JPH03220722A - Method and device for drying work - Google Patents
Method and device for drying workInfo
- Publication number
- JPH03220722A JPH03220722A JP1591590A JP1591590A JPH03220722A JP H03220722 A JPH03220722 A JP H03220722A JP 1591590 A JP1591590 A JP 1591590A JP 1591590 A JP1591590 A JP 1591590A JP H03220722 A JPH03220722 A JP H03220722A
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- drying
- workpiece
- vacuum
- warm pure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 102
- 238000001291 vacuum drying Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 6
- 238000011084 recovery Methods 0.000 description 5
- 230000032258 transport Effects 0.000 description 4
- 238000007654 immersion Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000007602 hot air drying Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000004925 denaturation Methods 0.000 description 1
- 230000036425 denaturation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、洗浄等により濡れた状態にあるワークを乾燥
するための乾燥方法及び装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a drying method and apparatus for drying a workpiece that is wet due to cleaning or the like.
[従来の技術]
従来、特開昭64−53549号公報に開示されている
ように、洗浄等により濡れたワークを所定温度の温純水
中に浸漬させて加熱した後、ゆっくり引き上けることに
より、該ワークを自己の熱で乾燥させるようにした温純
水乾燥法は公知である。このような温純水乾燥法は、有
機溶剤を使用しないために環境汚染の問題かなく、且つ
設備や管理も簡単であるため、各種ワークの乾燥に最適
なものとして注目を集めている。[Prior Art] Conventionally, as disclosed in Japanese Unexamined Patent Publication No. 64-53549, a workpiece wet from cleaning or the like is immersed in warm pure water at a predetermined temperature, heated, and then slowly pulled up. A hot pure water drying method in which the workpiece is dried using its own heat is known. Such a hot pure water drying method does not use an organic solvent, so there is no problem of environmental pollution, and the equipment and management are simple, so it is attracting attention as the most suitable method for drying various types of workpieces.
ところが、上記温純水乾燥法においては、ワークを温純
水から引き上げた際に該ワークの一部に水か溜っている
と、その部分の乾燥か遅れて乾燥終了まて時間かかかる
ばかってなく、部分的な乾燥遅れによりシくか残ること
かあり、そのため、水か溜り易い形状のワーク、例えば
、幅の広い上向き面や袋孔、四部等を備えたワークを乾
燥する場合に問題かあった。特に、温純水から引き上げ
たワークは、乾燥により気化熱を奪われるため徐々に冷
却し、その冷却と共に乾燥しにくくなるため、一部に水
滴が付着したり水か溜っている場合には、それをてきる
たけ速やかに蒸発させないとその部分にシくか残る確率
が高くなる。However, in the hot pure water drying method described above, if water accumulates in a part of the work when the work is pulled out of the warm pure water, the drying of that part will be delayed and it will take a long time to finish, and the drying will not be completed partially. Due to the drying delay, some stains may remain, which is a problem when drying workpieces that have a shape where water tends to accumulate, such as a workpiece with a wide upward facing surface, a blind hole, four parts, etc. In particular, when a workpiece is pulled out of hot pure water, it gradually cools down as the heat of vaporization is removed by drying, and as it cools, it becomes difficult to dry. If you don't evaporate it as quickly as possible, there is a high chance that it will remain in that area.
ワークに温風を吹き付けることによって乾燥させる方法
もあるか、このような温風乾燥法ては、温風の吹き付は
方向によって乾燥むらを生したり、水滴が温風に吹き飛
ばされて既に乾燥した面を移動しながら蒸発、乾燥する
ため、シくの発生か避けられず、精密な乾燥を行うこと
かてきない。しかも、ワークの形状によっては水滴の付
着部分か温風に対して死角となり、乾燥に時間かかかる
という欠点もある。Is there a way to dry the workpiece by blowing hot air onto it? With this hot air drying method, the blowing of hot air may cause uneven drying depending on the direction, or water droplets may be blown away by the hot air and may have already dried. As it evaporates and dries as it moves over the exposed surface, the formation of stains is unavoidable, making precise drying impossible. Moreover, depending on the shape of the workpiece, there is also the disadvantage that the part on which water droplets are attached becomes a blind spot to the warm air, and it takes a long time to dry.
更に、真空乾燥法も知られているか、かかる真空乾燥に
おいては、ワークに付着した水滴あるいは溜った水を蒸
発させるのに必要な熱エネルキーをワーク自身から得な
ければならないため、洗浄等により低温化したワークを
そのまま真空乾燥すると、ワークの温度が更に低下して
凍結したり、乾燥に長時間を要する等の問題かある。ワ
ークを真空乾燥装置内で補助的に加熱することもてきる
が、大掛かりな加熱装置か必要になるはかりてなく、該
加熱装置からワークへ効率良く且つ均等に熱を伝達する
ことか困難であるため所定の温度に加熱するまで時間か
かかり、例えば洗浄から乾燥まてな一連の工程て行うよ
うな場合に、乾燥工程に費やすことかできる限られた時
間(5分程度)内に必要な熱エネルギーを十分ワークに
与えて乾燥な短時間て終了させることは殆ど不可能に近
い。Furthermore, vacuum drying methods are also known, and in such vacuum drying, the thermal energy necessary to evaporate water droplets or accumulated water on the workpiece must be obtained from the workpiece itself, so it is necessary to lower the temperature by cleaning etc. If the workpiece is vacuum-dried as it is, there are problems such as the temperature of the workpiece further dropping and freezing, and drying taking a long time. It is possible to supplementally heat the workpiece in a vacuum drying device, but this requires a large-scale heating device, and it is difficult to efficiently and evenly transfer heat from the heating device to the workpiece. Therefore, it takes a long time to heat to a specified temperature. For example, when performing a series of processes from washing to drying, the heat required within the limited time (about 5 minutes) that can be spent on the drying process. It is almost impossible to give enough energy to the work and finish it dry in a short time.
し発明が解決しようとする課題j
本発明の課題は、ワークをその形状に拘らず確実且つ迅
速に乾燥させることのてきる乾燥方法及び装置を提供す
ることにある。Problems to be Solved by the Invention j An object of the present invention is to provide a drying method and apparatus that can reliably and quickly dry a workpiece regardless of its shape.
[課題を解決するための手段]
上記課題を解決するため、本発明の乾燥方法は、濡れた
ワークを温純水に浸漬して加熱したあと取り出すことに
より温純水乾燥した後、熱量を保有している間に真空槽
に収容し、該真空槽内において真空乾燥することを特徴
とするものである。[Means for Solving the Problems] In order to solve the above problems, the drying method of the present invention immerses a wet workpiece in warm pure water, heats it, takes it out, and then dries it with warm pure water. It is characterized in that it is housed in a vacuum chamber and vacuum-dried in the vacuum chamber.
また、本発明の装置は、濡れたワークを浸漬する温純水
な充填するための温純水槽と、ワークを真空乾燥するた
めの真空槽とを備え、これらの温純水槽と真空槽との間
に温+11ff水槽から引き上げたワークを真空層へ搬
送するための搬送機構を設けたことを特徴とするもので
ある。Furthermore, the apparatus of the present invention includes a warm pure water tank for filling warm pure water into which a wet workpiece is immersed, and a vacuum tank for vacuum drying the workpiece. This system is characterized by the provision of a transport mechanism for transporting the workpiece pulled up from the +11ff water tank to the vacuum layer.
[実施例]
以下、本発明の実施例を図面を参照しなから詳細に説明
する。[Embodiments] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第1図に示す乾燥装置は、前段の洗浄機構等から濡れた
状態て送られてくるワーク4を温純水に浸漬して乾燥す
る温純水乾燥部1と、温純水乾燥したワーク4を真空乾
燥する真空乾燥部2と、上記温純水乾燥部1から真空乾
燥部2にワーク4を搬送する搬送機構3とを有している
。The drying apparatus shown in Fig. 1 includes a warm pure water drying section 1 that immerses and dries the wet workpiece 4 sent from a cleaning mechanism in the previous stage in warm pure water, and a vacuum drying section 1 that dries the workpiece 4 that has been dried with warm pure water under vacuum. 2 and a transport mechanism 3 for transporting the workpiece 4 from the hot pure water drying part 1 to the vacuum drying part 2.
上記温純水乾燥部】は、不純物を取り除かれて所定の温
度に加熱された温純水11を充填するための温純水槽1
0を備えており、該温純水槽10は、その底部に電熱や
スチーム等を熱源とする加熱器13を介して純水源12
か接続され、該純水fi12からの純水か加熱器I3に
より所定温度に加熱されて底部から供給されるようにな
っている。なお、上記加熱器13を温純水槽10の内底
部に設け、該槽10内て純水を加熱するようにしても良
い。また、上記温純水槽10の内部には泡取器14を設
置し、この泡取器14て、温純水の供給時又は槽内に設
けた加熱器で純水を力I熱する時に発生する気泡を集め
、排出管14aを通じて外部に排出するように構成して
おくことか望ましく、これにより、気泡か温純水11の
水面を波立たせて温純水乾燥に悪影響を及ぼすのを防止
することかできる。The warm pure water drying section] is a warm pure water tank 1 for filling warm pure water 11 from which impurities have been removed and heated to a predetermined temperature.
The hot pure water tank 10 is equipped with a pure water source 12 at its bottom via a heater 13 that uses electric heat, steam, etc. as a heat source.
The pure water from the pure water fi12 is heated to a predetermined temperature by the heater I3 and supplied from the bottom. Note that the heater 13 may be provided at the inner bottom of the warm pure water tank 10 to heat the pure water within the tank 10. A bubble remover 14 is installed inside the warm pure water tank 10, and the bubble remover 14 is used to prevent air bubbles generated when the warm pure water is supplied or when the pure water is heated by a heater installed in the tank. It is preferable to collect the hot water and discharge it to the outside through the discharge pipe 14a. This can prevent air bubbles from undulating the surface of the warm pure water 11 and adversely affecting the drying of the warm pure water.
上記温純水槽IOの周囲には、該温純水槽10からオー
バーフローした温純水を回収する回収溝15か形成され
、該回収溝15て回収した温純水を回収管16を通して
外部に排出するようになっている。A recovery groove 15 is formed around the warm pure water tank IO to recover the warm pure water overflowing from the warm pure water tank 10, and the warm pure water recovered by the recovery groove 15 is discharged to the outside through a recovery pipe 16. There is.
この場合、上記回収管16に耐熱性のフィルタ17を設
け、温純水中の不純物を該フィルタ17で除去したあと
該温純水を上記加熱器13又は純水源12に供給し、循
環的に再使用するように構成しても良い
また、上記温純水槽10の上部には、隔壁21で囲まれ
た乾燥室20か形成されている。該乾燥室20は、温純
水11から引き上げたワーク4の乾燥を促進するための
もので、排気口22に接続された排気管23によりミス
トキャッチ24を介して排気ファン25に接続され、該
排気ファン25で水面及びワーク4の表面から蒸発する
水蒸気を吸引、排出することにより、該水蒸気かワーク
4に接触して該ワーク4を濡らすのを防止するようにな
っており、この際、水蒸気をはg水平方向に吸引してよ
り効果的な接触防止を図るため、該乾燥室20の内部に
は、水平方向の空気流を発生させる複数の仕切板26が
角度調整自在に設けられている。なお、上記くストキャ
ッチ24で捕集された純水は、排水管27を通じて上記
回収管16により排出され。In this case, a heat-resistant filter 17 is provided in the recovery pipe 16, and after the impurities in the warm pure water are removed by the filter 17, the warm pure water is supplied to the heater 13 or the pure water source 12 and reused cyclically. Furthermore, a drying chamber 20 surrounded by a partition wall 21 is formed above the hot pure water tank 10. The drying chamber 20 is for accelerating the drying of the work 4 pulled up from the warm pure water 11, and is connected to an exhaust fan 25 via a mist catch 24 by an exhaust pipe 23 connected to an exhaust port 22. By sucking and discharging the water vapor that evaporates from the water surface and the surface of the workpiece 4 at step 25, the water vapor is prevented from coming into contact with the workpiece 4 and wetting the workpiece 4. At this time, the water vapor is g In order to achieve more effective contact prevention by horizontal suction, a plurality of partition plates 26 that generate horizontal airflow are provided inside the drying chamber 20, the angle of which can be adjusted freely. The pure water collected by the stock catch 24 is discharged through the drain pipe 27 by the collection pipe 16.
一方、上記真空乾燥部2には、蓋体31により開閉目在
で、内部にワーク4を載置するための載置台32とワー
ク4の乾燥を補助する槽内ヒータ33とを備えた真空槽
30か設けられている。該真空槽30は、吸引管35に
よりバルブ36及びコールドトラップ37を介して真空
ポンプ38に接続されると共に、ヒーター39及びエア
フィルタ40を備えた外気導入用の導気管41にバルブ
42を介して接続されており、これらの吸引管35と導
気管41とは連結管43によりバルブ44を介して相互
に連結されている。また、真空槽30の底部にはワーク
4から流下した水を排出するための排水管45が接続さ
れ、該排水管45と上記コールドトラップ37とか連結
管46により接続されている。該コールドトラップ37
は、空気中に含まれる水蒸気を分離して該水蒸気か空気
と共に真空ポンプ38に吸い込まれるのを防止するため
と、真空ポンプ38の潤滑用に使用されているオイルの
くストか吸引管35を介して真空槽3oに逆流してワー
ク4を汚染する現象を防ぐためのものであるか、必要に
応じて設置すれば良い。On the other hand, the vacuum drying section 2 includes a vacuum chamber which is opened and closed by a lid 31 and is equipped with a mounting table 32 for placing the workpiece 4 therein and an in-tank heater 33 for assisting in drying the workpiece 4. There are 30. The vacuum chamber 30 is connected to a vacuum pump 38 through a suction pipe 35 through a valve 36 and a cold trap 37, and is connected through a valve 42 to an air guide pipe 41 for introducing outside air equipped with a heater 39 and an air filter 40. The suction pipe 35 and the air guide pipe 41 are connected to each other by a connecting pipe 43 via a valve 44 . Further, a drain pipe 45 for discharging water flowing down from the workpiece 4 is connected to the bottom of the vacuum chamber 30, and the drain pipe 45 is connected to the cold trap 37 or a connecting pipe 46. The cold trap 37
In order to separate the water vapor contained in the air and prevent it from being sucked into the vacuum pump 38 along with the air, the oil waste used for lubricating the vacuum pump 38 or the suction pipe 35 is separated. It may be installed as necessary to prevent the phenomenon of contaminating the work 4 by flowing back into the vacuum chamber 3o through the valve.
なお、上記槽内ヒータ33は、赤外線ランプやパネルヒ
ータ等のような適宜の加熱源によって構成することかで
きる。The in-tank heater 33 can be constructed from an appropriate heating source such as an infrared lamp or a panel heater.
更に、ワーク4を搬送する上記搬送機構3は、ワーク4
を入れた籠50を吊持する搬送アーム51を有し、該搬
送アーム51をガイド52に沿って移動自在に配設する
と共に、その移動をボールネジやタイミングベルト、シ
リンダ等の駆動手段によって行うように構成したもので
、該搬送アーム51は、上記籠50を吊り下げるフック
53と、該フック53を昇降させるボールネジ55及び
モータ56からなる駆動手段54と、該フック53の昇
降を案内する一対のガイド57とで構成されている。な
お、上記フック53の駆動手段54は、タイミンクベル
トやシリンダ等によって構成することもてきる。Furthermore, the transport mechanism 3 that transports the work 4
The transport arm 51 is arranged to be movable along a guide 52, and is moved by a driving means such as a ball screw, a timing belt, or a cylinder. The transport arm 51 includes a hook 53 for hanging the basket 50, a driving means 54 consisting of a ball screw 55 and a motor 56 for raising and lowering the hook 53, and a pair of driving means 54 for guiding the raising and lowering of the hook 53. It is composed of a guide 57. Incidentally, the driving means 54 for the hook 53 may be constituted by a timing belt, a cylinder, or the like.
上記構成を有する乾燥装置は、例えば洗浄機構の後段に
配設され、洗浄により濡れた状態て送られてくるワーク
4を乾燥するもので、次のように作用する。The drying device having the above configuration is disposed, for example, after the cleaning mechanism, and dries the workpiece 4 that is sent in a wet state due to cleaning, and operates as follows.
即ち、籠50に入れられたワーク4か搬送アーム51に
吊持されて温純水乾燥部1における温純水槽lOの上部
に運ばれて来ると、フック53か下降し、該ワーク4は
温純水11中に侵漬される。That is, when the work 4 placed in the basket 50 is suspended by the transport arm 51 and carried to the upper part of the warm pure water tank IO in the warm pure water drying section 1, the hook 53 descends and the work 4 is suspended in the warm pure water 11. immersed in.
このとき、該温純水乾燥部1においては、所定の温度に
加熱された温純水11か温純水槽10内に所定量づつ連
続的に供給され、オーバーフローした温純水は回収溝1
5に流れ込み、回収管16を通して排出されており、ま
た、乾燥室20内の空気は排気ファン25により吸引さ
れ、水面から蒸発した水蒸気がこの空気流と共にはg水
平方向に排出されている。At this time, in the warm pure water drying section 1, warm pure water 11 heated to a predetermined temperature is continuously supplied in a predetermined amount into the warm pure water tank 10, and the overflowing warm pure water is removed from the recovery groove 1.
The air in the drying chamber 20 is sucked in by the exhaust fan 25, and the water vapor evaporated from the water surface is discharged horizontally along with this air flow.
上記ワーク4か温純水11に一定時間浸漬されて加熱さ
れると、フック53がゆっくりと上昇し、該ワーク4は
液面か彼女たない程度のゆっくりとした速度で温純水か
ら引き出される。これにより該ワーク4は、自己の熱で
温純水より引き出された部分から順次乾燥し、温純水乾
燥か行われる。また、上記乾燥室20内においては、水
面から蒸発した水蒸気が排気ファン25によりはX水平
方向に排出され、ワーク4と接触しないようになってい
るため、乾燥したワーク4の表面か水蒸気によって再度
濡れることかなく、従って、再湿潤による乾燥むらやシ
くの発生がない。When the work 4 is immersed in warm pure water 11 for a certain period of time and heated, the hook 53 slowly rises, and the work 4 is pulled out of the warm pure water at a slow speed that does not disturb the liquid level. As a result, the workpiece 4 is sequentially dried by its own heat starting from the portion drawn out from the warm pure water, and drying with warm pure water is performed. In addition, in the drying chamber 20, the water vapor evaporated from the water surface is discharged in the X horizontal direction by the exhaust fan 25, so that it does not come into contact with the workpiece 4. It does not get wet, so there is no uneven drying or formation of wrinkles due to rewetting.
1
上記温純水11の適温は、ワーク4の種類やフィルタ1
7その他の付帯設備の耐熱性等によっても相違するか、
それらの熱変性を生じない範囲内ててきるたけ高い温度
にしておくことか望ましく、例えばワーク4がガラスや
アルミニウム等である場合には、約80°C程度が好適
である。勿論これ以下の温度てあっても良い。また、ワ
ーク4の温純水11への浸漬時間や温純水11から引き
上げる際の引上速度等についても、温純水11の温度や
ワーク4の種類等によって異なるか、例えば、温純水の
温度を80°Cとした場合、ワーク4か計器のカバー等
に使用されるフラットな板状カラスである場合には、浸
漬時間は約30〜60秒、引上速度は8〜12+n+n
/sec程度か好適てあり、ワーク4かアルくニウム製
のタイキャスト品である場合には、浸漬時間は約30〜
60秒、引上速度は5〜8 mm/sec程度で良い。1 The appropriate temperature of the above warm pure water 11 depends on the type of workpiece 4 and the filter 1.
7 Will it differ depending on the heat resistance of other incidental equipment?
It is desirable to keep the temperature as high as possible within a range that does not cause thermal denaturation; for example, when the workpiece 4 is made of glass, aluminum, etc., about 80°C is suitable. Of course, the temperature may be lower than this. In addition, the immersion time of the workpiece 4 in the warm pure water 11 and the pulling speed when lifting it from the warm pure water 11 may vary depending on the temperature of the warm pure water 11 and the type of the workpiece 4. For example, the temperature of the warm pure water is 80°C. In this case, if the workpiece 4 is a flat glass plate used for instrument covers, the immersion time is approximately 30 to 60 seconds, and the pulling speed is 8 to 12+n+n.
/sec, and in the case of Work 4 or an aluminum tie-cast product, the immersion time is approximately 30~30 seconds.
60 seconds, and the pulling speed may be about 5 to 8 mm/sec.
なお、ワーク4を温純水から完全に引上げた後は、爾後
の作業を迅速化するため該ワーク4を 2
上記引上速度より早い速度で上昇させるようにしても良
い。In addition, after the workpiece 4 is completely pulled up from the warm pure water, the workpiece 4 may be raised at a speed faster than the above-mentioned lifting speed in order to speed up the subsequent work.
上記温純水乾燥か終了すると、熱かそれほど冷めないう
ちにワーク4は搬送アーム51により直ちに真空乾燥部
2に送られる。搬送アーム51が蓋体31の解放した真
空槽30の上部に移動して来ると、フック53の下降に
よりワーク4は籠50に入れられたまま真空槽30内の
載置台32上に載置され、該籠50がフック53から外
される。そして、籠50を解放したフック53は上昇し
、蓋体31か閉じられる。このとき、ワーク4の幅の広
い上向き面や袋孔、凹部等に付着していた水滴か流下し
て真空槽30の底部に溜っている場合には、それか排水
管45により排出される。When the hot pure water drying process is completed, the workpiece 4 is immediately sent to the vacuum drying section 2 by the transfer arm 51 before the workpiece 4 has cooled down much. When the transfer arm 51 moves to the upper part of the vacuum chamber 30 which has been opened by the lid 31, the workpiece 4 is placed on the mounting table 32 inside the vacuum chamber 30 while being placed in the basket 50 due to the lowering of the hook 53. , the basket 50 is removed from the hook 53. Then, the hook 53 that has released the basket 50 rises, and the lid 31 is closed. At this time, if water droplets adhering to the wide upward surface, blind hole, recess, etc. of the workpiece 4 flow down and accumulate at the bottom of the vacuum chamber 30, they are discharged through the drain pipe 45.
続いて、導気管41のハルツ42が閉しると共に吸引管
35のハルツ35か開口し、真空ポンプ38によって真
空槽30内の空気か排出され、該真空槽30か所定の真
空度に達したところてハルツ42か適量開口し、ヒータ
ー39て加熱されたカロ熱エアか導気管4工を通して適
量づつ流入している状態で該真空槽30が所定の真空度
(例えば4.5torr程度)に保持され、その状態で
ワーク4の真空乾燥か行われる。Subsequently, the Harz 42 of the air guide pipe 41 is closed, and the Harz 35 of the suction pipe 35 is opened, and the air in the vacuum chamber 30 is exhausted by the vacuum pump 38, and the vacuum chamber 30 reaches a predetermined degree of vacuum. By the way, the HARTZ 42 is opened to an appropriate amount, and the vacuum chamber 30 is maintained at a predetermined degree of vacuum (for example, about 4.5 torr) while the Calorie air heated by the heater 39 is flowing in an appropriate amount through the four air guide pipes. In this state, the workpiece 4 is vacuum dried.
このとき、必要に応して槽内ヒータ33によりワーク4
が補助的に加熱される。At this time, the workpiece 4 is heated by the in-tank heater 33 as necessary.
is heated auxiliary.
上記真空乾燥により、ワーク4の上向き面や袋孔、四部
等に付着して上記温純水乾燥では完全に除去され得なか
った水分か直ちに蒸発、排除され、ワーク4は速やかに
乾燥する。従って、温純水乾燥した後に水滴か長時間残
留することによるシミの発生かない。しかも、温風乾燥
する場合のように水滴が熱風に吹き飛ばされて乾燥した
ワーク4表面を移動することかないため、これによるシ
ミの発生もない。また、加熱エアの供給と槽内ヒータ3
3による加熱とによって真空乾燥に伴うワーク4の温度
低下が防止されるため、ワーク4の凍結か防止されて乾
燥効率が向上する。但し、ワーク4を温純水乾燥した後
十分に熱量を保有している状態て真空乾燥するようにす
れば、必ずしもこのような加熱エアの供給と槽内ヒータ
33による加熱とを行う必要はなく、その何れか一万或
は両方を省略することもてきる。By the vacuum drying, the moisture that has adhered to the upward facing surface, blind hole, four parts, etc. of the workpiece 4 and could not be completely removed by the hot pure water drying is immediately evaporated and removed, and the workpiece 4 is quickly dried. Therefore, stains do not occur due to water droplets remaining for a long time after drying with hot pure water. Moreover, unlike in the case of hot air drying, water droplets are not blown away by the hot air and moved on the surface of the dried workpiece 4, so no stains are caused by this. In addition, supply of heated air and tank heater 3
3 prevents the temperature of the workpiece 4 from decreasing due to vacuum drying, thereby preventing the workpiece 4 from freezing and improving drying efficiency. However, if the workpiece 4 is dried in warm pure water and then vacuum-dried while retaining sufficient heat, it is not necessarily necessary to supply heated air and heat the tank heater 33. Either one or both can be omitted.
上記真空乾燥に要する時間は、ワーク4の種類にもよる
か、通常は約30〜50秒程度て十分である。The time required for the vacuum drying may depend on the type of workpiece 4, but usually about 30 to 50 seconds is sufficient.
かくして真空乾燥か終了すると、真空槽30内は大気圧
に戻され、蓋体31か開放されてワーク4は搬送アーム
51により籠50と共に取り出され、次の工程に送られ
る。When the vacuum drying is thus completed, the inside of the vacuum chamber 30 is returned to atmospheric pressure, the lid 31 is opened, and the work 4 is taken out together with the basket 50 by the transfer arm 51 and sent to the next process.
[発明の効果J
このように本発明によれば、ワークを温純水乾燥と真空
乾燥とを併用して乾燥するようにしたのて、水切れの良
い単純形状のワークは勿論のこと、水滴か付着したり水
か溜り易い特殊形状のワーク、例えば幅の広い上向き面
や袋孔、凹部等 5
を備えたワーつてあっても、それらの水滴や水を確実に
且つ速やかに蒸発させ、乾燥むらや乾燥遅れ等によるシ
よを生しることなくそれを乾燥することかてきる。[Effect of the Invention J As described above, according to the present invention, by drying a workpiece using a combination of hot pure water drying and vacuum drying, it is possible to dry not only a workpiece with a simple shape that drains easily but also has no water droplets attached. Even if the workpiece has a special shape where water can easily collect, such as a workpiece with a wide upward facing surface, a blind hole, a recess, etc., the water droplets and water can be reliably and quickly evaporated to prevent uneven drying and drying. It is possible to dry it without causing stains due to delays, etc.
また、ワークを温純水乾燥した後未た十分に熱量を保有
している状態で真空乾燥するようにしたので、真空乾燥
に当って該ワークを特別に予熱する必要がなく、従って
、ワークを直接真空乾燥する場合のような予熱に必要な
大掛かりな設備や時間等を縮小又は省略することができ
るという利点かある。In addition, after drying the workpiece with warm pure water, the workpiece is vacuum-dried while still retaining sufficient heat, so there is no need to preheat the workpiece during vacuum drying, and therefore, the workpiece can be directly vacuum-dried. There is an advantage that large-scale equipment, time, etc. required for preheating as in the case of drying can be reduced or omitted.
第1図は本発明に係る乾燥装置の一実施例を示す構成国
である。
3・・搬送機構、 4・・ワーク、10・・温純
水槽、 11・・温純水30・・真空槽。
6FIG. 1 shows the configuration of an embodiment of a drying apparatus according to the present invention. 3. Transfer mechanism, 4. Workpiece, 10. Warm pure water tank, 11. Warm pure water 30. Vacuum tank. 6
Claims (1)
り出すことにより温純水乾燥した後、熱量を保有してい
る間に真空槽に収容し、該真空槽内において真空乾燥す
ることを特徴とするワークの乾燥方法。 2、濡れたワークを浸漬する温純水を充填するための
温純水槽と、ワークを真空乾燥するための真空槽とを備
え、これらの温純水槽と真空槽との間に温順水槽から引
き上げたワークを真空層へ搬送するための搬送機構を設
けたことを特徴とするワークの乾燥装置。[Claims] 1. After immersing a wet workpiece in warm pure water, heating it, and then taking it out to dry it with warm pure water, it is placed in a vacuum chamber while retaining heat, and vacuum dried in the vacuum chamber. A workpiece drying method characterized by: 2. Equipped with a warm pure water tank for filling warm pure water for immersing wet workpieces and a vacuum tank for vacuum drying the workpieces, and between these warm pure water tanks and the vacuum tank, the workpieces lifted from the warm water tank are placed. A workpiece drying device characterized by being provided with a transport mechanism for transporting the material to a vacuum layer.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1591590A JP2880549B2 (en) | 1990-01-25 | 1990-01-25 | Work drying method and apparatus |
| CA 2010233 CA2010233A1 (en) | 1989-02-17 | 1990-02-16 | Positioning system |
| US07/761,883 US5263264A (en) | 1990-01-25 | 1991-01-24 | Method and apparatus for drying wet work |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1591590A JP2880549B2 (en) | 1990-01-25 | 1990-01-25 | Work drying method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03220722A true JPH03220722A (en) | 1991-09-27 |
| JP2880549B2 JP2880549B2 (en) | 1999-04-12 |
Family
ID=11902075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1591590A Expired - Lifetime JP2880549B2 (en) | 1989-02-17 | 1990-01-25 | Work drying method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2880549B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5520744A (en) * | 1993-05-17 | 1996-05-28 | Dainippon Screen Manufacturing Co., Ltd. | Device for rinsing and drying substrate |
| WO1997048129A1 (en) * | 1996-06-14 | 1997-12-18 | Seiko Epson Corporation | Pull-up drying method and drying apparatus |
-
1990
- 1990-01-25 JP JP1591590A patent/JP2880549B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5520744A (en) * | 1993-05-17 | 1996-05-28 | Dainippon Screen Manufacturing Co., Ltd. | Device for rinsing and drying substrate |
| WO1997048129A1 (en) * | 1996-06-14 | 1997-12-18 | Seiko Epson Corporation | Pull-up drying method and drying apparatus |
| US6179930B1 (en) | 1996-06-14 | 2001-01-30 | Seiko Epson Corporation | Pull-up drying method and apparatus |
| KR100662825B1 (en) * | 1996-06-14 | 2007-04-26 | 세이코 엡슨 가부시키가이샤 | Phosphorus Drying Method and Drying Device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2880549B2 (en) | 1999-04-12 |
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