JPH0322531U - - Google Patents
Info
- Publication number
- JPH0322531U JPH0322531U JP8219889U JP8219889U JPH0322531U JP H0322531 U JPH0322531 U JP H0322531U JP 8219889 U JP8219889 U JP 8219889U JP 8219889 U JP8219889 U JP 8219889U JP H0322531 U JPH0322531 U JP H0322531U
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean chamber
- constant temperature
- indoor air
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Description
第１図は本案の実施例を示す図、第２図は本案
実施例の詳細図、第３図は恒温クリーンチヤンバ
ーの構成要素を示す図、第４図は水平フロー方式
恒温チヤンバーの外観図である。
１……ＨＥＰＡフイルタ、２……室内空気取入
口、３……リターンダクト、４……送風機、５…
…フレキシブルダクト、６……フランジ、７……
ホースバンド、８……移動台、９……恒温クリー
ンチヤンバー、１０……縮小投影露光装置、１１
……外壁。
Figure 1 is a diagram showing an embodiment of the present invention, Figure 2 is a detailed diagram of an embodiment of the present invention, Figure 3 is a diagram showing the components of a constant temperature clean chamber, and Figure 4 is an external view of a horizontal flow type constant temperature chamber. It is. 1...HEPA filter, 2...Indoor air intake, 3...Return duct, 4...Blower, 5...
...Flexible duct, 6...Flange, 7...
Hose band, 8... Moving table, 9... Constant temperature clean chamber, 10... Reduction projection exposure device, 11
……outer wall.
Claims (1)
ＨＥＰＡフイルタと温度調節機器より成る恒温ク
リーンチヤンバーにおいて、恒置クリーンチヤン
バー室内空気と室外空気を取入れ、冷凍機（又は
冷水コイル）で取入れた空気を冷却し温度調節機
器でヒータをコントロールし一定温度の空気を作
り、送風機でＨＥＰＡフイルタを介し清浄空気と
してクリーンチヤンバー室内に吸い出し、 上記サイクルを繰り返し精密温度調節をする恒
温クリーンチヤンバーの室内空気取入手段は、移
動可能な構造の室内空気取入口を複数個設けたこ
とを特徴とする恒温クリーンチヤンバー。[Scope of Claim for Utility Model Registration] In a constant temperature clean chamber consisting of a refrigerator (or chilled water coil), a heater, a blower, a HEPA filter, and a temperature control device, indoor air and outdoor air are taken into the constant clean chamber, and the refrigerator ( Cool the air taken in with a cold water coil, control a heater with a temperature controller to create air at a constant temperature, use a blower to suck out clean air through a HEPA filter into the clean chamber, and repeat the above cycle to achieve precise temperature control. The indoor air intake means of the constant temperature clean chamber is characterized by having a plurality of indoor air intake ports with a movable structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8219889U JPH0322531U (en) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8219889U JPH0322531U (en) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322531U true JPH0322531U (en) | 1991-03-08 |
Family
ID=31628794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8219889U Pending JPH0322531U (en) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322531U (en) |
-
1989
- 1989-07-14 JP JP8219889U patent/JPH0322531U/ja active Pending
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