JPH032247U - - Google Patents
Info
- Publication number
- JPH032247U JPH032247U JP6298989U JP6298989U JPH032247U JP H032247 U JPH032247 U JP H032247U JP 6298989 U JP6298989 U JP 6298989U JP 6298989 U JP6298989 U JP 6298989U JP H032247 U JPH032247 U JP H032247U
- Authority
- JP
- Japan
- Prior art keywords
- optical component
- light
- photodetector
- tray
- determination device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Image Processing (AREA)
Description
第１図は本考案の一実施例を示す光学部品表面
判定装置の側面図、第２図、第３図は回折格子の
表面判定原理についての説明図、第４図は他の実
施例を示す光学部品表面判定装置の斜視図である
。
１……光源、３……光検出器、５……回折格子
（光学部品）、５ａ……格子面、７……開口窓。
Fig. 1 is a side view of an optical component surface determination device showing one embodiment of the present invention, Figs. 2 and 3 are explanatory diagrams of the principle of surface judgment of a diffraction grating, and Fig. 4 shows another embodiment. FIG. 2 is a perspective view of an optical component surface determination device. DESCRIPTION OF SYMBOLS 1... Light source, 3... Photodetector, 5... Diffraction grating (optical component), 5a... Grating surface, 7... Opening window.
Claims (1)
光ビームを出射する光源と、光学部品表面で反射
した前記光ビームを受光し、入射した光強度に応
じた出力をする光検出器とを備えたことを特徴と
する光学部品表面判定装置。 (2) 前記光検出器の手前に、検査対象が回折格
子面を持つ光学部品である場合における前記回折
格子面で反射した回折光を遮へいする開口窓を設
けたことを特徴とする請求項１記載の光学部品表
面判定装置。 (3) 複数の光学部品を乗せるトレイと、このト
レイを１方向または直角２方向に移動調整するス
テージとを備え、かつ、少なくとも、このトレイ
上の現在検査対象の光学部品および前記光検出器
を暗部環境に設けたことを特徴とする請求項１記
載の光学部品表面判定装置。[Scope of Claim for Utility Model Registration] (1) A light source that emits a light beam from an oblique direction onto the surface of an optical component to be inspected, and a light source that receives the light beam reflected on the surface of the optical component and adjusts the intensity of the light according to the intensity of the incident light. An optical component surface determination device comprising: a photodetector that outputs an output. (2) An aperture window is provided in front of the photodetector to shield diffracted light reflected by the diffraction grating surface when the inspection target is an optical component having a diffraction grating surface. The optical component surface determination device described above. (3) It comprises a tray on which a plurality of optical components are placed, and a stage that moves and adjusts the tray in one direction or two directions at right angles, and at least the optical component currently being inspected on the tray and the photodetector. 2. The optical component surface determination device according to claim 1, wherein the device is installed in a dark environment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6298989U JPH032247U (en) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6298989U JPH032247U (en) | 1989-05-30 | 1989-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH032247U true JPH032247U (en) | 1991-01-10 |
Family
ID=31592641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6298989U Pending JPH032247U (en) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032247U (en) |
-
1989
- 1989-05-30 JP JP6298989U patent/JPH032247U/ja active Pending
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