JPH03218972A - Silicon nitride-based sintered body - Google Patents
Silicon nitride-based sintered bodyInfo
- Publication number
- JPH03218972A JPH03218972A JP1289893A JP28989389A JPH03218972A JP H03218972 A JPH03218972 A JP H03218972A JP 1289893 A JP1289893 A JP 1289893A JP 28989389 A JP28989389 A JP 28989389A JP H03218972 A JPH03218972 A JP H03218972A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- silicon nitride
- strength
- rare earth
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【発明の詳細な説明】
く産業上の利用分野〉
この発明は高温強度が高く、耐酸化性に優れた窒化珪素
質焼結体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a silicon nitride sintered body that has high high temperature strength and excellent oxidation resistance.
〈従来の技術〉
窒化珪素質焼結体は機械的強度、耐熱性、耐腐蝕性など
の諸特性に優れているため、例えば自動車用エンジン部
品や、ガスタービンエンジン等の高温構造材料への応用
が試みられている。<Prior art> Silicon nitride sintered bodies have excellent properties such as mechanical strength, heat resistance, and corrosion resistance, so they are used in high-temperature structural materials such as automobile engine parts and gas turbine engines. is being attempted.
この窒化珪素は共有結合性が高いため、単独では焼結が
困難であるのでMgO, A 12 t(h.Zroz
及び希土類元素の酸化物等の焼結助剤を添加して焼結す
ることが行なわれてきている。Since this silicon nitride has a high covalent bonding property, it is difficult to sinter it alone, so MgO, A 12 t (h. Zroz
Sintering has been carried out by adding sintering aids such as oxides of rare earth elements.
〈発明が解決しようとする課題〉
上記従来の技術において、Mgo. A Il 20s
,ZrO,等の金属酸化物を焼結助剤として用いる場
合は、粒界相に低融点ガラス質相が析出するために、こ
れが高温における強度の向上を阻害し、耐酸化性の向上
を阻害していた。<Problems to be Solved by the Invention> In the above conventional technology, Mgo. A Il 20s
When metal oxides such as , ZrO, etc. are used as sintering aids, a low melting point glassy phase precipitates in the grain boundary phase, which inhibits the improvement of strength at high temperatures and inhibits the improvement of oxidation resistance. Was.
又、希土類元素の酸化物を単独で焼結助剤として用いる
場合は他の焼結助剤よりも焼結促進作用に乏しいので、
緻密な焼結体を得るためにはホントプレスが必要である
。従って焼結助剤について種々の検討を加え、ホットプ
レスを用いなくても緻密化が可能な程度に焼結性に優れ
、かつ従来の焼結助剤を用いた場合に比べて高温強度及
び耐酸化性の優れた窒化珪素質焼結体の開発が望まれて
おり、本発明は、このような焼結体を捉供することを目
的とするものである。In addition, when rare earth element oxides are used alone as sintering aids, they have a poorer sintering promoting effect than other sintering aids, so
Real pressing is necessary to obtain a dense sintered body. Therefore, we conducted various studies on sintering aids, and found that they have excellent sinterability to the extent that densification can be achieved without using hot pressing, and that they have better high-temperature strength and acid resistance than when using conventional sintering aids. The development of a silicon nitride sintered body with excellent oxidation properties is desired, and the present invention aims to provide such a sintered body.
〈課題を解決するための手段〉
本発明はこの目的を達成するために種々検討の結果なさ
れたものでその概要は希土類元素の酸化物1種以上を1
〜20重量%と、バナジウム(V)成分をv20,換算
で合計1〜8重量%と、残部が窒化珪素(St,N,)
とからなる窒化珪素質焼結体である。<Means for Solving the Problems> The present invention has been made as a result of various studies to achieve this object, and its outline is that one or more oxides of rare earth elements are
~20% by weight, a total of 1 to 8% by weight of the vanadium (V) component in terms of v20, and the balance is silicon nitride (St, N,)
It is a silicon nitride sintered body consisting of.
〈作 用〉
ここに希土類元素の酸化物は焼結を促進させるために1
〜20重量%の範囲で加えるが、1重量%未満の場合は
焼結を促進する効果がなく、逆に20重量%を超えた場
合は、焼結体の機械的強度が低下する。又、希土類元素
の酸化物の添加量を増加させると、700〜1000℃
の低温酸化に対して有害なメリライト型化合物(RzS
iaOJ4ただしR:希土類元素)が多く生成し、耐酸
化性が低下するため、添加量は15重量%以下がより好
ましい。<Function> Here, rare earth element oxides are used to promote sintering.
It is added in an amount of up to 20% by weight, but if it is less than 1% by weight, it will not have the effect of promoting sintering, and if it exceeds 20% by weight, the mechanical strength of the sintered body will decrease. Also, when the amount of rare earth element oxide added is increased, the temperature rises from 700 to 1000℃
melilite-type compounds (RzS) that are harmful to the low-temperature oxidation of
Since a large amount of iaOJ4 (R: rare earth element) is produced and the oxidation resistance is lowered, the amount added is preferably 15% by weight or less.
次にV成分は酸化物が焼結助剤として有効であり、複雑
形状品の作成が困難なホットプレス以外の焼結法、例え
ばガス圧焼結等でも緻密体が容易に得られるためである
。又、これらの成分を添加することにより、焼結体中に
酸素分が放出されてメリライト型化合物(R,Si.0
,N4)の生成を抑制し、粒界にはVSi2及びV5S
i3等の珪化物が生成する.これらの珪化物は融点が1
600℃以上と非常に高く、粒界にこれが生成した焼結
体は高温においても強度低下がほとんど無いものとなる
。さらにこの珪化物が粒界に均一に分散することにより
SiJ.粒子の粒成長が抑制され、機械的特性が向上す
る効果もある。v20,は1重量%未満では助剤として
の効果及びメリライト型化合物の生成を抑制する効果が
なく逆に8重量%を超えるとVの珪化物が過剰となり、
均一に分散せず凝集するため、室温強度及び高温強度が
低下するので好ましくない。Next, the V component is an oxide that is effective as a sintering aid, and a dense body can be easily obtained using sintering methods other than hot pressing, such as gas pressure sintering, which makes it difficult to create products with complex shapes. . In addition, by adding these components, oxygen is released into the sintered body and a melilite type compound (R, Si.0
, N4) and VSi2 and V5S at the grain boundaries.
Silicides such as i3 are formed. These silicides have a melting point of 1
The temperature is extremely high at 600°C or higher, and a sintered body in which this is generated at the grain boundaries has almost no decrease in strength even at high temperatures. Furthermore, by uniformly dispersing this silicide in the grain boundaries, SiJ. It also has the effect of suppressing particle growth and improving mechanical properties. When V20 is less than 1% by weight, it has no effect as an auxiliary agent or suppresses the formation of melilite-type compounds, and on the other hand, when it exceeds 8% by weight, V silicide becomes excessive.
Since it is not uniformly dispersed and aggregates, the room temperature strength and high temperature strength decrease, which is not preferable.
実施例1
平均粒径0.7μ−のα−Si3N.粉末に、平均粒径
2μ鎖のy,o. 、平均粒径1μ鵬の■20,、平均
粒径1μ一〇A j2 zChの各粉末を第1表に示す
割合で配合し、ボールミルにより混合粉砕後、ホノトプ
レスにより200 kg / d−1800℃−1時間
の条件で焼結して35X35X5mの焼結体を得た。焼
結体の特性を以下の方法により測定し、結果を第1表に
示した。Example 1 α-Si3N. with an average particle size of 0.7μ. The powder had y, o. , ■20, with an average particle size of 1μ, and each powder with an average particle size of 1μ1〇A j2 zCh were blended in the proportions shown in Table 1, mixed and pulverized in a ball mill, and then 200 kg / d - 1800 ° C - with a honoto press. Sintering was performed for 1 hour to obtain a sintered body measuring 35 x 35 x 5 m. The properties of the sintered body were measured by the following method, and the results are shown in Table 1.
(1) 抗折強度二室温及び1300℃にてJIS−
R 1601及びJIS−R 1604に従う3点曲げ
強度、(2)酸化増量: iooo℃及び1350℃に
て大気中、各100時間酸化後、重量増加を測定(3X
4X35fi試片)
第1表の結果から、本発明により得られたホットプレス
焼結体(Ncil,2)は室温から1300℃にかけて
の強度低下が極めて小さく、1300℃において90
kg / w ”以上の高強度を示す。また酸化特性に
おいても、酸化増量が1000℃、1350℃共に0.
1■/cd以下と非常に小さく耐酸化性に優れている。(1) Flexural strength JIS-2 at room temperature and 1300℃
Three-point bending strength according to R 1601 and JIS-R 1604, (2) Oxidation weight gain: After oxidation for 100 hours each in the air at iooo°C and 1350°C, the weight increase was measured (3X
4X35fi specimen) From the results in Table 1, it is clear that the hot-pressed sintered body (Ncil, 2) obtained according to the present invention has an extremely small decrease in strength from room temperature to 1300°C, and has a strength of 90% at 1300°C.
It exhibits high strength of over 1,000 kg/w''.Also, in terms of oxidation properties, the oxidation weight gain is 0.
It is extremely small, less than 1 .mu./cd, and has excellent oxidation resistance.
一方比較例として示したllh3はA l ,03を添
加したことにより粒界に低融点ガラス相が生成したため
1300℃の強度が室温強度に対して著しく低下し、1
1h4はY20,のみの添加でメリライト相が生成し1
000℃の酸化増量が著しく増大し耐酸化性が低下して
いる。On the other hand, in llh3 shown as a comparative example, the strength at 1300°C was significantly lower than the room temperature strength due to the formation of a low melting point glass phase at the grain boundaries due to the addition of Al,03.
In 1h4, melilite phase is formed by adding only Y20, 1
The oxidation weight gain at 000°C increased significantly and the oxidation resistance decreased.
第1表
ホソトプレス燐結体の持性
実施例2
実施例1と同じ原料粉末及び純度99.9%の希土類元
素の酸化物を用い、第2表に示す割合で配合し、乾燥し
た粉末を2 ton/一の圧力で10 X 10X5(
bsに静水圧プレスで成形し、以下に示す条件でガス圧
焼結を行ない焼結体を得た。焼結体の相対密度を第2表
に示した。Table 1: Properties of photo-press phosphorus bodies Example 2 Using the same raw material powder as in Example 1 and rare earth element oxide with a purity of 99.9%, the powders were mixed in the proportions shown in Table 2 and dried. 10 x 10 x 5 at a pressure of ton/1 (
BS using a hydrostatic press, and gas pressure sintering was performed under the conditions shown below to obtain a sintered body. The relative densities of the sintered bodies are shown in Table 2.
焼成条件: Nt 5atm−1900℃ 2hr*第
2表の結果から、本発明の範囲内(No.5〜9)であ
ればv20,の添加効果により焼結性が向上し、上記焼
成条件で相対密度98χ以上の緻密焼結体を得ることが
できた。しかし、比較例(No.10〜13)に示すよ
うに、Shysが1重量%未満あるいは希土類元素の酸
化物が1重量%未満であると焼結助剤としての効果がな
く、得られた焼結体は相対密度80〜85χと低密度で
、開気孔が残留した。Firing conditions: Nt 5 atm - 1900°C 2 hr A dense sintered body with a density of 98χ or more could be obtained. However, as shown in Comparative Examples (Nos. 10 to 13), if Shys is less than 1% by weight or rare earth element oxide is less than 1% by weight, it has no effect as a sintering aid, and the resulting sintered The compact had a low relative density of 80 to 85χ, and open pores remained.
第2表 ガス圧焼結による焼結性
実施例3 (ガス圧焼結体の特性)
実施例2と同し原料粉末を用い、第3表に示す割合で配
合、乾燥した粉末を2ton/cm2の圧力で50x5
0xlOWに静水圧プレスで成形し、以下の条件でガス
圧焼結を行い、焼結体を得た。焼結体の特性は以下の方
法により測定し、結果を第3表に示した。Table 2 Sinterability by gas pressure sintering Example 3 (Characteristics of gas pressure sintered body) Using the same raw material powder as in Example 2, the powder was mixed in the proportions shown in Table 3 and dried at 2 tons/cm2. 50x5 at the pressure of
A sintered body was obtained by molding to 0xlOW using a hydrostatic press and performing gas pressure sintering under the following conditions. The properties of the sintered body were measured by the following method, and the results are shown in Table 3.
焼結:ガス圧焼結(2段焼結)
一次焼成一N,中2atm−1800℃−2hr二次焼
成:N2中100at+n−1800℃−2hr(1)
抗折強度:室温および1350℃にてJIS−R 16
01及びJIS−R 1604に従う3点曲げ強度、(
2)酸化増量: 1000℃及び1350℃にて大気中
、各100時間酸化後、重量増加を測定(3 X 4
X 35顛試片)
第3表に示すように、本発明により得られたガス圧焼結
体(階14〜22)は室温から1300℃にかけての強
度低下が極めて小さ< 、1300℃において79kg
/w2以上の高強度を示す。また酸化特性においても、
酸化増量が1000℃、1350℃共に0.2■/d以
下と非常に小さく耐酸化性に優れている。Sintering: Gas pressure sintering (two-stage sintering) Primary firing: 1N, medium 2 atm-1800℃-2hr Secondary firing: N2 medium 100at+n-1800℃-2hr (1)
Flexural strength: JIS-R 16 at room temperature and 1350°C
01 and JIS-R 1604, 3-point bending strength (
2) Oxidation weight gain: Weight gain was measured after oxidation at 1000°C and 1350°C in the air for 100 hours each (3 x 4
As shown in Table 3, the gas-pressure sintered bodies (floors 14 to 22) obtained according to the present invention showed extremely small decrease in strength from room temperature to 1300°C, and had a strength of 79 kg at 1300°C.
Shows high strength of /w2 or more. Also, in terms of oxidation properties,
The weight gain due to oxidation is very small, less than 0.2 μ/d at both 1000°C and 1350°C, and it has excellent oxidation resistance.
一方比較例として示したI1m23〜5はν20,及び
希土類元素の酸化物が0.1重量χ未満と少なレ11た
め、助剤としての添加効果がないため緻密化せず、強度
、耐酸化性ともに本発明品に比べて劣る。On the other hand, I1m23-5 shown as a comparative example has a small ν20 and a rare earth element oxide of less than 0.1 weight χ, so there is no effect of adding it as an auxiliary agent, so it does not become densified, and has poor strength and oxidation resistance. Both are inferior to the product of the present invention.
一方隘26はv20,の添加量が10重量χと本発明の
範囲の8重量χを超えるためVの珪化物が過剰となり、
室温及び1300℃の強度が本発明品に比べて著しく低
下する。また嵐27は希土類元素の酸化物の添加量が多
いため、メリライト型化合物が生成し、1000℃の耐
酸化性が著しく劣化し、室温及び高温強度も実施例に対
して劣る。On the other hand, in case 26, the amount of V20 added is 10 weight χ, which exceeds the 8 weight χ within the scope of the present invention, so V silicide is excessive.
The strength at room temperature and at 1300°C is significantly lower than that of the product of the present invention. Furthermore, since Arashi 27 has a large amount of rare earth element oxide added, a melilite type compound is formed, and the oxidation resistance at 1000° C. is significantly deteriorated, and the room temperature and high temperature strength are also inferior to the examples.
実施例4
実施例1と同じ原料粉末及び平均粒径1μ−のCr20
3を用い、第4表に示す割合で配合し、乾燥した粉末を
2 ton/cdの圧力で10 X 10 X 50m
mに静水圧プレスで成形し、以下に示す条件でガス圧焼
結を行ない焼結体を得た。焼結体断面を鏡面研磨し、S
EMの組成により組織観察を行った。第1−A図(実施
例)、第1−B図(比較例)にこの組織写真を示す。Example 4 Same raw material powder as Example 1 and Cr20 with an average particle size of 1 μ-
3, blended in the proportions shown in Table 4, and dried the powder at a pressure of 2 ton/cd in a size of 10 x 10 x 50 m.
The sintered body was molded using a hydrostatic press, and gas pressure sintered under the conditions shown below to obtain a sintered body. The cross section of the sintered body is mirror polished and S
Tissue observation was performed based on the composition of EM. Photographs of this structure are shown in Fig. 1-A (Example) and Fig. 1-B (Comparative Example).
焼成条件二N2中 10ats−1850℃−4 hr
a第 4 表
第1−A図(実施例)、第1−B図(比較例)の組織写
真において、白い輝点はV及びCrの珪化物であり、黒
灰色の柱状粒子はSi.N. 、その周りを埋めている
白色部はY化合物の粒界相である。Firing conditions: 2 N2 medium 10 ats-1850℃-4 hr
Table 4 In the microstructure photographs shown in Figure 1-A (Example) and Figure 1-B (Comparative Example), the white bright spots are silicides of V and Cr, and the black-gray columnar particles are Si. N. , the white part surrounding it is the grain boundary phase of the Y compound.
これによれば、実施例においては1μ鋼以下のV珪化物
が均一に分散しており、Si3N.粒子の粒成長が抑制
されている。一方比較例では、Cr珪化物及びSi3N
.粒子が実施例に比べ著しく成長しており、比較例のも
のは焼結体の室温抗折強度も実施例に比して劣る。(第
4表参照)
このようにv20,を添加することにより、Si3N.
粒子の粒成長を抑制し、機械的特性を向上させる効果も
ある。According to this, in the example, V silicide of 1μ or less steel is uniformly dispersed, and Si3N. Grain growth of particles is suppressed. On the other hand, in the comparative example, Cr silicide and Si3N
.. The particles have grown significantly compared to the examples, and the room temperature bending strength of the sintered bodies of the comparative examples is also inferior to that of the examples. (See Table 4) By adding v20 in this way, Si3N.
It also has the effect of suppressing particle growth and improving mechanical properties.
〈発明の効果〉
本発明によれば、希土類元素の酸化物と■成分を適量添
加することにより、ホットプレスを用いなくても緻密化
可能な高温強度、耐酸化性の優れた窒化珪素質焼結体を
提供することができる。<Effects of the Invention> According to the present invention, by adding appropriate amounts of rare earth element oxides and component can provide cohesion.
第1−A図は実施例の、第1−B図は比較例の&lv&
を示すS− E M写真である。Figure 1-A shows the example, and Figure 1-B shows the comparative example.
This is an S-EM photograph showing.
Claims (1)
ナジウム(V)成分をV_2O_5換算で合計1〜8重
量%と、残部が窒化珪素(Si_3N_4)とからなる
窒化珪素質焼結体。A silicon nitride sintered body comprising 1 to 20% by weight of one or more oxides of rare earth elements, 1 to 8% by weight of a vanadium (V) component in terms of V_2O_5, and the remainder silicon nitride (Si_3N_4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1289893A JPH0692271B2 (en) | 1988-12-16 | 1989-11-09 | Silicon nitride sintered body |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63-316312 | 1988-12-16 | ||
| JP31631288 | 1988-12-16 | ||
| JP1289893A JPH0692271B2 (en) | 1988-12-16 | 1989-11-09 | Silicon nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03218972A true JPH03218972A (en) | 1991-09-26 |
| JPH0692271B2 JPH0692271B2 (en) | 1994-11-16 |
Family
ID=26557790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1289893A Expired - Fee Related JPH0692271B2 (en) | 1988-12-16 | 1989-11-09 | Silicon nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0692271B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59199578A (en) * | 1983-04-22 | 1984-11-12 | 住友電気工業株式会社 | silicon nitride sintered body |
| JPS60264366A (en) * | 1984-06-11 | 1985-12-27 | 株式会社日立製作所 | Composite sintered body |
| JPS62187169A (en) * | 1986-02-12 | 1987-08-15 | 住友電気工業株式会社 | Silicon nitride base sintered body and manufacture |
-
1989
- 1989-11-09 JP JP1289893A patent/JPH0692271B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59199578A (en) * | 1983-04-22 | 1984-11-12 | 住友電気工業株式会社 | silicon nitride sintered body |
| JPS60264366A (en) * | 1984-06-11 | 1985-12-27 | 株式会社日立製作所 | Composite sintered body |
| JPS62187169A (en) * | 1986-02-12 | 1987-08-15 | 住友電気工業株式会社 | Silicon nitride base sintered body and manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0692271B2 (en) | 1994-11-16 |
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