剤に対して十分
な溶解度を示すものであれば特に限定されるものではな
く、任意のものとすればよく、これにはネオジム、エル
ビウム、ユーロピウム、セリウムなどの希土類元素の塩
化物、硝酸塩が例示される。この希土類元素可溶性塩は
二種または二種以上を使用して共ドープしてもよいし、
さらには光増感剤としてのクロムなどの遷穆金属を添加
してもよい。また、希土類金属元素の可溶性塩の溶液を
作るために使用される溶剤は多孔買ガラス母材と化学的
に反応しないものであれば特に限定されず、したがって
これは水であってもよいが水は多孔質ガラス母材の微粒
子間の凝集力を弱める作用が強いので、こわは希土類元
素可溶性塩の溶解度、多孔質ガラス母材への滲透性、乾
燥速度の面からメタノール、エタノールのようなアルコ
ールとすることが好ましい。なおこの希土類元素可溶性
塩の多孔質ガラス母材への含浸け希土類元素可溶性塩の
溶液に多孔質ガラス母材を単に浸漬すればよく、この浸
漬によって希土類元素可溶性塩が含浸された多孔貿ガラ
ス母材は空気中で風乾し溶剤を揮散させて次工程に送れ
はよい。
This porous glass base material is immersed in a solution of a soluble salt of a rare earth element to uniformly impregnate the rare earth element compound, and then immersed in an alkali metal compound solution to uniformly impregnate the alkali metal compound. Impregnate. The soluble salt of the rare earth element used here is not particularly limited as long as it has sufficient solubility in the solvent, and may be any salt, including neodymium, erbium, europium, and cerium. Examples include chlorides and nitrates of rare earth elements such as. These rare earth element soluble salts may be co-doped using two or more kinds,
Furthermore, a transition metal such as chromium may be added as a photosensitizer. Furthermore, the solvent used to make the solution of the soluble salt of the rare earth metal element is not particularly limited as long as it does not chemically react with the porous glass matrix; Alcohols such as methanol and ethanol have a strong effect of weakening the cohesive force between fine particles in the porous glass base material, so the stiffness is due to the solubility of rare earth element soluble salts, permeability to the porous glass base material, and drying speed. It is preferable that In order to impregnate the porous glass base material with this rare earth element soluble salt, it is sufficient to simply immerse the porous glass base material in a solution of the rare earth element soluble salt. It is best to air-dry the material in the air to volatilize the solvent before sending it to the next process.

このようにして希土類元素が均一に含浸された多孔質カ
ラス母材はついでアルカリ金属化゛合物の溶液に含浸さ
れるのであるが、ここに使用されるアルカリ金属化合物
は可溶性のものとするということから塩化物、硝酸塩な
どとすればよく、この溶液も上記と同じ理由からアルコ
ール溶液とすればよいか、これによれば希土類元素とア
ルカリ金属化合物が均一に含浸された多孔質ガラス母材
を容易に得ることができ、このものはついで空気中で風
乾するか、30〜80℃に加熱して溶剤を揮散させるこ
とがよい。
The porous glass base material uniformly impregnated with rare earth elements in this way is then impregnated with a solution of an alkali metal compound, but the alkali metal compound used here is said to be soluble. For this reason, chlorides, nitrates, etc. may be used.For the same reason as above, this solution may also be an alcohol solution.According to this, a porous glass base material uniformly impregnated with rare earth elements and alkali metal compounds can be used. It can be easily obtained, and this product is then preferably air-dried in the air or heated to 30 to 80°C to evaporate the solvent.

本発明の希土類元素ドープ石英ガラスはこのようにして
得た希土類元素とアルカリ金属化合物とを含有する多孔
質ガラス母材を高温で焼結してこの多孔質ガラス母材を
透明ガラス化して石英ガラスとすることによって作られ
る。この焼結は多孔質ガラス母材を電気炉中で1,10
0〜1,800℃に加熱すればよいが、この場合の雰囲
気はヘリウムガス雰囲気とすることが好ましい。このよ
うにして多孔質ガラス母材が透明な石英ガラスとなり、
多孔質ガラス母材に含浸されている希土類元素化合物、
アルカリ金属化合物はいずれも酸化物となるので、石英
ガラス中に希土類元素とアルカリ金属の酸化物が均一に
分散された本発明の希土類元素ドープ石英ガラスを容易
に得ることができる。
The rare earth element-doped quartz glass of the present invention is produced by sintering the porous glass base material containing the rare earth element and the alkali metal compound obtained in this manner at high temperature to turn the porous glass base material into transparent glass. It is created by This sintering process is performed by sintering a porous glass base material in an electric furnace at a temperature of 1.10
It may be heated to 0 to 1,800°C, but the atmosphere in this case is preferably a helium gas atmosphere. In this way, the porous glass base material becomes transparent quartz glass,
Rare earth element compounds impregnated into a porous glass matrix,
Since all of the alkali metal compounds are oxides, it is possible to easily obtain the rare earth element-doped quartz glass of the present invention in which the rare earth element and the alkali metal oxide are uniformly dispersed in the quartz glass.

[実施例] つぎに本発明の実施例、比較例をあげる。[Example] Next, examples of the present invention and comparative examples will be given.

実施例1 石英製同心多重管バーナーに水素ガス5,511.7分
、酸素ガス8.OJ2/分を供給して酸水素火炎を形成
させ、このバーナー中心部に酸素ガス0.11!/分を
キャリャーガスとして四塩化けい素0.25J2/分を
供給し、この火炎を担体としての直径20mmの石英ガ
ラス棒に当て、四塩化けい素の火炎加水分解で発生した
シリカガラス微粒子を担体の軸方向に堆積成長させ、8
時間運転して外径451nlll、長ざ300mm、重
さ170 gで平均かさ密度が0.35g/cm3てあ
る多孔質ガラス母材を作った。
Example 1 A quartz concentric multi-tube burner was charged with hydrogen gas for 5,511.7 minutes and oxygen gas for 8 minutes. OJ2/min is supplied to form an oxyhydrogen flame, and 0.11 of oxygen gas is in the center of this burner! 0.25 J2/min of silicon tetrachloride is supplied as a carrier gas, and this flame is applied to a 20 mm diameter quartz glass rod as a carrier, so that the silica glass fine particles generated by the flame hydrolysis of silicon tetrachloride are removed from the carrier gas. axially deposited and grown, 8
A porous glass preform having an outer diameter of 451 nll, a length of 300 mm, a weight of 170 g, and an average bulk density of 0.35 g/cm3 was produced by operating for hours.

ついてこの多孔質ガラス母材を塩化エルビウムの01重
量%のメタノール溶液に浸漬して多孔質ガラス母材の内
部まで塩化エルビウムを滲透させたのち、塩化リチウム
の 1.0%メタノール水溶液に含侵して塩化リチウム
を均一に滲透させたところ、塩化エルビウムと塩化リチ
ウムを含有する多孔質カラス母材が得られたので、こわ
をヘリウムガス:囲気下に保持されている電気炉中にお
いて 1.600℃に3時間加熱して焼結したところ、
この多孔質ガラス母材が透明ガラス化されて石英ガラス
となり、エルビウムとリチウムの酸化物が均−に分散さ
れた希土類元素ドープ石英ガラスが得られたが、このも
のはICP発光法によって測定したところ、酸化エルビ
ウムを200ppm,酸化リチウムを1.5重量%含有
していた。
Then, this porous glass base material was immersed in a methanol solution containing 0.1% by weight of erbium chloride to allow the erbium chloride to penetrate into the inside of the porous glass base material, and then impregnated with a 1.0% methanol aqueous solution of lithium chloride. When lithium chloride was permeated uniformly, a porous glass matrix containing erbium chloride and lithium chloride was obtained. After heating for 3 hours and sintering,
This porous glass base material was made into transparent vitrification to become quartz glass, and rare earth element-doped quartz glass in which erbium and lithium oxides were evenly dispersed was obtained, which was measured by ICP luminescence method. It contained 200 ppm of erbium oxide and 1.5% by weight of lithium oxide.

つぎにこの石英ガラスをコアとし、フッ素ドープした石
英ガラスをクラッドとして光ファイバ用プリフォームを
作り、このプリフォームから作った光ファイバに1.5
3μmの信号光を伝送させながら1.46μmのポンプ
光を入射したところ、1.53μmの信号が増幅され、
このときの増幅ゲインは32dBであり、このときの誘
導断面積は3.8×10−”cm2であった。
Next, an optical fiber preform is made using this quartz glass as a core and fluorine-doped silica glass as a cladding.
When a 1.46 μm pump light was input while transmitting a 3 μm signal light, a 1.53 μm signal was amplified.
The amplification gain at this time was 32 dB, and the guiding cross section at this time was 3.8 x 10-'' cm2.

また、上記において塩化リチウムの代わりに塩化ナトリ
ウム、塩化カリ、塩化ルビジウムを用いたほかは上記と
同様に処理して光ファイバを作り、このものの誘導断面
積を測定したところ、下記に示したとおりの結果が得ら
れた。
In addition, an optical fiber was made in the same manner as above except that sodium chloride, potassium chloride, and rubidium chloride were used instead of lithium chloride, and the induced cross-sectional area of this fiber was measured, as shown below. The results were obtained.

NaCR  2.2X 10−20cm2KCj!  
  0.9X 10−”cm2RbCj!   0.7
x 10−20cm2比較例 実施例1と同様の方法で得た多孔買ガラス母材を塩化エ
ルビウムの0.1重量%メタノール溶液に浸漬して、こ
の溶液を多孔質ガラス母材の内部にまて滲透ざせたのち
、空気中に24時間放置して風乾させ、ついでこれを水
素−ヘリウムガス雰囲気にある電気炉中で1,600℃
に3時間加熱して透明ガラス化して希土類元素ドープ石
英ガラスを作ったところ、この石英ガラスは酸化エルビ
ウムを280ppm含有していたが、これをファイバ化
してその増幅特性を評価したところ、このものは増幅度
が9dBと低いものであった。
NaCR 2.2X 10-20cm2KCj!
0.9X 10-”cm2RbCj! 0.7
x 10-20 cm2 Comparative Example A porous glass base material obtained in the same manner as in Example 1 was immersed in a 0.1% by weight methanol solution of erbium chloride, and this solution was spread inside the porous glass base material. After permeating, it was left in the air for 24 hours to air dry, and then heated at 1,600°C in an electric furnace in a hydrogen-helium gas atmosphere.
When we made rare earth element-doped quartz glass by heating it for 3 hours to make it transparent, we found that this quartz glass contained 280 ppm of erbium oxide, but when we made it into a fiber and evaluated its amplification characteristics, we found that this The amplification degree was as low as 9 dB.

[発明の効果] 本発明は希土類元素トーブ石英ガラスおよびその製造方
法に関するもので、これは前記したように石英ガラスに
希土類元素とアルカリ金属酸化物を均一に分散させてな
る希土類元素ドープ石英ガラス、およびけい素化合物の
火炎加水分解によって生成したシリカガラス微粒子を堆
積して得た多孔質カラス母材を希土頚元素イオンの可溶
性塩溶液に浸漬したのち、アルカリ金属化合物の溶液に
含浸し、つぎにこの多孔買ガラス母材を高温で焼結して
石英ガラスとする希土類元素ドープ石英ガラスの製造方
法に関するものであるが、この石英ガラスは上記したよ
うな方法で得られるので希土類元素とアルカリ金属酸化
物が均一に分散されたものとなり、したがって発光スペ
クトル強度が大きく、良好なレーザー特性を示すので、
特に光ファイバレーザー、光増幅器用として有用とされ
るという有利性が与えられる。
[Effects of the Invention] The present invention relates to a rare earth element-doped quartz glass and a method for manufacturing the same, and as described above, this invention relates to a rare earth element-doped quartz glass in which a rare earth element and an alkali metal oxide are uniformly dispersed in quartz glass, A porous glass matrix obtained by depositing fine silica glass particles produced by flame hydrolysis of silicon compounds is immersed in a soluble salt solution of rare earth element ions, and then impregnated with a solution of an alkali metal compound. The present invention relates to a method for producing rare earth element-doped quartz glass in which this perforated glass base material is sintered at high temperature to produce quartz glass.Since this quartz glass can be obtained by the method described above, it contains rare earth elements and alkali metals. The oxide is uniformly dispersed, and therefore the emission spectrum intensity is large and it exhibits good laser characteristics.
It has the advantage of being particularly useful for optical fiber lasers and optical amplifiers.

Claims (1)

【特許請求の範囲】 1、石英ガラスに希土類元素とアルカリ金属酸化物を含
有させてなることを特徴とする希土類元素ドープ石英ガ
ラス。 2、アルカリ金属酸化物がLiまたはNaの酸化物であ
る請求項1に記載の希土類元素ドープ石英ガラス。 3、けい素化合物の火炎加水分解によって生成したシリ
カガラス微粒子を堆積して得た多孔質ガラス母材を希土
類元素イオンを含む可溶性塩の溶液に浸漬したのち、こ
れをアルカリ金属酸化物の溶液に浸漬してから乾燥し、
つぎにこの多孔質ガラス母材を高温で焼結して透明ガラ
ス化することを特徴とする希土類元素ドープ石英ガラス
の製造方法。 4、希土類元素イオンを含む可溶性塩が塩化物または硝
酸塩である請求項3に記載の希土類元素ドープ石英ガラ
スの製造方法。 5、多孔質ガラス母材が平均かさ密度0.3〜1.0g
/cm^3のものである請求項3または4に記載の希土
類元素ドープ石英ガラスの製造方法。
[Claims] 1. A rare earth element-doped quartz glass characterized by containing a rare earth element and an alkali metal oxide in the quartz glass. 2. The rare earth element-doped silica glass according to claim 1, wherein the alkali metal oxide is an oxide of Li or Na. 3. A porous glass base material obtained by depositing silica glass particles produced by flame hydrolysis of a silicon compound is immersed in a solution of a soluble salt containing rare earth element ions, and then immersed in a solution of an alkali metal oxide. Soak and then dry
A method for producing rare earth element-doped quartz glass, which is characterized in that the porous glass base material is then sintered at high temperature to form transparent glass. 4. The method for producing rare earth element-doped quartz glass according to claim 3, wherein the soluble salt containing rare earth element ions is a chloride or a nitrate. 5. Porous glass base material has an average bulk density of 0.3 to 1.0 g
5. The method for producing a rare earth element-doped quartz glass according to claim 3 or 4, wherein the quartz glass has a diameter of /cm^3.
JP1339990A 1990-01-23 1990-01-23 Rare earth element-doped quartz glass and its production Pending JPH03218936A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1339990A JPH03218936A (en) 1990-01-23 1990-01-23 Rare earth element-doped quartz glass and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1339990A JPH03218936A (en) 1990-01-23 1990-01-23 Rare earth element-doped quartz glass and its production

Publications (1)

Publication Number Publication Date
JPH03218936A true JPH03218936A (en) 1991-09-26

Family

ID=11832042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1339990A Pending JPH03218936A (en) 1990-01-23 1990-01-23 Rare earth element-doped quartz glass and its production

Country Status (1)

Country Link
JP (1) JPH03218936A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013224247A (en) * 2012-03-23 2013-10-31 Fujikura Ltd Method for manufacturing glass preform

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013224247A (en) * 2012-03-23 2013-10-31 Fujikura Ltd Method for manufacturing glass preform
US9395485B2 (en) 2012-03-23 2016-07-19 Fujikura Ltd. Method of manufacturing glass preform

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