JPH03219593A - Thin film EL element - Google Patents
Thin film EL elementInfo
- Publication number
- JPH03219593A JPH03219593A JP2004579A JP457990A JPH03219593A JP H03219593 A JPH03219593 A JP H03219593A JP 2004579 A JP2004579 A JP 2004579A JP 457990 A JP457990 A JP 457990A JP H03219593 A JPH03219593 A JP H03219593A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- color
- cas
- present
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Electroluminescent Light Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は薄膜EL素子(薄膜エレクトロルミネッセント
素子)、特に緑色発光層を備える薄膜EL素子に関する
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a thin film EL device (thin film electroluminescent device), and particularly to a thin film EL device including a green light emitting layer.
[従来の技術]
薄膜EL素子を用いてフルカラー表示を実現する際、も
っとも有望な発光材料としては、青色にSrS:Ce、
緑色にZnS:Tb、赤色にCaS : Euがそれぞ
れ現在研究されている。[Prior art] When realizing full-color display using thin film EL elements, the most promising light-emitting materials are SrS:Ce, SrS:Ce, and blue light emitting materials.
ZnS:Tb is currently being researched in green, and CaS:Eu is being researched in red.
しかし、実際に材料の適応性を考えれば、緑色用発光材
料だけが他の材料と異っていることが問題である。However, when considering the adaptability of materials, the problem is that only the green light-emitting material is different from other materials.
すなわち、ZnSはn b−vrb族化合物であるのに
対して、Ca5SSrSは何れもnavxb族化合物で
ある。That is, ZnS is an nb-vrb group compound, whereas both Ca5SSrS are navxb group compounds.
II a −Vl b族化合物を用いた緑色発光材料と
しては、CaS : CeやS r S : M nが
知られているがCaS : Ceは色純度が悪く、黄緑
色を示し、SrS:Mnは作製条件によっては黄橙色に
なる場合があって、色調の再現性がよくないのが問題で
あった。CaS:Ce and SrS:Mn are known as green light-emitting materials using IIa-Vlb group compounds, but CaS:Ce has poor color purity and exhibits a yellow-green color, while SrS:Mn has a yellow-green color. Depending on the manufacturing conditions, the color may become yellow-orange, and the problem was that the reproducibility of the color tone was poor.
[発明が解決しようとする課題]
本発明ではCaS : Ceの色純度の改善を行い、フ
ルカラー表示用の緑色発光材料として用いることができ
るようにすることである。[Problems to be Solved by the Invention] The present invention aims to improve the color purity of CaS:Ce so that it can be used as a green light-emitting material for full-color display.
[課題を解決するための手段]
上記課題を解決するための本発明の構成は、CaS :
CeをTbで付活した緑色発光層を有する薄膜EL素
子である。[Means for Solving the Problems] The configuration of the present invention for solving the above problems is based on CaS:
This is a thin film EL device having a green light-emitting layer made of Ce activated with Tb.
発光中心であるCeとTbの濃度については、作製条件
等により異るが、あくまでもCeの発光が主体となるよ
うにする。これはCaS :CeとCaS:Tbとの輝
度をそれぞれ比べると、CaS:Ceの方が高いためで
ある。そのためCe濃度は最適値である0、05〜0.
3mo1%とし、Tb濃度は0.1〜2.0mo1%が
適している。Although the concentrations of Ce and Tb, which are the luminescent centers, vary depending on the manufacturing conditions, etc., the luminescence of Ce should be the main one. This is because when comparing the brightness of CaS:Ce and CaS:Tb, CaS:Ce is higher. Therefore, the Ce concentration is the optimum value of 0.05 to 0.05.
3 mo1%, and the Tb concentration is suitably 0.1 to 2.0 mo1%.
発光層の作製方法は蒸着法、イオンブレーティング法ス
パッタ法、あるいはMoCVD法等いずれでも良い。The light-emitting layer may be produced by any method such as vapor deposition, ion blating, sputtering, or MoCVD.
又、本発明は薄膜EL素子の発光層に関するものであり
、従って電極材料、絶縁層材料を特定するものでは無い
。もちろん、素子構成も限定されるものでは無く、発光
層の画側に絶縁層を設けた両側絶縁構造、片側に設けた
片側絶縁構造でも良く、又、絶縁層をまったく用いない
構造でも良い。Further, the present invention relates to the light emitting layer of a thin film EL element, and therefore does not specify the electrode material or the insulating layer material. Of course, the element configuration is not limited either, and may be a double-sided insulating structure in which an insulating layer is provided on the picture side of the light-emitting layer, a one-sided insulating structure in which an insulating layer is provided on one side, or a structure in which no insulating layer is used at all.
まずはじめに本発明の上記構成を有する薄膜EL素子の
一具体例を第1図に示す。First, a specific example of a thin film EL element of the present invention having the above structure is shown in FIG.
図示するように、本発明の薄膜EL素子はガラス基板1
、透明電極2、発光層3、絶縁層4及び背面電極5で構
成されている。As shown in the figure, the thin film EL device of the present invention has a glass substrate 1.
, a transparent electrode 2, a light emitting layer 3, an insulating layer 4, and a back electrode 5.
ガラス基板lは例えばほう珪酸ガラス、アルミノ珪酸ガ
ラス等のアルカリ成分のすくない材質のものであること
が望ましい。The glass substrate l is preferably made of a material with low alkaline content, such as borosilicate glass or aluminosilicate glass.
透明電極2の材料はITO等、透明電極としての機能を
もつ材料であれば特に制限なく利用できるが、特に、Z
nO:A1等、ZnO系材料は耐熱性にすぐれており透
明電極2の材料として好適である。後述の実施例では透
明電極2としてRPマグネトロンスパッタ法で作製した
比抵抗−1O−4ΩCnI のZnO:Atの薄膜が
用いられる。The material of the transparent electrode 2 can be used without any particular restrictions as long as it has a function as a transparent electrode, such as ITO.
ZnO-based materials such as nO:A1 have excellent heat resistance and are suitable as materials for the transparent electrode 2. In the embodiments described below, a ZnO:At thin film having a resistivity of -1O-4ΩCnI produced by RP magnetron sputtering is used as the transparent electrode 2.
絶縁層の4の材料としては、813 N4 、BN。The material of insulating layer 4 is 813 N4, BN.
AIN等の窒化物、Ta2 05、S]、02、Y 2
03、Al2O3等の酸化物を用いることができる。ま
た、タングステンブロンズ構造やペロプスカイト構造の
結晶構造を取る強誘電体材料を用いることもできる。又
、更にはこれら材料の混合系による膜や材料のことなる
薄膜を積層した複合膜の形態で絶縁層4を構成してもよ
い。Nitride such as AIN, Ta2 05, S], 02, Y 2
Oxides such as 03, Al2O3, etc. can be used. Further, a ferroelectric material having a crystal structure such as a tungsten bronze structure or a perovskite structure can also be used. Furthermore, the insulating layer 4 may be configured in the form of a film made of a mixture of these materials or a composite film formed by laminating thin films made of different materials.
更に、絶縁層は第1図のようにどちらか一方のみのによ
るいわゆる片側絶縁構造でも又両方とも用いないいわゆ
る直流型構造でもよい。Further, the insulating layer may have a so-called one-sided insulating structure in which only one of them is used, as shown in FIG. 1, or a so-called direct current type structure in which both are not used.
絶縁層4上に積層される背面電極5の材料としては、A
1等の金属材料をあげることができる。The material of the back electrode 5 laminated on the insulating layer 4 is A.
Examples include first class metal materials.
もちろん、背面電極5上に更に重ねて別のEL素子構造
を積層する場合は背面電極を透明電極とすべきはいうま
でもない。Of course, if another EL element structure is further stacked on the back electrode 5, it goes without saying that the back electrode should be a transparent electrode.
以下実施例によって、本発明を具体的に説明する。The present invention will be specifically described below with reference to Examples.
[実施例]
ここでは第1図に示したようなMIS構造を有する薄膜
EL素子を作製した。[Example] Here, a thin film EL device having an MIS structure as shown in FIG. 1 was manufactured.
ガラス基板上にZnO:Alを形成し、次に発光層を電
子ビーム蒸着法を用いて、基板温度500℃で形成した
。この際、発光層としてCaSにCeCl3を0.1m
o1%添加したものと、本発明によるCeCl3を0.
1mo1%、TbCl3を1.0IIo1%添加したも
の、それぞれ2種類作製した。そして、発光層形成後、
絶縁層としてY2O3薄膜を電子ビーム蒸着で形成し、
最後に背面電極としてAI薄膜を形成した。ZnO:Al was formed on a glass substrate, and then a light emitting layer was formed using an electron beam evaporation method at a substrate temperature of 500°C. At this time, 0.1 m of CeCl3 was added to CaS as a light emitting layer.
o1% added and CeCl3 according to the present invention added at 0.
Two types were prepared, each with 1mol1% and 1.0IIo1% of TbCl3 added. After forming the light emitting layer,
A Y2O3 thin film is formed as an insulating layer by electron beam evaporation,
Finally, an AI thin film was formed as a back electrode.
このようにして得られた薄膜EL素子のそれぞれの色調
についてCIE色度点を第2図に示す。比較のため、現
在カラーCRTに用いられている緑色の色度点も同様に
示す。FIG. 2 shows CIE chromaticity points for each color tone of the thin film EL device thus obtained. For comparison, the chromaticity point of green color currently used in color CRTs is also shown.
これからもわかるように従来技術による素子に比べて本
発明による素子の法がカラー用緑色として優れているこ
とが判る。As can be seen, the element according to the present invention is superior to the element according to the prior art as a color green color.
なお、本発明において発光中心の化合物として塩化物を
用いたが、フッ化物や硫化物を用いでも同様な結果が得
られた。Although chloride was used as the luminescent center compound in the present invention, similar results were obtained using fluoride or sulfide.
[発明の効果]
以上説明したように、本発明の薄膜EL素子をマルチカ
ラー用緑色として優れた色調の緑色発光をする薄膜EL
素子である。[Effects of the Invention] As explained above, the thin film EL element of the present invention can be used as a thin film EL device that emits green light with an excellent tone as a multicolor green color.
It is element.
第1図は本発明のEL素子の構造を示す断面の模式図、
第2図は本発明のEL素子(CaS:Ce:Tb)、従
来技術のEL素子(CaS:Ce)、現在のカラーCR
Tに用いられている緑色の薄膜EL素子の各色度点を示
すグラフである。
1・・・ガラス基板、2・・・透明電極、3・・・発光
層、4・・・絶縁層、5・・・背面電極。
O:本発明による素子の色度点
・:従来技術による素子の色度点
一二現在カラーCRTに用いられている緑色の色度点Figure 1 is a cross-sectional schematic diagram showing the structure of the EL element of the present invention. Figure 2 is an EL element of the present invention (CaS:Ce:Tb), a conventional EL element (CaS:Ce), and the current color CR.
It is a graph showing each chromaticity point of the green thin film EL element used in T. DESCRIPTION OF SYMBOLS 1...Glass substrate, 2...Transparent electrode, 3...Light emitting layer, 4...Insulating layer, 5...Back electrode. O: Chromaticity point of the device according to the present invention: Chromaticity point of the device according to the prior art 12 Chromaticity point of green color currently used in color CRTs
Claims (1)
膜EL素子。A thin film EL device having a green light-emitting layer made of CaS:Ce activated with Tb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004579A JPH03219593A (en) | 1989-11-08 | 1990-01-16 | Thin film EL element |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28874589 | 1989-11-08 | ||
| JP1-288745 | 1989-11-08 | ||
| JP2004579A JPH03219593A (en) | 1989-11-08 | 1990-01-16 | Thin film EL element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03219593A true JPH03219593A (en) | 1991-09-26 |
Family
ID=26338392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004579A Pending JPH03219593A (en) | 1989-11-08 | 1990-01-16 | Thin film EL element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03219593A (en) |
-
1990
- 1990-01-16 JP JP2004579A patent/JPH03219593A/en active Pending
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